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167 results about "Ultra-high vacuum" patented technology
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Ultra-high vacuum (UHV) is the vacuum regime characterised by pressures lower than about 10⁻⁷ pascal or 100 nanopascals (10⁻⁹ mbar, ~10⁻⁹ torr). UHV conditions are created by pumping the gas out of a UHV chamber. At these low pressures the mean free path of a gas molecule is greater than approximately 40 km, so the gas is in free molecular flow, and gas molecules will collide with the chamber walls many times before colliding with each other. Almost all molecular interactions therefore take place on various surfaces in the chamber.
High-power and frequency-adjustable gyrotron loading test system for nuclear fusion
ActiveCN121762917ASpectral/fourier analysisNuclear energy generationNuclear engineeringUltra-high vacuum
The invention discloses a high-power and frequency-adjustable gyrotron loading test system for nuclear fusion, which relates to the technical field of nuclear fusion and comprises a 2-megawatt coaxial gyrotron with adjustable frequency of 170 / 240GHz and a loading test platform. The loading test platform comprises a gyrotron part loading system, a strong magnet system, a vacuumizing system, a power supply system, a load system, a cooling system, a monitoring and diagnosing system and a control system. The component loading system is used for precise assembly; the strong magnet system provides an adjustable strong magnetic field; the vacuumizing system maintains ultrahigh vacuum; the power supply system comprises a cathode power supply and a body power supply, and the body power supply is used as a high-voltage amplifier to realize 10kHz rapid power modulation; the cooling system provides independent active cooling; the load system simulates a real load; comprehensive detection of the monitoring and diagnosis system; and the control system realizes coordinated control and rapid protection. According to the invention, a complete solution is provided for development, test, operation and maintenance of the 2-megawatt-level and frequency-adjustable gyrotron.
Owner:XIANGTAN SHUANGCHAO QUENCHED ROCK NEW ENERGY TECHNOLOGY CO LTD
Special-shaped plate spring and manufacturing process thereof
The invention belongs to the technical field of elastic element manufacturing, and relates to a special-shaped plate spring and a manufacturing process thereof, in particular to a manufacturing process of a spring used in an ultrahigh vacuum environment. The process comprises the following steps: selecting a 07Cr17Ni7Al plate as a raw material; performing laser melting cutting blanking according to the shape and the size of the special-shaped plate spring plate blank; carrying out solution treatment on the blanked plate blank; carrying out punch forming and bending forming; the formed semi-finished product is subjected to aging treatment; and cleaning the surface after polishing. The manufactured special-shaped plate spring is reliable in work, good in temperature resistance, long in service life and capable of being used in an ultrahigh vacuum environment, the temperature resistance of the special-shaped plate spring can reach 250 DEG C, and the service life of the special-shaped plate spring is 600000 times or above.
Owner:SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
Ultra-high-vacuum cell with integrated meta-optics
ActiveUS12411263B2Handling using diffraction/refraction/reflectionDiffraction gratingsBeam splitterUltra-high vacuum
Metamaterial optics are integrated with vacuum-boundary walls of ultra-high-vacuum (UHV) cells to manipulate light in a manner analogous to various bulk optical elements including lenses, mirrors, beam splitters, polarizers, waveplate, wave guides, frequency modulators, and amplitude modulators. For example, UHV cells can have metasurface lenses formed on interior and / or exterior surfaces on one or more of their vacuum-boundary walls. Each metasurface lens can include a plurality of mesas with the same height and various cross-sectional dimensions. The uses of metasurface lenses allows through-going laser beams to be expanded, collimated or focused without using bulky refractive optics. Each metasurface lens can be formed on a cell wall using photolithographic or other techniques.
