87 results about "Ultra-high vacuum" patented technology

The invention discloses a high-power and frequency-adjustable gyrotron loading test system for nuclear fusion, which relates to the technical field of nuclear fusion and comprises a 2-megawatt coaxial gyrotron with adjustable frequency of 170 / 240GHz and a loading test platform. The loading test platform comprises a gyrotron part loading system, a strong magnet system, a vacuumizing system, a power supply system, a load system, a cooling system, a monitoring and diagnosing system and a control system. The component loading system is used for precise assembly; the strong magnet system provides an adjustable strong magnetic field; the vacuumizing system maintains ultrahigh vacuum; the power supply system comprises a cathode power supply and a body power supply, and the body power supply is used as a high-voltage amplifier to realize 10kHz rapid power modulation; the cooling system provides independent active cooling; the load system simulates a real load; comprehensive detection of the monitoring and diagnosis system; and the control system realizes coordinated control and rapid protection. According to the invention, a complete solution is provided for development, test, operation and maintenance of the 2-megawatt-level and frequency-adjustable gyrotron.

The invention relates to a method for fabricating a two-dimensional (2D) heterostructure comprising depositing graphene on a substrate in an ultrahigh vacuum (UHV) chamber at a first temperature and a first chamber pressure to form sub-monolayer graphene on the substrate; and subsequently depositing borophene onto the sub-monolayer graphene on the substrate in the UHV chamber at a second temperature and a second chamber pressure so as to couple the borophene with the graphene on the substrate to form a 2D borophene-graphene heterostructure comprising lateral and / or vertical heterostructures.

The invention relates to a cooled manipulator (10) for an ultra-high vacuum process device of a structure comprising one or more layers. According to the invention, the cooled manipulator for an ultra-high vacuum process device comprises: - a cooling device (12) comprising a solid material, - a rotating support (14) integral with the cooling device, - a reservoir (16) supplied by a circulation of a cryogenic fluid, configured to be moved between two positions (P1) and (P2), the first in which the reservoir is in contact with the cooling device, the second in which the reservoir is not in contact with the cooling device. Figure for the abstract: Fig. 1.

The invention discloses an aluminum alloy complex cavity diffusion welding method, which is characterized in that a uniform and compact organic molecule adsorption protection layer is formed on the surface of aluminum by completely immersing a cleaned blank in a diethylene glycol dimethyl ether solution for ultrasonic-assisted treatment. The protective film can effectively isolate air at normal temperature and prevent the oxidation film from regenerating; and in the initial stage of diffusion welding temperature rise, the aluminum alloy can be completely decomposed and volatilized, no impurity is left, and the high-activity clean aluminum surface is exposed. According to the method, diffusion welding is carried out under the conditions that the vacuum degree is high, the temperature is 500-560 DEG C and the pressure is 5-15 MPa in cooperation with a positioning tool system matched with the thermal expansion coefficient, aluminum atoms are fully diffused under the condition that no oxidation film hinders exist, and high-quality metallurgical bonding is formed. By means of the technical scheme, the problem that the welding rate is low due to an oxidation film on the surface of the aluminum alloy is successfully solved, meanwhile, the defects of ultrahigh vacuum equipment input and middle layer material introduction are overcome, and the manufacturing quality and production efficiency of complex aluminum alloy components are greatly improved.

This invention belongs to the field of optical functional thin film materials, specifically relating to a silicon-oxygen-aluminum ternary composite optical coating material and its preparation method. Addressing the problem in existing technologies of achieving high transmittance, high hardness, and corrosion resistance synergistically within a single ternary material system, this invention utilizes a single-crystal thin film with a completely ordered single-phase structure epitaxially grown on a MgAl2O4 spinel single-crystal substrate, co-doped with transition metal ions and protons. Employing a combined laser molecular beam epitaxy and low-temperature proton implantation technique, alternatingly ablates the silicon target, aluminum target, and doped target, and simultaneously irradiating with a low-energy hydrogen ion beam under ultra-high vacuum, atomic-level epitaxial growth and in-situ proton embedding are achieved, resulting in a unified high transmittance, high hardness, and corrosion resistance.

