104 results about "Vapor phase" patented technology

This invention relates to the field of vapor phase etching (VPE) apparatus technology, specifically a double-sided VPE apparatus for semiconductor silicon wafers. The apparatus includes a VPE apparatus body, a silicon wafer transfer mechanism at the upper end of the apparatus body, an etching chamber fixedly mounted on the outer side of the apparatus body, and a mounting base fixedly mounted on the upper end of the etching chamber. By combining the VPE mechanism with a central air-guiding mechanism, stable adsorption of the semiconductor silicon wafer is ensured during the etching process, avoiding vibration and improving etching efficiency and precision. A Bernoulli-style chuck structure is formed by the cooperation of the air-guiding support stage and the central stage, stably "fixing" the silicon wafer above the air-guiding support stage, minimizing contact with the semiconductor silicon wafer, avoiding physical damage and contamination, and simultaneously enabling multi-directional airflow distribution to meet auxiliary heat dissipation needs for the semiconductor silicon wafer, further improving the accuracy and etching efficiency of the VPE process.

This utility model discloses a regenerated steam superheating system for an energy-saving steam oven, including a superheater, a regenerated steam device, and a water supply pipeline. The superheater is equipped with a high-temperature, high-pressure steam outlet, and the regenerated steam device is equipped with a high-temperature, high-pressure steam inlet and a regenerated steam outlet. The high-temperature, high-pressure steam outlet is connected to both the high-temperature, high-pressure steam inlet and the water supply pipeline via a gas-liquid separator. The water supply pipeline is connected to the regenerated steam device, and the regenerated steam outlet is connected to the superheater. This utility model uses high-temperature, high-pressure steam as a heat source to heat the regenerated steam in the superheater, and separates the vapor phase of the high-temperature, high-pressure steam, returning it to the regenerated steam device for power steam recycling. The heated regenerated steam significantly reduces its moisture content while increasing its temperature. Compared with the prior art, the regenerated steam superheating system of this utility model produces steam with low moisture content and high temperature, meeting the specific process requirements of crispy noodle production.

Vapor phase methods of depositing a metal or a semimetal—comprising materials on a substrate are provided. In the methods, various metal or semimetal precursors may be used together with reactants that may generate hydrogen radical or amino radical to react with the metal or semimetal precursor to deposit the metal or semimetal—comprising material on the substrate. Further provided are materials and structures deposited by the disclosed methods, as well as deposition assemblies.

The disclosed and claimed subject matter provides Group 13 (i.e., B, Al, Ga and In) compounds and methods of using the compounds as precursors for deposition of metal-containing films.

A method and apparatus for filling a gap with a material comprising silicon are disclosed. The method comprises providing a substrate into a reaction chamber, wherein the substrate comprises at least one gap; providing a first reactive species generated from a capacitively-coupled plasma produced from a first reactant gas into the reaction chamber; and executing a plurality of deposition cycles. The deposition cycle comprises providing a first silicon precursor in vapor phase into the reaction chamber; and providing a second reactive species generated from an inductively-coupled plasma produced from a second reactant gas into the reaction chamber.

This invention discloses a method for large-size ammonium fluoroborate single crystal vapor phase growth, comprising the following steps: weighing two or more compounds containing NH4, B, O, and F as raw materials in a stoichiometric ratio of 1:4:6:1, mixing them thoroughly, adding a transport agent to obtain an initial mixture, and loading the initial mixture into a crystallization vessel; during the crystal growth stage, seed crystals or suspended seed crystals are selected by geometric selection and temperature screening among the grains; the crystallization vessel is dynamically heated within the temperature gradient zone of a vertical tube furnace, the dynamic heating being achieved by independently raising or lowering the temperatures of the high-temperature and low-temperature zones to dynamically control the temperature gradient of the crystal growth zone, so as to match it with the temperature gradient required at each stage of the crystal growth process; the raw materials crystallize in the crystal growth zone under the transport agent, resulting in large-size ammonium fluoroborate crystals. This invention produces large-size single crystals, is simple to operate, and highly practical, representing a superior ammonium fluoroborate single crystal growth process.