Owner:COLDQUANTA INC
Borophene-based two-dimensional heterostructures, fabricating methods and applications of same
PendingUS20260152403A1Polycrystalline material growthNon-metal conductorsHeterojunctionUltra-high vacuum
The invention relates to a method for fabricating a two-dimensional (2D) heterostructure comprising depositing graphene on a substrate in an ultrahigh vacuum (UHV) chamber at a first temperature and a first chamber pressure to form sub-monolayer graphene on the substrate; and subsequently depositing borophene onto the sub-monolayer graphene on the substrate in the UHV chamber at a second temperature and a second chamber pressure so as to couple the borophene with the graphene on the substrate to form a 2D borophene-graphene heterostructure comprising lateral and / or vertical heterostructures.
Owner:THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY
Movable vacuum transfer cavity based on linear sliding rail positioning and using method
The invention relates to a movable vacuum transfer cavity based on linear sliding rail positioning and a using method, the movable vacuum transfer cavity comprises an ultrahigh vacuum multi-way cavity body, the cavity body is provided with a plurality of through holes, each through hole is provided with a vacuum flange, and the through hole above the ultrahigh vacuum multi-way cavity body is connected with a storage table sample transfer rod; a sample target sample transfer rod is connected to a horizontal front through hole of the ultrahigh vacuum multi-way cavity, the ultrahigh vacuum multi-way cavity is integrated in a regular-shaped accommodating box body, and at least one-dimensional sliding module in the direction of the sample target sample transfer rod in a working state is arranged at the bottom of the accommodating box body. Through the cooperation of the linear slide rail and the magnetic slide block, the movement of the sample transfer rod can be completed through one-hand operation, and the complexity of multi-step coordination is reduced. The containing box body is combined with the supporting section bar support through the linear sliding rail and can flexibly move and be fixed in the experiment platform. Meanwhile, under the working state and the non-working state, installation and fixation can be achieved, and neatness and neatness in arrangement and arrangement after experiments can be achieved.
Owner:SHANGHAI INST OF ORGANIC CHEM CHINESE ACAD OF SCI
Non-magnetic quartz observation window
A mounting opening is arranged on a mounting flange, a mounting step extending along the inner edge of the mounting opening is formed on one side of the mounting opening, a transition ring extends along the inner edge of the mounting step, and quartz glass is positioned on the mounting step and is fixedly welded with the mounting flange through the transition ring. And the quartz glass is welded and fixed at the mounting step of the mounting flange through the transition ring, so that vacuum sealing is realized, sealing materials with poor irradiance such as rubber are effectively replaced, and the device is suitable for ultrahigh vacuum, strong magnetic and irradiation environments such as accelerators, strong magnetic fields, magnetic confinement fusion and the like.
Owner:HEFEI RONGKE SCI RES INSTR CO LTD
High-precision adjustable slit for vacuum environment
The invention provides a high-precision adjustable slit for a vacuum environment, which is used for solving the problem that most existing optical slits cannot be applied to the vacuum environment due to structural limitation. Or the technical problems that an existing optical slit capable of being applied to the vacuum environment cannot meet the requirements for high vacuum sealing and reliable vacuum degree and is low in adjusting precision are solved. According to the high-precision adjustable slit for the vacuum environment, the slit is formed by the left slit piece and the right slit piece, and opening and closing of the slit are achieved in cooperation with the design of the steel ball, the transmission shifting piece, the transmission shaft, the transmission block, the spring, the adjusting mechanism and the transmission rod; meanwhile, the adjusting end of the bottom of the adjusting part abuts against or is fixedly connected to the top end of the transmission rod, the bottom of the transmission rod penetrates through the main body and then abuts against the steel ball, a highly airtight cavity structure is formed in combination with the design of the telescopic corrugated pipe, a foundation is provided for achieving high vacuum and ultrahigh vacuum, the slit can be easily connected into a vacuum system, and the vacuum degree is improved. And external high-precision adjustment can be realized.
