51 results about "Blazed grating" patented technology

The invention discloses a system and method for generating, regulating and controlling a partially coherent space-time light field. The system comprises a pulse shaping assembly composed of a plurality of optical elements and an incident light source used for providing a completely coherent ultrafast pulse light field. An optical element in the pulse shaping assembly comprises a first blazed grating, a first cylindrical lens, a two-dimensional dynamic holographic modulator, a second cylindrical lens and a second blazed grating which are sequentially arranged in the light field propagation direction. The focal lengths of the first cylindrical lens and the second cylindrical lens are the same, and the distance between the adjacent optical elements is equal to the focal lengths of the first cylindrical lens and the second cylindrical lens; the two-dimensional dynamic holographic modulator is used for loading a specific complex amplitude modulation function to reconstruct the spatial-spectral characteristics of the light field. According to the invention, the two-dimensional space-spectrum function of the pulse is dynamically modulated, the generation of the partially coherent space-time wave packet is realized, and the amplitude and structure distribution of the space-time coherence can be designed and regulated as required.

The invention provides a high-flux large-volume optical tomography system and method, and the system comprises a spatial light modulator which is used for carrying out the wavefront modulation of an incident laser beam, and generating an illumination light beam; a scanning device for generating an illumination light sheet based on the illumination beam; the sCMOS camera is used for detecting signals; the sample table is used for bearing and driving a sample to move; the synchronous control module is configured to control the spatial light modulator to dynamically load a composite phase pattern, and the composite phase pattern is formed by superposition of a depth-of-field phase component used for generating an extended depth-of-field light beam, a blazed grating phase component used for concentrating energy to first-level light and a lens phase component used for controlling a light beam focus to perform axial scanning; the synchronous control module is further configured to synchronously control the refreshing of the composite phase pattern and the deflection angle of the scanning device so as to acquire a three-dimensional image view field block through pure optical scanning during the stationary period of the sample stage. According to the invention, the imaging flux is greatly improved.

A method is provided for forming optical elements with different optical element structures in a single element material layer. The method includes forming a patterned hard mask over an element material layer deposited on a top surface of a substrate, and patterning a first region of the element material layer to form a first plurality of optical features. The method also includes depositing a dielectric layer over the patterned hard mask, and selectively etching the dielectric layer and the element material layer to form a second plurality of optical features in a second region of the element material layer. The first plurality of optical features may be a binary grating structure, and the second plurality of optical features may be a blazed grating structure.

A design method of a Gibbs-Wulff optical vortex array mask plate, steps are as follows: obtaining an electric field expression of a Gibbs-Wulff optical vortex array, combining the amplitude, phase of the Gibbs-Wulff optical vortex array with a blazed grating, obtaining a complex transmittance function of the Gibbs-Wulff optical vortex array mask plate, and the mask plate described based on the complex transmittance function is the Gibbs-Wulff optical vortex array mask plate. The present application utilizes the principle of computer holography, and obtains the amplitude modulation phase mask plate of the Gibbs-Wulff optical vortex array through computer coding, so that the Gibbs-Wulff optical vortex array with controllable boundary and controllable structure and arrangement mode in the boundary can be generated. Thus, the present application has important application value in the fields of particle manipulation and optical micro-machining.

The utility model provides a display panel, a limiting layer of the display panel is provided with a groove at a position corresponding to a light source, a limiting part is formed corresponding to a first gap between adjacent light sources, a color conversion unit is arranged in the groove, a blazed grating is arranged on the groove wall of the groove, and the blazed grating is located between the limiting part and the color conversion unit. A second gap is formed between the color conversion unit and the adjacent blazed grating, and the emergent light of the light source is converted by the color conversion unit to directly form display light, or is converted by the color conversion unit, is reflected by the blazed grating and then is emitted from the second gap to form the display light. Therefore, light converted by the color conversion unit is directly emitted from the second gap after passing through the blazed grating and does not pass through the color conversion unit again, light loss caused by multiple times of reflection by the metal coating and scattering and re-absorption by the color conversion unit can be reduced, and the brightness can be improved.

