228 results about "Ultra-high vacuum" patented technology

The invention discloses a vacuum pumping system and method. The vacuum pumping system comprises a cavity, at least one low-vacuum pumping pump set, at least one high-vacuum pumping pump set, a first pipeline and a second pipeline, and the low-vacuum pumping pump set communicates with the cavity through the first pipeline and the second pipeline; the low-vacuum air extracting pump set is communicated with the cavity through a first pipeline, the high-vacuum air extracting pump set is communicated with the cavity through a second pipeline, the controller is electrically connected to the low-vacuum air extracting pump set and the high-vacuum air extracting pump set, the controller sequentially controls on-off of the low-vacuum air extracting pump set and the high-vacuum air extracting pump set, and the low-vacuum air extracting pump set can extract pressure in the cavity to be lower than 0.1 Torr; the system comprises a low-vacuum air extracting pump set and a high-vacuum air extracting pump set, and the low-vacuum air extracting pump set and the high-vacuum air extracting pump set can be used for extracting the pressure in the cavity to be lower than 0.1 Torr and the pressure in the cavity to be in an ultrahigh vacuum state respectively. The grading air exhaust mode can more effectively improve the air exhaust efficiency and reduce the air exhaust time; and the equipment can be prevented from being in a high-load state for a long time, so that the service life of the equipment is prolonged.

The invention belongs to the technical field of semiconductor material surface engineering and defect analysis, and provides an ultrahigh vacuum surface defect detection method and system based on a scanning tunneling microscope, and the method comprises the following steps: carrying out mechanical stripping on a bulk single crystal gallium oxide sample based on the cleavage property of a crystal, and obtaining a gallium oxide single crystal wafer with a micron thickness; placing the stripped single crystal gallium oxide sample in an ultrahigh vacuum environment, and removing atmospheric adsorbates on the surface through vacuum high-temperature annealing treatment; performing sputtering annealing cycle treatment on the surface of the preliminary annealing sample in an ultrahigh vacuum environment to generate an oxygen vacancy defect on the surface so as to obtain a post-treatment sample; the oxygen vacancy concentration, the surface cleanliness and the surface atom orderliness are verified through auxiliary characterization means (XPS, LEED); performing scanning imaging on the surface of the post-treatment sample through a scanning tunneling microscope (STM), and performing oxygen vacancy defect identification by combining with an oxygen vacancy defect STM image simulated by DFT calculation; according to the method, the atomic-scale resolution of the surface of the single crystal gallium oxide sample is detected through the scanning tunneling microscope, the oxygen vacancy defect and other various surface defects are accurately recognized, and the surface state of the sample is comprehensively evaluated.

The disclosure describes various aspects of a vibrationally isolated cryogenic shield for local high-quality vacuum. More specifically, the disclosure describes a cryogenic vacuum system replicated in a small volume in a mostly room temperature ultra-high vacuum (UHV) system by capping the volume with a suspended cryogenic cold finger coated with a high surface area sorption material to produce a localized extreme high vacuum (XHV) or near-XHV region. The system is designed to ensure that all paths from outgassing materials to the control volume, including multiple bounce paths off other warm surfaces, require at least one bounce off of the high surface area sorption material on the cold finger. The outgassing materials can therefore be pumped before reaching the control volume. To minimize vibrations, the cold finger is only loosely, mechanically connected to the rest of the chamber, and the isolated along with the cryogenic system via soft vacuum bellows.

The invention discloses a high-power and frequency-adjustable gyrotron loading test system for nuclear fusion, which relates to the technical field of nuclear fusion and comprises a 2-megawatt coaxial gyrotron with adjustable frequency of 170 / 240GHz and a loading test platform. The loading test platform comprises a gyrotron part loading system, a strong magnet system, a vacuumizing system, a power supply system, a load system, a cooling system, a monitoring and diagnosing system and a control system. The component loading system is used for precise assembly; the strong magnet system provides an adjustable strong magnetic field; the vacuumizing system maintains ultrahigh vacuum; the power supply system comprises a cathode power supply and a body power supply, and the body power supply is used as a high-voltage amplifier to realize 10kHz rapid power modulation; the cooling system provides independent active cooling; the load system simulates a real load; comprehensive detection of the monitoring and diagnosis system; and the control system realizes coordinated control and rapid protection. According to the invention, a complete solution is provided for development, test, operation and maintenance of the 2-megawatt-level and frequency-adjustable gyrotron.

