2005results about "Travelling cranes" patented technology

A vacuum assembly used for warming processed substrates above the dew point to prevent unwanted moisture on the processed substrate surfaces as well as reducing negative impact on manufacturing throughput. The vacuum assembly includes a processing chamber, a substrate handling robot, and a heater which may be an optical heater. The processing chamber is configured to cryogenically process one or more substrates. The transfer chamber is connected to the processing chamber and houses the substrate handling robot. The substrate handling robot is configured to displace one or more substrates from the processing chamber to the transfer chamber. The heater is connected to the transfer chamber above the substrate handling robot such that the heater emits energy incident on the substrate when the substrate handling robot displaces the substrate in the transfer chamber.

Provided is a substrate processing apparatus. The substrate processing apparatus includes a reaction tube, a substrate holder, a gas nozzle, a heating unit, a temperature detector, and an exhaust unit. The reaction tube accommodates and processes substrates. The substrate holder holds substrates stacked at predetermined intervals in the reaction tube. The gas nozzle is installed along a stacked direction of the substrates. The heating unit heats the substrates. The temperature detector is installed along the stacked direction of the substrates. The exhaust unit exhausts an inside atmosphere of the reaction tube. Each of the gas nozzle and the temperature detector includes first and second parts and is supported by a narrow tube supporting member including first and second supporting parts. The first supporting part makes contact with the first part. The second supporting part is parallel with the second part and supports the second part.

A system and method for the safe storage of items wherein a storage structure is provided having a first section in which storage units are stored in vertically oriented cells with each storage unit being stacked one upon another and wherein at least one transfer vehicle is provided for selectively engaging and conveying the storage units along an overhead grid track system between the first section and a second section wherein the at least one transfer vehicle may be used to either lift or lower a storage unit and move the storage unit to and from a storage position in one of the vertical storage cells of the first section of the storage structure.

A system and process for improving container flow within a port facility, including improved equipment and software for controlling operation and flow of the equipment in the part facility. The system may include a port facility geographically arranged to separate land operations and water operations. Land operations such as over-the-road missions and rail missions may use landside access areas positioned at one end of a yard including rows of container stacks. Water missions such as loading/discharging a vessel may use waterside access areas positioned at the opposite end of the yard. Automated cranes linked with a terminal operating system may pick/drop/shuffle containers and/or refrigerated containers (“reefers”) within the container stacks. Shuttle trucks may be used to pick/drop containers at quayside access points and the waterside access areas. The shuttle trucks may utilize shared wheelpaths. Software systems may be used to implement various principles of the invention.

A method and apparatus for transferring a substrate between a first environment having a first pressure and a second environment having a vacuum pressure is provided. In one embodiment, the apparatus comprises a chamber body having a first port disposed in a first wall and a second port disposed in a second wall that seals the chamber from the first and second environments. A cooling plate, a first substrate holder and a second substrate holder are disposed within the chamber body. The cooling plate is disposed at the bottom of the chamber body. The first port and the second port are sequentially opened and the pressure within the load lock regulated to allow substrate to pass through the load lock. A window is disposed in the top of the chamber body that allows a metrology device to view the chamber volume.

An intelligent assist method and apparatus are disclosed. The intelligent assist method includes imparting a manual force to a suspended object, determining an angle at which the suspended object is manually forced, generating motorized power to move the object in accordance with the angle at which the suspended object is forced, and inputting a signal to continue the motorized power and enable the object to continue moving on accordance with the angle at which the suspended object is manually forced.

