The invention relates to the technical field of semiconductors, and discloses a
semiconductor structure and a preparation method thereof, and the method comprises the steps: providing a substrate with a gate structure layer, and the gate structure layer comprises a plurality of gates which are arranged at intervals; forming a sacrificial layer between the gates on one side, deviating from the substrate, of the gate structure layer; forming a first
oxide layer covering the sacrificial layer and the gate structure layer on one side, away from the substrate, of the sacrificial layer;
etching the first
oxide layer to
expose the upper surface of the sacrificial layer; and removing the sacrificial layer and the first
oxide layer and the gate structure layer located in the self-aligned source-drain
contact region to form a self-aligned
metal layer. According to the technical scheme, through preparation and removal of the sacrificial layer, the depth-to-
width ratio of
dry etching is reduced, the reaction space of wet
etching is improved, the oxide layer between the grids can be fully etched, it is ensured that the oxide layer on the surface of the substrate can be completely removed, the quality of the self-aligned
metal layer is improved, and the yield of the self-aligned
metal layer is improved. And the
contact resistance of the self-aligned metal layer is reduced.