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491 results about "Low vacuum" patented technology

Low vacuum, also called rough vacuum or coarse vacuum, is vacuum that can be achieved or measured with rudimentary equipment such as a vacuum cleaner and a liquid column manometer. Medium vacuum is vacuum that can be achieved with a single pump, but the pressure is too low to measure with a liquid or mechanical manometer.

Low-vacuum circulating water heating dynamic load matching method based on AI regulation and control

The invention discloses a low-vacuum circulating water heating dynamic load matching method based on AI regulation and control, and the method comprises the following steps: step S100, multi-source data real-time collection: building thermal environment parameters are synchronously collected through a temperature sensor array, a vacuum pressure transmitter, a flowmeter and an environment monitoring unit which are deployed in a distributed manner; according to the method, the control period is compressed to the minute level, compared with traditional PID control, the response speed is increased by several times, the indoor temperature can be controlled more accurately, and meanwhile the failure rate of equipment is reduced. According to the sudden weather coping mechanism, heat supply strengthening can be started 30 minutes ahead of time under extreme weather such as snowstorm weather, and the stability of the system is ensured. The method is characterized in that the prediction advantage of deep learning and the optimization capability of model prediction control are deeply combined, and the control problem of multivariable strong coupling of the low vacuum system is solved through a verification system of multi-source data fusion and virtual-real combination.
Owner:华能吉林发电有限公司农安生物质发电厂

Welding seam detection device for magnetic suspension traffic low-vacuum pipeline

The invention belongs to the technical field of welding seam detection, and particularly relates to a welding seam detection device for a magnetic levitation traffic low-vacuum pipeline, which is characterized in that a helium mass spectrum leakage detection structure is arranged on the outer side of the vacuum pipeline, a helium inflation structure is arranged on the inner side of the vacuum pipeline, and a rolling structure is arranged at the bottom end of the vacuum pipeline and comprises a third base; supports are symmetrically fixed to the two sides of the top face of the third base, V-shaped frames are hinged to each support in a bilateral symmetry mode, rollers are connected between the ends of the two V-shaped frames, the two ends of a rotating shaft of each roller penetrate through the two V-shaped frames respectively and are rotationally connected with the contact positions of the two V-shaped frames, one end of each roller penetrates through the corresponding V-shaped frame and is fixedly provided with a first gear, and protective covers are fixed to the end faces of the V-shaped frames; a gear motor is fixedly installed on the outer end face of the protective cover, an output shaft of the gear motor penetrates through the protective cover to fix a second gear, the second gear is meshed with the first gear, and the two rolling structures are arranged in a mirror symmetry mode. The device does not need to lay a leak detection tool around a welding seam, facilitates leak detection, improves leak detection efficiency, and improves leak detection accuracy.
Owner:SHANXI ERJIAN GRP CO LTD +2

Balancing machine special for turbine rotor and balance debugging method

The invention relates to the technical field of turbine rotor balance debugging, in particular to a balancing machine special for a turbine rotor and a balance debugging method. Comprising a vacuum chamber, the vacuum chamber and the platform form a sealed space, a vacuum adjusting device connected with a processing and control unit is installed in the vacuum chamber, and a motor, a drilling weight removing device, a vibration detecting device and a clamp are all arranged in the vacuum chamber; the vacuum adjusting device comprises a sensor and a vacuum pump, and the vacuum pump is communicated with the vacuum chamber through a pipeline; and the sensor and the vacuum pump are respectively connected with the processing and control unit. The vacuum degree in the vacuum chamber can be adjusted by arranging the vacuum pump and the sensor, balance debugging can be carried out under high rotating speed and high vacuum and low rotating speed and low vacuum, and the balance debugging is not influenced by airflow when the balance debugging is carried out under the high rotating speed.
Owner:KYKY TECH