Owner:XIAN INST OF OPTICS & PRECISION MECHANICS CHINESE ACAD OF SCI
Rare bismuth II type superlattice material and preparation method thereof
PendingCN120603369APolycrystalline material growthFinal product manufacturePhotoluminescenceUltra-high vacuum
The invention discloses a rare bismuth II type superlattice material and a preparation method thereof. The superlattice material has an InAs (Bi) / GaSb or InAs (Bi) / InAsSb superlattice structure formed by alternately laminating InAs (Bi) layers and GaSb layers or InAsSb layers, and the InAs (Bi) layers are formed by introducing Bi elements into the InAs layers. The preparation method of the superlattice material comprises the following steps: (1) selecting an InSb, InAs or GaSb substrate, performing thermal cleaning on the substrate at 500 DEG C, and cleaning the substrate by using atomic hydrogen in an ultrahigh vacuum environment; (2) alternately laminating InAs (Bi) layers and GaSb layers or InAsSb layers by utilizing a molecular beam epitaxial growth technology, and finally growing a GaSb layer or InAsSb layer as a stop layer, (3) carrying out rapid thermal annealing treatment at the temperature of 380-420 DEG C; the time is 0.5 to 1 min; and (4) characterizing the photoluminescence property of the superlattice. According to the invention, the strain distribution and the energy band structure of the material are obviously improved, the more flexible wavelength regulation and control capability is realized, the hole effective quality is reduced, and the carrier mobility and the quantum efficiency are improved.
Owner:GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
An external drive mechanism for ultra-high vacuum
The present invention discloses an external driving mechanism for ultra-high vacuum, comprising a vacuum chamber assembly and a driving assembly connected to the outside of the vacuum chamber assembly via a connecting assembly. The driving assembly can achieve large-stroke movement of the driven part and resetting with sub-micron precision. The output end of the driving assembly is connected to the driven part, and the driven part can extend into the vacuum chamber assembly. In the present invention, by designing the driving mechanism outside the ultra-high vacuum and using bellows connection and knife-edge sealing, not only can the contamination of the ultra-high vacuum by the driving mechanism be avoided, but also flexible driving of the driven part can be achieved. At the same time, the driving assembly is directly mounted on the vacuum chamber assembly, eliminating the error caused by the independent support of the driving part. Through the provision of the bolt adjustment assembly, the driving assembly can be used to drive the driven part to move or rotate relative to the vacuum chamber assembly, thereby adapting to the actual orientation requirements of the passive driving part.
Owner:ANHUI UNIV
Electrical and thermal connection cable for charged particle microscope
PendingCN120895306AApparatus for feeding conductors/cablesCable conductor constructionUltra-high vacuumElectrical connection
The systems, methods, and communication cables taught herein provide cryogenic cooling, high voltage connections, and other electrical connections to a sample on a stage within a vacuum environment while still enabling stage motion in at least five degrees of freedom with minimal stage vibration to achieve new or improved measurement applications in situ within a microscope, such as in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, and in-situ microscopy. Such as atomic probe chromatography and testing of quantum computing components. The connection cables taught herein combine connections into a single connection cable within an outer spring suitable for use in ultra-high vacuum. These connection cables are also shaped and configured to maintain at least a minimum spacing distance from components in the surrounding environment (e.g., chamber walls and other equipment) to prevent mechanical, electrical and thermal shortcuts.
Owner:FEI CO
Cooled manipulator for ultra-high vacuum process device, ultra-high vacuum process device, and ultra-high vacuum deposition method
PendingFR3164130A1Lighting and heating apparatusDomestic cooling apparatusUltra-high vacuumLiquid storage tank
The invention relates to a cooled manipulator (10) for an ultra-high vacuum process device of a structure comprising one or more layers. According to the invention, the cooled manipulator for an ultra-high vacuum process device comprises: - a cooling device (12) comprising a solid material, - a rotating support (14) integral with the cooling device, - a reservoir (16) supplied by a circulation of a cryogenic fluid, configured to be moved between two positions (P1) and (P2), the first in which the reservoir is in contact with the cooling device, the second in which the reservoir is not in contact with the cooling device. Figure for the abstract: Fig. 1.
