444 results about "Vacuum pressure" patented technology

The invention relates to a bionic Al / SiC composite material with a three-dimensional network multilevel structure and a preparation method of the bionic Al / SiC composite material, and belongs to the technical field of new material preparation. According to the method, through the collaborative process of freeze casting and organic foam impregnation, the problem that in the prior art, the multilevel aperture and the complex network structure are difficult to cooperatively regulate and control is solved. The preparation method comprises the following specific steps: preparing tert-butyl alcohol-based ceramic slurry, impregnating the slurry with polyurethane foam, performing freeze casting molding, removing a solvent through freeze drying, performing high-temperature sintering to form SiC ceramic with a three-dimensional reticular hierarchical pore structure, and finally preparing the Al / SiC composite material through a vacuum pressure infiltration process. Wherein a sintering aid is added into the slurry, so that the sintering temperature is obviously reduced; the specification (40-60 ppi) of polyurethane foam, the solid phase content (20-30 vol.%) of slurry, the freezing speed (0-90 DEG C) and the content (5-20 wt.%) of a sintering aid are regulated and controlled. And the cross-scale collaborative design of micron-scale directional holes and millimeter-scale mesh holes is realized. The Al / SiC composite material prepared by the invention has the advantages that the compressive strength, fracture toughness and other properties are obviously higher than those of the traditional single-aperture porous ceramic, and the Al / SiC composite material is suitable for the fields of manufacturing and energy absorption of precise instruments, electronic packaging and optical devices.

The invention discloses a wafer bonding method, which comprises the following steps of: 1, providing a first wafer and a second wafer, the surface of the first wafer being provided with a microstructure with a high aspect ratio; step 2, cleaning the first wafer and the second wafer; step 3, performing vacuum drying treatment on the first wafer and the second wafer, wherein the vacuum pressure is controlled to be 0.1-10 Torr in the vacuum drying treatment process; step 4, carrying out pre-bonding on the first wafer and the second wafer to form a bonding body; and step 5, carrying out annealing treatment on the bonding body. Aiming at the problem of residual water in the pre-cleaning process in the bonding process of the micro-structure wafer with a high aspect ratio, the wafer is placed in a controllable vacuum environment, phase change boiling of liquid water under the condition of no heat input is realized, and the problem of high-temperature heat damage caused by an existing heating and baking method is effectively avoided.

A method of processing a substrate comprising: positioning the substrate on an upper surface of a substrate holder in a first chamber, wherein the substrate holder comprises one or more vacuum channels disposed at the upper surface and one or more electrodes disposed within the substrate holder proximate to the upper surface; while the substrate holder is within the first chamber, clamping and flattening the substrate to the substrate holder by applying a vacuum to the one or more vacuum channels; while the substrate is clamped to the substrate holder via the one or more vacuum channels, applying a voltage to the one or more electrodes to further clamp the substrate to the substrate holder with an electrostatic force; pumping out the first chamber to a vacuum pressure while continuing to clamp the substrate to the substrate holder with electrostatic force; while the substrate is clamped to the substrate holder by electrostatic force, transferring the substrate holder from the first chamber into a second chamber under vacuum conditions; and while the substrate holder is within the second chamber, maintaining the electrostatic force clamping the substrate to the substrate holder, and processing the substrate in the second chamber at a vacuum pressure.

The invention relates to the technical field of superconducting magnet manufacturing and insulation impregnation process optimization, and discloses a vacuum pressure impregnation process optimization method, device, equipment, medium and product, and the method comprises the steps: inputting a target porosity and a target permeability into an insulation layer homogenization fluid domain model to obtain a macroscopic homogeneous model; according to the macroscopic homogeneous model, a first corresponding relation between multiple technological parameters and the impregnation performance parameters under the boundary condition is determined through simulation, and the multiple technological parameters comprise at least two of the temperature, the glue injection parameter, the vacuum pressure, the resin viscosity and the resin curing kinetic parameter; and according to the plurality of first corresponding relations, optimizing the plurality of process parameters by taking the shortest filling time, the highest uniformity and the lowest residual bubble rate as optimization objectives to obtain an optimal process parameter combination of the vacuum pressure impregnation process. According to the method, the multiple process parameters are optimized, the multi-parameter optimization database can be established, and the optimal process combination scheme is obtained.

