The utility model relates to
wafer plasma surface activation equipment, and belongs to the technical field of equipment for
processing semiconductor components. According to the utility model, gas molecules in the chamber are effectively excited through a high-intensity
magnetic field generated by the ICP coil, so that high-density and high-activity
plasma is formed; the I CP reactor is arranged on the upper side of the activation chamber, the activation chamber and the I CP reactor are isolated through the insulating
ceramic isolation plate, I CP
electromagnetic induction can penetrate through the isolation plate, and the isolation plate not only ensures the leakproofness of the activation chamber, but also effectively isolates the high-temperature environment of the I CP reactor. The
adverse effect of the high temperature in the I CP reactor on the activation chamber is prevented; the I CP coil is arranged between the inner cylinder and the outer cylinder, the heat dissipation fan is arranged on the outer cylinder, and the heat dissipation coil
pipe is arranged in the activation chamber, so that the heat dissipation effect is improved, and the temperature in the activation chamber can be effectively reduced.