The invention belongs to the technical field of vacuum application equipment, and particularly relates to a multifunctional heating plate used in an ultrahigh vacuum environment, which comprises an upper heating plate assembly, a lower tray assembly, a lower tray transmission mechanism and auxiliary functional accessories, the lower tray assembly is located on the lower portion in the vacuum cavity and can move up and down, the lower tray assembly is driven by the lifting power source and the lower tray transmission mechanism to move up and down, and online sample bearing can be achieved. In the annealing process, a radio frequency power supply can be connected through a substrate support on the lower tray assembly, and backwash cleaning can be conducted on a substrate under the condition that argon is introduced. The device is simple in structure, stable and reliable in action, controllable and adjustable in temperature, capable of being used in high and ultrahigh vacuum environments and wide in application range.

The invention discloses a monitoring system and method for the cross state of in-loop reaction beam targets, and relates to the technical field of particle physical experiments. The system comprises a signal source module which is used for taking delta electrons generated by collision of a medium-high energy ion beam and a gas inner target as a signal source for monitoring a beam-target crossing state; the detection equipment module is used for adopting a customized ultrahigh vacuum compatible silicon detector as delta electron detection equipment; and the monitoring module is used for tracking the delta electronic normalization counting rate and monitoring the cross state of the reaction beam target in the ring in real time. The technical scheme has universality, real-time performance, safety and accuracy, and adapts to various beam target combinations.

The present application relates to the technical field of mechanical engineering sealing, and is suitable for sealing in ultra-high vacuum environment. The present application is an ultra-high vacuum magnetic liquid sealing device, belonging to the field of mechanical engineering sealing. The device is composed of a shell, a rotating shaft, a first sleeve, and a two-stage magnetic liquid sealing structure. The device does not have a rubber O-ring. The sealing assembly is arranged between the ultra-high vacuum side and all the bearings. The left side of the shell is non-magnetic, and the right side is magnetic, and the two parts are welded together. The left side of the rotating shaft is magnetic, and the right side is non-magnetic, and the two parts are welded together. The first pole shoe is connected with the shell and integrated by welding. The second pole shoe is connected with the shell and has no pole teeth, and there is a small gap between the second pole shoe and the rotating shaft. The third pole shoe is connected with the rotating shaft and has no pole teeth, and there is a small gap between the third pole shoe and the shell. The second pole shoe and the third pole shoe only have a magnetic guiding function. The fourth pole shoe is connected with the rotating shaft and integrated by welding. The present application has the advantages of reliable sealing, high ultimate vacuum degree, low leakage rate, low gas permeability, and no vacuum pollution.

The system includes a high vacuum chamber, a bakeout chamber, and an ultra-high vacuum (UHV) chamber that is configured to be removably disposed on the high vacuum chamber and the bakeout chamber. The system further includes a heating element configured to heat the UHV chamber and desorb water vapor from the UHV chamber with the UHV chamber disposed on the bakeout chamber, and a gas source configured to supply a backfill gas to the UHV chamber disposed on the bakeout chamber. The system further includes a bakeout vacuum pump configured to extract the water vapor from the UHV chamber with the UHV chamber disposed on the bakeout chamber, and a high vacuum pump configured to extract the backfill gas from the UHV chamber with the UHV chamber disposed on the high vacuum chamber.

The invention discloses an ultra-low temperature vacuum system of a Tokamak or star imitator adaptive to nuclear fusion, and relates to the technical field of nuclear fusion equipment, the ultra-low temperature vacuum system comprises a vacuum chamber, a plasma state sensor is embedded in the inner wall of the vacuum chamber, the outer end of the vacuum chamber is provided with a sealing interface, the outer end of the sealing interface is provided with a primary filter, and the primary filter is provided with a secondary filter. A getter bin is installed at the outer end of the primary filter, an auxiliary pump is installed at the outer end of the getter bin, a stop valve is installed at the outer end of the auxiliary pump, a cold trap is installed at the outer end of the stop valve, the side wall of the cold trap is connected with a refrigerating machine through a pipeline, and a main pump is installed at the outer end of the cold trap. By arranging a series of structures, the pain point of decoupling of a traditional system and plasma operation is thoroughly solved, all the components cooperate to guarantee the ultrahigh vacuum environment, interference of impurity gas on plasma constraint is greatly reduced, and the stability and success rate of a nuclear fusion experiment are remarkably improved.

