795results about "Muffle furnaces" patented technology

The invention provides a full-automatic vacuum oxygen-free oven, belongs to the technical field of wafer processing, and solves the problems that an existing wafer oven is low in feeding, discharging, heating and baking efficiency; and the automation degree is low. The full-automatic vacuum oxygen-free oven comprises an oven frame assembly, an EFEM frame assembly, two vacuum pump assemblies and four wafer loaders which are evenly distributed at equal intervals, four cavity assemblies and four automatic door assemblies are arranged in the oven frame assembly, and a robot transplanting assembly and a machine control box are arranged in the EFEM frame assembly. A main control computer is arranged on the left side of the EFEM frame assembly, the cavity assemblies are connected with the vacuum pump assemblies on the same side through exhaust pipelines, and the cavity assemblies are connected with an external high-purity nitrogen source. According to the invention, through cooperation of multiple sensors, mechanical linkage and a gas-liquid cooling system in the whole process, full-automatic stable grabbing and loading, vacuumizing treatment, heating, constant-temperature process baking treatment, dual-mode cooling and taking treatment of wafers in an oxygen-free and high-precision temperature control environment are realized.

The invention is suitable for the technical field of powder metallurgy and advanced ceramic material sintering equipment, and provides an integrated flash sintering device for vacuum and a sintering method. The device comprises a power supply module, a high vacuum module, a first servo hydraulic machine, a second servo hydraulic machine, a third servo hydraulic machine, a mold rotation switching module, a vacuum feeding module, a green body pressing module, a demolding and mold cleaning module and a mold transfer module. According to the invention, an integrated gear tray design is adopted to integrate the functions of die installation, graphite paper treatment and green body pressing, and online synchronous cleaning of an electrode and a die is realized through die fixation and a cleaning brush arranged in a cleaning drum; therefore, full-automatic, high-efficiency and high-stability continuous production of flash sintering from powder filling to finished product collection is realized.

The invention provides a semiconductor grade silicon dioxide vacuum sintering furnace which comprises a furnace body, a heating cavity is formed in the middle of the furnace body, and a rear door body is arranged at the first end of the furnace body; the material dragging trolley is arranged in the furnace body in a sliding mode, and a workpiece is placed on the material dragging trolley; the front door body is arranged on one side of the material dragging trolley, and when the material dragging trolley slides into the heating cavity, the front door body seals the second end of the furnace body; the device has the beneficial effects that through the arrangement of the pressing and rotating assembly, a workpiece on the material dragging trolley can be fixed from the two ends, it is ensured that the workpiece is always kept stable in the heating process, and the workpiece can be driven to rotate by the pressing and rotating assembly. In the heating process, the workpieces can be heated more uniformly through rotation of the workpieces, the heating effect and the product quality are improved, the workpieces can be automatically assembled and disassembled through arrangement of the material dragging trolley, the labor intensity of workers is reduced, and the working efficiency is improved.

The invention discloses a graphite electrode roasting device based on a thermal uniformity effect, and relates to the field of graphite electrode processing equipment.The graphite electrode roasting device comprises a roasting furnace, the roasting furnace comprises a furnace shell, a roasting chamber is arranged in the furnace shell, mounting chambers are arranged on the two sides of the roasting chamber, and a fuel gas inlet pipe is communicated with the interior of the roasting chamber; and a controller is fixed on the top surface of the furnace shell. According to the graphite electrode roasting device based on the thermal uniformity effect, a worm, a worm gear and a lead screw can be driven by a second servo motor to rotate together, and then a sliding block and a sliding rod are driven by the lead screw to move in the axial direction of the lead screw; a first trapezoidal block is pushed by a sliding rod, so that a second trapezoidal block and a connecting plate can drive a first placement plate to move upwards under the limitation of a fixing column, and then the graphite electrode is lifted through the first placement plate, so that the bottom of the graphite electrode can be intermittently heated, the graphite electrode cannot be damaged, and the service life of the graphite electrode is prolonged. And all parts of the graphite electrode are uniformly heated.