A method of processing a substrate is disclosed that comprises: transferring the substrate into a processing chamber and positioning the substrate on an upper surface of a substrate holder in the processing chamber, wherein the substrate holder comprises one or more vacuum channels disposed at the upper surface and one or more electrodes disposed within the substrate holder proximate to the upper surface; while the substrate holder is within the processing chamber, clamping and flattening the substrate to the substrate holder by applying a vacuum to the one or more vacuum channels; while the substrate is clamped to the substrate holder via the one or more vacuum channels, applying a voltage to the one or more electrodes to further clamp the substrate to the substrate holder with an electrostatic force; pumping out the processing chamber to a vacuum pressure while continuing to clamp the substrate to the substrate with the electrostatic force; and while the substrate is clamped to the substrate holder by the electrostatic force, processing the substrate in the processing chamber under vacuum conditions.

The invention relates to a multi-airflow alternating temperature calcining device for ultra-long nitride single crystal nanofibers. The multi-airflow alternating temperature calcining device comprises a reaction furnace; the mechanical vacuum pressure gauge and the exhaust port are arranged at the top of the reaction furnace; the reaction furnace chamber is arranged in the reaction furnace; the multi-reaction-zone graphite furnace body is arranged in the reaction furnace chamber and comprises a first low-temperature zone, a second high-temperature zone and a third low-temperature zone which are sequentially arranged from bottom to top and are not in contact with one another; the electromagnetic heating controller is arranged on the periphery of the multi-reaction-area graphite furnace body; the graphite boat is movably arranged in the multi-reaction-area graphite furnace body; the movable alumina crucible is arranged in the graphite boat; the graphite columns are arranged at the top and the bottom of the multi-reaction-zone graphite furnace body; the hydraulic cylinder is connected with the graphite column; and a control assembly. Compared with the prior art, the method has the advantages that the nitridation reaction process can be accurately controlled, the fiber quality and the crystal integrity can be improved, and independent and accurate temperature control can be realized.

A method of processing a substrate in a processing chamber that includes a primary volume and an auxiliary volume that can be environmentally sealed from the primary volume, the method including: transferring the substrate into the primary volume of the processing chamber and onto an upper surface of a substrate holder while the primary volume is at a vacuum pressure, wherein the substrate holder comprises one or more vacuum channels disposed at the upper surface and one or more electrodes disposed within the substrate holder proximate to the upper surface; moving the substrate holder within the processing chamber such that the substrate is moved from the primary volume to the auxiliary volume; sealing the auxiliary volume from the primary volume and increasing the pressure within the auxiliary volume; while the substrate is within the auxiliary volume, clamping and flattening the substrate to the substrate holder by applying a vacuum to the one or more vacuum channels; while the substrate is within the auxiliary volume and clamped to the substrate holder via the one or more vacuum channels, applying a voltage to the one or more electrodes to further clamp the substrate to the substrate holder with an electrostatic force; and while the substrate is clamped to the substrate holder by the electrostatic force, moving the substrate from the auxiliary volume back into the primary volume and processing the substrate in the primary volume at a vacuum pressure.