The application provides a complex amplitude SLM adaptive optical path alignment system and method for aligning a to-be-aligned light beam in a disturbed channel, wherein the to-be-aligned light beam in the disturbed channel is decomposed into target light and reference light after passing through a beam splitter; a wavefront sensor receives the reference light, acquires phase information of the reference light and inputs the phase information into a processor; the processor calculates a superimposed compensation amount of complex amplitude regulation according to an alignment position and generates a phase hologram, and inputs the phase hologram into a liquid crystal controller; the phase hologram comprises a plurality of concentric circles, and is used for simulating a ring-shaped blazed grating of focused light rays at a preset alignment position; a liquid crystal of a phase SLM receives the target light, the liquid crystal controller converts the phase hologram into a control voltage, and controls the liquid crystal to perform alignment output on the target light; and the application can continuously correct and align the light beam transmitted in the disturbed optical channel based on pure phase SLM complex amplitude regulation.

A method for multifocal energy gradient laser holographic cutting of hard and brittle materials includes the following steps: S1, determining the parameters of the incident beam and the high numerical aperture focusing objective; S2, determining the three-dimensional multifocal beam and parameters of the target hard and brittle material; S3, setting a two-dimensional linear phase distribution on the spatial light modulator plane as the initial phase for subsequent iterative calculations; S4, establishing a forward-backward propagation iterative loop based on phase optimization to calculate the multifocal holographic phase distribution; S5, superimposing a linear blazed grating phase on the multifocal holographic phase distribution, and generating a composite diffraction phase hologram using MATLAB code and inputting it into the spatial light modulator; achieving uniform holographic cutting with consistent actual absorbed energy in each layer. This invention features controllable three-dimensional focal positions, adjustable energy gradients along the depth direction at each focal point, strong deep-layer energy compensation capability, simultaneous aberration correction, and high consistency in cutting at different depths.

The embodiment of the present application discloses a manufacturing method of a blazed grating. First, a substrate for manufacturing the blazed grating is provided, and a patterned mask is covered on the substrate. Then, the substrate is etched by using a first etching rate and taking the patterned mask as a mask. A section perpendicular to a plane where the substrate is located is formed on the substrate. Then, the substrate is continuously etched by using a second etching rate, and the height of the section is reduced. The first etching rate is N times of the second etching rate. That is, the manufacturing method of the blazed grating provided by the embodiment of the present application first etches the substrate by using a higher etching rate to obtain a general structure of the blazed grating, and the structure includes the section. Then, the substrate is continuously etched by using a lower etching rate to repair the section formed by the first etching rate, so that the blazed grating with better structure parameters is finally formed.

The invention relates to the technical field of laser precision machining, in particular to a method for machining a blazed grating on a hard and brittle material through space-time shaping laser based on a Fabry-Perot cavity, and the method comprises the following steps: transmitting an initial ultrafast laser pulse; the initial ultrafast laser pulse is guided into a Fabry-Perot cavity, the Fabry-Perot cavity is composed of two partial transmission mirrors with preset relative inclination angles, the initial ultrafast laser pulse is reflected for multiple times in the Fabry-Perot cavity, and a string of sub-pulse sequences is output; the sub-pulse sequence is guided into a focusing system, the angle difference between the sub-pulses is converted into transverse spatial position offset on a focal plane by using the Fourier transform characteristic of the focusing system, and the transverse spatial position offset is irradiated on a workpiece made of a hard and brittle material; relatively moving the workpiece made of the hard and brittle material and the initial ultrafast laser pulse; and the steps are repeated, and the periodic blazed grating structure is formed on the workpiece made of the hard and brittle material. Therefore, decoupling of time-domain thermal regulation and spatial-domain morphology regulation is realized.

