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6584 results about "Gas concentration" patented technology

Apparatus and method for injecting and modifying gas concentration of a meta-stable or atomic species in a downstream plasma reactor

This invention provides an apparatus and method for injecting gas within a plasma reactor and tailoring the distribution of an active species generated by the remote plasma source over the substrate or wafer. The distribution may be made more or less uniform, wafer-edge concentrated, or wafer-center concentrated. A contoured plate or profiler is provided for modifying the distribution. The profiler is an axially symmetric plate, having a narrow top end and a wider bottom end, shaped to redistribute the gas flow incident upon it. The profiler is situated below an input port within the plasma reactor chamber and above the wafer. The method for tailoring the distribution of the active species over the substrate includes predetermining the profiler diameter and adjusting the profiler height over the substrate. A coaxial injector tube, for the concurrent injection of activated and non-activated gas species, allows gases (or gas mixtures) to be delivered in an axially symmetric manner whereby one gas can be excited in a high density RF plasma, while the other gas can be prevented from excitation and / or dissociation caused by exposure to the plasma or heated surfaces in the source apparatus. The gas admixture that is not to be excited or dissociated prior to contact with the wafer surface is shielded from direct exposure to the RF field surrounding the plasma confinement tube. The tube walls are also shielded from the infrared energy emitted from the plasma. The profiler is used in conjunction with the coaxial injector tube for redistributing the excited gases emerging from the injector tube, while allowing the non-excited gases to pass through its center.
Owner:NOVELLUS SYSTEMS

Metabolic calorimeter employing respiratory gas analysis

An indirect calorimeter for measuring the metabolic rate of a subject includes a respiratory connector configured to be supported in contact with the subject so as to pass inhaled and exhaled gases as the subject breathes, a flow pathway, and a hygiene barrier positioned to block a predetermined pathogen from the exhaled gases. The indirect calorimeter also includes a flow pathway having a first end in fluid communication with the respiratory connector and a second end in fluid communication with a source and sink for respiratory gases. The flow pathway includes a flow tube through which the inhaled and exhaled gases pass, an outer housing surrounding the flow tube, and a chamber disposed between the flow tube and the first end. The indirect calorimeter also includes a flow meter configured to generate electrical signals as a function of the instantaneous flow volume of inhaled and exhaled gases passing through the flow pathway, and a component gas concentration sensor operable to generate electrical signals as a function of the instantaneous fraction of a predetermined component gas in the exhaled gases as the gases pass through the flow pathway. The indirect calorimeter further includes a computation unit operable to receive the electrical signals from the flow meter and the concentration sensor and operative to calculate at least one respiratory parameter for the subject as the subject breathes through the calorimeter.
Owner:MICROLIFE MEDICAL HOME SOLUTIONS

Method of respiratory gas analysis using a metabolic calorimeter

A method of determining a respiratory parameter for a subject using an indirect calorimeter is provided. The indirect calorimeter includes a respiratory connector for passing inhaled and exhaled gases, a flow pathway operable to receive and pass inhaled and exhaled gases having a flow tube within the flow pathway through which the inhaled and exhaled gases pass, a flow meter for determining an instantaneous flow volume of the inhaled and exhaled gases, a component gas concentration sensor for determining an instantaneous fraction of a predetermined component gas and a computation unit having a processor and a memory. The method includes the steps of initializing the indirect calorimeter and the subject breathing into the respiratory connector if the indirect calorimeter is initialized, sensing the flow volume of the inhaled and exhaled gases passing through the flow pathway using the flow meter and transmitting a signal representing the sensed flow volume to the computation unit. The method also includes the steps of sensing a concentration of a predetermined component gas as the inhaled and exhaled gases pass through the flow pathway using the component gas sensor, and transmitting a signal representing the sensed concentration of the predetermined component gas to the computation unit. The method further includes the steps of calculating at least one respiratory parameter for the subject as the subject breathes through the calorimeter using the sensed flow volume and the sensed concentration of the predetermined component gas, and providing the subject with the at least one respiratory parameter.
Owner:MICROLIFE MEDICAL HOME SOLUTIONS

Method of measuring cardiac related parameters non-invasively via the lung during spontaneous and controlled ventilation