A catalyst loading system for utilizing catalyst from a bulk supply located adjacent but not on the upper tube sheet of a catalytic reactor and for mechanized measuring of multiple identical quantities of catalyst and for mechanized loading of catalyst pellets into the reaction tubes of the reactor to achieve even drop rate, compaction and outage of the reaction tubes. From the bulk supply, multi-compartment catalyst charging hoppers are individually filled in rapid and accurately measured fashion by mechanized filling equipment having a predetermined sequence of operation that ensures accuracy of volumetric catalyst measurement. The charging hoppers are used for delivery of measured volumes of catalyst of a reactor tube loading mechanism which may take the form of a mobile cart framework being selectively positionable relative to the upper tube sheet and reaction tubes of a catalytic reactor to be charged with catalyst pellets. A pair of electronic vibrators are mounted to the cart framework and provide for support and vibratory movement of a vibratory tray having a catalyst feed hopper adapted to feed catalyst pellets to a plurality of generally parallel catalyst transfer troughs along which catalyst pellets are moved by vibration of the vibratory tray to a plurality of drop tubes. A compartmented hopper is fixed to the vibratory tray and controllably feeds catalyst pellets into respective catalyst transfer troughs. A plurality of charging tubes are connected to respective drop tubes by a plurality of elongate flexible tubes and are maintained in fixed, spaced relation by a structural element so as to define a charging manifold for simultaneous, timed delivery of catalyst pellets into a plurality of reactor tubes. The charging manifold has locator pins which are inserted into selected reactor tubes for orienting the charging tubes of the charging manifold with respect to a selected group of reaction tubes. A system is also provided for raising and lowering the charging manifold for efficiency of reactor tube charging operations. An electronic control system is effective for controlling the vibrators to achieve even drop rate from each of the catalyst transfer troughs and to control the vibrators responsive to catalyst weight to achieve even catalyst drop rate during an entire catalyst charging cycle.

A system for processing semiconductor wafers, includes a plurality of front opening unified pods (FOUPs), loadlocks for receiving the plurality of wafers, a plurality of process chambers configured to perform processing steps and or measurement steps on the wafers, loadlock cooling stations for receiving the wafers from the processing chambers and a transport chamber interconnecting the loadlocks, cooling chambers and process chambers. A first multi-axis robot transfers wafers between the FOUPs, loadlocks and loadlock cooling stations, at an ambient pressure. A second multi-axis robot tranfers wafers between the loadlocks, process chambers and the loadlock cooling stations, and is adapted to operate in a transport chamber at a pressure that is different from the ambient pressure.

Automated systems and methods for adapting semiconductor fabrication tools to process wafers of different diameters are described. In one embodiment, a method comprises providing a semiconductor fabrication tool, placing an adapter ring on a plurality of ring holders via a robotic arm, the plurality of ring holders being operable to support the adapter ring at a vertical distance from a stage heater and the stage heater being movable in a vertical direction, placing a first semiconductor wafer on the stage heater via the robotic arm, the first semiconductor wafer having a first diameter, and moving the stage heater upward to receive the adapter ring from the plurality of ring holders and to cover a portion of the stage heater during processing of the first semiconductor wafer.

An apparatus includes a first enclosure, a first door, at least one first valve, at least one inlet diffuser and at least one substrate holder. The first enclosure has a first opening. The first door is configured to seal the first opening. The first valve is coupled to the first enclosure. The inlet diffuser is coupled to the first valve and configured to provide a first gas with a temperature substantially higher than a temperature of an environment around the first enclosure. Each substrate holder disposed within the first enclosure supports at least one substrate.

An object transport and stowage system for an aircraft (10) includes a transport unit (32) for the transport of an object (20) within the aircraft (10). A first transfer drive system (62) is attached to the transport unit (32) and includes object engagement devices (92) that are engagable with the object (20). A motor (120) is mechanically coupled to and rotates one or more of the object engagement devices (92). A controller (66) is electrically coupled to the motor (120) and translates the object (20) relative to the transport unit (32). Another object transport and stowage system for an aircraft (10) includes a housing (150) for the stowage of an object (20) on the aircraft (10). A transfer drive system (64) is attached to the housing (150) and includes object engagement devices (168, 176), which are engagable with the object (20). A motor (162) is mechanically coupled to and rotates one or more of the object engagement devices (168, 176). A controller (68) is electrically coupled to the motor (162) and translates the object (20) relative to the housing (150).

Techniques for temperature-controlled ion implantation are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for temperature-controlled ion implantation. The apparatus may comprise a platen to hold a wafer in a single-wafer process chamber during ion implantation, the platen including: a wafer clamping mechanism to secure the wafer onto the platen and to provide a predetermined thermal contact between the wafer and the platen, and one or more heating elements to pre-heat and maintain the platen in a predetermined temperature range above room temperature. The apparatus may also comprise a post-cooling station to cool down the wafer after ion implantation. The apparatus may further comprise a wafer handling assembly to load the wafer onto the pre-heated platen and to remove the wafer from the platen to the post-cooling station.