This invention provides a method for simulating the morphological evolution of blazed grating etching, including: pre-constructing an etching mask structure based on a pre-defined blazed grating structure; determining etching contour lines at different times and positions based on the morphological evolution of the mask structure during etching, and determining the motion properties of different contour lines; determining the linear equation of each contour line and the motion mode of each contour line; determining the motion direction of each contour line in combination with different etching processes; and determining and updating the position and linear equation of each contour line at different etching times based on the motion direction and motion rate of each contour line; and judging the simulated etching endpoint of the blazed grating etching morphology based on different etching processes. This invention can more accurately describe the influence of different processes and process parameters on the final etching result, perform in-depth processing of discrete technical data, and thus predict and control the ion beam etching process.

This disclosure relates to a method (100) for fabricating a blazed grating. The method (100) comprises providing a substrate and a patterned mask layer (110) on the substrate, performing primary dry etching (120) of the substrate such that primary ions are accelerated towards a primary etch direction to impinge on the substrate, and performing secondary dry etching (150) of the substrate such that secondary ions are accelerated towards a secondary etch direction to impinge on the substrate. A primary projection of the primary etch direction and a secondary projection of the secondary etch direction onto the grating cross-sectional plane extend perpendicular to one and the other of a blaze facet direction and an anti-blaze facet direction, respectively, and ions accelerated towards a direction with a projection onto a grating cross-sectional plane perpendicular to the blaze facet direction are collimated to form a collimated ion beam for etching the substrate.

The application discloses an ultra-narrow linewidth Littman tunable laser, comprising a semiconductor laser diode, a collimating lens, a blazed grating and a tunable mirror which is arranged opposite to the grating plane of the blazed grating and is angle-adjustable, wherein the semiconductor laser diode, the collimating lens and the blazed grating are located on the same optical axis, and the grating plane of the blazed grating is distributed in intersection with the optical axis; and the application further comprises a cavity length-adjustable F-P etalon, which is located on the output light path of the zero-order diffraction light of the blazed grating, and the zero-order diffraction light is output as laser after passing through the F-P etalon. In this way, the semiconductor laser diode, the collimating lens, the blazed grating and the tunable mirror form a standard Littman tunable laser, and the cavity length-adjustable F-P etalon is additionally arranged, so that the cavity distance of the F-P etalon is adjusted to match the narrow-band filtering characteristics of the F-P etalon with the output wavelength of the semiconductor laser diode.

The application provides a blazed grating preparation process, a blazed grating and a diffractive optical waveguide. The blazed grating preparation process comprises the following steps: forming a blazed grating preparation process parameter information query table based on a blazed grating preparation process parameter calculation model; querying the preparation process parameters of a target blazed grating through the blazed grating preparation process parameter information query table by using known related setting parameters of the target blazed grating; and preparing the target blazed grating according to the preparation process parameters of the target blazed grating. The blazed grating preparation process provided by the application can quickly and accurately determine the preparation process parameters of the target blazed grating with the setting target parameters, so that the target blazed grating can be quickly and accurately prepared.

This invention discloses a square lattice structured light-illuminated super-resolution microscopy system and method. The system integrates a square blazed grating hologram generation module, a digital lens hologram generation module, and a composite hologram generation module on its phase modulator. Wavefront phase modulation of the incident beam is achieved by loading the composite hologram onto the incident beam. The acquired raw image is pre-filtered, multiplied by a pre-calculated weighting function, and superimposed to obtain an intermediate image. Finally, deconvolution is performed on the intermediate image to obtain the final super-resolution image. This invention concentrates light energy into effective diffraction orders through the loaded square blazed grating hologram, improving the system's light energy utilization efficiency. Combining the digital lens hologram and adjusting the lens focal length allows control of the focusing position of the diffraction orders. Furthermore, adjusting optical elements enables switching between different magnification objectives, meeting the needs of multi-scale sample observation.

