567results about "Charge supports" patented technology

The invention is suitable for the technical field of powder metallurgy and advanced ceramic material sintering equipment, and provides an integrated flash sintering device for vacuum and a sintering method. The device comprises a power supply module, a high vacuum module, a first servo hydraulic machine, a second servo hydraulic machine, a third servo hydraulic machine, a mold rotation switching module, a vacuum feeding module, a green body pressing module, a demolding and mold cleaning module and a mold transfer module. According to the invention, an integrated gear tray design is adopted to integrate the functions of die installation, graphite paper treatment and green body pressing, and online synchronous cleaning of an electrode and a die is realized through die fixation and a cleaning brush arranged in a cleaning drum; therefore, full-automatic, high-efficiency and high-stability continuous production of flash sintering from powder filling to finished product collection is realized.

The invention discloses an annular furnace heat-resistant supporting forged chassis and an additive manufacturing process and a fixing device thereof, and belongs to the technical field of plating of metal materials, and the annular furnace heat-resistant supporting forged chassis comprises the steps that heat-resistant alloy steel base metal with specific components is prepared; carrying out laser texturing and nickel-based alloy bottom layer pretreatment on the surface of the steel plate; performing laser cladding on high-silicon high-temperature alloy powder containing niobium and rare earth elements to form a functional cladding layer, and performing gradient cladding on the edge of the atmosphere guide hole; and finally, carrying out heat treatment and assembling with a fan-shaped refractory brick fixing device. A composite oxide film and a multi-scale strengthening system are constructed, hydrogen resistance and brittleness resistance are effectively achieved, interface thermal stress is relieved, cracking and stripping of a cladding layer are avoided, a fixing device adapts to thermal expansion, the atmosphere is dredged, and the annealing uniformity of a steel coil is improved; the problems of creep deformation, hydrogen embrittlement, cladding layer stripping and thermal stress cracking of a traditional supporting component under the conditions of high temperature, heavy load and nitrogen and hydrogen atmosphere are solved.

The present disclosure provides a vertical furnace. The vertical furnace comprises a furnace tube, a storage device, a loading device, a wafer boat, a first carrying device, a second carrying device and a gas system. A furnace chamber used for heating a wafer is arranged in the furnace tube. The storage device is provided with a storage chamber and a carrying table located in the storage chamber, and the carrying table is used for carrying a wafer box. The loading device is used for loading a wafer box for storing a wafer to be heated. The wafer boat is used for moving a wafer to be heated between the furnace chamber and the loading device. The first carrying device is used for moving the wafer box between the carrying table and the loading device. And the second carrying device is used for moving the to-be-heated wafer between the loading device and the wafer boat. And the gas system comprises a gas inlet port and a gas outlet port which are arranged on the carrying table, and is used for introducing protective gas into the wafer box through the gas inlet port and discharging the gas from the wafer box through the gas outlet port so as to inject the protective gas of which the pressure is greater than the environmental pressure into the wafer box. Consequently, pollutants in the environment can be prevented from making contact with the wafer, and the interior of the wafer box is clean.

The invention relates to the technical field of high-temperature sintering, and particularly discloses a gradient composite kiln furniture based on spinel interface strengthening and a preparation method thereof. Wherein the kiln furniture sequentially comprises a mullite matrix layer, a silicon carbide enhancement layer and a zirconium oxide high-temperature-resistant layer from outside to inside, and the layers are chemically bonded through an in-situ generated MgAlO spinel interface layer. The preparation method comprises the following steps: carrying out layered tape casting on gradient slurry, carrying out isostatic pressing lamination molding, generating an MgSi transition phase at 1380-1420 DEG C through a stepped sintering process, and heating to 1600-1650 DEG C at a specific heating rate to form a continuous spinel interface. According to the kiln furniture, gradient component design cooperates with spinel interface strengthening, the problem of interface stripping caused by thermal expansion mutation of a traditional double-layer structure is solved, and the kiln furniture has excellent thermal shock stability and high-temperature strength retention rate. According to the preparation method, precise construction of the spinel interface is realized through staged reaction control.