The invention discloses a conveying and bearing mechanism of a Loadlock type ultrahigh vacuum evaporator, and relates to the wafer conveying technology of the evaporator, the conveying and bearing mechanism comprises a bearing platform installed on the upper portion in the evaporator, and a lifting oil cylinder is arranged on the left side of the upper portion of the bearing platform; a butt joint mechanism is arranged below the bearing platform, and the butt joint mechanism comprises a bottom supporting bearing ring; wherein the underpinning carrying ring is used for being in contact with the bottom end of the wafer transfer disc; a conveying mechanism is arranged on the right side of the bearing platform and comprises a conveying fork rod. According to the conveying and bearing mechanism of the Loadlock type ultrahigh vacuum evaporator, when a wafer body is driven to be conveyed through the conveying fork rod, dust and chippings are removed by penetrating through a partition vertical plate in the evaporator, residues are prevented from affecting the evaporation effect, accurate temperature control is conducted through the bottom bearing ring and the cooling pressing disc when a low-melting-point material is coated, and the conveying and bearing efficiency of the Loadlock type ultrahigh vacuum evaporator is improved. And the hanging flow phenomenon caused by overheat melting of the material is avoided.

This invention discloses an atomic-level construction method for a fixed-axis molecular rotor and its array on a semiconductor substrate. Metal atoms and phthalocyanine molecules are deposited on the semiconductor substrate surface using an ultra-high vacuum thermal evaporation method. The phthalocyanine molecules are laterally manipulated using a scanning tunneling microscope (STM) to place them onto the surface-adsorbed metal atoms. The metal atoms are then longitudinally manipulated using the STM to place them onto the phthalocyanine molecules, resulting in a metal atom-phthalocyanine molecule-metal atom fixed-axis molecular rotor composite structure. The rotation and control of the molecular rotor are achieved by applying a gate voltage to regulate the local potential. This method achieves atomic-level precise anchoring of the molecular rotor composite structure and realizes the rotor array arrangement. The rotation speed is controlled by regulating the local potential through the gate voltage of pre-embedded electrodes. By precisely designing the molecular rotor array using individual atoms and molecules as basic units, the problem of the inability to reposition and arrange molecular structures is solved.

The application provides a sealing detection method of an ultrahigh vacuum exhaust device, relates to the technical field of sealing detection, and comprises the following steps: performing leakage risk feature mining on the ultrahigh vacuum exhaust device, and constructing a detection point distribution; performing vacuum pumping smooth detection on the ultrahigh vacuum exhaust device, and generating a sealing detection starting signal according to a smooth detection result; performing sealing detection on the ultrahigh vacuum exhaust device according to the detection point distribution and a helium mass spectrometer leak detector, and obtaining a first device sealing detection result; and performing detection background interference correction, helium injection cross-influence compensation and material helium adsorption correction on the first device sealing detection result, and generating a fourth device sealing detection result. The application solves the technical problem that, due to the existence of various interference factors, misjudgment and omission are prone to occur, and the sealing detection precision is insufficient, the detection is performed after vacuum smoothing, the detection result is corrected, and the sealing detection effect of the ultrahigh vacuum exhaust device is improved.

This invention discloses a method for analyzing soft X-ray gain phenomena in trapped ions and the cavity type of the X-ray laser, mainly relating to the field of soft X-ray gain phenomena. The method includes: S1, calculating the small-signal gain coefficient α of the X-ray gain medium to obtain numerical information about the gain coefficient α; S2, the above calculation in S1 requires simulating ion source conditions, selecting different electron densities and incident electron energy points; S3, considering the differences between the ion source and the plasma environment, calculating the small-signal gain coefficient at the center frequency; and S4, analyzing the obtained data. The beneficial effects of this invention are: through the X-ray resonant cavity structure, the output beam can achieve high coherence and good beam quality similar to conventional lasers. It supports high repetition rates and even continuous wave operation, and through continuous collisional excitation and ion reuse in ultra-high vacuum, it eliminates the dependence on driving lasers and target materials, thereby improving peak gain.

Aspects of the present disclosure describe systems, methods, and structures that enable compact UHV ion trap systems that can operate above cryogenic temperatures. Ion trap systems according to the present disclosure are surface treated and sealed while maintained within a UHV environment, with dissimilar components joined via UHV seals, such as welded joints, compressible metal flanges, and UHV-compatible solder joints. This allows for extremely small volume systems by eliminating the need for cryogenic pumps.