The invention discloses a wide-temperature-range ultrahigh vacuum system gas component testing device and method, the device comprises an inner vacuum cavity, an outer vacuum cavity, a sample supporting plate, a quadrupole mass spectrometer, a vacuum system, a vacuum coupling sample transfer rod and a control device, the outer vacuum cavity is used for loading, unloading and transferring a sample, and the inner vacuum cavity is used for maintaining and testing the ultrahigh vacuum system. The vacuum system adopts a mechanical pump, a molecular pump, an ion pump and other multi-stage vacuum pumps to vacuumize, and adopts multiple groups of vacuum gauges to measure different vacuum degrees. A quadrupole mass spectrometer is adopted to analyze and detect gas components generated by the parts.

The invention belongs to the technical field of elastic element manufacturing, and relates to a special-shaped plate spring and a manufacturing process thereof, in particular to a manufacturing process of a spring used in an ultrahigh vacuum environment. The process comprises the following steps: selecting a 07Cr17Ni7Al plate as a raw material; performing laser melting cutting blanking according to the shape and the size of the special-shaped plate spring plate blank; carrying out solution treatment on the blanked plate blank; carrying out punch forming and bending forming; the formed semi-finished product is subjected to aging treatment; and cleaning the surface after polishing. The manufactured special-shaped plate spring is reliable in work, good in temperature resistance, long in service life and capable of being used in an ultrahigh vacuum environment, the temperature resistance of the special-shaped plate spring can reach 250 DEG C, and the service life of the special-shaped plate spring is 600000 times or above.

Metamaterial optics are integrated with vacuum-boundary walls of ultra-high-vacuum (UHV) cells to manipulate light in a manner analogous to various bulk optical elements including lenses, mirrors, beam splitters, polarizers, waveplate, wave guides, frequency modulators, and amplitude modulators. For example, UHV cells can have metasurface lenses formed on interior and / or exterior surfaces on one or more of their vacuum-boundary walls. Each metasurface lens can include a plurality of mesas with the same height and various cross-sectional dimensions. The uses of metasurface lenses allows through-going laser beams to be expanded, collimated or focused without using bulky refractive optics. Each metasurface lens can be formed on a cell wall using photolithographic or other techniques.

The invention relates to the technical field of vacuum cavity machining, in particular to a thin-wall vacuum chamber machining method and an arc-shaped forked thin-wall vacuum chamber. The thin-wall vacuum chamber machining method comprises the steps that a thin-wall pipe is machined; the thin-walled pipe is fixed to the mold; the thin-walled tube is subjected to empty burning treatment and then put into a vacuum brazing furnace to be subjected to vacuum brazing; and the thin-walled pipe and the ultrahigh vacuum flange are installed and welded. The arc-shaped forked thin-wall vacuum chamber comprises a vacuum chamber main body, the vacuum chamber main body comprises a first vacuum chamber forming a part of the vacuum chamber main body in the length direction, and the head end of the first vacuum chamber serves as one end of the vacuum chamber main body and is provided with one ultrahigh vacuum flange; the second vacuum chamber and the third vacuum chamber are respectively connected to the tail end of the first vacuum chamber, the second vacuum chamber and the third vacuum chamber jointly form the rest part of the vacuum chamber main body in the length direction, and the tail end of the second vacuum chamber and the tail end of the third vacuum chamber are jointly provided with another ultrahigh vacuum flange.

The invention relates to a method for fabricating a two-dimensional (2D) heterostructure comprising depositing graphene on a substrate in an ultrahigh vacuum (UHV) chamber at a first temperature and a first chamber pressure to form sub-monolayer graphene on the substrate; and subsequently depositing borophene onto the sub-monolayer graphene on the substrate in the UHV chamber at a second temperature and a second chamber pressure so as to couple the borophene with the graphene on the substrate to form a 2D borophene-graphene heterostructure comprising lateral and / or vertical heterostructures.

The invention relates to a movable vacuum transfer cavity based on linear sliding rail positioning and a using method, the movable vacuum transfer cavity comprises an ultrahigh vacuum multi-way cavity body, the cavity body is provided with a plurality of through holes, each through hole is provided with a vacuum flange, and the through hole above the ultrahigh vacuum multi-way cavity body is connected with a storage table sample transfer rod; a sample target sample transfer rod is connected to a horizontal front through hole of the ultrahigh vacuum multi-way cavity, the ultrahigh vacuum multi-way cavity is integrated in a regular-shaped accommodating box body, and at least one-dimensional sliding module in the direction of the sample target sample transfer rod in a working state is arranged at the bottom of the accommodating box body. Through the cooperation of the linear slide rail and the magnetic slide block, the movement of the sample transfer rod can be completed through one-hand operation, and the complexity of multi-step coordination is reduced. The containing box body is combined with the supporting section bar support through the linear sliding rail and can flexibly move and be fixed in the experiment platform. Meanwhile, under the working state and the non-working state, installation and fixation can be achieved, and neatness and neatness in arrangement and arrangement after experiments can be achieved.