The invention relates to the technical field of lithium batteries, in particular to a preparation method of a protective layer for a high-voltage ternary positive electrode material saggar, which comprises the following steps: uniformly mixing zirconium oxide, a lithium source compound, a binder and water according to the mass ratio of (2-3): (2-5): (1-5): (10-60) to prepare slurry; and uniformly coating the mixture on the bottom and the side wall of the sagger, pressing, drying and sintering to obtain the protective layer. According to the method, a compact composite protection layer from the pre-lithiation sagger surface layer to the lithium zirconate layer is successfully formed on the sagger surface, the sagger corrosion rate is reduced, composition segregation caused by the fact that zirconium / lithium components in the ternary material are adsorbed by the sagger is inhibited, the interface thermal stress concentration phenomenon is remarkably relieved, the cycle service life of the sagger is prolonged, and falling of the protection layer is avoided. In addition, the invention also discloses the protective layer prepared by the method and application thereof.

The utility model discloses a roller kiln transmission cooling system and a roller kiln device.The roller kiln transmission cooling system comprises a kiln body, a transmission platform composed of a plurality of ceramic roller bars, perforated bricks and a heat insulation sealing plate, the kiln body comprises kiln walls on the left side and the right side, and the transmission platform is erected on the kiln walls on the left side and the right side; the perforated brick is arranged in the middle of the kiln wall and used for erecting the ceramic roller, the heat insulation sealing plate is arranged on the outer side of the perforated brick, the ceramic roller penetrates through the heat insulation sealing plate and is rotatably arranged on the heat insulation sealing plate, and the heat insulation sealing plate is used for forming a heat insulation layer on the periphery of the perforated brick. The heat insulation sealing plate is arranged on the outer side of the perforated brick, so that a heat insulation layer is formed on the periphery of the perforated brick, the temperature of the outer side of the kiln at the perforated brick is prevented from being high, the distance from the driven end support and the driving end support to the kiln wall can be reduced, the supporting span of the ceramic roller is reduced, and high-temperature load-bearing deformation of the ceramic roller can be improved; and the firing quality of building ceramic products is improved.

The invention discloses a graphite sagger preparation method based on a secondary isostatic pressing process. According to the method, natural crystalline flake graphite and artificial graphite powder are selected as raw materials, coal pitch is selected as a binder, and boron carbide micro powder is selected as a filler. The preparation method comprises the following steps: dry-mixing a graphite raw material, preparing crushed and molten coal pitch and boron carbide into a suspension, and mixing and kneading the coal pitch and the boron carbide into paste; the paste is pre-pressed into a biscuit through a hydraulic machine, the biscuit is sealed in a rubber sheath and then subjected to primary cold isostatic pressing, then primary roasting is carried out, the blank is subjected to vacuum impregnation in a suspension liquid after primary roasting, secondary cold isostatic pressing and secondary roasting treatment are carried out after impregnation is completed, graphitization treatment and cutting shaping are sequentially carried out after roasting, and the finished graphite saggar is obtained. The degree of dependence on equipment is effectively reduced through a secondary isostatic pressing process, so that the prepared graphite saggar has good performance, and the density, bending strength, porosity, thermal shock performance and other indexes of the graphite saggar all meet the specialized operation requirements in the fields of photovoltaics, new energy and the like.