The invention discloses a self-adaptive vacuum filling and sealing device and method, and mainly solves the problems that the existing vacuum filling and sealing technology is difficult to realize accurate adaptation and optimal adjustment of multiple types of filling and sealing adhesives, and the filling and sealing consistency and the product reliability under complex working conditions are influenced. Comprising a vacuum box, a vacuum pump, a vacuum pressure digital display meter, a control panel and an air inlet valve, wherein a liquid flow meter is arranged at a glue injection and pouring outlet in the vacuum box, and instantaneous flow data of pouring sealant is detected and fed back in real time; a refrigerating device is arranged on the side wall to inhibit local temperature rise of the two-component pouring sealant caused by heat release of a chemical reaction; a heating device is arranged at the upper part to compensate the adverse effect of environment temperature reduction on the fluidity of the pouring sealant; and meanwhile, a fusion algorithm for self-adaptive adjustment of multiple types of pouring sealants is deployed in the microprocessor, so that self-adaptive temperature balance and regulation in the pouring process are realized. According to the invention, the automation degree and the response sensitivity of the potting process can be obviously improved, and the stability and the reliability of the potting process are improved.

The invention relates to the technical field of blade packaging suction tool control, and provides a milling cutter blade packaging suction tool control method and system.The method comprises the steps that the vacuum pressure establishing speed in a suction cup, fluctuation after the vacuum pressure is stabilized and response of the vacuum pressure to tentative movement of a mechanical arm are obtained and integrated, and suction state parameters are obtained; according to the adsorption state parameters, whether the adsorption state is in a critical unstable state or not is judged, and an adsorption state judgment result is obtained; starting a dynamic vacuum compensation mechanism when the adsorption state judgment result shows that the adsorption device is in a critical unstable state; through a dynamic vacuum compensation mechanism, in the blade carrying process of the mechanical arm, the adsorption force is enhanced by dynamically adjusting the power of a vacuum generator and / or applying auxiliary airflow. The milling cutter blade packaging device has the effect of improving the stability of milling cutter blade packaging operation.

The utility model relates to a room temperature vacuum pressure bonding device which comprises a vacuum cavity, the wall surface of the vacuum cavity is respectively provided with a first through hole and a second through hole, the first through hole is connected with a plasma generating assembly, the second through hole is connected with a vacuum generating assembly, and the vacuum generating assembly vacuumizes the interior of the vacuum cavity. Activating the wafer in the vacuum cavity through a plasma generation assembly; an air cylinder is fixed to the outer top wall face of the vacuum cavity, an output guide rod of the air cylinder extends into the vacuum cavity and is connected with the bonding pressing head, an operation table is fixed to the inner bottom wall face of the vacuum cavity, and an operation arm mechanism is installed in the vacuum cavity in a matched mode. By arranging the plasma generating assembly, the plasma beam can be emitted into the vacuum cavity, so that plasma bombardment activation is carried out on the wafer, the wafer can be bonded at the room temperature without heating the wafer, energy consumption is reduced, production time is greatly shortened, and production efficiency is effectively improved.

The invention relates to the technical field of semiconductor equipment, in particular to a heating disc and semiconductor equipment. In order to achieve the purpose, the invention provides the heating plate which comprises a plate body and a plate handle, a plurality of circles of concentric adsorption grooves and a plurality of radial adsorption grooves are formed in the disc body, and the multiple circles of concentric adsorption grooves are communicated through the radial adsorption grooves; a main air exhaust pipeline is arranged in the plate handle, and the main air exhaust pipeline is communicated with the radial adsorption groove; wherein the diameter of the outermost concentric adsorption groove is configured to enable the vacuum adsorption force generated by the heating disc to be greater than or equal to the minimum adsorption force required for flattening the wafer in the preset warping state. According to the method, the diameter of the outermost concentric adsorption groove is determined based on the thin plate bending theory and the vacuum pressure difference principle, stable adsorption and rapid flattening of the high-warpage wafer are achieved, the film deposition uniformity is remarkably improved, the process defect rate is reduced, and the wafer production yield is improved.