A mounting opening is arranged on a mounting flange, a mounting step extending along the inner edge of the mounting opening is formed on one side of the mounting opening, a transition ring extends along the inner edge of the mounting step, and quartz glass is positioned on the mounting step and is fixedly welded with the mounting flange through the transition ring. And the quartz glass is welded and fixed at the mounting step of the mounting flange through the transition ring, so that vacuum sealing is realized, sealing materials with poor irradiance such as rubber are effectively replaced, and the device is suitable for ultrahigh vacuum, strong magnetic and irradiation environments such as accelerators, strong magnetic fields, magnetic confinement fusion and the like.

The invention provides a high-precision adjustable slit for a vacuum environment, which is used for solving the problem that most existing optical slits cannot be applied to the vacuum environment due to structural limitation. Or the technical problems that an existing optical slit capable of being applied to the vacuum environment cannot meet the requirements for high vacuum sealing and reliable vacuum degree and is low in adjusting precision are solved. According to the high-precision adjustable slit for the vacuum environment, the slit is formed by the left slit piece and the right slit piece, and opening and closing of the slit are achieved in cooperation with the design of the steel ball, the transmission shifting piece, the transmission shaft, the transmission block, the spring, the adjusting mechanism and the transmission rod; meanwhile, the adjusting end of the bottom of the adjusting part abuts against or is fixedly connected to the top end of the transmission rod, the bottom of the transmission rod penetrates through the main body and then abuts against the steel ball, a highly airtight cavity structure is formed in combination with the design of the telescopic corrugated pipe, a foundation is provided for achieving high vacuum and ultrahigh vacuum, the slit can be easily connected into a vacuum system, and the vacuum degree is improved. And external high-precision adjustment can be realized.

The invention discloses a rare bismuth II type superlattice material and a preparation method thereof. The superlattice material has an InAs (Bi) / GaSb or InAs (Bi) / InAsSb superlattice structure formed by alternately laminating InAs (Bi) layers and GaSb layers or InAsSb layers, and the InAs (Bi) layers are formed by introducing Bi elements into the InAs layers. The preparation method of the superlattice material comprises the following steps: (1) selecting an InSb, InAs or GaSb substrate, performing thermal cleaning on the substrate at 500 DEG C, and cleaning the substrate by using atomic hydrogen in an ultrahigh vacuum environment; (2) alternately laminating InAs (Bi) layers and GaSb layers or InAsSb layers by utilizing a molecular beam epitaxial growth technology, and finally growing a GaSb layer or InAsSb layer as a stop layer, (3) carrying out rapid thermal annealing treatment at the temperature of 380-420 DEG C; the time is 0.5 to 1 min; and (4) characterizing the photoluminescence property of the superlattice. According to the invention, the strain distribution and the energy band structure of the material are obviously improved, the more flexible wavelength regulation and control capability is realized, the hole effective quality is reduced, and the carrier mobility and the quantum efficiency are improved.

The present invention discloses an external driving mechanism for ultra-high vacuum, comprising a vacuum chamber assembly and a driving assembly connected to the outside of the vacuum chamber assembly via a connecting assembly. The driving assembly can achieve large-stroke movement of the driven part and resetting with sub-micron precision. The output end of the driving assembly is connected to the driven part, and the driven part can extend into the vacuum chamber assembly. In the present invention, by designing the driving mechanism outside the ultra-high vacuum and using bellows connection and knife-edge sealing, not only can the contamination of the ultra-high vacuum by the driving mechanism be avoided, but also flexible driving of the driven part can be achieved. At the same time, the driving assembly is directly mounted on the vacuum chamber assembly, eliminating the error caused by the independent support of the driving part. Through the provision of the bolt adjustment assembly, the driving assembly can be used to drive the driven part to move or rotate relative to the vacuum chamber assembly, thereby adapting to the actual orientation requirements of the passive driving part.