The utility model discloses a well type tempering furnace for die steel relates to die steel technical field, including the top of the tempering furnace body that is equipped with the opening, the top of the tempering furnace body is equipped with the cover and sets up the furnace cover of tempering furnace in the top of the tempering furnace body, is equipped with the rotary drive mechanism for fixing die steel and driving die steel rotation on the furnace cover of tempering furnace, the utility model discloses being equipped with the fixed jaw, can fix the die steel and hold, is convenient for the fixed die steel, the output shaft of first speed reducer drives one gear rotation, and a plurality of gears are connected through chain drive, make all the gear that sets up rotate synchronously, and the gear drives the rotation of the rotating rod, and the rotating rod drives die steel rotation through fixed plus jaw, can make all the die steel that fixedly holds rotate, can rotate the die steel of inner ring, avoid the uneven heating of inner and outer rings to occur, make all the die steel even heating, improve the heat treatment quality.

The invention relates to the technical field of calcining kiln bed plates, and discloses a refractory material-steel support superposed internal circulation boiling calcining kiln bed plate structure, which is characterized by comprising a steel support bed plate main body, the upper end surface of which is provided with an annular steel platform and an upper-layer heat insulation plate; the upper-layer heat insulation plate is annular and located on the inner ring of the annular steel platform, a center blind island is installed on the inner ring of the upper-layer heat insulation plate, and an annular supporting steel beam, a lower-layer heat insulation plate and a supporting foot stool structure are arranged on the lower end face of the steel supporting bed plate body. A steel framework bearing and refractory material heat insulation superposed structure is adopted, the steel supporting bed plate main body forms a high-strength bearing framework, excellent mechanical strength and stability are provided, and the external upper-layer heat insulation plate, the central blind island and other refractory material layers directly face a high-temperature environment, so that excellent high-temperature resistance and corrosion resistance are provided; and meanwhile, the dual harsh requirements of high bearing capacity and high temperature resistance are met.

The utility model discloses a high-temperature cracking shaping tool for a ceramic-based composite sheet, relates to the technical field of ceramic-based composites, and can solve the problems that a shaping tool in the prior art cannot shape a product at one time and is troublesome to disassemble and assemble. The high-temperature cracking shaping tool for the ceramic-based composite sheet comprises an upper die and a lower die which are detachably connected, and the upper die comprises a cover plate and a first forming structure arranged at the bottom of the cover plate; the lower die comprises a base and a containing groove formed in the center of the top face of the base, and the bottom of the containing groove is provided with a second forming structure used for being matched with the first forming structure to enable the circular arch structure of the ceramic-based composite to be formed.

The invention relates to a support frame for sintering high-proportion concentrate as well as a preparation method and a use method of the support frame. The support frame comprises the following raw materials in parts by weight: 45-60 parts of sintered return mine, 20-30 parts of oily sludge, 6-12 parts of desulfurized fly ash, 5-10 parts of a pore forming agent and 3-6 parts of a cold setting binder. Compared with the prior art, the invention has the following beneficial effects: 1) the caking property of the oily sludge is utilized to reduce a cold setting binder, the desulfurized fly ash is adopted as a calcium flux to realize complete consistency of chemical components of the support frame and the sintered ore, and efficient resource utilization of the oily sludge and the desulfurized fly ash is realized; and 2) the pore-forming agent is decomposed and exhausted at high temperature to form holes with different diameters, so that the air flow on the sintering trolley is uniformly distributed, and the influence of non-uniform air flow formed near the support frame on the sintering process is reduced.

The utility model relates to the technical field of semiconductor production equipment, and discloses a semiconductor chip production mold, which comprises a plurality of lower movable molds, an upper movable mold and a middle fixed mold which are matched with each other, and further comprises a rotating plate for driving the plurality of lower movable molds to rotate, a driving motor used for driving the rotating plate to rotate is fixedly installed in the fixing base, a plurality of fixing mold frames used for positioning the lower movable mold are arranged on the upper portion of the rotating plate, second receding openings are formed in the lower portions of the fixing mold frames in a penetrating mode, and a plurality of first receding openings matched with the second receding openings are formed in the rotating plate. A first telescopic device used for pushing the lower movable mold to move upwards is fixedly installed at the bottom in the fixing base, and a fixing frame is fixedly installed on one side of the fixing base. According to the utility model, the semiconductor chip in the lower movable die is taken and placed in the sintering process, so that the waiting time of the semiconductor chip in the sintering process is shortened, and the production efficiency of the semiconductor chip is improved.