The invention discloses a vacuum-vertical shaft-electroosmosis combined dehydration test device for waste mud, and belongs to the technical field of geotechnical tests. The device is composed of a modular model cylinder, a direct-current power supply system, a measuring system, a vacuum pump and a vertical vacuum drainage body. The model cylinder is formed by connecting a top cylinder, a middle cylinder and a bottom cylinder through bolts and stacking sealing rings, the height can be flexibly adjusted, and good air tightness is kept. And the cylinder side is provided with a standard quick-plug interface, so that a vacuum meter and a pore pressure sensor can be conveniently connected. An anode electrode plate and a cathode electrode plate which are connected with a direct-current power supply are respectively arranged on the top surface and the bottom surface of the slurry, and the vertical vacuum drainage body penetrates through the bottom horizontal drainage layer and is fixed on the positioning frame to form a vacuum-vertical shaft combined drainage channel. The device effectively overcomes the problems of vacuum pressure transmission attenuation, overlong drainage path, non-uniform electroosmosis dehydration and the like through the coupling effect of vacuum, the vertical shaft and electroosmosis, can realize accurate research on different depth dehydration mechanisms of slurry, and has the advantages of rapid dehydration, simplicity and convenience in operation, environmental protection and high efficiency.

Complexly-curved glass articles and methods of forming the same are described herein. The glass articles described herein may be reformed via application of vacuum pressure thereto. The glass articles may comprise a first glass layer comprising a first non-developable curved shape defined by a first curved surface and a second curved surface. At least one of the first curved surface and the second curved surface comprises a surface area of 60.000 mm2 or more. A thickness of the glass articles may comprise a uniformity of + / −75 microns per 1000 mm2 of surface area. The non-developable curved shape may comprise a maximum compressive strain shape parameter, as measured between an imaginary central surface disposed between the first curved surface and the second curved surface and an imaginary surface, of greater than or equal to 3.0%.

The cyclical suction system generates an intermittent cyclically spaced cyclical suction pressure waveform of a vacuum pressure below atmospheric pressure and a positive pressure above the vacuum pressure. The system includes a flexible inlet tubing connected in fluid communication between a vacuum pump and a suction conduit. A positive pressure pulse generator mechanism intermittently cyclically applies an external force that compresses the segments of the flexible inlet tubing, thereby reducing the internal volume and displacing fluid that can be collected therein, thereby generating positive pressure pulses. Upon withdrawal of the applied external force, the flexible inlet tubing is configured to be able to be forced to return to an uncompressed state, thereby increasing the internal volume while reducing pressure therein until the vacuum pressure ultimately regenerates, thereby minimizing return time and maximizing cycle frequency.

To provide a method for manufacturing a vacuum pressure sensor, a device including the vacuum pressure sensor, and / or a system including the vacuum pressure sensor.SOLUTION: The vacuum pressure sensor can comprise a weld ring and a header element welded to the weld ring. The header element may comprise one or more header pins hermetically sealed to the header element, a piezoresistive sensing element coupled to the header element and electrically coupled to the one or more header pins, a corrugated diaphragm coupled to the header element and the weld ring, the corrugated diaphragm defining, with the header element, a cavity configured to contain a material, and a plastic spacer disposed within the cavity. The vacuum pressure sensor may comprise a protruding sharp edge or a substantially flat edge without corner breaks of at least a portion of the header element in physical contact with the metal plate.SELECTED DRAWING: Figure 1

The invention relates to a multi-stage vacuum generator applied to the field of vacuum generators, in the multi-stage vacuum generator, through the arrangement of a plurality of reducing vacuum shafts, traditional first-stage vacuum is improved into multi-stage vacuum, the Laval structure in a traditional vacuum generator is changed, the air inlet flow is reduced, and the air inlet efficiency is improved. Meanwhile, the vacuum degree and the vacuum flow are greatly improved, so that when the vacuum generator is used for carrying and moving materials, the stability is greatly improved, the probability that the materials fall off is reduced, meanwhile, through the arrangement of a plurality of sealing plugs and negative pressure holes, the vacuum pressure can be adjusted according to actual needs, and the adaptability is higher; in addition, in cooperation with the arrangement of a disassembly-free cleaning rope, the interior can be cleaned under the condition that only the outer sleeve is disassembled, and compared with the mode that the outer sleeve is completely disassembled for cleaning in the prior art, the situation that recombination is difficult after disassembly is effectively avoided, and then the utilization rate of the vacuum generator is effectively guaranteed.