Vacuum pumping system and method

The invention discloses a vacuum pumping system and method. The vacuum pumping system comprises a cavity, at least one low-vacuum pumping pump set, at least one high-vacuum pumping pump set, a first pipeline and a second pipeline, and the low-vacuum pumping pump set communicates with the cavity through the first pipeline and the second pipeline; the low-vacuum air extracting pump set is communicated with the cavity through a first pipeline, the high-vacuum air extracting pump set is communicated with the cavity through a second pipeline, the controller is electrically connected to the low-vacuum air extracting pump set and the high-vacuum air extracting pump set, the controller sequentially controls on-off of the low-vacuum air extracting pump set and the high-vacuum air extracting pump set, and the low-vacuum air extracting pump set can extract pressure in the cavity to be lower than 0.1 Torr; the system comprises a low-vacuum air extracting pump set and a high-vacuum air extracting pump set, and the low-vacuum air extracting pump set and the high-vacuum air extracting pump set can be used for extracting the pressure in the cavity to be lower than 0.1 Torr and the pressure in the cavity to be in an ultrahigh vacuum state respectively. The grading air exhaust mode can more effectively improve the air exhaust efficiency and reduce the air exhaust time; and the equipment can be prevented from being in a high-load state for a long time, so that the service life of the equipment is prolonged.
Owner:WUXI ZHONGKE DEXIN SENSING TECH CO LTD

Composite material differential pressure coating machine

ActiveCN119898052ALow vacuumHeating system
The invention discloses a composite material differential pressure coating machine, which belongs to the technical field of coating machines, and comprises a rack, a sliding table mounted on the rack, a lower vacuum cover fixed on the sliding table, a mold assembly mounted at the bottom of the inner side of the lower vacuum cover, a lifting device connected to the mold assembly, and an upper vacuum cover mounted on the upper side of the lower vacuum cover, a heating system is mounted in the upper vacuum cover, the upper vacuum cover and the lower vacuum cover are matched to form a forming cavity, the forming cavity is connected with a pressure difference generating system, and a workpiece positioning mechanism for fixing a workpiece to be coated is mounted at an opening in the lower side of the upper vacuum cover; the mold assembly comprises a supporting plate, a supporting frame is formed in the middle of the supporting plate, a plurality of mold units are installed in the supporting frame in an array mode, the upper surfaces of the multiple mold units are matched to form a coating working face for a workpiece, and the bottoms of the mold units are connected to the supporting frame through vibration cylinders. And the coating quality of the workpiece surface is improved.
Owner:SHENZHENXINTAIMING MASCH EQUIMENT CO LTD

Multi-piece golf club head

A method of making a golf club head includes interposing bonding tape between a first piece and a second piece of the golf club head such that the first piece is temporarily adhered to the second piece via a tackiness of the bonding tape. The method additionally includes positioning the first piece, the second piece, and the bonding tape, interposed between the first piece and the second piece, in a vacuum bag, and reducing a pressure within the vacuum bag, relative to a pressure external to the vacuum bag, such that the vacuum bag collapses onto the first piece and the second piece and compresses the bonding tape between the first piece and the second piece. The method also includes heating the bonding tape, at least to a curing temperature of the bonding tape, when the pressure within the vacuum bag is reduced.
Owner:TAYLOR MADE GOLF CO INC

Additive manufacturing equipment and method for magnesium alloy liquid continuous injection molding annular part

The invention provides additive manufacturing equipment and method for a magnesium alloy liquid continuous injection molding annular part, and mainly relates to the field of metal material additive manufacturing equipment. The invention discloses additive manufacturing equipment and method for a magnesium alloy liquid continuous injection molding annular part, and the additive manufacturing equipment comprises a crucible smelting assembly arranged in an upper vacuum cavity, a liquid injection printing assembly which is arranged in a lower vacuum cavity and communicates with the crucible smelting assembly, and a controller. A three-dimensional motion platform located below the liquid jet printing assembly is arranged in the lower vacuum cavity, and an annular mold with an opening in the top face is arranged at the top of the three-dimensional motion platform. The device has the beneficial effects that the hollow graphite ring piece and the nozzles distributed in an annular array mode are adopted, uniform spraying of magnesium liquid to the annular mold is achieved, the forming efficiency and the quality stability are improved, and the device is particularly suitable for manufacturing large-diameter annular pieces.
Owner:SHANGHAI JIAOTONG UNIV +1