The application discloses a narrow linewidth tunable Raman laser and an emission method, relates to the field of Raman lasers, and comprises a half-wave plate, a pump source and a focusing lens which are arranged on the two sides of the half-wave plate, a laser resonant cavity is arranged on the other side of the focusing lens, a cavity locking frequency doubler is arranged on the other side of the laser resonant cavity, a shaping lens group is arranged between the laser resonant cavity and the cavity locking frequency doubler, a dichroic mirror is arranged on the other side of the cavity locking frequency doubler, the laser resonant cavity is arranged in a V-shaped cavity structure which is composed of an input mirror, an output mirror and a reflective blazed grating, a diamond crystal is arranged between the input mirror and the output mirror, and the reflective blazed grating is arranged below the diamond crystal. The stability of the laser resonant cavity is improved through the design of the cavity mirror, the wavelength adjustment is accurate to 0.01 nm, and the loss in the transmission process is reduced through the cavity locking frequency doubler of the ring-shaped cavity structure.

This invention provides a method for forming a waveguide structure and a blazed grating. The method for forming the waveguide structure includes: step S11: providing a silicon material layer; step S12: etching a portion of the silicon material layer to form multiple steps on the surface of the silicon material layer; step S13: oxidizing the surface of the silicon material layer using a thermal oxidation process to form a silicon oxide layer; step S14: wet etching the silicon oxide layer; step S15: repeating steps S13 to S14 to make the surface of the stepped silicon material layer become a smooth slope shape. In the waveguide structure of this invention, the smooth slope of the silicon material layer can form a waveguide structure with gradually varying thickness, thereby reducing coupling loss.

A reflective spectral purity filter (SPF) for extreme ultraviolet (EUV) light includes a substrate having a reflective surface and an angle of incidence of at least 60 degrees, and a blazed diffraction grating formed on the substrate, the blazed diffraction grating having a grating pitch and blaze angle (fixed or variable) configured to simultaneously diffract incident EUV light into a higher-order diffraction angle and confine out-of-band (OOB) light to a Oth order reflection angle to angularly separate the EUV light and the OOB light. An imaging system including the reflective SPF, the imaging system having a field of view (FOV) configured to collect the spatially filtered EUV light and reject the OOB light based on angular separation of the lights.

A high-throughput miniature Raman spectrometer, belonging to the field of spectroscopic analysis instruments, includes a laser module, an external optical path system, and a beam splitting system. The laser module comprises a narrowband laser module and a collimating mirror; the external optical path system includes a dichroic mirror, an aspherical lens, a stage, a long-pass filter, a cemented doublet lens, and a slit; the beam splitting system includes a collimating mirror, a blazed grating, a focusing mirror, and a linear charge-coupled device (CCD). By integrating the laser module and external optical path system with the beam splitting system, signal attenuation during fiber optic transmission is avoided; a large numerical aperture aspherical lens is used to achieve efficient sample excitation and signal collection; the cemented doublet lens converges the beam to the slit, reducing the optical path size and eliminating axial chromatic aberration; and the cascaded filtering structure of the dichroic mirror and long-pass filter effectively suppresses Rayleigh scattering interference. While maintaining resolution, the luminous throughput is significantly improved, offering low cost, high precision, and portability, making it suitable for fields such as food safety testing.

This invention discloses an optical waveguide module, relating to the field of optical device technology. It includes a substrate, an optical waveguide layer on top of the substrate, and a buffer layer with a continuously curved, wave-shaped design between the substrate and the waveguide layer. This invention forms a stress-relieving structure based on the wave-shaped buffer layer, substrate, and waveguide layer, achieving thermal expansion coefficient matching and bending stress dispersion between the substrate and the waveguide layer. Simultaneously, combined with various adhesion enhancement layers, it ensures the long-term stability of the multi-layer interface. Furthermore, the input coupling layer employs a composite design of a blazed grating and a subwavelength grating, significantly improving the coupling efficiency from visible light to near-infrared. The output coupling layer achieves wide field-of-view output through a gradient periodic grating, adapting to large viewing angle requirements. Additionally, it integrates a modulator and a graphene thermal conductive layer, simultaneously solving the problems of high-speed modulation and heat dissipation, significantly improving the optical performance, thermal stability, and mechanical reliability of the optical waveguide module.