This invention employs an interactive precipitation-vacuum combined surcharge preloading system and method for reinforcing deep soft soil foundations. The method involves deploying precipitation wells during vacuum preloading. By periodically switching the vacuum pumps of the precipitation wells on and off and connecting them to the atmosphere, an interactive precipitation effect is created between the precipitation wells and drainage boards. During the process of connecting the precipitation wells to the atmosphere, a vacuum pressure gradient is formed in the soil between the precipitation wells and drainage boards, thereby creating a hydraulic gradient between them. This significantly reduces the clogging effect of the drainage boards and enhances the precipitation efficiency of the precipitation wells. This treatment method offers significant improvements for the reinforcement of deep soft soil foundations, shortening the construction period and reducing construction and maintenance costs. Furthermore, the method is simple, easy to implement, and applicable to practical engineering projects.

This utility model discloses an active exhaust saturated oxygen therapy device, comprising an oxygen source, an oxygen therapy device, and an active exhaust structure connected sequentially via tubing. The oxygen therapy device includes a respirator, a saturated oxygen mask, and an elastic airbag connected sequentially. The active exhaust structure includes a vacuum tank and a vacuum pump. The elastic airbag has an inlet and an outlet. The saturated oxygen mask is connected to the inlet of the elastic airbag via tubing, and the outlet of the elastic airbag is connected to one end of the vacuum tank via tubing. The other end of the vacuum tank is connected to the vacuum pump. A vacuum pressure sensor is installed on the vacuum tank. This utility model solves the problems of reliance on chamber pressure for exhaust and uneven exhaust in existing technologies. This utility model can achieve uniform and efficient exhaust in low-pressure and zero-pressure environments. It can also effectively handle instantaneous high-flow exhalation, avoiding suffocation and improving the user experience for oxygen therapy personnel.

A biological particle counting system can include: an impedance particle counter comprising at least one sample aperture; a pump configured to pull particles through the at least one sample aperture of the impedance particle counter for counting, the pump producing a vacuum pressure; and a stepper motor configured to adjust a speed of the pump to substantially maintain the vacuum pressure.

The cyclical suction system produces an associated cyclical pressurization waveform of intermittent cyclical intervals of a vacuum pressure below atmospheric pressure and a positive pressure above the vacuum pressure. The system includes a vacuum pump that generates a vacuum pressure, a conduit connected in fluid communication to the vacuum pump, and a suction conduit connected in fluid communication to the conduit. Associated with the conduit is a positive pressure pulse generator mechanism that controls the vacuum pressure generated by the vacuum pump through the conduit via the vacuum pressure gating device and cyclically generates positive pressure pulses intermittently.

The present invention provides a cleaning method and apparatus for package structures. This cleaning method includes a negative pressure cleaning step, which includes adjusting the pressure in a chamber in which the package structure is placed to a predetermined vacuum pressure, rotating the package structure, and spraying a cleaning solution at a predetermined temperature onto the rotating package structure to perform negative pressure cleaning on the package structure. Here, the predetermined vacuum pressure is higher than the vaporization pressure of the cleaning solution at the predetermined temperature. By utilizing the principle that the surface tension of the cleaning solution decreases under negative pressure, the method promotes the inflow of the cleaning solution into the fine gaps of the package structure and prevents the cleaning solution from vaporizing before it reaches the part of the package structure to be cleaned.

A device for vacuum pressure testing at multiple angles, comprising: a winding and unwinding device; a device for hot pressing testing at an angle of inclination; a conveyor belt designed to transport at least one battery cell to be tested for hot pressing tests at various angles of inclination from the winding and unwinding device to the device for hot pressing testing at an angle of inclination, and to transport a tested battery cell to be tested back to the winding and unwinding device for collection; a drive device by which the conveyor belt is driven in such a way that it carries out transport at an angle between the winding and unwinding device and the hot press testing device; and a first vacuum chamber, which serves to accommodate the device for hot press testing at an angle of inclination.