Sensitization type pressure sensor based on weak coupling resonator

The invention provides a weakly coupled resonator-based sensitization pressure sensor, which comprises a weakly coupled resonator and a heat conduction main body, the weakly coupled resonator is connected with the heat conduction main body, the heat conduction main body is arranged in a bending and circling manner, each main resonator of the weakly coupled resonator is made of different materials, and each main resonator is made of different materials. Each main resonator and the affiliated heat conduction main body are made of the same material, the pressure sensor organically combines the Pirani vacuum gauge and the weak coupling resonator, the sensitive stress of the weak coupling resonator comes from the thermal stress generated by the heat conduction main body, rigidity disturbance is provided for the weak coupling resonator, the measurement of vacuum pressure is realized, and the measurement precision is improved. According to the Pirani vacuum gauge, the measurement lower limit is expanded, the comprehensive performance is improved, on the premise that the test range of the Pirani vacuum gauge is not sacrificed, the same sensitive core can measure medium and low vacuum pressure, and the measuring range can be expanded to be close to the atmospheric pressure.
Owner:AEROSPACE INFORMATION RES INST CAS

Device for detecting and cleaning particles on surface of optical element

The invention provides an optical element surface particle detection and cleaning device, which comprises a low-vacuum laminar flow environment module, a particle detection module, a particle cleaning module and a displacement table module, and is characterized in that the low-vacuum laminar flow environment module comprises a working chamber and a laminar flow low-vacuum control unit; the particle detection module comprises a first collecting lens, a second collecting lens, a laser emission assembly and a laser feedback detection assembly; the first collecting lens, the second collecting lens and the laser feedback detection assembly are respectively arranged in the working chamber; the particle cleaning module comprises a pulse laser emitting assembly, a beam expander and a convergent lens, and the beam expander and the convergent lens are arranged in the working chamber; and the displacement table module is arranged in the working chamber and is used for bearing the optical element to move in the working chamber so as to realize detection and cleaning of particulate matters on the optical element. According to the invention, in-situ detection and cleaning of the optical element can be realized in the semiconductor equipment, and the problem of secondary pollution after cleaning can be avoided.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI LTD

Vacuum pump

The utility model provides a vacuum pump, and belongs to the field of vacuum pumps. The vacuum pump comprises a pump body, a driving piece and a plurality of driving handles, the driving piece comprises a machine body and a rotating shaft, the two ends of the rotating shaft are located outside the machine body, the machine body is located in the pump body and connected with the pump body, and the driving handles are connected with the rotating shaft and the pump body; and the other part of the driving handles is connected with the other end of the rotating shaft. The two ends of a rotating shaft of the driving piece extend out of the machine body and are connected with the pump body through driving handles correspondingly, so that when the driving piece operates, the rotating shaft rotates, and the pump body works under the combined action of the driving handles located on the two sides of the machine body. Due to the fact that loads are arranged at the two ends of the rotating shaft, rotation of the rotating shaft is more stable, vibration generated in the operation process of the driving piece is smaller, and vibration generated in the operation process of the vacuum pump can be reduced.
Owner:SHENZHEN HUKE INSTR CO LTD

Flattening device with dust removal structure for laser paper processing

The utility model discloses a laser paper processing flattening device with a dust removal structure, which belongs to the technical field of laser paper production and comprises a shell. The dustproof assembly comprises a draught fan located at the top of the shell, a first air pipe is arranged in the draught fan, the other end of the first air pipe is fixedly connected with an air blowing plate, and a dust suction box is arranged on the back face of the shell; according to the dust collection device, when the winding drum is replaced, external dust enters the shell, at the moment, the fan and the dust collection box are started, the working fan conveys air into the air blowing plate through the first air pipe, the air is blown out through the air blowing plate, and the dust entering the shell is blown to the dust collection plate below; and the working dust collection box sucks dust blown to the dust collection plate into the dust collection box through a second air pipe, so that the problem that when the door is opened to be replaced, external dust enters the shell and falls to corners in the shell, and the dust cannot be cleaned up through a dust collection device in the shell is solved.
Owner:YUNNAN JIUAO PACKAGING MATERIAL CO LTD