The systems, methods, and communication cables taught herein provide cryogenic cooling, high voltage connections, and other electrical connections to a sample on a stage within a vacuum environment while still enabling stage motion in at least five degrees of freedom with minimal stage vibration to achieve new or improved measurement applications in situ within a microscope, such as in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, and in-situ microscopy. Such as atomic probe chromatography and testing of quantum computing components. The connection cables taught herein combine connections into a single connection cable within an outer spring suitable for use in ultra-high vacuum. These connection cables are also shaped and configured to maintain at least a minimum spacing distance from components in the surrounding environment (e.g., chamber walls and other equipment) to prevent mechanical, electrical and thermal shortcuts.

The invention relates to a cooled manipulator (10) for an ultra-high vacuum process device of a structure comprising one or more layers. According to the invention, the cooled manipulator for an ultra-high vacuum process device comprises: - a cooling device (12) comprising a solid material, - a rotating support (14) integral with the cooling device, - a reservoir (16) supplied by a circulation of a cryogenic fluid, configured to be moved between two positions (P1) and (P2), the first in which the reservoir is in contact with the cooling device, the second in which the reservoir is not in contact with the cooling device. Figure for the abstract: Fig. 1.

The utility model belongs to the field of manufacturing of isotope mass spectrometers in analytical instruments, particularly relates to a vacuum flat tube, and aims to solve the problems of insufficient structural strength, low space utilization rate and easiness in deformation in an ultrahigh vacuum environment in the design of a pipeline in the prior art, particularly meet the requirement of large-mass dispersion, and improve the production efficiency. And the cavity compactness and the processing cost are difficult to consider at the same time. According to the device, an inlet connecting piece is installed at an outlet of a deflection pipeline and fixed to one end of a flat pipe, one end of the flat pipe is communicated with the outlet of the deflection pipeline, the other end of the flat pipe is fixed to an outlet connecting piece, and the outlet connecting piece is installed on a receiver; the width of the flat pipe is gradually increased from the end close to the inlet connecting piece to the end close to the outlet connecting piece. According to the utility model, the structural strength is high, the pipeline with gradually increased width is matched with the scattered ion flow flight path, the requirement of large dispersion mass dispersion spacing is met, and the whole design and process have the advantages of less welding and difficult deformation.

The invention discloses an aluminum alloy complex cavity diffusion welding method, which is characterized in that a uniform and compact organic molecule adsorption protection layer is formed on the surface of aluminum by completely immersing a cleaned blank in a diethylene glycol dimethyl ether solution for ultrasonic-assisted treatment. The protective film can effectively isolate air at normal temperature and prevent the oxidation film from regenerating; and in the initial stage of diffusion welding temperature rise, the aluminum alloy can be completely decomposed and volatilized, no impurity is left, and the high-activity clean aluminum surface is exposed. According to the method, diffusion welding is carried out under the conditions that the vacuum degree is high, the temperature is 500-560 DEG C and the pressure is 5-15 MPa in cooperation with a positioning tool system matched with the thermal expansion coefficient, aluminum atoms are fully diffused under the condition that no oxidation film hinders exist, and high-quality metallurgical bonding is formed. By means of the technical scheme, the problem that the welding rate is low due to an oxidation film on the surface of the aluminum alloy is successfully solved, meanwhile, the defects of ultrahigh vacuum equipment input and middle layer material introduction are overcome, and the manufacturing quality and production efficiency of complex aluminum alloy components are greatly improved.

This invention belongs to the field of optical functional thin film materials, specifically relating to a silicon-oxygen-aluminum ternary composite optical coating material and its preparation method. Addressing the problem in existing technologies of achieving high transmittance, high hardness, and corrosion resistance synergistically within a single ternary material system, this invention utilizes a single-crystal thin film with a completely ordered single-phase structure epitaxially grown on a MgAl2O4 spinel single-crystal substrate, co-doped with transition metal ions and protons. Employing a combined laser molecular beam epitaxy and low-temperature proton implantation technique, alternatingly ablates the silicon target, aluminum target, and doped target, and simultaneously irradiating with a low-energy hydrogen ion beam under ultra-high vacuum, atomic-level epitaxial growth and in-situ proton embedding are achieved, resulting in a unified high transmittance, high hardness, and corrosion resistance.

