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1264 results about "Low vacuum" patented technology

Low vacuum, also called rough vacuum or coarse vacuum, is vacuum that can be achieved or measured with rudimentary equipment such as a vacuum cleaner and a liquid column manometer. Medium vacuum is vacuum that can be achieved with a single pump, but the pressure is too low to measure with a liquid or mechanical manometer.

Refractory metal capped low resistivity metal conductor lines and vias formed using PVD and CVD

Capping a low resistivity metal conductor line or via with a refractory metal allows for effectively using chemical-mechanical polishing techniques because the hard, reduced wear, properties of the refractory metal do not scratch, corrode, or smear during chemical-mechanical polishing. Conductive lines and vias are created using a combination of both physical vapor deposition (e.g., evaporation or collimated sputtering) of a low resistivity metal or alloy followed by chemical vapor deposition (CVD) of a refractory metal and subsequent planarization. Altering a ratio of SiH4 to WF6 during application of the refractory metal cap by CVD allows for controlled incorporation of silicon into the tungsten capping layer. Collimated sputtering allows for creating a refractory metal liner in an opening in a dielectric which is suitable as a diffusion barrier to copper based metalizations as well as CVD tungsten. Ideally, for faster diffusing metals like copper, liners are created by a two step collimated sputtering process wherein a first layer is deposited under relatively low vacuum pressure where directional deposition dominates (e.g., below 1 mTorr) and a second layer is deposited under relatively high vacuum pressure where scattering deposition dominates (e.g., above 1 mTorr). For refractory metals like CVD tungsten, the liner can be created in one step using collimated sputtering at higher vacuum pressures.
Owner:GLOBALFOUNDRIES INC

Low vacuum and vacuum release device for electric rice cooker

The present invention relates to a low vacuum and vacuum release device for an electric rice cooker, the device being capable of releasing a vacuum and maintaining a vacuum state by the rotation of an operation lever. The electric rice cooker has: the operation lever provided at the upper part of a lid; and the low vacuum and vacuum release device provided inside the lid, elastically connected to the operation lever such that when the operation lever is rotated, the device rises so as to open an air inlet, thereby releasing the vacuum while external air flows therein, and when the operation lever is released, the device lowers by the elastic force of a spring so as to maintain the vacuum state by blocking the air inlet, wherein the low vacuum and vacuum release device comprises: a housing provided in the inside of the lid; a first pressure opening/closing operation part provided inside the housing and rising or lowering according to the vapor pressure during cooking, thereby opening or closing the first vapor outlet of a first lower sealing member; a second vacuum release operation part provided inside the housing and rising or lowering according to the rotation of the operation lever, thereby opening or closing the air inlet of a second lower sealing member; and a raising/lowering operation connection part provided at the upper part of the housing and raising or lowering the second vacuum release operation part while being mounted with the operation lever.
Owner:SAMMY CORPORATION

Purification apparatus and method for solar energy level polysilicon

Disclosed are a purification device as well as a purification method of solar-grade polysilicon, relating to a polysilicon, which provides a purification device and a purification method of solar-grade polysilicon characterized by low cost, high purity, simple process, easy operation and suitability for large-scale production. The purification device is equipped with a vacuum system, a melting system and a directional solidification system; wherein the vacuum system is provided with a mechanical rotary vane pump, a lobed element pump and an oil diffusion pump, and the melting system is provided with a vacuum chamber, a secondary feeder, an observation window, a rotary ventilation device which can be raised and lowered, an induction coil and a graphite crucible; and the directional solidification system is disposed at the lower part of the vacuum chamber and is equipped with an electric resistance-wire heating and holding furnace, a graphite mold, a holding furnace frame, a water-cooled copper tray and an elevating lever which can control speed. The metal silicon is treated by induction heating to be molten, the oxidizing gas is fed under conditions of low vacuum and high temperature to remove boron, and then under conditions of high temperature and high vacuum to remove phosphorus, and finally the molten silicon solution is poured into a directional mold to strictly conduct directional solidification to remove metal impurities.
Owner:XIAMEN UNIV

Polyester fibres and preparation method thereof

The invention relates to polyester fibres and a preparation method thereof. The raw material of the polyester fibres is modified polyester which consists of a terephthalic acid chain segment, an ethylene glycol chain segment and a branched chain-containing dihydric alcohol chain segment. The preparation method of the polyester fibres comprises the following steps: performing esterification reaction on terephthalic acid and branched chain-containing dihydric alcohol under the catalysis of concentrated sulphuric acid to obtain terephthalic acid dihydric alcohol ester; then, preparing the terephthalic acid and the ethylene glycol into slurry, and performing the esterification reaction on the slurry to obtain the terephthalic acid ethylene glycol ester; finally, stirring and mixing the terephthalic acid dihydric alcohol ester and the terephthalic acid ethylene glycol ester, and performing condensation polymerization in a low vacuum stage and a high vacuum stage under the action of a catalyst and a stabilizing agent to obtain modified polyester; metering, extruding, cooling, oiling, stretching, heat-setting and winding the polyester to prepare the polyester fibres. The increasing amplitude of the spatial gaps of the polyester fibres is much higher than that of branched chain-free polyester fibres at the same temperature, which is beneficial to the degree of micro particles, such as a dye, that enter the polyester; the dyeing rate is improved.
Owner:JIANGSU HENGLI CHEM FIBER