Vacuum system for precisely controlling gas density of nano dose detector

The invention discloses a vacuum system for precisely controlling the gas density of a nano-dose detector, and belongs to the field of ionizing radiation nano-dose measurement. The system comprises a vacuum pump set unit, a vacuum degree detection unit and a logic control unit. According to the requirements of the nano dose detector for the vacuum degree and the gas concentration, the working air pressure is within 1 Torr and the air pressure control precision reaches 0.01 Torr through cooperation of a pump set in a vacuum system and PLC logic control and data monitoring. The system can provide gas for generating ionizing radiation and a low-vacuum environment for the nano-dose detector, and ensures that a measurement signal of the nano-dose detector is accurate and stable. The ionization degree of the nano dose detector depends on the vacuum degree in the cavity, and the vacuum degree of the cavity depends on the concentration of gas in the sensitive volume. The method has the advantages of high precision, high accuracy, high reliability and the like. According to the invention, the vacuum environment of the nano-dose detector is constant, the sensitive gas is single, and the precise measurement of the nano-dose detector can be supported.
Owner:NATIONAL INSTITUTE OF METROLOGY CHINA

Neutral beam injection device multi-stage isolation high vacuum obtaining system and control method

The invention discloses a multi-stage isolation high vacuum obtaining system of a neutral beam injection device and a control method, and relates to the field of nuclear fusion Tokamak vacuum pumping design. The low-temperature pump unit comprises a plug-in low-temperature pump in a neutral beam vacuum chamber, and the plug-in low-temperature pump is used for refrigerating and cooling liquid nitrogen and liquid helium to adsorb gas to realize vacuum pumping; the low-temperature pump preceding-stage air extractor unit comprises a molecular pump unit, a roots pump unit and a mechanical pump unit; an inlet of the molecular pump set is connected with the neutral beam vacuum chamber through a gate valve, and an outlet of the molecular pump set is connected with an inlet of the roots pump set through a forestage valve. An inlet of the roots pump set is connected with the neutral beam vacuum chamber through a preceding stage valve and a pre-pumping valve, and an outlet of the roots pump set is connected with the mechanical pump set through the preceding stage valve. By adopting a multi-stage vacuum shielding technology and a step-by-step start-stop strategy, step-by-step transition from low vacuum to high vacuum and from high vacuum to low vacuum can be efficiently, stably and reliably realized, and an air extractor unit and a vacuum environment are protected from being polluted.
Owner:SOUTHWESTERN INST OF PHYSICS

Method, device, device, medium and product for cleaning a device

The invention provides a method, a device, equipment, a medium and a product for cleaning equipment, and relates to the technical field of cleaning equipment, the cleaning equipment comprises a floor brush assembly with an adjusting mechanism, and the position of the adjusting mechanism is determined based on the type of dirt on a cleaning surface and / or the material of the cleaning surface. Different positions of the adjusting mechanism correspond to different vacuum degrees in the floor brush assembly; the method includes: detecting the material of a cleaning surface; after it is determined that the material is the carpet, the adjusting mechanism is controlled to be located at the first position and waits for the preset time period, and during the preset time period, the floor brush motor is controlled to clean the cleaning face at the first rotating speed, so that after it is detected that the carpet exists, the vacuum degree is preferentially reduced by controlling the adjusting mechanism which is simpler and faster in response; and in a period of waiting for a period of time, the rotating speed of the floor brush motor is not increased, so that unnecessary output of the floor brush motor is prevented from being increased, and energy waste is reduced while effective cleaning is improved.
Owner:DREAME TECHNOLOGY (SUZHOU) COLTD

Energy-saving vacuum cabinet and use method thereof

The invention discloses an energy-saving type vacuum cabinet and a using method thereof, and relates to the technical field of vacuum, the energy-saving type vacuum cabinet comprises a mounting cabinet body, a first partition plate is fixedly mounted in the mounting cabinet body, a second partition plate is fixedly connected in the mounting cabinet body, a sealing plate is mounted on the front surface of the mounting cabinet body, and the sealing plate is used for sealing a vacuum chamber a and a vacuum chamber b respectively; the vacuum pump set is installed at the bottom of an inner cavity of the installation cabinet body, the communicating pipe set is arranged among the vacuum pump set, the vacuum cavity a and the vacuum cavity b, and the vacuum cavity a and the vacuum cavity b form a negative pressure auxiliary source through the communicating pipe set. According to the invention, by utilizing the cooperative use mode of the mounting cabinet body, the vacuum pump set and the connecting pipe set, when the vacuum pump set performs vacuum negative pressure operation on the vacuum chamber a or the vacuum chamber b, the vacuum chamber a and the vacuum chamber b can be a negative pressure auxiliary source under the action of the connecting pipe set, so that the energy consumption during the operation of the vacuum pump set is reduced, and the energy consumption is further reduced.
Owner:SHANGHAI PUYAN MASCH EQUIP CO LTD