The application provides a helium mass spectrum-based automatic helium leakage detection method for an ultrahigh vacuum exhaust station, relates to the technical field of gas leakage detection, and comprises the following steps: controlling the ultrahigh vacuum exhaust station to start a vacuum pumping system, pumping a cavity to be detected to a preset vacuum range; starting a helium filling device to inject helium into the outer surface area of the cavity to be detected, and recording the helium injection time sequence; obtaining a first group of helium mass spectrum response signals and a second group of helium mass spectrum response signals by a helium mass spectrum detection unit, the second group of helium mass spectrum response signals being delay sampling response signals; comparing response time curves, identifying delay response characteristics; analyzing the delay response characteristics according to a time delay analysis model, and outputting a helium leakage detection result according to a significance judgment result. The application solves the technical problem that the prior art usually assumes that helium leakage occurs instantaneously, ignores the hysteresis effect in the leakage path of a complex structure, and thus causes missed detection or misjudgment, thereby affecting the accuracy of helium leakage detection.

The invention discloses an automatic clamping and overturning device suitable for an ultrahigh vacuum environment. The automatic clamping and overturning device comprises a clamping assembly, an angle adjusting assembly, an overturning driving mechanism and a clamping driving mechanism. The angle adjusting assembly is connected with the ultrahigh vacuum chamber in a sealed mode, the turnover driving mechanism is connected with the angle adjusting assembly and the clamping driving mechanism, the turnover driving mechanism and the clamping driving mechanism are coaxially arranged, and one end of the turnover driving mechanism penetrates through the angle adjusting assembly in a sealed mode and then extends into the ultrahigh vacuum chamber. The overturning assembly is connected with the clamping assembly and is used for driving the clamping assembly to overturn; one end of the clamping driving mechanism penetrates through the overturning driving mechanism and the angle adjusting assembly in a sealed mode, then extends into the ultrahigh vacuum cavity and is connected with the clamping assembly so as to drive the clamping assembly to be opened or clamped. The invention has the characteristics of compact structural layout, small number of parts in vacuum, small surface deflation amount and the like, and well meets the requirements of substrate or chip turn-over under ultrahigh vacuum.

A vacuum valve for high / ultra-high vacuum systems includes a valve housing defining a passage connecting a first and a second opening of the housing. A valve body and a complementary seat is disposed in the passage, the valve body and / or the seat including a seal and the valve body being movable in a linear axial direction along between an open position and a closed position. The valve body cooperates with the seat in the closed position so as to close the first opening gas-tightly. An electromechanical actuation unit for actuating the valve body includes an electric motor and a mechanical conversion unit with an input portion drivingly connected to the motor and an output portion drivingly connected to the valve body. The conversion unit converts a rotational output of the electrical motor into a linear movement of an output portion to move the valve body in the axial direction.

The invention discloses a photomultiplier photocathode integrated manufacturing system and method, and belongs to the technical field of photoelectric detection. The device comprises a precision processing cavity design, configuration of a composite three-stage vacuum pump set system with precise monitoring and control, a cleaning and degassing unit integrating plasma cleaning, high-temperature baking and an electronic brushing module, a dynamic evaporation system with multi-parameter in-situ control, and a packaging unit with laser ranging matched with visual precision cooperative positioning. On the basis of the integrated system, the steps of photocathode substrate surface cleaning, chamber baking, alkali source degassing, electronic brushing, photocathode evaporation and packaging are sequentially executed. According to the invention, the quantum efficiency of the photocathode is greater than or equal to 30% and the surface photoelectric efficiency distribution deviation is less than or equal to 5% under the wavelength of 550nm by relying on a 10-9Pa-level ultrahigh vacuum environment and combining a dynamic intelligent model to iterate evaporation process parameters in real time, so that the problem that the service life of the photocathode is short is effectively solved, the sensitivity is doubled compared with that of a traditional device, the production efficiency and the cost are optimized, and leap-type improvement of the efficiency is realized.

The application provides a sample transmission device and method for an ultrahigh vacuum magnetic force microscope, which comprises a working box, a transition box, a sample feeding assembly, a sample transmission assembly, a sample storage assembly and a switch structure. The working box can be pumped to a set vacuum degree, and has a test position, a transfer position and a temporary storage position. The test position is used for placing a sample holder and a needle tip holder, the transfer position is used for the sample transmission assembly to take and place the sample holder and the needle tip holder on the sample feeding assembly and the sample storage assembly, and the temporary storage position is used for temporarily storing the sample holder and the needle tip holder. Compared with the operation of frequently opening the working box in the prior art, the vacuum degree of the working box is not affected during the whole working process, the established ultrahigh vacuum environment is not damaged, the whole operation process is simple and fast, and the sample transmission is facilitated. The replacement of different sample holders or needle tip holders at the test position can be completed in the working box, the working box does not need to be opened, and the stability of the vacuum degree of the working box during the sample transmission process is ensured.

