The invention provides an IGZO
thin film transistor and a method for improving the electrical property of the IGZO
thin film transistor. The method comprises the following steps that a
semiconductor structure is provided, the
semiconductor structure comprises a substrate, a
metal gate is formed on part of the surface of the substrate, and the
metal gate and the upper surface of the substrate are respectively covered with a
gate oxide layer; an IGZO film layer is manufactured to cover the
gate oxide layer, the IGZO film layer is etched to form an
active layer and a pixel
electrode area, and a source
electrode, a drain
electrode and a
passivation layer are formed above the IGZO film layer in sequence; after the IGZO film layer is etched to form the
active layer, the surface of the IGZO film layer is treated through a
plasma treatment process. The IGZO film layer is treated through
oxygen plasma and UV
radiation, the
oxygen content of an IGZO film is improved, lattice imperfections between the IGZO film and the
gate oxide layer are reduced, meanwhile, impurities and defects on the surface of the IGZO film can be removed, and device performance is improved.