An electronic
system for selectively detecting and identifying a plurality of
chemical species, which comprises an array of
nanostructure sensing devices, is disclosed. Within the array, there are at least two different selectivities for sensing among the
nanostructure sensing devices. Methods for fabricating the electronic
system are also disclosed. The methods involve modifiying nanostructures within the devices to have different selectivity for sensing
chemical species. Modification can involve chemical, electrochemical, and self-limiting point defect reactions. Reactants for these reactions can be supplied using a bath method or a chemical jet method. Methods for using the arrays of
nanostructure sensing devices to detect and identify a plurality of
chemical species are also provided. The methods involve comparing signals from nanostructure sensing devices that have not been exposed to the chemical species of interest with signals from nanostructure sensing devices that have been exposed to the chemical species of interest.
Nanostructure sensing device array structures that can measure and subtract out environmental factors are also disclosed.