Owner:RIBER SA
Diffusion welding method for aluminum alloy complex cavity
The invention discloses an aluminum alloy complex cavity diffusion welding method, which is characterized in that a uniform and compact organic molecule adsorption protection layer is formed on the surface of aluminum by completely immersing a cleaned blank in a diethylene glycol dimethyl ether solution for ultrasonic-assisted treatment. The protective film can effectively isolate air at normal temperature and prevent the oxidation film from regenerating; and in the initial stage of diffusion welding temperature rise, the aluminum alloy can be completely decomposed and volatilized, no impurity is left, and the high-activity clean aluminum surface is exposed. According to the method, diffusion welding is carried out under the conditions that the vacuum degree is high, the temperature is 500-560 DEG C and the pressure is 5-15 MPa in cooperation with a positioning tool system matched with the thermal expansion coefficient, aluminum atoms are fully diffused under the condition that no oxidation film hinders exist, and high-quality metallurgical bonding is formed. By means of the technical scheme, the problem that the welding rate is low due to an oxidation film on the surface of the aluminum alloy is successfully solved, meanwhile, the defects of ultrahigh vacuum equipment input and middle layer material introduction are overcome, and the manufacturing quality and production efficiency of complex aluminum alloy components are greatly improved.
Owner:CHINA STATE SHIPBUILDING CORP LTD RESEARCH INSTITUTE 719
A silicon-oxygen-aluminum ternary composite optical coating material and its preparation method
ActiveCN121826887BPolycrystalline material growthAfter-treatment detailsProton implantationUltra-high vacuum
This invention belongs to the field of optical functional thin film materials, specifically relating to a silicon-oxygen-aluminum ternary composite optical coating material and its preparation method. Addressing the problem in existing technologies of achieving high transmittance, high hardness, and corrosion resistance synergistically within a single ternary material system, this invention utilizes a single-crystal thin film with a completely ordered single-phase structure epitaxially grown on a MgAl2O4 spinel single-crystal substrate, co-doped with transition metal ions and protons. Employing a combined laser molecular beam epitaxy and low-temperature proton implantation technique, alternatingly ablates the silicon target, aluminum target, and doped target, and simultaneously irradiating with a low-energy hydrogen ion beam under ultra-high vacuum, atomic-level epitaxial growth and in-situ proton embedding are achieved, resulting in a unified high transmittance, high hardness, and corrosion resistance.
Owner:HUBEI TENGSHENG TECH CO LTD
Ultrahigh vacuum rapid sampling device and method
The invention discloses an ultrahigh vacuum rapid sample injection device and method, and belongs to the field of vacuum sample parking, the ultrahigh vacuum rapid sample injection device comprises a rapid sample injection chamber, and a first 100CF flange port, a second 100CF flange port, a third 100CF flange port, a first 63CF flange port, a first 35CF flange port, a second 35CF flange port and a second 63CF flange port which are arranged on the rapid sample injection chamber. According to the invention, the volume of the cavity is reduced; the operation is simple and convenient, the use experience of a user is good, automatic sample transfer can be upgraded, and butt joint of a glove transfer cavity / an ultrahigh vacuum transfer cavity can be compatible.
Owner:UNIV OF SCI & TECH OF CHINA
Vacuum sealing interface device
ActiveCN223306414UOperating means/releasing devices for valvesLift valveUltra-high vacuumMechanical engineering
The utility model relates to a vacuum sealing interface device which comprises a vacuum cavity, a metal sealing ring, a sealing plate, a mounting ring and a tool, the metal sealing ring is arranged on a step interface of the vacuum cavity, the mounting ring is arranged around the sealing plate, the vacuum cavity and the tool are communicated in an air exhaust state so as to vacuumize the vacuum cavity through the tool, and the tool is arranged on the sealing plate. The sealing plate is placed on the metal sealing ring through a tool in the maintaining state and fixedly installed on the vacuum cavity through the installation ring so as to maintain the vacuum sealing state. The vacuum sealing connector device is convenient, fast, attractive, small in sealing space and more attractive; a vacuum valve is prevented from being additionally arranged, and the tool can be repeatedly used; and the sealing ring is in static sealing, so that the damage of ultrahigh vacuum is avoided.