The utility model provides a kind of support for ceramic metallization sintering.The support for ceramic metallization sintering includes: base;Multiple vertical boards are fixedly installed on the inner wall of the bottom of the base;Multiple guide rods are fixedly installed on the inner wall of the base and are respectively fixedly connected with multiple vertical boards;Multiple support assemblies for supporting ceramic tubes are located on the top of the base;Adjusting mechanism is installed on the inner wall of the base for adjusting the spacing of multiple support assemblies.The support for ceramic metallization sintering provided by the utility model can adjust the spacing of support assemblies, facilitate the disassembly and replacement of support assemblies, and is suitable for different specifications and sizes of ceramic tubes.

The utility model relates to a graphite crucible belongs to high temperature smelting equipment technical field. Among them, graphite crucible includes: the crucible body has the first wall body and second wall body with the wall thickness is formed, and the first wall body is located the outside of second wall body, the top of second wall body is lower than the top of first wall body, to make second wall body and first wall body form the step between, the cover body, cover is established on the step, among them, the recess is provided on the first wall body, and the recess is along the circumference of the crucible body and sets up, and the depth of recess is greater than 0 and is less than or equal to 10. Through the recess along the circumference of the crucible body and sets up, to make the gripper of mobile equipment when the graphite crucible is clamped, the gripper can be held at the recess, to realize the quick positioning of the crucible body, simultaneously, still can make at least partial gripper can be housed in the recess, with the recess forms the card and holds, avoids the sliding between the gripper and the crucible body, to avoid the occurrence of the fall of the crucible body, improves the service life of the crucible.

The utility model relates to the technical field of material detection, and discloses a lifting test furnace which comprises a rack, a heating assembly, a clamp assembly and a driving assembly, and the heating assembly is connected with the rack and forms a heating channel with at least one open end; the clamp assembly comprises a clamp and a heat preservation and insulation part, the clamp is slidably arranged in the heating channel, and the heat preservation and insulation part is connected with the clamp and used for blocking the open end of the heating channel. The driving assembly comprises an elastic piece and a linear driving piece, and the linear driving piece is connected with the rack, connected with the clamp through the elastic piece and used for driving the clamp to slide into and out of the heating channel through the elastic piece. According to the lifting test furnace, the opening end of the heating channel can be sealed through the heat preservation and insulation piece, and meanwhile, the situation that a gap is formed between the heat preservation and insulation piece and the heating assembly and the heat preservation and insulation piece is damaged in the sealing process can be avoided.

The invention relates to the technical field of photovoltaic cell manufacturing equipment, and particularly discloses a TOPCon cell sintering furnace. In order to solve the problems that a traditional tunnel furnace or a vertical sintering furnace is generally high in energy consumption, waste gas generated after high-temperature sintering is directly discharged, and energy is wasted, the sintering furnace comprises a furnace body, a heating element, a bearing rotating mechanism and a gas circulating pipeline, and the interior of the furnace body is separated from top to bottom and communicated with a gas heating chamber and a sintering working chamber; the heating element is arranged in the gas heating chamber and is used for feeding the heated gas into the sintering working chamber below; the bearing and rotating mechanism is arranged in the sintering working chamber and used for bearing and driving the battery piece to move; the inlet end of the gas circulation pipeline communicates with the exhaust port of the sintering working chamber, the outlet end of the gas circulation pipeline communicates with the gas inlet of the gas heating chamber, and the gas circulation pipeline is used for guiding gas obtained after heat exchange in the sintering working chamber back to the gas heating chamber to be reheated and recycled. The situation of energy waste caused by heat loss in the sintering furnace can be reduced.