The calcining furnace comprises a machine table and a furnace body, a flue gas purification mechanism is installed at the top of the machine table, a top plate is installed at the top of the flue gas purification mechanism, an oxygen supply device and a smashing and stirring mechanism are arranged at the top of the top plate, a calcining rack is arranged at one end of the furnace body in a sealing fit mode, and the calcining rack is arranged at the other end of the furnace body. An L-shaped bracket is mounted at the bottom of one end of the machine table, and a flue gas purification mechanism is arranged in the machine table; through the smashing and stirring mechanism and the smashing type calcining structure of the calcining rack in the furnace body, materials needing to be calcined and processed are uniformly placed in the discharging groove to be processed, a material collecting structure of the discharging groove is conveniently utilized, unfolding and sealing are convenient, the processed materials are conveniently and uniformly collected and crushed, and the processing efficiency is improved. The limitation and inconvenience that materials are scattered and are difficult to take out are abandoned, rapid cooling and discharging are facilitated under the condition that the structure is actively pulled out from the interior of the furnace body, and the working efficiency of antimony trioxide processing and production is greatly improved.

The invention discloses a preparation method and a preparation system of a silicon-carbon negative electrode material, and the method comprises the following steps: conveying a porous carbon raw material into a deposition furnace, introducing inert gas to replace air in the deposition furnace, and vacuumizing the deposition furnace; raising the temperature of a deposition furnace to 300-800 DEG C, mixing inert gas with the preheated silicon source gas, and introducing the mixture into the deposition furnace for chemical vapor deposition to obtain a silicon-carbon composite material precursor; raising the temperature of a buffer furnace to 300-800 DEG C, conveying the precursor into the buffer furnace, and carrying out chemical vapor deposition by utilizing residual silicon source gas in the buffer furnace; carrying out gas-solid separation on the material in the buffer furnace, conveying the solid to a cladding furnace, detecting the gas, and detecting the content lt of the silicon source gas; and (2) adding 0.2 mg / L of the silicon-carbon composite material into the coating furnace, introducing coating gas into the coating furnace, and performing carbon deposition coating to obtain the silicon-carbon composite material. The preparation system disclosed by the invention is a continuous preparation system, so that the production efficiency is greatly improved, and the requirements of large-scale production are met.

The utility model provides a Joule hot tube furnace capable of quickly heating and cooling. The Joule hot tube furnace comprises a case, a high-temperature reaction chamber and a vacuum pump, an electrical system is installed in the case, the high-temperature reaction chamber comprises a quartz tube, a graphite heating tube and graphite conductive stations are installed in the quartz tube, the two ends of the graphite heating tube are arranged in mounting holes in one ends of the centers of the two graphite conductive stations respectively, and the other ends of the two graphite conductive stations are each fixedly provided with a metal conductive rod; the two metal conducting rods are connected with an electrical system, the two ends of the high-temperature reaction chamber are sealed through flange assemblies, air channels are machined in the flange assemblies and the graphite conducting tables to communicate the interior of the graphite heating pipe with the exterior of the high-temperature reaction chamber, the air channels in the two flange assemblies are connected with an air inlet valve and an air outlet valve through air pipes respectively, and the air outlet valve is connected with a vacuum pump. The graphite heating tube is a heating device and a device for containing materials, the rapidly-increased temperature can directly act on the materials, and the material calcination efficiency is greatly improved.