A continuous pressure letdown system connected to a hopper decreases a pressure of a 2-phase (gas and solid) dusty gas stream flowing through the system. The system includes a discharge line for receiving the dusty gas from the hopper, a valve, a cascade nozzle assembly positioned downstream of the discharge line, a purge ring, an inert gas supply connected to the purge ring, an inert gas throttle, and a filter. The valve connects the hopper to the discharge line and controls introduction of the dusty gas stream into the discharge line. The purge ring is connected between the discharge line and the cascade nozzle assembly. The inert gas throttle controls a flow rate of an inert gas into the cascade nozzle assembly. The filter is connected downstream of the cascade nozzle assembly.

A thermal treatment system comprising at least one apparatus for thermally treating an object, the apparatus comprising: one platform or two substantially opposite platforms, where at least one of the platforms has at least one thermal means for heating or cooling of the object; and at least one of the platforms has fluid-mechanical means for supporting the object without contact. The platform has an active surface comprising at least one of a plurality of basic cells, each basic cell having at least one of a plurality of pressure outlets and at least one of a plurality of fluid-evacuation channels. At least one of the pressure outlets of each basic cell is fluidically connected through a flow restrictor to a high-pressure fluid supply, the pressure outlets providing pressurized fluid for maintaining a fluid-cushion between the object and the active-surface of the platform. The f low restrictor characteristically exhibits fluidic return spring behavior. Each of the evacuation channels has an inlet and outlet, for locally balancing mass flow for the basic cells.

A vertically-adjustable gantry assembly installation adapted for removal or placement of a train bridge-span of the type which spans and is supported by two piers, comprises a gantry assembly positioned on load-bearing first ground-support locations, the gantry assembly comprising a gantry and a ground-engaging vertical support and lift system, the vertical support and lift system adapted for supporting a combined weight of the gantry and a bridge span in at least one operational vertical position above respective bridge span support-surfaces of the piers including a position corresponding to a disembarking plane in which the leg portions are extended from a stowed position to an extent at least sufficient for the gantry assembly to self-liftoff the pre-installation conveyance system onto the first ground-support locations to effect the gantry assembly installation.

A mandrel segment loader provides a reliable means of assembling the segments of a large multi-piece mandrel designed for the lay-up of composite materials in the manufacture of large structures such as one-piece fuselage barrels for wide-body aircraft and can also be used for removing the mandrel from the finished fuselage barrel by disassembling the segments. The mandrel segment loader provides transport and multi-axis positioning for the segments, which may weigh as much as 25,000 pounds, with linear positioning resolution in the realm of 0.002 inch and rotational positioning resolution in the realm of 0.005 degree. The mandrel segment loader is also more generally useful as a material handling system that can perform many useful manufacturing functions, such as loading passenger floors into a fuselage barrel when assembling an aircraft. Self-locking grippers prevent accidental self-release of a load.

An article is conveyed from a load port 26a for a processing device 16 to a load port 26b for a processing device 20. An overhead buffer 28 is provided for each load port 26. An overhead travelling carriage 14 can freely deliver the article to the load port 26 or to the overhead buffer 28. The article can be conveyed directly between processing devices for different processes via inter-bay routes 6, 7. Only a short time is required for conveyance. It is unnecessary to provide stockers between the intra-bay routes 6, 7 and the inter-bay route 8.

The present invention discloses integral offshore platform building and hoisting process and special crane. The integral offshore platform building and hoisting process includes the first building integral lower platform part and upper platform modules at ground, the subsequent shifting the lower platform part to the sea dock, hoisting the upper platform modules onto the lower platform part and welding together. The special crane in great hoisting capacity includes four uprights for fixing on ground, crossbeams, and several hoisting mechanisms. The present invention has the features of high work efficiency, less risk and high platform quality.

A sensor device, for diagnosing a processing system, generally includes a support platform and one or more sensors mounted on the support platform. The sensor senses a condition, such as direction or inclination or acceleration in one or two axes, of the sensor device and outputs a signal indicative thereof, which is then sent to a transmitter, also mounted to the support platform, for wireless transmission of the signal to a receiver mounted on or near the processing system. The support platform generally has physical characteristics, such as size, profile height, mass, flexibility and/or strength, substantially similar to those of the substrates that are to be processed in the processing system, so the sensor device can be transferred through the processing system in a manner similar to the manner in which production substrates are transferred through the processing system.