The application relates to the technical field of atomic layer deposition, and discloses an ultrahigh vacuum atomic layer deposition system which comprises a support outer frame, a precursor source bottle, a valve control gas path system, a deposition cavity, an ultrahigh vacuum transfer cavity, a sample holder and a vacuum pumping system, the precursor source bottle is installed on the support outer frame, the output end of the precursor source bottle is connected with the input end of the valve control gas path system, the output end of the valve control gas path system is connected with the gas inlet of the deposition cavity, the gas outlet of the deposition cavity is connected with the input end of the vacuum pumping system, the deposition cavity and the ultrahigh vacuum transfer cavity are arranged vertically and are in communication with each other, and the top of the ultrahigh vacuum transfer cavity is provided with a fixing sleeve; the application has the advantages of being capable of depositing and transferring samples in an ultrahigh vacuum environment, and the whole system has a small size; the special-structure sample holder used in the application is matched with the deposition cavity to realize the deposition of the small-content-volume deposition cavity, the efficiency is improved, and the function of isolating vacuum is met.

The invention discloses an in-situ packaging mechanism for vacuum chamber sealing and a using method thereof, and relates to the technical field of ultrahigh vacuum packaging. Comprising a sealed cavity, a pipeline on one side of the sealed cavity is communicated with an air exhaust chamber, an H-shaped sealing knife edge flange is installed in the air exhaust chamber and located on a pipeline port, and a stud for guiding the H-shaped light window flange is arranged on the H-shaped sealing knife edge flange; and a driving mechanism is arranged on one side of the air exhaust chamber. Vacuum is pumped to the target vacuum degree through the air pumping chamber, then the hydraulic mechanism is used for pushing the grabbing clamp to press the optical window flange to achieve primary sealing, then vacuum breaking is conducted, an air pumping channel is disassembled, and finally permanent sealing is completed through mechanical fastening. Wherein the design that a conical surface is matched with a spherical surface of a damping universal joint of the hydraulic rod is adopted for the grabbing clamp, self-adaptive aligning can be achieved, and it is ensured that a sealing flange is evenly pressed; the sealing device is convenient to operate, high in sealing reliability and capable of meeting the vacuum packaging requirements of precise quantum devices such as superconducting quantum bits and the like.

The invention belongs to the technical field of medicine preparations, discloses a preparation method of a high-stability medicine amorphous solid dispersion, and aims to solve the problems of medicine degradation, solvent residue, easiness in crystal returning in an amorphous state and the like in the preparation of the existing medicine amorphous solid dispersion. The preparation method comprises the following steps: in an ultra-high vacuum and ultra-low temperature environment, evaporating a drug and a carrier polymer into atom or molecular beams in an ultra-mild evaporation mode, and accurately controlling codeposition, so that the atom or molecular beams are subjected to ultra-fast condensation on the surface of an ultra-low temperature substrate, and an atom / molecular level compact amorphous structure is directly formed. By the adoption of the method, high temperature is thoroughly avoided, no organic solvent is left, extreme amorphous physical stability is achieved from the atomic / molecular level, and medicine back crystallization is fundamentally inhibited.

Disclosed is a frozen solution sample preparation device applicable to an ultra-high vacuum system. The frozen solution sample preparation device includes: a sample stage, a compressible linear shift, a sample transfer chamber, a gate valve, a solution vessel and a vacuum pump; where the sample stage includes a cooling system and a sample preparation system; an interior of the compressible linear shift has a hollowed structure; a top end of the sample transfer chamber is hermetically connected to a bottom end of the compressible linear shift, the sample transfer chamber is connected to the interior of the compressible linear shift to form a connected chamber, and the connected chamber is connected to the vacuum pump; and the solution vessel is connected to a bottom end of the sample transfer chamber through the gate valve.

1. The name of the design product: ultra-high vacuum evaporation machine (UHV4-LIEO-1001). 2. The use of the design product: for vacuum coating. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view.