The utility model relates to equipment for heat treatment of small parts. The equipment comprises a box-type furnace body, a furnace door assembly and a cooling liquid tank body, the box-type furnace body comprises a first fire-resistant heat preservation layer, heating elements and a furnace body shell, the furnace body shell is arranged on the outer side of the first fire-resistant heat preservation layer, and the heating elements are arranged on the inner side of the first fire-resistant heat preservation layer. The furnace door assembly is connected to the guide rail moving system in a sliding mode to move, the furnace door assembly is connected with the protective cover assembly, the protective cover assembly comprises an upper protective cover, a communicating pipe and an air inlet pipe, and the furnace door assembly is fixedly connected with the upper protective cover through the communicating pipe. A conventional common box-type furnace is adopted, and through the designed structure and operation and use modes and methods, the problem of oxidation of small workpieces or samples during high-temperature heating is solved, and the problem of rapid quenching cooling after heating is solved; and the heat treatment high-temperature heating oxidation problem of small workpieces and test samples and the rapid cooling problem during quenching are perfectly solved.

The invention relates to the technical field of heat treatment vacuum furnaces, in particular to a heat treatment vacuum furnace which comprises a furnace body and a furnace door which are arranged in a matched mode, a vacuum pump, an air pump and a pressure relief pump are arranged at the top end of the furnace body in a matched mode, a partition plate is fixedly arranged in a furnace cavity of the furnace body, and the furnace cavity of the furnace body is divided into a first cavity and a second cavity through the partition plate. A heating inner furnace is fixedly arranged in the first cavity, and a placing plate provided with a honeycomb hole array is placed on the heating inner furnace. The honeycomb hole array is formed in the placement plate to enhance the heat dissipation capacity, the area is divided into the central area, the transition area and the edge area, the central area resists principal stress through a dense honeycomb structure, the transition area relieves thermal stress through a single-edge communication design, and the edge area accelerates heat dissipation through a full-edge communication design; therefore, the cooling efficiency of the workpiece is improved while the thermal deformation resistance is ensured.

An injector configured for arrangement within a reactor of a vertical furnace to inject gas in the reactor is provided. The injector is made substantial elongated and configured with an internal gas conduction channel to transport gas from a first end of the injector to a second end of the injector. An outer sidewall of the injector may be tapered towards the second end over at least 10%, preferably 30% and most preferably 50% of the length of the injector to increase tolerances for fitting the injector in the tube.

The utility model provides an ion nitriding reaction device, which belongs to the technical field of ion nitriding and comprises a reaction furnace, an air pressure regulating valve arranged on one side of the top of the reaction furnace, a vacuum extraction pipe arranged on one side of the bottom of the reaction furnace, a vacuum control valve arranged at one end of the vacuum extraction pipe and a thermocouple support arranged at the bottom of the inner wall of the reaction furnace. A ventilation air valve is embedded in the bottom of one side of the reaction furnace, one end of the ventilation air valve is in pipe connection with a thermal insulation three-flow pipe, the thermal insulation three-flow pipe is embedded in the bottom of the inner wall of the reaction furnace, and the two sides of the top of the thermal insulation three-flow pipe are communicated with thermal insulation flow dividing gas conveying pipes in a sealed mode; according to the ionitriding and nitriding reaction device provided by the utility model, the adjusting motor rotates to drive the gear to drive the rack meshed with the gear to rotate, and at the moment, the fan blades drive reaction gas from the bottom to concentrate the gas towards the middle part of the reaction furnace, so that the gas is in full contact with a workpiece, and the ionitriding efficiency is improved.

The utility model provides a heating furnace. The heating furnace comprises a shell; the vacuum cavity is arranged in the shell, and the vacuum cavity is used for accommodating the flaky material; the fixing assembly is arranged on the outer side of the vacuum cavity; the heating assembly is arranged around the outer side of the vacuum cavity and is connected to the fixing assembly; the distance between the upper portion of the heating assembly and the vacuum cavity is a first distance, the distance between the lower portion of the heating assembly and the vacuum cavity is a second distance, and the first distance is larger than the second distance. When the heating assembly is used for heating, the lower part of the heating assembly is closer to the vacuum cavity than the upper part, so that the heating temperature of the lower part of the vacuum cavity is higher than that of the upper part of the vacuum cavity, the temperature nonuniformity caused by upward flowing of hot air is compensated, and the temperature of the upper part of the reaction space is closer to that of the lower part of the reaction space; and the heating uniformity of the flaky material is improved, so that the processing quality is improved.

