Method (1) for
laser processing of a glass or glass-
ceramic element (2), in which: - the
laser beam (7) of an
ultrashort pulse laser (10) is concentrated to an elongated focus in the glass or glass-
ceramic element (2) by means of a focusing optic (3), wherein: - a pulse power of the
ultrashort pulse laser (10) is set which is sufficient to generate filament-shaped damage (6) within the glass or glass-
ceramic by means of the laser pulses focused in the glass or glass-ceramic, wherein the focusing optic (3) comprises a lens (4) arranged in the beam path of the
ultrashort pulse laser (10), and wherein: - by means of a lens movement device (9), during operation of the
ultrashort pulse laser (10), the lens (4) is moved transversely to the
beam direction (70) so that the position of the
optical axis (40) of the lens (4) relative to the position of the laser beam (7) is changed.and the movement of the lens (4) relative to the laser beam (7) deflects the laser beam (7) and thus shifts the point of
impact (71) of the laser beam on the glass or glass-ceramic element (2), wherein the point of
impact (71) is guided along a predetermined path forming a dividing line (12) by means of a computing device (15), wherein the lens movement device (9) is controlled by successively emitting control signals, wherein, in response to the successively emitted control signals, the lens (4) of the focusing
optics (3) is moved transversely to the
beam direction (70), so that the position of the
optical axis (40) of the lens (4) changes relative to the position of the laser beam (7), thereby moving the point of
impact (71) of the laser beam (7) on the glass or glass-ceramic element (2),wherein- by means of a movement device (17) the glass or glass-ceramic element (2) is moved relative to the
ultrashort pulse laser (10) during the incident laser beam (7), so that the point of impact (71) of the laser beam (7) is guided along a predetermined path forming the dividing line (12), which is formed by the superposition of the positions set by means of the lens movement device (9) and the movement device (17), wherein- by the movement of the lens (4) deviations of the point of impact (71) from the predetermined dividing line (12) caused by undesired movement of the glass or glass-ceramic element (2) relative to the
ultrashort pulse laser (10), in particular by vibrations or overshoot, during a change of direction of movement are compensated.