Electrostatic vacuum plate structure and filling type electrostatic vacuum plate

The utility model discloses an electrostatic vacuum plate structure and a filling type electrostatic vacuum plate, and relates to the field of vacuum plates, the electrostatic vacuum plate structure comprises an upper vacuum plate and a lower vacuum plate, the space between the two vacuum plates is in a vacuumized state to form a vacuum cavity, and the two ends of the vacuum cavity are subjected to heat edge sealing treatment; the upper vacuum plate, the lower vacuum plate and the sealing edges at the two ends are attached through flexible insulating aluminum plastic films containing PTFE layers; inner-layer aluminum foils are pasted on the upper vacuum plate and the lower vacuum plate in the vacuum cavity respectively, the two inner-layer aluminum foils sense same-polarity negative static electricity, external air pressure is resisted through electrostatic repulsive force, and the thickness of the vacuum cavity is maintained to be in the preset size. Compared with a traditional glass fiber vacuum plate, heat transfer of an inner core material is avoided, the heat conductivity is reduced, the thickness of the vacuum plate can be reduced to be within 0.5 mm, high-performance heat-insulation ultrathin performance is achieved, a hard plate is changed into a flexible film material, and the fitting adaptability of a product on different surfaces is greatly improved.
Owner:KONGYIN TECHNOLOGY (CHANGSHU) CO LTD

Plasma-assisted surface activation method

The invention discloses a plasma-assisted surface activation method. The method comprises the following steps: placing a material matrix in a reaction cavity, vacuumizing, introducing oxygen and inert gas, exciting a radio frequency power supply and a microwave power supply to form multi-frequency composite plasma, and treating the material. The physical bombardment of the radio frequency plasma and the chemical activation of the microwave plasma have a synergistic effect, and deep cleaning and efficient modification of the surface of the material are realized in a low-vacuum environment. The surface water contact angle of the treated material is reduced to 35 degrees or below, the adhesive force of a coating reaches 0-1 level, the tensile shear strength is improved to 22.5 MPa or above, the problems that a traditional surface treatment method is unstable in effect and insufficient in modification depth are effectively solved, and the surface treatment method has the outstanding advantages of being high in treatment efficiency, uniform and lasting in modification effect, environmentally friendly and the like.
Owner:SHANGHAI XUANDIAN NEW MATERIALS CO LTD

Long stator structure of linear motor

The utility model relates to the technical field of motor structures, in particular to a long stator structure of a linear motor, which comprises two identical stator module units, and each stator module unit comprises a stator core, a winding unit and a plurality of combination keys. The stator iron core is of a cuboid structure, a wire embedding groove unit is formed in the front side of the stator iron core, the winding unit comprises a plurality of stator coils, all the stator coils are evenly distributed in the wire embedding groove unit side by side in a snakelike mode, and the ends of the stator coils are integrally sealed in a plastic mode. All the combination keys are fixed on the rear side of the stator iron core at intervals along the length direction of the stator iron core; the stator module units take the surfaces on which the stator coils are arranged as working surfaces, and the working surfaces of the two stator module units are opposite to each other. According to the technical scheme, modular design is adopted, the structure is simple, and compared with the prior art, the air resistance is small and ultra-high-speed operation can be achieved when the air conditioner runs in a low-vacuum environment.
Owner:DONGFANG ELECTRIC MACHINERY

Control method, device, equipment and medium of stepped cascade electric adjusting valve

The invention relates to a control method, device, equipment and medium for stepped cascade electric adjusting valves, and belongs to the technical field of centrifugal separation of isotopes. The method comprises the steps that a preset pressure value and an actual pressure value corresponding to each electric adjusting valve are obtained; determining a pressure deviation value based on the preset pressure value and the corresponding actual pressure value; determining a pressure deviation change rate of the pressure deviation value based on the pressure deviation value; the pressure deviation value and the pressure deviation change rate serve as input values to be input into a fuzzy controller, output values are obtained, and the output values comprise # imgabs0 # and # imgabs1 #; superposing the output value with a set value of a controller to obtain an adjustment parameter; and the opening degree of each electric adjusting valve is adjusted based on the adjusting parameters, so that when the actual pressure value of one unit changes, the fuzzy controller adjusts the opening degrees of the electric adjusting valves of the other units according to the adjusting parameters, and the medium pressure in the low-vacuum medium environment is controlled. The pressure control device has the effect of effectively controlling the medium pressure.
Owner:中核第七研究设计院有限公司