The invention relates to the technical field of heat treatment, and discloses an optimized heat treatment device for a high-temperature vacuum tube type muffle furnace, which comprises a muffle furnace main body with an air inlet pipe and a cabin door, a clamp conveying mechanism and a sample clamp are arranged in an inner cavity of the muffle furnace main body, and by utilizing the chemical characteristics of the sample clamp, in the heating process, the sample clamp is conveyed to the muffle furnace main body; before the sample heat treatment temperature is reached, oxidation reaction with residual oxygen in the inner cavity of the muffle furnace main body can be carried out, and the residual oxygen in the muffle furnace main body is quickly consumed, so that the inner cavity of the muffle furnace main body can quickly reach a perfect vacuum environment, and the influence of the residual oxygen on the sample heat treatment is avoided; the end, located in the inner cavity of the muffle furnace body, of the gas inlet pipe is provided with the gas guide assembly, replacement gas introduced through the gas inlet pipe enters the inner cavity of the muffle furnace body in a divergent mode through the gas guide assembly, and therefore the phenomenon that an airflow shadow area exists in the inner cavity of the muffle furnace body is avoided, and the content of exhausted oxygen meets the requirement.

The invention discloses a silicon carbide vacuum sintering furnace optimization method based on computational heat transfer theory simulation, which is used in the field of artificial intelligence and comprises the following steps: establishing a heat transfer model; the heat effect in the silicon carbide vacuum sintering furnace is predicted by setting the boundary conditions of initial temperature, heat flow implementation and convective heat transfer and solving the heat transfer model by using an implicit numerical method; based on the optimized heat transfer model, simulating the physical process in the silicon carbide vacuum sintering furnace by using a multi-physical field simulation technology, and analyzing the influence of the operation parameter data of the silicon carbide vacuum sintering furnace on the heat transfer process; comparing the operation data with a simulation result, and based on a comparison result and an analysis result; and comparing and analyzing the actual performance data and the simulation result, and evaluating the adjustment effect of the operation parameter data. Through quality detection and energy efficiency evaluation, the energy utilization efficiency in the sintering process is measured and optimized, and the link of energy waste is identified.

The invention relates to the technical field of microwave heating control, and discloses a variable-frequency microwave heating control method and system for a vacuum furnace, and the method comprises the following steps: S101, collecting first feature data of M blocks of a material, the first feature data comprising temperature, humidity, pressure, vacuum degree, microwave frequency and heating time; s102, preprocessing the first feature data to obtain a second feature sequence; s103, analyzing the moisture content of the material based on a preset moisture content prediction model, and outputting the moisture content of the M blocks; and S104, the control parameters of the blocks are optimized according to an improved particle swarm algorithm, optimal control parameters are obtained, and the control parameters comprise the microwave frequency and the heating time. According to the method, the microwave frequency and the heating time are optimized in a zoning mode, the moisture content prediction model is combined, and the drying uniformity and adaptability are remarkably improved.

The utility model relates to the technical field of vacuum sintering machines, and discloses a vacuum sintering machine with a tray module, which comprises a vacuum sintering machine main body and a sealing cover, linear guide rails are fixedly mounted on the front side and the rear side of the vacuum sintering machine main body, guide sleeves are fixedly mounted on sliding tables of the linear guide rails, and polish rods are slidably mounted on the guide sleeves. The right end of the polished rod and the sealing cover are fixedly assembled, a supporting base is fixedly installed at the bottom of the left side of the sealing cover, a tray module is placed on the upper side of the supporting base, and a driving assembly used for lifting the guide sleeve is installed on the upper side of the vacuum sintering machine body. Through the tray module which is detachably used on the supporting seat, the annular parts can be conveniently placed on the tray module after being stamped and installed in the sealing cover, gaps can be reserved between the annular parts, and the heating uniformity and the yield are improved; and structures such as a driving assembly and a guide sleeve are arranged, so that the sealing cover can conveniently carry out translation and lifting movement with the tray module, and the labor amount of workers is greatly reduced.

