The invention discloses an aluminum
nitride ceramic substrate and a preparation method thereof, and belongs to the technical field of
ceramic substrates, and the preparation method comprises the following steps: 1, mixing aluminum
nitride powder, a
sintering aid, a
boron nitride dispersion liquid, a dispersant, a binder, a
plasticizer and a
solvent in parts by weight, and carrying out ball milling to obtain
slurry; the
boron nitride dispersion liquid comprises hydroxylated
boron nitride nanosheets and hyperbranched
polysilazane, the
mass ratio of the hyperbranched
polysilazane to the
boron nitride is (0.8-1): 1, and the addition amount of the modified
boron nitride is 0.8%-1.2% of the
mass of the aluminum nitride
powder; 2, carrying out
tape casting and cold isostatic pressing on the
slurry to obtain a blank; and the blank is subjected to glue discharging and
sintering, and the aluminum nitride
ceramic substrate is obtained. According to the preparation method, the
boron nitride dispersion liquid composed of the hydroxylated boron nitride nanosheets and the hyperbranched
polysilazane is added, and synchronous optimization of the tensile property and the heat-conducting property of the aluminum nitride
ceramic substrate is achieved through the synergistic effect between the hydroxylated boron nitride nanosheets and the hyperbranched polysilazane.