This invention discloses an extreme ultraviolet (EUV) time-delay compensated monochromator, processing method, and electronic device, relating to the field of EUV light processing technology. The monochromator includes: a first optical structure comprising a first planar blazed grating and a first ring mirror, wherein the first planar blazed grating is used to split and diffract the incident light, and the first ring mirror is used to focus and reflect the beam; a second optical structure comprising a second planar blazed grating and a second ring mirror, wherein the second planar blazed grating is used to compensate for the pulse forward tilt introduced by the first planar blazed grating, and the second ring mirror is used to focus and reflect the beam; and a slit plane, disposed between the first and second optical structures to ensure symmetry, for filtering the beam corresponding to the desired wavelength. This invention solves the technical problem in related technologies where monochromators cannot simultaneously achieve performance indicators such as energy transfer efficiency, spectral resolution, and pulse forward tilt compensation.

The invention provides a quantum cascade laser external cavity dual-wavelength output device and method. The quantum cascade laser external cavity dual-wavelength output device comprises a double-end output quantum cascade laser, an aspheric collimating lens, a rotatable half-wave plate, a mid-infrared grating polarizer, a total reflection mirror and a blazed grating. A light beam is divided into two paths of polarized light with the same polarization state through polarization separation and polarization conversion, the polarized light is guided by an independent reflecting mirror and then enters the same blazed grating at different angles, the polarized light is diffracted by the blazed grating and then enters the reflecting mirror at the same diffraction angle, and then the polarized light returns to the laser through the reflecting mirror to form external cavity oscillation. The feedback intensity of the two paths can be balanced by rotating the half-wave plate, and the dual-wavelength independent tuning can be realized by adjusting the corresponding reflecting mirror. According to the invention, stable dual-wavelength output is realized by using a single grating, mode competition is effectively inhibited, the problem of wavelength lock loss caused by polarization mismatch is solved, and the dual-wavelength tunable filter has the advantages of simple structure, flexible tuning, stable output and high efficiency.

Aspects of the present disclosure includes methods of forming a waveguide. The method of forming a waveguide includes depositing a mandrel disposed over a substrate. Portions of the mandrel are etched to form a trench. A spacer material is deposited over the mandrel and the substrate. The spacer material is etched to form a spacer in the trench. The mandrel is etched using ion beam etching (IBE). The mandrel and the substrate are etched to form a blazed grating. The spacer is removed.

A design method of a customizable arbitrary shape structured light mask plate, steps are as follows: based on holographic shaping technology and the current model, the electric field expression of the customizable arbitrary shape structured light beam is obtained, the complex transmittance function of the customizable arbitrary shape structured light beam mask plate is obtained by combining the amplitude, phase and a blazed grating of the light beam, and the mask plate described based on the complex transmittance function is the customizable arbitrary shape structured light mask plate. The mask plate designed by the application can generate a customizable arbitrary shape structured light. The topological charge value of the structured light is controllable, and the structured light with amplitude and phase distribution along any preset track can be generated according to actual requirements. Compared with the previous beam shaping technology, the controllability of the structured light is greatly improved.