An immersion cooling system can include an immersion tank for containing a refrigerant in both liquid and vapor phases, a heat exchanger for extracting heat from the refrigerant, and a pump for circulating the refrigerant from the tank to the heat exchanger and back to the tank. The tank can contain one or more electronic devices submerged in the liquid phase of the refrigerant, below a surface of the refrigerant in the tank. The pump can draw the refrigerant from the tank below the surface and / or return the refrigerant to the tank above the surface. The system can include an enclosure housing the tank, the heat exchanger, and the pump. The refrigerant can have a high specific heat and / or be non-toxic and / or non-flammable, such as water or a water-based refrigerant.

The utility model discloses a kind of equipment for producing high-purity sic material by gas phase method, belong to silicon carbide production technical field, comprising: shell, the shell is double-layer structure;Sealing cover, the sealing cover is with the top of shell and is sealedly connected through sealing assembly;Base, the base is with the bottom of shell and is sealedly connected through centring component;Gas pipe assembly is provided on the base;Cooling assembly, the cooling assembly is set in the interlayer of shell;The input end of the cooling assembly is close to the base setting, the output end of the cooling assembly is connected with the sealing cover;Electrode silicon core is provided on the base;The device solves the sealing defect of traditional equipment through multiple sealing structure, realize tight sealing through the metal pressure strip of sealing cover and the mouth of connecting pipe and compress seal ring, base and shell bottom are sealedly connected through centring component, and double sealing design can effectively isolate outside oxygen, nitrogen, moisture and other impurities into shell interior.

Provided is a mounting table for rotating a substrate in a vapor phase growth device, the mounting table including a recessed part in which the substrate is accommodated, a ring part provided around the recessed part, and a plurality of first protruding parts provided so as to protrude upward from an upper face of the ring part, the plurality of first protruding parts preventing the substrate from being cast out due to centrifugal force applied to the substrate during rotation, and having a shape for regulating the flow of gas that is fed thereto.

This utility model discloses a twin-screw granulator for producing vapor phase rust-preventive films. It includes a worktable, with a twin-screw granulation channel bolted to the top of the worktable. A receiving box is installed on one side of the worktable corresponding to the twin-screw granulation channel. A feeding and crushing mechanism is provided at the top of the twin-screw granulation channel. This mechanism includes a feeding hopper, a crushing cylinder, a guide plate, a vertical frame, a crushing channel, a connecting rod, a crushing roller, and a drive motor. This utility model has a scientifically sound and reasonable structure, is safe and convenient to use, and features a feeding and crushing mechanism. The guide plate facilitates the guidance of raw materials into the crushing channel. The drive motor, crushing channel, and crushing roller work together to crush the raw materials. Simultaneously, the connecting rod enables synchronous crushing in both crushing channels, ensuring crushing efficiency, reducing the volume of raw materials, and improving the granulation effect.

This invention discloses a method for processing cocoa beans or cocoa granules, comprising the steps of: (a) adding water to cocoa beans or cocoa granules to form a suspension; (b) wet milling the suspension; (c) subjecting the suspension to heat treatment at a temperature of 70°C or lower; (d) separating the suspension into: an aqueous phase (heavy phase), a lipid phase including cocoa oil (light phase), and a solid phase including cocoa powder and fluid components; (e) continuously separating the fluid components from the solid phase obtained in step (d) by supplying the solid phase to a mixing device to obtain cocoa aroma and cocoa powder; wherein the mixing device... The device includes: a cylindrical tubular body having a horizontal axis, the tubular body having an inlet opening for a solid phase, an outlet opening for a dried solid phase, and an optional outlet opening for a vapor phase including cocoa aroma; end plates closing the tubular body at opposite ends; a coaxial sleeve for heating or cooling the inner wall of the tubular body to a temperature of 55°C to 150°C; and a bladed rotor supported in the tubular body for rotation, the blades of the bladed rotor being arranged in a helical shape and oriented for centrifugally separating the solid phase and simultaneously transporting the solid phase toward the outlet opening.