The utility model discloses a vacuum press-fit mechanism for a liquid crystal display panel, which comprises a lower press-fit unit, an upper press-fit unit and a first linear driving module, and the upper press-fit unit and the first linear driving module are respectively connected onto a support frame. The lower pressing unit is located below the upper pressing unit and movably connected to the first linear driving module. The upper pressing unit comprises a first lifting module, a second lifting module, an upper pressing platform, a main pressing platform and a vacuum exhaust pipe. Wherein the first lifting module is used for driving the second lifting module and the upper pressing platform to ascend and descend, so that the upper pressing platform and a lower pressing platform in the lower pressing unit are attached in a hard-to-hard mode to form a closed cavity, meanwhile, the second lifting module can independently drive the main pressing platform to ascend and descend, the pressure applied to a base plate by the main pressing platform can be adjusted, and the pressure applied to the base plate by the main pressing platform can be adjusted. And the laminating pressure during vacuum pressure-maintaining laminating is adjusted, so that the situation that the upper substrate and the lower substrate are not tightly laminated due to too small pressure is avoided, and the situation that the substrates are damaged due to too large pressure is also avoided.

The invention provides a high vacuum flow testing device for an energy-saving pump, and the device comprises a vacuum testing cover, a vacuum pressure gauge, a thermal gas mass flowmeter, a gas inlet pipe, an operation watching mechanism, and a locking mechanism which is used for assisting the position movement of the operation watching mechanism and the fixation after the movement. The bottom end of the vacuum testing cover is provided with a special-shaped connector, the bottom end of the special-shaped connector is provided with an air inlet seat, and the side surface of the top end of the vacuum testing cover is fixedly sleeved with a first limiting ring and a second limiting ring which are arranged in parallel. Sealing rings are arranged at a plurality of key connecting parts of the device, and clean and standard sealing surface treatment is matched, so that external gas leakage interference can be effectively avoided, the stability of a vacuum environment is ensured, the test precision is improved, and the data reliability is guaranteed; the prompt area visually displays operation steps and matters needing attention, and operators can conveniently look up the operation steps and matters at any time.

This invention discloses a highly collapsible ceramic core with a dense outer surface and a porous core, and its preparation method. The ceramic core is composed of a porous core ceramic core and a densified inert coating on its outer surface. The porous core ceramic core comprises 42-51 wt% ceramic powder, 35-40 wt% hollow glass microspheres, 4-9 wt% fiber, 3-7 wt% graphite, and 2-8 wt% starch. The densified inert coating comprises 67-75 wt% sol and 25-33 wt% nanoparticles. The preparation method includes the following steps: preparing a porous core ceramic core and a densified inert coating slurry; impregnating the porous core ceramic core with the densified inert coating slurry under segmented vacuum pressure using a gradient pressure reduction method; and then sintering it in a heat treatment furnace. The ceramic core prepared by this invention exhibits excellent collapsibility, which can solve the problem of blade thermal cracking. The inert coating avoids interfacial reactions, and the porous core structure facilitates efficient core removal.

The application discloses a kind of light car laminated glass and preparation method thereof, belong to laminated car glass production technical field.The light car laminated glass is bent thick glass, adhesive film layer, flat thin glass in turn from bottom to top, when vacuum pressure is covered, thin glass needs to bend the same curvature as thick glass, flat thin glass is provided with groove around.The thick glass is combined with thin glass to reduce the mass of laminated glass as a whole, realize light weight;Thin glass exists groove around, by glass and gap, and the shape of gap is isosceles triangle;The thin glass of the application is provided with groove around in car laminated glass, ensure the space of bending deformation when vacuum pressure is covered, not easy to break, improve production yield, improve the light distortion of finished product simultaneously.