The utility model discloses a flat type three-face heating box-type furnace hearth, and relates to the technical field of box-type furnace hearths. The utility model comprises an outer layer, the inner wall of the outer layer is provided with a middle layer, and the inner wall of the middle layer is provided with an inner layer. According to the utility model, the bearing mechanism is inserted into the two placing mechanisms which are highly symmetrical by hands and slides to a deeper position of the inner layer along the two placing mechanisms, and the bearing mechanism falls into the placing mechanisms due to gravity along with the sliding of the bearing mechanism; at the moment, the two containing mechanisms with the same height support and limit the bearing mechanism, then a crucible containing powder, liquid and other materials is placed on the containing mechanisms, solid materials can also be placed on the containing mechanisms, and then the adaptability of different heating requirements is greatly improved by adjusting the height of the heated materials. And therefore, the heating effect and the product quality are obviously improved.

The invention relates to the field of nuclear fuel element manufacturing, in particular to a molybdenum boat for nuclear fuel pellet boat pushing sintering. The molybdenum boat comprises a molybdenum boat frame, molybdenum pins and a molybdenum bottom plate. The molybdenum boat frame is integrally formed, the bottom face of the molybdenum boat frame is pressed into a corrugated shape, and the molybdenum boat frame is used for horizontally loading and stacking green pellets. The side wall of the molybdenum boat frame is partially provided with holes for atmosphere circulation in the hearth, and the molybdenum boat frame is fixed on the molybdenum bottom plate through molybdenum pins; the molybdenum pin comprises a stop part and a molybdenum pin part; a through hole is formed in the bottom surface of the backstop part, and the molybdenum pin part penetrates into the through hole and is fully welded with the backstop part; the four corners of the molybdenum bottom plate are respectively provided with a square groove, a positioning hole is formed in the center of each groove, and molybdenum pin parts of the molybdenum pins are inserted into the positioning holes. The device is simple in structure and not prone to deformation, the pins are firmly fixed, and the nuclear fuel pellets are horizontally and neatly loaded, so that the nuclear fuel pellets can be efficiently loaded into a furnace for sintering in a high-load mode.

The utility model discloses a sintering tray with a sintering nail structure, which comprises a sintering tray body, the top of the sintering tray body is provided with uniformly distributed insertion holes, two insertion rods are arranged above the sintering tray body, the bottom ends of the two insertion rods are respectively connected with the inner walls of the two insertion holes in a sliding manner, and the sintering nail structure is arranged on the sintering tray body. Sintering nail bodies are fixedly connected to the top ends of the two inserting rods correspondingly, and sliding cavities are formed in the tops of the two sintering nail bodies correspondingly. According to the sintering nail, the distance between every two adjacent sintering nail bodies can be finely adjusted, and then the inserting rods on the sintering nail bodies can be smoothly inserted into the inserting holes, so that the stability and efficiency of connection of the sintering nail bodies are improved; a user can fix the porcelain teeth on the mounting blocks at the tops of the sintering nail bodies without considering the distance between the two sintering nail bodies, so that the processing efficiency is effectively improved.

The utility model relates to the field of heating devices, in particular to a vacuum cavity heating device which comprises a vacuum cavity, a top plate, a heating furnace body, heat insulation pieces, fixing pieces, a graphite heating rod, a graphite heating sheet, a molybdenum wire heat conduction piece and a carrying table, the top plate is installed on the front side of the vacuum cavity, and the heat insulation pieces can be installed on the inner side of the vacuum cavity in a stacked mode and fixed through the fixing pieces. A plurality of graphite heating rods are mounted on the inner side wall of the heating furnace body; graphite heating sheets are mounted at the other ends of the graphite heating rods; a molybdenum wire heat conduction piece is mounted on the outer side wall of the heating furnace body; a carrying table is mounted in the middle section of the inner side of the heating furnace body; the heat insulation piece can reduce heat radiation and heat conduction transmitted by components to the maximum extent, ensure the temperature stability in the heating furnace body and improve the heating efficiency.