This invention relates to the field of refrigeration equipment control technology, specifically to an adaptive control method for condenser operation in silicone oil production lines. The method includes: First, based on historical production data, determining a reference range for the condenser outlet vapor phase temperature to produce silicone oil with preset quality indicators, and determining a target temperature within this range based on historical operating efficiency. Second, during production, using a model predictive control algorithm to adjust the condenser's operating parameters in real time, bringing the predicted future outlet temperature closer to the target temperature. Finally, based on the recent changes in actual operating efficiency with temperature and the difference between historical and predicted trends in outlet temperature, the target temperature is dynamically readjusted. This invention achieves adaptive tracking and coordination of the condenser with the de-boiling vessel conditions, ensuring key indicators such as product viscosity and volatile matter content while further achieving energy saving and efficient recovery of low-boiling-point substances in the production process.

The present invention generally relates to a device, a system comprising a plurality of devices and a method for controlled heat transfer, in particular by means of a condensing liquid, to workpieces, and in particular for soldering items to be soldered in a vapor phase zone. The vapor formed when the items to be soldered are immersed in the vapor phase zone is discharged and recovered. The immersion of the items to be soldered in the vapor phase zone and the removal of the items to be soldered from the vapor phase zone is realised in a simple manner.

Embodiments described herein relate to apparatuses and methods for self-assembled monolayer (SAM) deposition. The apparatuses described herein include a process chamber having various vapor delivery apparatuses fluidly coupled to the process chamber. SAM precursors can be delivered to a process volume of the chamber via various apparatuses heated to maintain the precursors in a vapor phase. In one embodiment, a first ampoule or vaporizer configured for delivering a SAM precursor can be fluidly coupled to a process volume of the process chamber. A second ampoule or vaporizer configured to deliver a material different from the SAM precursor can also be fluidly coupled to the process volume of the process chamber.

The application discloses a lifting swing door vacuum tank, which comprises a fixed beam, the two ends of the fixed beam are respectively sleeved with fixed seats, a plurality of bolt holes are arranged on the fixed seats, a first cross beam, a second cross beam and a third cross beam are fixedly inserted into the fixed beam, a pair of front end rollers, a pair of middle rollers and a rear end roller are rotatably installed below the first cross beam, the second cross beam and the third cross beam, and the application relates to the technical field of vapor phase drying equipment. The structure of a long roller in the traditional mode is divided into the structures of multiple short rollers, which are then distributed in a triangular mode on the bag body, and the multiple short rollers are designed below the same fixed beam. The design can save the number of rollers and ensure that the multiple short rollers are located at the same position, so that the position needs not to be calibrated after the equipment is maintained.

This utility model discloses a solvent evaporator vapor phase heat recovery system. The solvent vapor outlet of the descaling machine is connected to the shell side of the first evaporator, the outlet of the mixed oil inlet pipe is connected to the tube side inlet of the first evaporator, the bottom outlet of the first evaporator tank is connected to the shell side inlet of the mixed oil heat exchanger, the shell side outlet of the mixed oil heat exchanger is connected to the tube side inlet of the second evaporator, the secondary steam outlets of the first and second evaporator tanks are connected to the shell side inlet of the heat pump evaporator, the tube side outlet of the heat pump evaporator is connected to the compressor inlet, the compressor outlet is connected to the shell side inlet of the heat pump condenser, the shell side outlet of the heat pump condenser is connected to the tube side inlet of the heat pump evaporator through an expansion valve, the tube side outlet of the heat pump condenser is connected to the flash tank, the bottom outlet of the flash tank is connected to the tube side inlet of the heat pump condenser through a circulating pump, and the top secondary steam outlet of the flash tank is connected to the steam inlet of the descaling machine. This system can reduce the consumption of steam and cooling water in oil processing.

The application discloses an industrial continuous production method and system of low-deuterium water, and the method is as follows: after pretreatment, raw water enters a tower group formed by a plurality of rectifying towers in series for separation, deuterated water is enriched in a liquid phase, and low-deuterium water is enriched in a vapor phase. The extracted high-purity low-deuterium water vapor is pressurized by a compressor and then condensed in a reboiler to release heat and drive the rectifying process, and meanwhile, part of the condensed low-deuterium water is extracted as a product, and part of the condensed low-deuterium water is returned to the rectifying tower as reflux liquid. The tower top vapor and the tower bottom liquid flow cross each other between the towers to form a closed loop or a cascade circulation. The application realizes continuous and stable production of low-deuterium water with a deuterium content reduced by 1-3 orders of magnitude by using a full heat pump rectifying method, and the low-deuterium water is easy to be popularized in industry.