The invention discloses a linear transmission mechanism suitable for an ultrahigh vacuum environment. The linear transmission mechanism comprises a sample trolley, a linear guide rail, a driving mechanism and a transmission gear set, the sample trolley, the linear guide rail and the transmission gear set are all arranged in the vacuum cavity, the sample trolley is placed on the linear guide rail, and the multiple driving mechanisms are arranged outside the vacuum cavity in the length direction of the linear guide rail; the transmission gear set comprises a gear and a rack, the rack is arranged on the side of the sample trolley in the moving direction of the sample trolley, and the gear is installed on the side of the linear guide rail through an installation positioning supporting assembly and located on the same side as the rack. The output end of the driving mechanism extends into the vacuum cavity in a sealed mode and is connected with the gear. The driving mechanism drives the gear to rotate, and the gear is meshed with the rack to drive the sample trolley to linearly move in the vacuum cavity along the linear guide rail. The sample trolley has the advantages of being simple in structure, high in reliability and the like, and stable and accurate movement of the sample trolley in the vacuum cavity is achieved.

The invention relates to a leak detection system and method suitable for a linear field antiform nuclear fusion device. Comprising a high vacuum pumping system I, an ultrahigh vacuum pumping system II, a high vacuum pumping system III, an ultrahigh vacuum pumping system IV, an ultrahigh vacuum pumping system V, an ultrahigh vacuum pumping system VII, a gas analysis system I and a gas analysis system II which are connected with a vacuum cavity. The high vacuum pumping system I, the ultrahigh vacuum pumping system II, the high vacuum pumping system III, the ultrahigh vacuum pumping system IV, the ultrahigh vacuum pumping system V and the ultrahigh vacuum pumping system VII are all provided with leak detection systems. According to the invention, vacuum chamber leak detection is carried out by using a shunt leak detection method; meanwhile, a gas analyzer is used for detecting internal gas components when the vacuum cavity is vacuumized, whether helium molecules remain in the vacuum cavity or not is judged, and then a sectional type leak detection method is adopted, so that the problems that detection data are wrong and detection time is too long due to the fact that the vacuum cavity is too large are solved.

A cryogenic refrigeration system and control method with ultra-low disturbance can reduce the impact of vibration on the workspace, reduce heat loss during transmission, and achieve cryogenic cooling of the controlled object to -150°C. o Below 100°C and under long-term precise control, this system avoids vibration interference caused by cryogenic liquid refrigeration, resulting in lower operating costs and high temperature control accuracy. The gas collection pipe is placed in liquid refrigerant. Power is supplied to the gas generator to vaporize the liquid refrigerant, producing cryogenic refrigeration gas, which is collected through the gas collection pipe. A cryogenic gas insulated transmission pipe introduces the refrigeration gas into the ultra-low temperature refrigeration working space. The object being refrigerated is placed in an ultra-high vacuum environment. Temperature control is achieved through heat exchange between the active temperature control layer and the object via thermal radiation. A temperature sensor measures the temperature of the active temperature control layer, and the control signal output by the temperature controller is fed back to the power supply of the cryogenic gas generator through the refrigeration logic control circuit, achieving high-precision ultra-low temperature control of the object.

A high-modulus and high-hardness crystalline Ti-Zr-Hf-Co-Ni-Cu high-entropy shape memory thin film and its preparation method are disclosed, belonging to the field of high-entropy shape memory alloy technology. The specific chemical composition of this high-modulus and high-hardness crystalline Ti-Zr-Hf-Co-Ni-Cu high-entropy shape memory thin film is Ti... 16.67 Zr 16.67 Hf 16.67 Co 16.67 Ni 16.67 Cu 16.67 The prepared high-modulus and high-hardness crystalline Ti-Zr-Hf-Co-Ni-Cu high-entropy shape memory film achieved a hardness of up to 75 GPa and an elastic modulus of up to 935 GPa. The film exhibits high crystallinity, with fine-sized, uniformly distributed equiaxed grains. The preparation method employed was ultra-high vacuum DC magnetron sputtering, a method with broad applicability.

The invention discloses a cleaning method for ultrahigh vacuum equipment parts. The process comprises cleaning modes of different types of parts. According to the method, parts are classified according to sizes and materials, then the parts are sequentially subjected to water washing dust removal, cleaning agent ultrasonic cleaning, clear water washing, clear water ultrasonic cleaning, clear water washing, nitrogen blow-drying and alcohol ultrasonic cleaning, then the parts are subjected to nitrogen blow-drying and drying in a drying oven, and finally the parts are sealed and packaged through aluminum foil paper or a preservative film. The method is high in universality and suitable for various materials of ultrahigh vacuum parts, including stainless steel, aluminum alloy, PEEK, aluminum oxide ceramic and the like, equipment is simple and easy to purchase, and the problem of oil stains in the ultrahigh vacuum equipment parts can be solved.