Owner:SHANGHAI AIPUQIANG PARTICLE EQUIP
Optical system based on X-ray detection bent crystal
The invention relates to the technical field of X-ray detection, in particular to an optical system based on X-ray detection bent crystals. Compared with a traditional 316L stainless steel or epoxy resin bonding structure, the aluminum foil-carbon fiber / polyimide-316L stainless steel composite vacuum cavity provided by the invention shows remarkable comprehensive performance advantages. The X-ray detector has the core advantage of extremely low thermal expansion coefficient, so that the X-ray detector can still maintain submicron precision in a wide temperature range, and the positioning error caused by temperature change of a traditional metal cavity is avoided. Meanwhile, according to the structure, multiple layers of aluminum foils and carbon fibers are alternately laminated to be matched with reactive polyimide resin, an efficient sealing barrier is formed, long-term stability of ultrahigh vacuum is ensured, the air leakage risk is greatly reduced, and the service life is prolonged.
Owner:MIANYANG LANHUI PRECISION OPTICAL TECH CO LTD
Multifunctional heating plate used in ultrahigh vacuum environment
The invention belongs to the technical field of vacuum application equipment, and particularly relates to a multifunctional heating plate used in an ultrahigh vacuum environment, which comprises an upper heating plate assembly, a lower tray assembly, a lower tray transmission mechanism and auxiliary functional accessories, the lower tray assembly is located on the lower portion in the vacuum cavity and can move up and down, the lower tray assembly is driven by the lifting power source and the lower tray transmission mechanism to move up and down, and online sample bearing can be achieved. In the annealing process, a radio frequency power supply can be connected through a substrate support on the lower tray assembly, and backwash cleaning can be conducted on a substrate under the condition that argon is introduced. The device is simple in structure, stable and reliable in action, controllable and adjustable in temperature, capable of being used in high and ultrahigh vacuum environments and wide in application range.
Owner:SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
Pattern transfer device for ultrahigh vacuum interconnection system
PendingCN120742623APhotomechanical exposure apparatusMicrolithography exposure apparatusUltra-high vacuumMechanical engineering
The invention discloses and provides a pattern transfer device for an ultrahigh vacuum interconnection system, and the device comprises a sample storage mechanism which comprises a base and a cover plate, the surface of the base is provided with a recessed sample groove, the cover plate is stacked on the surface of the base and is rotatably connected with the base through a rotating shaft, the cover plate is provided with an opening, and the cover plate is provided with an opening; the area of the opening is larger than or equal to the projection area of the sample groove in the first direction, and the opening of the cover plate is rotated to a set position to open or close the sample groove; the pattern transfer mechanism is used for transferring the mask pattern to the sample; and the vacuum interconnection pipeline is used for communicating the sample storage mechanism and the pattern transfer mechanism, and the sample storage mechanism is arranged in the vacuum interconnection pipeline. Through the sample storage mechanism capable of being opened and closed, exposure denaturation of photoresist in the sample transfer process is avoided, diffusion of the photoresist in a vacuum interconnection pipeline is reduced to a certain extent, and the pattern transfer quality is improved.
Owner:SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
Junction between hexaboride-containing and tantalum-containing components
PendingUS20250357069A1Electric discharge tubesElectrode assembly manufactureElectron sourceUltra-high vacuum
Apparatus and methods are disclosed for a mechanically stable, long-life junction between hexaboride-containing and tantalum-containing components. Examples are used as a cold field emitter assembly which is compatible with ultra-high vacuum and occasional high-temperature flashing. A metal adapter is welded to a hexaboride electrode. Some embodiments use a tantalum adapter and a LaB6 microrod electrode with a nanorod emitter tip. Other material combinations are disclosed, as also usage in electron sources for electron microscopes. In variations, the adapter is deposited onto a filament and the electrode then welded to the adapter.