The invention discloses aluminum oxide foamed ceramic for casting and filtering molten aluminum and a preparation method of the aluminum oxide foamed ceramic, and belongs to the technical field of aluminum oxide ceramics. The method comprises the following steps: firstly, carrying out plasma activation on polyurethane foam, then immersing the polyurethane foam into a composite modifier system consisting of a main modifier, an auxiliary modifier and a catalyst, and sequentially carrying out first-stage grafting and second-stage cross-linking reaction to introduce carboxyl-hydroxyl composite functional groups and a heterocyclic cross-linking structure to the surface of the foam, so as to obtain a modified precursor; uniformly coating the precursor with aluminum oxide ceramic slurry by adopting a vacuum-pressure alternate impregnation method, and finally drying and sintering at high temperature to obtain a finished product. By constructing a strong interface bonding layer, the adhesion uniformity and firmness of ceramic slurry on an organic precursor are remarkably improved, the aluminum oxide foamed ceramic which is compact in framework, few in defect, high in mechanical strength, excellent in filtering performance and resistant to molten aluminum erosion is obtained, and the aluminum oxide foamed ceramic is suitable for molten liquid purification of high-end aluminum castings.

The application relates to the technical field of molecular distillation equipment, and discloses a vacuum pressure system of a multi-stage molecular distillation equipment, which comprises an outer pipe connecting end, an inner pipe connecting end, a distiller and a monitoring mechanism; the monitoring mechanism is arranged in the interlayer of the outer pipe connecting end and the inner pipe connecting end, is used for monitoring the sealing condition of the outer side of the gap of the inner pipe connecting end, and seals the leakage point after the leakage point appears, and informs the personnel to repair. The vacuum pressure system of the multi-stage molecular distillation equipment is characterized in that the monitoring mechanism is arranged in the interlayer of the outer pipe connecting end and the inner pipe connecting end, the attaching sheet of a plurality of sealing components is annularly wrapped around the inner pipe connecting end, and the protection shell is filled with gas-expanding fluorine rubber particles; when the leakage point appears, the attaching sheet is firstly moved to the leakage point to preliminarily seal the leakage point, and then the filler is expanded to further press the attaching sheet to tightly adhere to the leakage point, so that the problem that the connecting end is prone to generating the leakage point and the product quality is reduced in the prior art is solved.

A processing apparatus for a thermal treatment of a workpiece is presented. The processing apparatus includes a processing chamber, a workpiece support disposed within the processing chamber, a rotation system configured to rotate the workpiece support, a gas delivery system configured to flow one or more process gases into the processing chamber from the a first side of the processing chamber, one or more gas exhaust ports for removing gas from the processing chamber such that a vacuum pressure can be maintained, one or more radiative heating sources disposed on the second side of the processing chamber, one or more dielectric windows disposed between the workpiece support and the one or more radiative heating sources, and a workpiece temperature measurement system configured at a temperature measurement wavelength range to obtain a measurement indicative of a temperature of a back side of the workpiece.

The invention provides a pressure switch, and relates to the technical field of pressure control. The pressure switch comprises a shell, a switch assembly and a motion assembly. The movement assembly is arranged on the inner wall of the shell and divides the interior of the shell into a first chamber and a second chamber which are isolated from each other; the first chamber is an atmospheric pressure chamber, and the second chamber is a negative pressure chamber of equipment to be tested; the switch assembly is fixedly arranged on the inner wall of the first cavity; in the axial direction perpendicular to the mounting plane of the switch assembly, the movement assembly moves between the triggering position and the non-triggering position of the switch assembly based on the pressure difference between the first cavity and the second cavity. The motion assembly is in contact / non-contact with the switch assembly based on the motion position change, and the switch assembly generates a switch signal based on contact / non-contact. According to the invention, the chamber pressure of the to-be-detected equipment is detected based on the atmospheric pressure, the change of negative pressure in the chamber can be dynamically monitored and fed back based on the change of the atmospheric pressure, and a relative vacuum pressure switch is realized.