A testing device for measuring the deflation performance of a vacuum material comprises a mechanical pump, a first molecular pump, a backing valve, a magnet and a limiting block, one side of the mechanical pump is connected with the first molecular pump through a pipeline, the backing valve is installed on the pipeline between the mechanical pump and the first molecular pump, one side of the first molecular pump is connected with a second molecular pump through a pipeline, and the second molecular pump is connected with the magnet. A resistance gauge is installed on the pipeline between the forestage valve and the first molecular pump, one side of the second molecular pump is respectively connected with an ultrahigh vacuum micrometering valve and an ultrahigh vacuum stop valve through pipelines, and an ultrahigh vacuum deflation valve is installed on the pipeline at the front end of the ultrahigh vacuum micrometering valve. A dynamic conductance method is adopted to qualitatively and quantitatively analyze the deflation performance of a material, the deflation type, the deflation rate, the deflation amount of different gases and the total deflation amount of the material are mainly tested, a heater can be switched to bake and degas all backgrounds in a vacuum chamber, and the vacuum degree of the backgrounds is improved.

The invention discloses an ultrahigh vacuum rapid sample injection device and method, and belongs to the field of vacuum sample parking, the ultrahigh vacuum rapid sample injection device comprises a rapid sample injection chamber, and a first 100CF flange port, a second 100CF flange port, a third 100CF flange port, a first 63CF flange port, a first 35CF flange port, a second 35CF flange port and a second 63CF flange port which are arranged on the rapid sample injection chamber. According to the invention, the volume of the cavity is reduced; the operation is simple and convenient, the use experience of a user is good, automatic sample transfer can be upgraded, and butt joint of a glove transfer cavity / an ultrahigh vacuum transfer cavity can be compatible.

A continuous UHV vertical floating zone melting zone metal purification system can realize the continuous preparation of ultrapure metal and can be applied to industrial production. In particular, by providing an ultra-high vacuum environment for the zone melting, the difference in saturated vapor pressure between the matrix and the impurities can be used to further remove impurities with a higher saturated vapor pressure than the matrix. It is characterized in that it includes a main chamber for performing an ultra-high vacuum zone melting process, a three-dimensional mobile platform is arranged above the main chamber, a multi-axis platform adjustment seat at the lower end of the three-dimensional mobile platform is connected to the upper end clamping assembly of the zone melting metal bar passing through the main chamber cover and entering the main chamber, the right side of the main chamber is connected to the pretreatment chamber through the transmission port flange, the right side of the pretreatment chamber is connected to the magnetic sample feeding rod, the zone melting pre-treatment metal bar clamping claw of the magnetic sample feeding rod is located in the pretreatment chamber, the left side of the main chamber is connected to a cryogenic pump through a plug valve, and the rear side of the main chamber is connected to an induction heating system, and the induction heating system induction coil heats the zone melting metal bar to form a vertical floating zone.

The utility model relates to a vacuum sealing interface device which comprises a vacuum cavity, a metal sealing ring, a sealing plate, a mounting ring and a tool, the metal sealing ring is arranged on a step interface of the vacuum cavity, the mounting ring is arranged around the sealing plate, the vacuum cavity and the tool are communicated in an air exhaust state so as to vacuumize the vacuum cavity through the tool, and the tool is arranged on the sealing plate. The sealing plate is placed on the metal sealing ring through a tool in the maintaining state and fixedly installed on the vacuum cavity through the installation ring so as to maintain the vacuum sealing state. The vacuum sealing connector device is convenient, fast, attractive, small in sealing space and more attractive; a vacuum valve is prevented from being additionally arranged, and the tool can be repeatedly used; and the sealing ring is in static sealing, so that the damage of ultrahigh vacuum is avoided.

The invention relates to the technical field of X-ray detection, in particular to an optical system based on X-ray detection bent crystals. Compared with a traditional 316L stainless steel or epoxy resin bonding structure, the aluminum foil-carbon fiber / polyimide-316L stainless steel composite vacuum cavity provided by the invention shows remarkable comprehensive performance advantages. The X-ray detector has the core advantage of extremely low thermal expansion coefficient, so that the X-ray detector can still maintain submicron precision in a wide temperature range, and the positioning error caused by temperature change of a traditional metal cavity is avoided. Meanwhile, according to the structure, multiple layers of aluminum foils and carbon fibers are alternately laminated to be matched with reactive polyimide resin, an efficient sealing barrier is formed, long-term stability of ultrahigh vacuum is ensured, the air leakage risk is greatly reduced, and the service life is prolonged.