Vacuum type heating structure for differential pressure coating machine

ActiveCN120134605AThin membraneLow vacuum
The invention discloses a vacuum type heating structure for a differential pressure coating machine, which belongs to the technical field of coating machines and comprises a lower vacuum cover, an upper vacuum cover mounted on the upper side of the lower vacuum cover, and a vertical displacement driving device for driving the upper vacuum cover to be matched with the lower vacuum cover, a lower opening corresponding to the upper opening is formed in the lower side of the upper vacuum cover, the upper vacuum cover and the lower vacuum cover are both square, a coating film is mounted at the lower opening, and the upper opening and the lower opening are completely consistent in size and shape and can be overlapped. A heating assembly is installed in the upper vacuum cover, a heating system is used for heating a coating film to soften the coating film, coating of materials is facilitated, the uniformity of a coating layer is guaranteed, and the upper vacuum cover and the lower vacuum cover are matched to form a forming cavity. The shape and the position of the radiation area can be adjusted so as to meet the heating requirements of diversified products, and meanwhile structural reliability and energy consumption optimization are considered.
Owner:SHENZHENXINTAIMING MASCH EQUIMENT CO LTD

Simulated lunar soil preparation system with low water content and known H isotope

The invention discloses a low water content and H isotope known simulated lunar soil preparation system, which comprises a standard water source sample pipe, a vaporization pipeline, a sample chamber, a vacuum pipeline and a dry nitrogen pipeline, the standard water source sample pipe is connected with the gas inlet side of the sample chamber through the vaporization pipeline, the gas outlet side of the sample chamber is connected with the vacuum pipeline, and the dry nitrogen pipeline is connected with the sample chamber through the vaporization pipeline. The vaporization pipeline is used for vacuumizing to a set vacuum degree, comprises a temperature-controlled buffer chamber, a first pipeline, a mixing chamber and a second pipeline, and is used for inhibiting low vacuum and H isotope fractionation; a first pressure gauge is arranged on the gas inlet side of the sample chamber, a second pressure gauge is arranged on the gas outlet side of the sample chamber, and when the pipeline pressure of the gas inlet side and the gas outlet side of the sample chamber is monitored to be stable, it is judged that the steam and soil combination process is finished. The method can be used for preparing the simulated lunar soil with low water content and known H isotope.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

Vacuum sealing machine with characters

The utility model belongs to the technical field of vacuum sealer products, and particularly discloses a vacuum sealer with characters, which comprises a base and an upper cover, the upper cover is movably hinged with one side of the base, a vacuum pump, a control circuit board and a power line are arranged on the base, and an upper vacuum cavity and a lower vacuum cavity are arranged at corresponding positions of fitting surfaces when the base and the upper cover are closed. Sealing rubber rings are arranged on the periphery of the upper vacuum cavity and the periphery of the lower vacuum cavity respectively, a sealing heating piece assembly is arranged on the front side of the base, a heat sealing strip is arranged at the corresponding position of the front side of the upper cover, a plurality of character belts and character belt driving devices are arranged in the upper cover / base, and an elastic character hot stamping device is arranged at the corresponding position in the base / upper cover. The vacuum sealing machine is simple in structure, convenient to use, light and miniaturized in appearance, capable of achieving hot stamping of various characters, clear in handwriting, high in heating efficiency, capable of synchronously completing sealing and hot stamping of the characters, capable of being disassembled without additional tools, convenient to clean and maintain, long in service life, good in stability and low in manufacturing cost.
Owner:NINGBO KEDLY APPLIANCE IND