The invention discloses a preparation method and application of an aerogel catalyst, and belongs to the technical field of catalytic combustion. The preparation method comprises the following steps: firstly, preparing silicon dioxide nanofibers from a mixed solution of polyvinyl alcohol (PVA) and tetraethyl orthosilicate (TEOS) through an electrostatic spinning method; then loading noble metal palladium (Pd) or platinum (Pt) onto the silicon dioxide nanofiber; dispersing the silicon dioxide nanofiber loaded with the noble metal into a colloidal solution; then removing the solvent in the colloidal solution to obtain an aerogel precursor; and finally, calcining the aerogel precursor at high temperature to obtain the catalyst. The preparation method has the characteristics of high efficiency, environment friendliness, simple process and the like, and the aerogel product has high temperature resistance, flexibility and connectivity and has a wide application prospect in the field of catalytic combustion.

The utility model relates to the technical field of industrial smelting, and discloses a chute liquid level temperature measuring device and a vacuum furnace, which can accurately measure the temperature of molten metal in a chute of the vacuum furnace. According to the device, the tail end of a temperature measuring component and a body of the temperature measuring component are located in a temperature measuring component storage cylinder, the head end of the temperature measuring component is located in a first temperature measuring cylinder in an initial state, and cavities of the first temperature measuring cylinder and the temperature measuring component storage cylinder are communicated to form a temperature measuring component moving channel; the temperature measuring component moves in the temperature measuring component storage cylinder and the first temperature measuring cylinder in the axis direction. The second temperature measuring cylinder is fixed above the chute channel of the vacuum furnace; and the inner cavity of the second temperature measuring cylinder is communicated with the chute channel of the vacuum furnace. The driving mechanism is connected with the outer wall of the first temperature measuring cylinder and drives the lower end of the first temperature measuring cylinder to be aligned and contacted with the upper end of the second temperature measuring cylinder in a working state, and inner cavities of the first temperature measuring cylinder and the second temperature measuring cylinder are communicated; and the temperature measuring component extends into the inner cavity of the second temperature measuring cylinder through the inner cavity of the first temperature measuring cylinder and extends into the chute channel to measure the temperature of the liquid level in the chute.

The invention discloses a spark plasma sintering device for producing large-size advanced ceramics. The spark plasma sintering device comprises a vacuum cavity, a discharge assembly and a control assembly. The discharge assembly is formed by splicing a plurality of discharge modules, an insulating layer is arranged between the adjacent discharge modules, and the adjacent discharge modules are isolated through the insulating layer; according to the invention, an advanced ceramic sample to be sintered is effectively partitioned, and a control assembly controls a plurality of discharge modules to circularly discharge / cut off power repeatedly in an extremely short time according to a set sequence, so that the partitioned regions of a material are circularly conducted to release heat / cut off to stop heat release repeatedly in the extremely short time according to the sequence; plasma sintering of large-size advanced ceramics under the condition of current with conventional magnitude is realized. According to the sintering method disclosed by the invention, the treatment such as granulation on the advanced ceramic powder is not needed, the treatment procedures such as degumming with very long time consumption on the forming additive are also not needed, and the rapid production of the advanced ceramic can be realized.