An apparatus to measure cardiac output (Q) and other parameters such as alveolar ventilation (VA), minute CO2 elimination from the lung (VCO2 ), minute oxygen consumption (VO2), oxygenated mixed venous partial pressure of CO2, (PvCO2-oxy), true mixed venous partial pressure of CO2(PvCO2), PaCO2, mixed venous oxygen saturation (SvO2), pulmonary shunt, and anatomical dead space, consisting of: a) a breathing circuit with characteristics that: i. on exhalation, exhaled gas is kept substantially separate from inhaled gas; ii. oninhalation, when VE is greater than FGS flow, the subject inhales FGS first and then inhales a gas that is substantially SGS, for the balance of inhalation; b) gas sensor means for monitoring gas concentrations at the patient-circuit interface c) a first gas set (FGS), and a second gas set (SGS), said second gas set which may comprise previously exhaled gases or exogenous gases or both d) a gas flow control means for controlling the rate of FGS flow into the breathing circuit e) means to identify phase of breathing, said means may consist of pressure sensors or analysis of signal generated by gas sensors or other means known to those skilled in the art; f) machine intelligence consisting of a computer or logic circuit capable of controlling the gas flow control means, receiving the output of the gas sensor means and means to identify phased of breathing, and performing the calculations for measuring cardiac output and other parameters as outlined in the disclosure.
Owner:THORNHILL SCI INC

Methods and apparatus for measuring NOx gas concentration, for detecting exhaust gas concentration and for calibrating and controlling gas sensor

A nitrogen oxide concentration detector has a first measurement chamber 2 into which is introduced a measurement gas via a first diffusion resistance 1; an oxygen concentration detection electrode 7a for measuring the oxygen concentration in the measurement gas in said first measurement chamber 1; a first oxygen ion pump cell 6 for pumping out oxygen in the measurement gas from said first measurement chamber 2 based on the potential of said oxygen concentration detection electrode 7a; a second measurement chamber 8 into which the gas is introduced from said first measurement chamber 2 via a second diffusion resistance 3; and a second oxygen ion pump cell 8 having a pair of electrodes 8a,8b across which a voltage is applied to decompose NOx in the second measurement chamber 4 to pump out dissociated oxygen to cause a circuit Ip2 corresponding to the NOx concentration to flow in the second oxygen ion pump cell 8. Variation of NOx concentration is a function of variation of Ip2. The concentration obtained based on the Ip2 is corrected responsive to the oxygen concentration in the measurement gas. Particularly, a coefficient of the variation of the Ip2, gain, in said function is corrected responsive to the oxygen concentration in the measurement gas.
Owner:BERKLEY INC +1

Fire-fighting robot for transformer substation

The invention relates to a fire-fighting robot for a transformer substation. The fire-fighting robot comprises a routing-inspection robot, a gas detection device, an infrared temperature measurement device, a fire extinguishing device and a main control computer, wherein the routing-inspection robot is arranged in the transformer substation, a routing-inspection route is painted at the ground of a working space of the routing-inspection robot, and a plurality of radio frequency cards for positioning are mounted at ground key points. The fire-fighting robot has the beneficial effects that the automatic routing inspection can be carried out based on routing-inspection route marks and a navigation device; the gas detection device is utilized for monitoring the characteristic gas concentration of an early-stage fire disaster in a production place of the transformer substation in real time and pre-warning the concentration overrun condition in a grading manner; the infrared temperature measurement device is utilized for collecting infrared temperature images of production devices, and pre-warning over-temperature conditions of the devices in a grading manner and positioning fault points; the fire extinguishing device is utilized for rapidly extinguishing the sudden fire, controlling the fire propagation in an initial stage and earning time for the rescue operation. Therefore, the precaution and the fighting of the early-stage fire disaster are strengthened, and the fire safety situation of the transformer substation is effectively improved.
Owner:STATE GRID CORP OF CHINA +2

Personal cabin pressure monitor and warning system

A cabin pressure altitude monitor and warning system provides a warning when a detected cabin pressure altitude has reached a predetermined level. The system is preferably embodied in a portable, pager-sized device that can be carried or worn by an individual. A microprocessor calculates the pressure altitude from signals generated by a calibrated pressure transducer and a temperature sensor that compensates for temperature variations in the signals generated by the pressure transducer. The microprocessor is programmed to generate a warning or alarm if a cabin pressure altitude exceeding a predetermined threshold is detected. Preferably, the microprocessor generates two different types of warning or alarm outputs, a first early warning or alert when a first pressure altitude is exceeded, and a second more serious alarm condition when either a second, higher pressure altitude is exceeded, or when the first pressure altitude has been exceeded for a predetermined period of time. Multiple types of alarm condition indicators are preferably provided, including visual, audible and tactile. The system is also preferably designed to detect gas concentrations and other ambient conditions, and thus incorporates other sensors, such as oxygen, relative humidity, carbon dioxide, carbon monoxide and ammonia sensors, to provide a more complete characterization and monitoring of the local environment.
Owner:NASA
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