Owner:FEI CO
System and method for monitoring cross state of reaction beam targets in ring
The invention discloses a monitoring system and method for the cross state of in-loop reaction beam targets, and relates to the technical field of particle physical experiments. The system comprises a signal source module which is used for taking delta electrons generated by collision of a medium-high energy ion beam and a gas inner target as a signal source for monitoring a beam-target crossing state; the detection equipment module is used for adopting a customized ultrahigh vacuum compatible silicon detector as delta electron detection equipment; and the monitoring module is used for tracking the delta electronic normalization counting rate and monitoring the cross state of the reaction beam target in the ring in real time. The technical scheme has universality, real-time performance, safety and accuracy, and adapts to various beam target combinations.
Owner:LANZHOU UNIV +1
Ultra-high vacuum magnetic liquid seal
The present application relates to the technical field of mechanical engineering sealing, and is suitable for sealing in ultra-high vacuum environment. The present application is an ultra-high vacuum magnetic liquid sealing device, belonging to the field of mechanical engineering sealing. The device is composed of a shell, a rotating shaft, a first sleeve, and a two-stage magnetic liquid sealing structure. The device does not have a rubber O-ring. The sealing assembly is arranged between the ultra-high vacuum side and all the bearings. The left side of the shell is non-magnetic, and the right side is magnetic, and the two parts are welded together. The left side of the rotating shaft is magnetic, and the right side is non-magnetic, and the two parts are welded together. The first pole shoe is connected with the shell and integrated by welding. The second pole shoe is connected with the shell and has no pole teeth, and there is a small gap between the second pole shoe and the rotating shaft. The third pole shoe is connected with the rotating shaft and has no pole teeth, and there is a small gap between the third pole shoe and the shell. The second pole shoe and the third pole shoe only have a magnetic guiding function. The fourth pole shoe is connected with the rotating shaft and integrated by welding. The present application has the advantages of reliable sealing, high ultimate vacuum degree, low leakage rate, low gas permeability, and no vacuum pollution.
Owner:BEIJING JIAOTONG UNIV +1
Systems and methods for ex-situ bakeout of differentially pumped vacuum chambers
ActiveUS12594619B2Electron beam welding apparatusWelding/soldering/cutting articlesUltra-high vacuumWater vapor
The system includes a high vacuum chamber, a bakeout chamber, and an ultra-high vacuum (UHV) chamber that is configured to be removably disposed on the high vacuum chamber and the bakeout chamber. The system further includes a heating element configured to heat the UHV chamber and desorb water vapor from the UHV chamber with the UHV chamber disposed on the bakeout chamber, and a gas source configured to supply a backfill gas to the UHV chamber disposed on the bakeout chamber. The system further includes a bakeout vacuum pump configured to extract the water vapor from the UHV chamber with the UHV chamber disposed on the bakeout chamber, and a high vacuum pump configured to extract the backfill gas from the UHV chamber with the UHV chamber disposed on the high vacuum chamber.
Owner:KLA CORP
Integrated sample holder assembly suitable for wide-temperature-range plug-in type rapid assembly and disassembly
The invention relates to the technical field of ultrahigh vacuum variable-temperature probe stations, in particular to a plug-in type integrated sample support assembly suitable for quick assembly and disassembly in a wide temperature range, which comprises a sample support integrated piece, a sample support receiving table and an electric signal transmission terminal. The sample support integration piece is used for integrating a sample and the plugging seat; the sample support receiving table is used for fixing the sample support integrated piece; and the electric signal transmission terminal is used for leading in or leading out current or voltage. According to the invention, the sample support assembly and the sample support receiving table are assembled and disassembled in a pluggable manner, and the electric signal transmission terminals of the sample support assembly and the sample support receiving table are butted, so that the sample support assembly can be quickly assembled and disassembled in a vacuum environment, and meanwhile, a plurality of groups of electric signals can be output or imported. In combination with temperature adjustment of a sample table, the ultrahigh vacuum variable temperature probe table is particularly suitable for research in the fields of electron transmission and the like as an ultrahigh vacuum variable temperature probe table, and the working efficiency and the scientific research range in the related fields are greatly improved.