The sagger assembly comprises a first sagger structure, and the first sagger structure comprises a first sagger, a second sagger arranged on the lower layer of the first sagger and a first groove formed in the bottom face of the second sagger; and the first rod structure comprises a first rod arranged on the bottom surface of the second sagger and a first bulge connected with the first rod. The sagger and the stick are bound through the sagger structure and the stick structure, the sagger and the stick are tightly combined through the concave-convex structure, a unique running path is provided for movement of the sagger, the problems of deviation, collision and the like are avoided, in addition, the sagger assembly guarantees that different rows of saggers have fixed intervals, and the sagger assembly is convenient to use. The contact area of the atmosphere and the material is increased, forward chemical reaction is facilitated, waste gas generated in the sintering process can be discharged in time, and the performance of the material is improved.

The utility model relates to the technical field of ceramic sintering, and discloses a low-temperature fast-firing conductive ceramic microwave-assisted sintering device which comprises a microwave sintering furnace and a furnace chamber arranged on the microwave sintering furnace, the furnace chamber comprises a sintering chamber, a placing frame is connected in the furnace chamber in a sliding mode, and the placing frame comprises placing plates and sealing plates which are fixed alternately. The sealing plate is used for shielding the furnace chamber; the placing frame is arranged in the furnace chamber of the microwave sintering furnace, the placing frame is formed by alternately fixing the placing plates and the sealing plates, a plurality of conductive ceramics can be placed on the placing plates, the placing frame is moved to enable the conductive ceramics to sequentially enter the sintering chamber of the furnace chamber to be sintered, and the conductive ceramics are directly moved out after being sintered. The efficient sintering of the conductive ceramic is realized by adopting a reciprocating translation mode, the conductive ceramic is convenient to take, and the sintered conductive ceramic is still sintered when the sintered conductive ceramic is taken, so that the sintering efficiency is improved, and the phenomena of heat dissipation and energy waste caused by repeatedly opening the furnace chamber are avoided.

A heat treatment apparatus for manufacturing a secondary battery active material disclosed herein comprises: a main body including a body housing, which has an inner space formed therein, and a plurality of insulating partition walls, which divide the inner space into a plurality of heating zones and at least one non-heating zone positioned between at least one pair of the heating zones; a plurality of heaters for heating the plurality of heating zones, respectively; and a saggar transfer unit including a plurality of transfer rollers, which support a saggar accommodating the secondary battery active material and transfer the saggar in the inner space, and an electric motor, which provides power to rotate the plurality of transfer rollers.

The utility model relates to a perovskite cell substrate annealing equipment heating thermal insulation cavity, which is provided with at least one group of independent thermal insulation cavity units, each thermal insulation cavity unit comprises a sealing mechanism, the sealing mechanism comprises an outer shell and an upper sealing door, the top of the outer shell is provided with a material inlet, and the upper sealing door is installed at the material inlet in an opening and closing manner; the material bearing mechanism is mounted in the outer shell and is used for bearing materials fed from the material inlet; the heat uniformizing mechanism comprises a flow guide cover, a wind wheel and a wind wheel motor, the flow guide cover and the inner wall of the outer shell are arranged in a spaced mode to form a circulation cavity, the wind wheel is rotatably installed in the circulation cavity, the wind wheel motor is connected with the wind wheel to drive the wind wheel to rotate, and an air inlet structure and an air outlet structure which are oppositely arranged are arranged on the flow guide cover. According to the invention, the heat generated by the heater can be uniformly dissipated into the heat preservation cavity unit by using the uniform heat mechanism, so that the uniformity of annealing and heating is improved, and the quality of the perovskite battery substrate is improved.