The invention discloses a furnace atmosphere control device and method. The furnace atmosphere control device comprises an adjusting device, a sensor system and a control unit. An exhaust unit in the adjusting device is provided with a cover plate, a connecting rod, a crank and an actuator, the connecting rod is used for pushing and pulling the cover plate to move, the position of the cover plate is changed, and therefore the area of an outlet of the exhaust unit is changed. According to the furnace atmosphere control device, the high oxygen concentration of the sintering atmosphere in the calcining furnace is kept, continuous furnace pressure fluctuation can be kept, and the calcining effect of the raw material of the positive electrode material is guaranteed. According to the furnace atmosphere control method, automatic and real-time adjustment is achieved, and safety and high efficiency are achieved.

To efficiently deposit a triiron tetroxide film using gas without using water vapor.SOLUTION: A metal oxide film deposition method comprises: an arrangement step of arranging a metal workpiece in a heat treatment furnace; a substitution step of substituting air in the heat treatment furnace with inert gas or carbon dioxide; a heating step of heating the inside of the heat treatment furnace after the substitution step; and a film deposition step of depositing a triiron tetroxide film on the workpiece by changing the inside of the heat treatment furnace after the heating step into a carbon dioxide atmosphere.SELECTED DRAWING: Figure 2

The utility model provides an anti-mixing device which comprises a supporting plate with a hollow part, a feeding frame with an opening in the bottom of one side is arranged above the supporting plate, and the feeding frame communicates with the hollow part of the supporting plate; a baffle matched with the opening in the bottom of the feeding frame in size is arranged between the feeding frame and the supporting plate, one end of the baffle penetrates through the opening in the bottom of one side of the feeding frame, the other end of the baffle is connected to the movable end of a telescopic mechanism, and the telescopic direction of the movable end of the telescopic mechanism is parallel to the supporting plate. The device can be fixed at the upper end of a square chamber, collects scattered negative electrode materials during feeding, avoids the problem of material mixing, and can also automatically control opening and closing of the material conveying channel to prevent the negative electrode materials from overflowing from the chamber during feeding.

A vacuum oven comprising an inner cavity, a heating element, a first door, and a second door. The inner cavity configured for holding a hazardous material and is surrounded by a housing. The heating element is configured to heat the inner cavity and is joined to an outer surface of the housing. The first door covers a first side of the inner cavity. The second door covers a second side of the inner cavity opposite the first side.

A geothermally powered zinc production subsystem includes a geothermal system with a wellbore extending from a surface into an underground magma reservoir. A hopper receives a sphalerite ore that is crushed and provided to a flotation tank. The flotation tank is heated by a heat transfer fluid heated by the geothermal system, and a product of the flotation tank is used to prepare zinc.

The application discloses a pump source sintering jig and relates to the technical field of pump source chip positioning. The pump source sintering jig comprises a pump source base and a positioning jig. The pump source base is provided with a mounting groove. The bottom of the mounting groove is provided with a plurality of chip mounting positions. The positioning jig is arranged in the mounting groove and covers the bottom of the mounting groove. The positioning jig is provided with a plurality of positioning grooves penetrating in the up-down direction. The plurality of positioning grooves are arranged in correspondence with the plurality of chip mounting positions. At least two positioning columns are arranged on the positioning jig. The edges of the upper ends of the positioning columns are chamfered. The positioning columns are used to establish a rectangular coordinate system. Each mounting groove is provided with a corresponding coordinate in the rectangular coordinate system. The position of each mounting groove can be determined by recognizing the positioning columns, so that the technical problem of difficult recognition caused by the blurred edges of the mounting grooves of the positioning jig is avoided.