Owner:DALIAN QIWEI TECH DEV CO LTD
Ultralow-temperature vacuum system of Tokamak or star imitator adaptive to nuclear fusion
PendingCN121964201Areduce distractionsSolve the pain points of running decouplingNuclear energy generationThermonuclear fusion reactorNuclear engineeringUltra-high vacuum
The invention discloses an ultra-low temperature vacuum system of a Tokamak or star imitator adaptive to nuclear fusion, and relates to the technical field of nuclear fusion equipment, the ultra-low temperature vacuum system comprises a vacuum chamber, a plasma state sensor is embedded in the inner wall of the vacuum chamber, the outer end of the vacuum chamber is provided with a sealing interface, the outer end of the sealing interface is provided with a primary filter, and the primary filter is provided with a secondary filter. A getter bin is installed at the outer end of the primary filter, an auxiliary pump is installed at the outer end of the getter bin, a stop valve is installed at the outer end of the auxiliary pump, a cold trap is installed at the outer end of the stop valve, the side wall of the cold trap is connected with a refrigerating machine through a pipeline, and a main pump is installed at the outer end of the cold trap. By arranging a series of structures, the pain point of decoupling of a traditional system and plasma operation is thoroughly solved, all the components cooperate to guarantee the ultrahigh vacuum environment, interference of impurity gas on plasma constraint is greatly reduced, and the stability and success rate of a nuclear fusion experiment are remarkably improved.
Owner:ANHUI HANYI MECHANICAL & ELECTRICAL TECHNOLOGY CO LTD
Conveying and bearing mechanism of Loadlock type ultrahigh vacuum evaporator
The invention discloses a conveying and bearing mechanism of a Loadlock type ultrahigh vacuum evaporator, and relates to the wafer conveying technology of the evaporator, the conveying and bearing mechanism comprises a bearing platform installed on the upper portion in the evaporator, and a lifting oil cylinder is arranged on the left side of the upper portion of the bearing platform; a butt joint mechanism is arranged below the bearing platform, and the butt joint mechanism comprises a bottom supporting bearing ring; wherein the underpinning carrying ring is used for being in contact with the bottom end of the wafer transfer disc; a conveying mechanism is arranged on the right side of the bearing platform and comprises a conveying fork rod. According to the conveying and bearing mechanism of the Loadlock type ultrahigh vacuum evaporator, when a wafer body is driven to be conveyed through the conveying fork rod, dust and chippings are removed by penetrating through a partition vertical plate in the evaporator, residues are prevented from affecting the evaporation effect, accurate temperature control is conducted through the bottom bearing ring and the cooling pressing disc when a low-melting-point material is coated, and the conveying and bearing efficiency of the Loadlock type ultrahigh vacuum evaporator is improved. And the hanging flow phenomenon caused by overheat melting of the material is avoided.
Owner:SUZHOU YOULUN VACUUM EQUIP TECH CO LTD
Sample repositioning device for ultra-high vacuum environments
Owner:SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
Atomic-level construction method of fixed-axis molecular rotors and their arrays on semiconductor substrate surfaces
ActiveCN119797275BNanostructure manufactureVacuum evaporation coatingChemical physicsScanning tunneling microscope
This invention discloses an atomic-level construction method for a fixed-axis molecular rotor and its array on a semiconductor substrate. Metal atoms and phthalocyanine molecules are deposited on the semiconductor substrate surface using an ultra-high vacuum thermal evaporation method. The phthalocyanine molecules are laterally manipulated using a scanning tunneling microscope (STM) to place them onto the surface-adsorbed metal atoms. The metal atoms are then longitudinally manipulated using the STM to place them onto the phthalocyanine molecules, resulting in a metal atom-phthalocyanine molecule-metal atom fixed-axis molecular rotor composite structure. The rotation and control of the molecular rotor are achieved by applying a gate voltage to regulate the local potential. This method achieves atomic-level precise anchoring of the molecular rotor composite structure and realizes the rotor array arrangement. The rotation speed is controlled by regulating the local potential through the gate voltage of pre-embedded electrodes. By precisely designing the molecular rotor array using individual atoms and molecules as basic units, the problem of the inability to reposition and arrange molecular structures is solved.