This invention discloses a highly efficient and energy-saving separation method and system for 1,4-cyclohexanediethanol (CHDM). It is a three-tower distillation system with embedded thermal integration and positive / negative pressure coupling. The product distillation tower is thermally coupled to the methanol tower, and the de-weighing tower is thermally coupled to the product distillation tower. The de-weighing tower is coupled to the product distillation tower, meaning the top vapor phase from the de-weighing tower directly enters a suitable position in the product distillation tower, and a suitable amount of liquid is extracted at an appropriate position as reflux from the de-weighing tower. This significantly saves energy and reduces investment costs without affecting separation. The bottom temperature of the de-weighing tower can operate stably below 240°C for extended periods, reducing the risk of high-temperature polymerization and dehydration. A heat exchanger is embedded at a suitable position in the methanol tower stripping section to heat the methanol tower with the top vapor phase from the product distillation tower, further reducing energy consumption.

Methods for selectively etching SiGe relative to Si are provided. Some of the methods include forming a passivation layer on the surface of a Si layer to enhance SiGe etchant selectivity, and using a halogen intercompound gas that preferentially etches SiGe over Si in the presence of the passivation layer. The methods can be performed in a cyclical manner until a desired thickness of the SiGe layer is obtained.

A method of preparing isopropyl alcohol (IPA), the method including the steps of (S1) preparing a crude isopropyl alcohol (IPA) product obtained by performing gas purification and isopropyl alcohol purification on a reaction product of propylene and water; (S2) feeding the crude IPA product to a first section of a dividing wall distillation column including the first section, a second section, a top section, and a bottom section; and (S3) in the dividing wall distillation column, separating water and low boiling point organic materials contained in the crude IPA product to the top section, separating high boiling point organic materials and inorganic materials contained in the crude IPA product to the bottom section, and obtaining purified isopropyl alcohol in a liquid phase or a vapor phase to the second region.

The present application relates to a method for removing a particle from a photolithographic mask, including the following steps: (a) positioning a manipulator, which is movable relative to the mask, in the vicinity of the particle to be removed; (b) connecting the manipulator to the particle by depositing a connecting material on the manipulator and / or the particle from the vapor phase; (c) removing the particle by moving the manipulator relative to the photolithographic mask; and (d) separating the removed particle from the manipulator by carrying out a particle-beam-induced etching process which removes at least a portion of the manipulator.

This installation includes a processing chamber (5) which forms an internal volume for processing the substrate (SUB) in the form of a sheet or strip, the inlet (E') and outlet (S') of the installation communicating respectively with the inlet (E) and outlet (S) of the processing chamber, means (6) for injecting an active gas mixture into the processing volume of the substrate intended for the deposition, growth or modification of the material, and means (7) for heating the internal volume of the processing chamber.The treatment chamber (5) extends in a generally vertical manner, with the inlet and outlet of the treatment chamber located at different altitudes (ZE, ZS), while free spaces (37, 38) are provided on either side of the substrate path, in order to separate the respective faces of the substrate from the front walls (50, 51) of the chamber, the injection and heating means being provided on the front walls (50, 51) and the injection means being equipped with cooling means (65, 66). Figure for the abbreviation [Fig. 9].

Reactor for the deposition of silicon from a process gas, comprising a double-walled reactor bell (12) made of stainless steel mounted on a base plate (48), the bell having an outer wall (16) and an inner wall (18) forming an intermediate space (20) supplied with cooling medium, wherein current-carrying support rods (30) for the crystallization of pure silicon from the vapor phase are mounted on the base plate (48) within a process chamber (28) enclosed by the reactor bell (12), characterized in that a double-walled inner cylinder (32) is arranged in the process chamber (28) at a distance (42) from the inner wall (18) of the reactor bell (12) and at a distance above the base plate (48), the annular space of which within the double wall of the inner cylinder (32) is supplied with a cooling medium and the inner surface of which, facing into the process chamber (28), bears an inert coating (34) which preferably consists of silver.