The utility model discloses a clamping device and an automatic blow-in machine, and relates to the technical field of clamping devices.The clamping device comprises a first clamping piece, a second clamping piece and a wedge block, the first clamping piece comprises a bottom plate and two side plates, the two side plates are connected with the two sides of the bottom plate respectively, and the wedge block is arranged on the bottom plate; a first arc groove extending in the length direction of the bottom plate is formed in the top of the bottom plate, a first clamping hole and a second clamping hole are formed in the two side plates correspondingly, the first arc groove is used for being connected with the bottom of a to-be-clamped workpiece in a clamped mode, and a second arc groove is formed in the second clamping piece and used for being connected with the bottom of the to-be-clamped workpiece in a clamped mode. The radius of the cross section of the second arc groove is equal to that of the cross section of the first arc groove, the second arc groove is used for being clamped with the top of a to-be-clamped workpiece, the top of the wedge block is obliquely arranged in the length direction of the wedge block, one end of the wedge block penetrates through the first clamping hole to be clamped in the second clamping hole, and the other end of the wedge block is clamped in the first clamping hole; the bottom of the wedge block abuts against the second clamping piece. The whole operation process is simple and fast.

The utility model relates to a lifting feeding spring type tray bracket mechanism for a vertical furnace, and belongs to the field of vertical vacuum furnaces. The problems that in the process of completing feeding and discharging operation of an existing vertical vacuum furnace, a charging tray topples over, and parts are damaged and other potential safety hazards exist are solved. According to the technical scheme, each guide component comprises a base, the bases are connected to a supporting frame, guide columns are arranged on the bases, adjusting screw rods are connected to the guide columns, the guide columns are sleeved with guide column sleeves, the guide columns are in sliding connection with the guide column sleeves, and protrusions are connected to the ends, away from the supporting frame, of the guide column sleeves; the bracket is provided with a protrusion, the protrusion is in clearance fit with a first through hole formed in the bracket in a penetrating mode, the protrusion is fixedly connected to the bracket, the bracket is connected to the furnace body bottom cover through a supporting plate, the guide column sleeve is sleeved with an elastic component of a hollow structure, the elastic component abuts against the position between the supporting frame and the bracket, and the protrusion is provided with a first through hole in a penetrating mode, and the first through hole is in clearance fit with an adjusting screw. The utility model is applied to the vertical furnace.

The utility model relates to the technical field of heat treatment equipment, and discloses a silicon steel sheet annealing device for transformer production, which comprises a base structure, the base structure comprises a base, the two sides of the bottom of the base are provided with support columns, and the top of the base is provided with a case assembly; the machine box assembly comprises a machine shell, a collecting box is arranged in the machine shell, a heating chamber is arranged at the top of the collecting box, a heater is installed in the heating chamber, and a reaction chamber structure is arranged at the top of the heating chamber; the reaction chamber structure comprises an exhaust chamber, object containing grooves are formed in the two sides of the interior of the exhaust chamber, and an exhaust pipeline is installed at the top of the exhaust chamber. According to the utility model, the fixer is arranged to fix a workpiece so that the workpiece is uniformly stressed, and the reaction chamber structure is arranged to degrade harmful gas, so that the environmental protection property of the process is improved.

The utility model discloses a furnace body cabinet integral structure of tubular vacuum equipment, which comprises a furnace body cabinet, a plurality of groups of furnace body components are vertically and uniformly arranged on two sides of the furnace body cabinet, a mounting area is arranged between the furnace body components, and each furnace body component comprises a mounting frame, a furnace body and a quartz tube; the quartz tube cleaning device is simple in structure and reasonable in design, one end of the mounting frame is pulled out of the side face of the furnace body cabinet by removing the connection between the first fixing piece and the second fixing piece and movably and rotatably connecting the third fixing piece to the fixing bolt, the control piece controls the furnace body to be opened and exposes the head of the quartz tube, and then the quartz tube is pulled out in the radial direction and cleaned. The quartz tube and the furnace body do not need to be detached and replaced respectively, the weight is reduced, the maintenance space is increased, and personnel operation is easy.