The invention discloses a temperature control device based on square partition heat one-way active transportation, and belongs to vacuum environment temperature control equipment. A cylindrical vacuum inner tank body is fixedly arranged in a cylindrical vacuum outer tank body, an annular cylindrical vacuum cavity is arranged between the inner wall surface of the cylindrical vacuum outer tank body and the outer wall surface of the cylindrical vacuum inner tank body, and an annular circulating cooling water cavity is arranged on the inner wall surface of a cylindrical side plate of the cylindrical vacuum inner tank body. A square electric heating radiant panel assembly is arranged in a cavity of the cylindrical vacuum inner tank body, a temperature controller and a vacuum pump assembly are fixedly arranged outside the cylindrical vacuum outer tank body, and the temperature controller is communicated with the square electric heating radiant panel assembly. The vacuum pump assembly is respectively communicated with the vacuum cavity of the cylindrical vacuum outer tank body and the annular circulating cooling water cavity of the cylindrical vacuum inner tank body; according to the device, a heat one-way active transport structure is additionally arranged on the basis of partition heat radiation, so that the temperature control efficiency is improved, the uniformity of heat distribution is optimized, and accurate regulation and control of the temperature in a vacuum environment are realized.

The invention relates to a device for melting metal by means of solar energy, the device comprising a crucible (11) able to contain a liquid metal and a gas-tight enclosure (9, 13), wherein the enclosure contains the crucible, the crucible being in mechanical contact with the enclosure, wherein the enclosure comprises a first duct (7) configured for the introduction, into the enclosure and into the crucible, of divided solid metal, a second duct (14) configured for the removal, from the crucible and the enclosure, of liquid metal, and a third, optical duct (15) configured for the entry, into the enclosure and into the crucible, of sunlight (4), wherein the first duct comprises a first isolation valve (1.b) for gases, the second duct comprises a second isolation valve (1.c) for gases, and the third duct comprises a window (6) transparent to sunlight.

We provide a radiant tube heater that can be used not only in heating processes but also in cooling processes as needed. [Solution] The radiant tube heater 20 comprises a tube 22 with openings at both ends, a first cover body 45A and a second cover body 45B that close the openings at both ends, at least one electrical resistance heating element 30 provided inside the tube 22, a support member 35 provided inside the tube 22 to support the electrical resistance heating element 30, a gas inlet 47A for introducing furnace cooling gas into the tube 22, and a gas outlet 47B for discharging the furnace cooling gas introduced into the tube 22.

To provide a production method of a sintered body that can obtain a sintered body satisfying light transmissivity required as a dental prosthetic material by short time sintering without essentially requiring precise temperature control at a high temperature region and without depending on a content of a stabilization element of a zirconia composition.SOLUTION: A production method of a zirconia sintered body containing a stabilization element comprises: a first temperature rising step for rising temperature of a zirconia composition containing the stabilization element from a temperature rising start temperature up to a first arrival temperature between 800°C or higher and lower than 1400°C with a rate of temperature increase of 150°C / minute or more; a second temperature rising step for rising the temperature from the first arrival temperature up to a second arrival temperature between 1400°C or higher and lower than 1580°C with a rate of temperature increase of over 30°C / minute and less than 200°C / minute; and a holding step for holding the temperature at the second arrival temperature.SELECTED DRAWING: None

The invention relates to the technical field of semiconductor processing, and discloses an energy-saving double-furnace-body vacuum sintering furnace for a quartz waste liquid bottle for a semiconductor, which comprises a nested structure of a heat preservation drying furnace and a high-temperature sintering furnace, a rotary drying frame is arranged between the heat preservation drying furnace and the high-temperature sintering furnace, and the opening and closing of furnace doors are controlled through a guide rail driving mechanism respectively; the high-temperature sintering furnace adopts a molybdenum alloy lining; the vacuum pump combination realizes high vacuum, the furnace door adopts perfluoroether rubber triple sealing, the rotary drying frame and the sintering frame are respectively provided with a quartz boat and a lead screw guide rail driving mechanism to guarantee high-precision positioning, and during working, the two furnace bodies operate cooperatively, waste liquid bottles are dried and preheated in the heat preservation drying furnace firstly and then transferred to the high-temperature sintering furnace to be sintered. The vacuum interlayer is used for heat insulation, so that energy consumption is reduced, impurity volatilization rate is increased, and efficient and energy-saving recovery of the quartz waste liquid bottle is effectively realized.