Owner:XI AN JIAOTONG UNIV
Method for detecting the sealing of an ultra-high vacuum evacuation device
The application provides a sealing detection method of an ultrahigh vacuum exhaust device, relates to the technical field of sealing detection, and comprises the following steps: performing leakage risk feature mining on the ultrahigh vacuum exhaust device, and constructing a detection point distribution; performing vacuum pumping smooth detection on the ultrahigh vacuum exhaust device, and generating a sealing detection starting signal according to a smooth detection result; performing sealing detection on the ultrahigh vacuum exhaust device according to the detection point distribution and a helium mass spectrometer leak detector, and obtaining a first device sealing detection result; and performing detection background interference correction, helium injection cross-influence compensation and material helium adsorption correction on the first device sealing detection result, and generating a fourth device sealing detection result. The application solves the technical problem that, due to the existence of various interference factors, misjudgment and omission are prone to occur, and the sealing detection precision is insufficient, the detection is performed after vacuum smoothing, the detection result is corrected, and the sealing detection effect of the ultrahigh vacuum exhaust device is improved.
Owner:XINAN VACUUM TECH (JIANGSU) CO LTD
Cold atom ultra-high vacuum mixed gas partial pressure measuring device and method
The application discloses a device and method for measuring partial pressure of mixed gas in ultra-high vacuum based on cold atom technology. The application is based on the theory that the regularity attenuation of the cold atoms trapped in the potential well caused by the particle collision of the background gas can be used to reverse the density of the gas particles, and the characteristics that the velocity thermal average collision cross section of different gas particles and cold atoms has a certain and independent change trend with the depth of the potential well. A multivariate linear regression equation set of total collision loss rate about mixed gas density under different well depth conditions is constructed to analyze the change of the total loss rate of the cold atom group under different well depth conditions, so that the type and density of each component in the mixed gas are separated, and the partial pressure of each component is determined. The method avoids the measurement uncertainty caused by the effects brought by the ionization process of the traditional mass spectrometer, and has the advantages of no calibration, no disturbance to the measurement environment, high accuracy, reproducibility at different times and different places and the like based on the basic physical characteristics of the cold atoms.
Owner:LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
A system and method for off-line measurement of cesium evaporation rate in a fusion device
ActiveCN119643480BNuclear energy generationColor/spectral properties measurementsEvaporation (deposition)Ultra-high vacuum
The present application provides a system and method for measuring cesium evaporation rate in a fusion device offline, comprising a vacuum chamber, a cesium crucible assembly, a heating assembly, a film thickness gauge, a laser absorption spectroscopy system and a vacuum pumping unit. The present application uses the vacuum pumping unit to provide an ultra-high vacuum environment for the whole device including the vacuum chamber; then uses the heating assembly to heat the cesium crucible and the transmission pipeline to ensure the effective evaporation of cesium and reduce the deposition of cesium on the pipeline wall; then uses the film thickness gauge and the laser absorption spectroscopy system to measure the deposition thickness of cesium and the concentration of cesium atoms, and cross-check the measurement results of the two diagnostic methods; realize the measurement of cesium evaporation rate and obtain the quantitative relationship between the cesium evaporation rate and the heating temperature; finally transplant the measurement system to the negative ion source to realize the real-time monitoring of the cesium injection amount in the vacuum stage. The present application provides effective data and technical support for cesium flow control in the magnetic confinement nuclear fusion negative neutral beam injection system.
Owner:INST OF ENERGY HEFEI COMPREHENSIVE NAT SCI CENT (ANHUI ENERGY LAB)