The invention discloses a self-sealing isolation valve for an electron optical column. The self-sealing isolation valve comprises a valve body assembly, a valve element assembly, a driving assembly and a vacuumizing assembly. The valve body assembly comprises a valve cavity, the top of the valve cavity is connected with the upper portion of the electron optical column and located in an ultrahigh vacuum environment, and the bottom of the valve cavity is connected with the lower portion of the electron optical column and located in a high vacuum environment. The vacuumizing assembly is connected with the side portion of the valve cavity so that an ultrahigh vacuum environment can be formed in the valve cavity. The valve element assembly is arranged in the valve cavity and located above an air hole of the valve cavity, the driving assembly is arranged on the outer side of the valve cavity, and the output end of the driving assembly penetrates into the valve cavity in a sealed mode and is connected with the valve element assembly. Under driving of the driving assembly, the valve element assembly opens or closes the air hole so as to achieve connection or isolation of the upper portion and the lower portion of the electron optical column. The device has the characteristics of compact structure, convenience in operation, high stability and the like, and realizes isolation of different vacuum environments at the upper part and the lower part of the electron optical column.

The invention belongs to the technical field of vacuum application equipment, and particularly relates to a multifunctional heating plate used in an ultrahigh vacuum environment, which comprises an upper heating plate assembly, a lower tray assembly, a lower tray transmission mechanism and auxiliary functional accessories, the lower tray assembly is located on the lower portion in the vacuum cavity and can move up and down, the lower tray assembly is driven by the lifting power source and the lower tray transmission mechanism to move up and down, and online sample bearing can be achieved. In the annealing process, a radio frequency power supply can be connected through a substrate support on the lower tray assembly, and backwash cleaning can be conducted on a substrate under the condition that argon is introduced. The device is simple in structure, stable and reliable in action, controllable and adjustable in temperature, capable of being used in high and ultrahigh vacuum environments and wide in application range.

An apparatus, including a scanning probe microscope base that includes a configured to be secured to an end of an insert in a cryostat; a top configured to be connected to a base of a scanning probe microscope head that is configured to be disposed inside the insert; and a damping system disposed between the frame and the top and comprising a bellows that seals the end of the insert. This sealing separates an ultra-high vacuum (UHV) environment in the insert from a high vacuum (HV) environment surrounding the end of the insert and also positions an upper surface of the top in the UHV environment.

The invention discloses a method for obtaining a single crystal iron atomic-scale clean surface, and belongs to the technical field of material science and surface engineering.The method comprises the following steps that under the room temperature and ultrahigh vacuum, electron beams are adopted for conducting surface treatment on a single crystal iron sample, and the single crystal iron atomic-scale clean surface is obtained; wherein the surface treatment process comprises electron beam cutting and electron beam irradiation. According to the method, the electron beam is used for accurately treating the surface oxide layer under the high-vacuum condition, the atomic-scale clean single crystal iron surface can be effectively obtained, and the problem that the oxide layer on the iron surface is difficult to completely remove through existing (electro) chemical cleaning and mechanical polishing is solved.

The invention discloses and provides a pattern transfer device for an ultrahigh vacuum interconnection system, and the device comprises a sample storage mechanism which comprises a base and a cover plate, the surface of the base is provided with a recessed sample groove, the cover plate is stacked on the surface of the base and is rotatably connected with the base through a rotating shaft, the cover plate is provided with an opening, and the cover plate is provided with an opening; the area of the opening is larger than or equal to the projection area of the sample groove in the first direction, and the opening of the cover plate is rotated to a set position to open or close the sample groove; the pattern transfer mechanism is used for transferring the mask pattern to the sample; and the vacuum interconnection pipeline is used for communicating the sample storage mechanism and the pattern transfer mechanism, and the sample storage mechanism is arranged in the vacuum interconnection pipeline. Through the sample storage mechanism capable of being opened and closed, exposure denaturation of photoresist in the sample transfer process is avoided, diffusion of the photoresist in a vacuum interconnection pipeline is reduced to a certain extent, and the pattern transfer quality is improved.

Apparatus and methods are disclosed for a mechanically stable, long-life junction between hexaboride-containing and tantalum-containing components. Examples are used as a cold field emitter assembly which is compatible with ultra-high vacuum and occasional high-temperature flashing. A metal adapter is welded to a hexaboride electrode. Some embodiments use a tantalum adapter and a LaB6 microrod electrode with a nanorod emitter tip. Other material combinations are disclosed, as also usage in electron sources for electron microscopes. In variations, the adapter is deposited onto a filament and the electrode then welded to the adapter.