Methods of modifying properties of a cellulosic material include depositing an additive onto the cellulosic material, the additive being in a vapor phase and configured to modify one or more properties of the cellulosic material and adsorbing the additive into the cellulosic material, wherein the additive reacts with one or more functional groups of the cellulosic material. The depositing can be an atomic layer deposition of the additive onto the cellulosic material. The additive can be configured to react with a nucleophile in the cellulosic material. One or more properties of the cellulosic material can include hydrophobicity, thermal conductivity, thermal diffusivity, fungo-toxicity, toxicity, wettability, tensile strength, corrosiveness, biodegradability, bio-toxicity, or swelling.

This invention discloses a vapor phase thin film deposition apparatus and method for semiconductor crystals, relating to the field of vapor phase thin film deposition technology. The apparatus includes a frame; a rotating assembly is mounted on a worktable inside the frame; the rotating assembly includes a rotating disk; the rotating disk is movably mounted to the worktable via a rotating shaft; the rotating disk has multiple holes for mounting disks; firstly, a second drive motor in the lifting assembly drives one of the lead screws to rotate; adjacent lead screws are connected by a sprocket and chain, causing a threaded sleeve to move a lifting plate upwards; a fixed frame connected to the bottom of the lifting plate drives a movable sleeve upwards; an arc-shaped groove on the side wall of the movable sleeve engages with a post on the side wall of the rotating rod, allowing the rotating rod to rotate 90° along the bearing at the bottom; when the L-shaped frame at the top of the rotating rod rotates outside the rotating disk, an electric pusher cylinder mounted on the top of the L-shaped frame drives an adsorption structure to achieve corresponding loading and unloading, thus effectively reducing loading and unloading time.

This utility model relates to an anti-clogging structure for the vapor phase pipe of a polymerization device, belonging to the field of anti-clogging technology. It includes a vapor phase pipe body connected to a steam pipe, which is connected to an EG steam system. It also includes a vibration mechanism comprising a fixed ring and a vibration unit. The fixed ring is fixedly sleeved on the vapor phase pipe body, and the vibration unit is connected to the fixed ring. The vibration unit includes a moving rod that movably passes through the fixed ring, with a moving block fixedly installed at one end of the moving rod. During production operation, this utility model introduces EG steam into the vapor phase pipe body, causing the oligomers adhering to the body to cool, solidify, detach, and be discharged, thus preventing clogging and improving the operational stability of the polymerization device. Furthermore, the vibration facilitates the separation of the oligomers from the vapor phase pipe body, enhancing the anti-clogging effect.

This invention discloses a continuous steam distillation extraction system for woody essential oils, relating to the field of woody essential oil distillation extraction. Based on a distillation tower, it incorporates a spiral flow channel and a multi-stage gradient inverted conical filter layer. The tower is divided into a distillation chamber, a filtration chamber, and a steam outlet chamber. During distillation, the temperature and pressure parameters of each chamber are collected in real time. Using the distillation chamber as the first stage and the steam outlet chamber as the second stage, single-domain cross-linking analysis is performed in conjunction with the filtration chamber parameters to generate action interference commands. These commands drive a cylinder rod to achieve online self-cleaning of the filter layer and dynamic spacing control. This enables deep vapor phase impurity removal and closed-loop control of the distillation process, extending the system's continuous operating time, ensuring stable pressure-temperature-vapor velocity balance within the tower, and improving the extraction rate and product quality of woody essential oils. Essentially, it maintains the stability of the working environment within the tower while preserving the basic function of vapor phase filtration.

Acrolein is produced by selectively oxidizing iso-propanol over a first mixed metal oxide catalyst in the presence of oxygen in the vapor phase. The first mixed metal oxide catalyst comprises oxides of molybdenum and bismuth. Acrylic acid is produced by selectively oxidizing the acrolein over a second mixed metal oxide catalyst in the presence of oxygen in the vapor phase. The second mixed metal oxide catalyst has a different composition from the first mixed metal oxide catalyst.