Measuring device and measuring method for measuring gas permeability of material

Abstract

The invention discloses a measuring device and a measuring method for measuring gas permeability of a material. The measuring device comprises a gas chamber, a gas accumulation chamber and a high-vacuum chamber, wherein a film of the material to be measured or a thin sheet is installed between the gas chamber and the gas accumulation chamber; the gas chamber is connected with a gas source to be measured and a low-vacuum pump; the accumulation chamber is connected with the high-vacuum chamber through a needle valve; and the high-vacuum chamber is connected with a mass spectra gauge and a super-high-vacuum sucking system. By utilizing the device and the method, after a measured gas which permeates through the measured material is accumulated in the gas accumulation chamber to a relatively large gas quantity, part of the gas is sampled into the high-vacuum chamber to be subjected to mass-spectrometer measurement, so that the sensitivity in permeability measurement is improved; and the longer the accumulation time is, the higher the measurement sensitivity is, for example, the sensitivity in steam permeability measurement can reach the level of 10-7g / m<2>day grade.

Description

technical field [0001] The invention relates to a method and technology for measuring the gas permeability of packaging materials of electronic devices, food, medicine and other objects. Background technique [0002] Electronic devices, food, medicine and other items require packaging or packaging materials with low gas permeability to prevent harmful gases from entering the device (such as organic electroluminescent devices) during use and storage, which will affect the performance or life of the device. or prevent harmful gases from entering the packaging of food and medicines, resulting in deterioration of food and medicines; or prevent the material vapor of food or medicines from escaping from the packaging, resulting in degradation or failure of the quality of food and medicines. [0003] To design and manufacture packaging or packaging materials for electronic devices, food and medicine that meet the requirements of use and storage, it is necessary to have equipment an...

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Problems solved by technology

[0008] The disadvantage of this measurement method is that the gas permeating through the measured material is continuously pumped away by the high vacuum pump. If the permeability of the measured gas to the measured material is very small, the partial pressure of the measured gas established in the high vacuum chamber will be It is so small that it may be lower than the minimum detectable partial pressure value of the mass spectrometer, and the partial pressure of the measured gas in the high vacuum chamber cannot be measured, so it is impossible to measure the permeability of the measured gas to the tested material. Limitations Improved sensitivity of gas permeability measurement

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