Vacuum preloading device for soft soil foundation

The utility model provides a vacuum preloading device for a soft soil foundation, which belongs to the technical field of foundation treatment and comprises a plurality of drain boards, a vacuum tube, a water-gas separator, an air pump and a water pump. The vacuum pipe is connected with the drainage plate; the water-gas separator is provided with an inlet, a water outlet and an exhaust port, and the inlet is connected with the vacuum pipe; the air pump is connected with the exhaust port so as to exhaust gas in the water-gas separator; and the water pump is connected with the water outlet so as to discharge water in the water-gas separator. The protection plate is arranged at the top end of the drainage plate, so that the possibility that the vacuum sealing film is punctured by the drainage plate can be reduced; by arranging the water-gas separator, the air pump and the water pump, water-gas separation can be carried out on a water-gas mixture sucked out by the vacuum pipe, the special air pump is used for exhausting, the special water pump is used for draining water, the possibility that construction is stopped due to damage of the air pump and the water pump is reduced, and the vacuum preloading efficiency can be guaranteed and improved.
Owner:MCC GEOLOGICAL EXPLORATION & GEOTECHNICAL ENG CO LTD

Method for wavefront measurement of a projection system

The invention relates to a method for wavefront measurement of a projection system (20) for microlithography, comprising an actively temperature-controlled support frame (26) with optical elements (Mi) and a sensor frame (29) mechanically and thermally decoupled from the support frame (26), comprising the steps of: placing the projection system (20) in a vacuum chamber (32), lowering the pressure (p) in the vacuum chamber (32) to establish a vacuum in the vacuum chamber (32), and performing at least one wavefront measurement on the projection system (20) after establishing the vacuum in the vacuum chamber (32). In this method, to improve heat transfer from the support frame (26) to the sensor frame (29), the pressure (p) is maintained within a predetermined pressure range (Δp) for a predetermined time period (Δt) before the vacuum is established, and the support frame (26) is actively heated for at least the predetermined time period (Δt).
Owner:CARL ZEISS SMT GMBH

Motor protection device in vacuum environment

A motor protection device in a vacuum environment belongs to the technical field of wind tunnel tests. According to the invention, the problem that the permanent damage to the motor is easily caused if the vacuum injection time in the hypersonic wind tunnel is long at present is solved. The device comprises a motor protection shell, quick plugs, an air inlet pipe and a measurement and exhaust pipe, a motor is installed in the motor protection shell, the two quick plugs are installed on the motor protection shell, the air inlet pipe is communicated with the interior of the motor protection shell through one quick plug, and the measurement and exhaust pipe is communicated with the interior of the motor protection shell through the other quick plug. According to the motor protection device in the vacuum environment, on the premise that the atmosphere does not leak into a wind tunnel environment, the service life of the motor in the vacuum environment is prolonged, and the fault rate of the motor in the vacuum condition is reduced.
Owner:AVIC SHENYANG AERODYNAMICS RES INST

Two-stage ultrahigh vacuum differential air extractor based on low-temperature air extraction cold plate

The invention discloses a two-stage ultrahigh vacuum differential air extractor based on a low-temperature air extraction cold plate, which comprises a vacuum container, a central partition plate is mounted in the vacuum container, and the central partition plate divides the vacuum container into a first-stage differential area and a second-stage differential area; a first-stage air extraction cooling plate and a second-stage air extraction cooling plate are mounted in each of the first-stage differential region and the second-stage differential region and are used for extracting air in the differential region so as to adjust the vacuum degree of the differential region; a flange connector is arranged on the side portion of the vacuum container, a GM small refrigerator is installed in the flange connector, and the GM small refrigerator is connected with the first-stage air pumping cooling plate and the second-stage air pumping cooling plate and used for providing a low-temperature environment for the vacuum container. The differential air extractor has the beneficial effects that the differential air extractor can be communicated with other low-vacuum environment equipment, and an ultrahigh vacuum environment can be obtained in a secondary differential area after refrigeration is completed; in addition, the differential air extractor is simple in structure, small in size and free of air vibration interference in the using process.
Owner:BEIJING INST OF SPACECRAFT ENVIRONMENT ENG +1