Mass Spectrometer

The present invention provides a mass spectrometer having an ion lens capable of transporting an ion having a large mass to charge ratio with a high level of ion-passing efficiency even under a low-vacuum atmosphere. In conventional atmospheric pressure ionization mass spectrometers or similar mass spectrometers, applying an excessively high voltage to the ion lens undesirably causes an electric discharge. Therefore, the passing efficiency for an ion having a large mass to charge ratio cannot be adequately improved, which leads to a poor detection sensitivity. To solve this problem, the mass spectrometer according to the present invention includes a voltage controller 21 that controls a variable radiofrequency (RF) voltage generator 24 so that both the amplitude and the frequency of the RF voltage applied to the lens electrodes of an ion lens 5 are changed according to the mass to charge ratio of an ion to be analyzed. This control enables the ion lens 5 to focus an ion and transport it to the subsequent stage with a high level of passing efficiency even in the case of analyzing an ion having a large mass to charge ratio. Thus, the detection sensitivity is improved. The aforementioned control is conducted on the basis of the control data stored in a voltage control data storage 22. These data are obtained in advance by a measurement of a sample containing a substance having a known mass to charge ratio, in which the intensity of the signal of an ion detector is maintained while the analysis conditions are changed.
Owner:SHIMADZU CORP

Refractory metal capped low resistivity metal conductor lines and vias

Capping a low resistivity metal conductor line or via with a refractory metal allows for effectively using chemical-mechanical polishing techniques because the hard, reduced wear, properties of the refractory metal do not scratch, corrode, or smear during chemical-mechanical polishing. Superior conductive lines and vias are created using a combination of both physical vapor deposition (e.g., evaporation or collimated sputtering) of a low resistivity metal or alloy followed by chemical vapor deposition (CVD) of a refractory metal and subsequent planarization. Altering a ratio of SiH4 to WF6 during application of the refractory metal cap by CVD allows for controlled incorporation of silicon into the tungsten capping layer. Collimated sputtering allows for creating a refractory metal liner in an opening in a dielectric which is suitable as a diffusion barrier to copper based metalizations as well as CVD tungsten. Ideally, for faster diffusing metals like copper, liners are created by a two step collimated sputtering process wherein a first layer is deposited under relatively low vacuum pressure where directional deposition dominates (e.g., below 1 mTorr) and a second layer is deposited under relatively high vacuum pressure where scattering deposition dominates (e.g., above 1 mTorr). For refractory metals like CVD tungsten, the liner can be created in one step using collimated sputtering at higher vacuum pressures.
Owner:GLOBALFOUNDRIES INC

Process and device for removing phosphorus and metal impurities in polycrystalline silicon

The invention relates to a method and a device for removing impurity phosphorus and metal impurities in polycrystalline silicon, which pertains to the technical field of purifying the polycrystalline silicon by a physical metallurgy technology, particularly relates to the method for removing the impurity phosphorus and the metal impurities in the polycrystalline silicon by an electron-beam fusion technology. Cooperative ways of electron-beam fusion and induction heating are used for completing the fusion and solidification process of the polycrystalline silicon. Silicon powder with high purity is used for spreading in a hollow-out space at a water cooled copper base which is filled with quartz crucibles; polycrystalline silicon material is put into the quartz crucibles and the cover of a vacuum device is closed; in the process of vacuumization, a mechanical pump and a lodz pump are firstly used for vacuumizing a vacuum room to low vacuum and then a diffusion pump is used for vacuumizing to high vacuum; the device used is provided with a vacuum device cover and a vacuum drum which are formed into the outer shell of the device; the inner cavity of the vacuum drum is the vacuum room, in which a fusion system is arranged. The method and the device of the invention effectively improve the purity of the polycrystalline silicon, which have the advantages of high efficiency, simple device and saving energy.
Owner:QINGDAO NEW ENERGY SOLUTIONS

High-temperature superconducting motor

The invention relates to the field of superconducting technologies and the field of motor technologies, and particularly relates to a high-temperature superconducting motor. The motor comprises an electromotor and a generator, an armature winding is manufactured by winding a high-temperature superconducting wire, and a current passing through the armature winding has an alternating component. A refrigerating Dewar vessel of the motor is placed on the outside of a stator core, and cools a high-temperature superconducting coil in a contact conduction refrigerating mode. No heat insulating layer is arranged between a stator and a rotor of the motor, and an inner cavity of the motor is pumped as a low-vacuum cavity, so that no heat convection and no heat conduction are formed between the stator and the rotor. The torque transmission between the inside and outside of the vacuum cavity is realized through a magnetofluid sealing part. Stator windings are distributed in a centralized winding form. The coil adopts a runway coil or a rounded square coil, and no space mutual-interference situation occurs at the end part of the coil; a low-frequency alternating current is used, so that the loss is reduced; and due to the low-frequency characteristic, the motor is especially applicable to the fields such as wind power generation, marine propulsion power, and the like.
Owner:TSINGHUA UNIV +1
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