Vacuum laminating device for medium-large frameless cover plate

The utility model discloses a vacuum laminating device for medium and large frameless cover plates, which is characterized in that an upper vacuum adsorption plate is arranged in an upper cavity, the upper cavity is connected with a first driving device, and the upper vacuum adsorption plate is connected with a second driving device; the top of the cover plate supporting seat is transversely and slidably matched with two first mounting plates, the top of the cover plate supporting seat is longitudinally and slidably matched with two second mounting plates, the first mounting plates and the second mounting plates are connected with L-shaped supports respectively, the supports are connected with vacuum suction heads, the first mounting plates are connected with first driving units, and the second mounting plates are connected with second driving units. The second mounting plate is connected with a second driving unit for driving the second mounting plate to longitudinally move; the cover plate supporting seat is connected with a third driving device for driving the cover plate supporting seat to transversely move; a lower vacuum adsorption plate is arranged in the lower cavity, and the lower cavity is connected with a fourth driving device for driving the lower cavity to move transversely and further connected with a first vacuum pump for vacuumizing the interior of the lower cavity. And dust or small particles cannot be attached to the bottom of the cover plate, so that the yield of products after the cover plate is attached to the LCD can be improved.
Owner:CHINA AUTOVATION CO LTD SHENZHEN

Vacuum pump assembly

The invention discloses a vacuum pump assembly, which belongs to the technical field of vacuum and comprises a vacuum pump and a rotary air nozzle rotatably connected to an air inlet of the vacuum pump, and an included angle is formed between the air inlet direction of the rotary air nozzle and the rotating axis of the rotary air nozzle; the vacuum pump further comprises a silencer, the silencer is fixedly installed at an air outlet of the vacuum pump, an exhaust pipe is further installed at the exhaust end of the silencer, and the exhaust pipe is provided with a one-way exhaust structure. The vacuum pump is further provided with a shock pad. According to the vacuum pump assembly, the rotary air nozzle capable of freely rotating is installed at the air inlet of the vacuum pump assembly, so that the initial air inlet direction of the vacuum pump assembly can be changed by rotating the rotary air nozzle, and a vacuum pipe can be conveniently arranged between the vacuum pump assembly and the vacuum booster. Through the arrangement of the silencer and the one-way exhaust structure, the operation noise of the vacuum pump assembly can be effectively reduced, and external pollutants can be effectively prevented from entering the vacuum pump assembly. Through the arrangement of the shock pad, the vibration of the vacuum pump assembly during operation can be effectively reduced, and the comfort of a vehicle is improved.
Owner:SHANGHAI ZHIDONG TECH CO LTD

Carbonate cluster isotope test pretreatment device and test method

The invention provides a carbonate cluster isotope test pretreatment device and a test method. The device comprises an acidolysis reaction unit, a gas purification unit and a gas collection unit which are sequentially connected through a pipeline, and a balance gas unit; the acidolysis unit comprises a closed acidolysis reactor and a common acid bath acidolysis reactor; the closed acidolysis reactor and the common acid bath acidolysis reactor are connected in parallel; the first low vacuum pumping device is provided with a control valve and is connected with the acidolysis unit or the gas balancing unit; the second low-vacuum pumping device is provided with a control valve, and the second low-vacuum pumping device is connected with the first high-vacuum pumping device and is connected with the gas purification unit; a first high-vacuum pipeline is arranged on the pipeline, comprises a third low-vacuum pumping device and a second high-vacuum pumping device, and is connected with the acidolysis unit or the gas balancing unit; and the low vacuum pumping device is an oil-free system. The device disclosed by the invention is high in carbonate cluster isotope testing precision.
Owner:PETROCHINA CO LTD

A vacuum system for precise control of gas density in a sub-dose probe

A kind of vacuum system for nanodose detector gas density precision control belongs to ionizing radiation nanodose measurement field.The present application includes vacuum pump group unit, vacuum degree detection unit, logic control unit.The present application is aimed at the requirement of nanodose detector to vacuum degree and gas concentration, and realizes that working air pressure is in 1Torr by the pump group in vacuum system and the cooperation of PLC logic control and data monitoring, and gas pressure control precision reaches 0.01Torr.The system can provide ionizing radiation gas and low vacuum environment for nanodose detector, ensure that nanodose detector measurement signal is accurate and stable.The ionization degree of nanodose detector depends on the vacuum degree in cavity, and the vacuum degree of cavity depends on the concentration of gas in sensitive volume.The present application has the advantages of high precision, high accuracy, high reliability and the like.Through the present application, the vacuum environment of nanodose detector can be constant and sensitive gas is single, which can support the accurate measurement of nanodose detector.
Owner:NATIONAL INSTITUTE OF METROLOGY CHINA