This invention discloses a method for fabricating a large-aperture convex grating with a high-depth-width blazed groove shape. The method includes: confirming the grating line density using dispersion theory; determining the grating's operating temperature under corresponding wavelength radiation backgrounds; determining the grating substrate material; performing a rough calculation of the blaze angle using scalar diffraction theory; performing a precise calculation of the blaze angle using the finite-difference time-domain method; determining the film material and thickness; designing the consistency of TE and TM diffraction efficiencies; analyzing the grating groove shape difference; confirming the grating groove shape parameters; electron beam exposure and development of the blazed groove shape; designing, exposing, and developing the exposure dose compensation; stitching together the large-aperture grating exposure areas; ion beam etching of the grating; and coating the grating with a metal reflective film. This fabrication method ensures the stability of the diffraction efficiency of the grating substrate and film materials under varying temperatures from room temperature to deep cryogenics, as well as the consistency of TE and TM diffraction efficiencies, thus guaranteeing the imaging quality and response stability of spectroscopic instruments.

The invention belongs to the technical field of laser, and provides a time sequence synchronous multi-wavelength pulse laser output device, which comprises a plurality of groups of optical gain modules, each group of optical gain modules comprises a blazed grating and a laser gain tube, each blazed grating is configured to reflect incident light with a set wavelength into the laser gain tube, and each blazed grating is configured to reflect the incident light with the set wavelength into the laser gain tube. Each group of light splitting gain modules are used for forming laser with different wavelengths; the acousto-optic modulator is configured to enable the multiple groups of gained multi-wavelength lasers to be incident to the acousto-optic modulator to meet the Bragg condition and then enable the pulse lasers to be synchronously output in time sequence, and at least every two groups of lasers are incident to the same position of the acousto-optic modulator; each group of output mirrors is plated with a semi-transparent and semi-reflective film and forms a resonant cavity with one group of blazed gratings, a laser part returns to the laser gain tube through the output mirrors along the same path and forms resonance with the blazed gratings, and a laser part is transmitted through the output mirrors; and the beam combining grating is used for combining the pulse lasers with different wavelengths and then outputting the combined pulse lasers at the same emergent angle.

The invention provides a portable spectrum analyzer based on a grating diffraction principle, and relates to the field of spectrum analyzers. The portable spectrum analyzer based on the grating diffraction principle comprises a supporting structure, a handle is fixedly connected to the position, close to the rear side, of the center of the lower end face of a main body, a control button is arranged at the position, close to the upper end, of the center of the front side wall of the handle, and the supporting structure is arranged at the position, close to the front side edge, of the center of the lower end face of the main body. All optical, mechanical and electronic components are highly integrated in a compact sealed shell by adopting an integrated optical machine design and an image plane diffraction optical path, a complicated movable adjusting mechanism of a traditional spectrometer is abandoned, the size is small, the weight is light, handheld or portable handheld operation is truly realized, and the cost is low. Through the blazed grating, the aspherical lens and the high-sensitivity image sensor which are optimally designed, the wide spectral range, the high optical resolution and the low stray light level which are comparable with those of a traditional table type spectrograph are achieved in a compact structure.

This invention discloses an ultrasonic milling method for blazed gratings on metal surfaces, comprising the following steps: calculating the required clearance angle of the milling cutter based on the blaze angle of the blazed grating to be machined; calculating the required torsional and bending ratios of the milling cutter based on the length ratio of the cutting surface to the pressing surface of the blazed grating to be machined; calculating the frequency of the input signal, the feed rate of the milling cutter, and the spindle speed of the milling cutter based on the spacing of the blazed grating to be machined; calculating the predetermined angle between the axial direction of the milling cutter and the surface to be machined, and the milling depth based on the length of the blazed grating to be machined perpendicular to the feed direction; and calculating the amplitude of the input signal based on the height difference between the crests and troughs of the blazed grating to be machined. The ultrasonic milling method for blazed gratings on metal surfaces according to embodiments of this invention has advantages such as high processing efficiency, low machine tool precision requirements, and high degree of freedom.

The invention provides a vertical cavity surface emitting laser and a preparation method thereof, and relates to the technical field of semiconductor optoelectronic devices. A vertical cavity surface emitting laser comprises: a surface blazed grating for separating a diffraction main maximum zero order from an interference main maximum zero order to achieve single beam emission; and the surface embossment structure is arranged on the surface, far away from the single-beam emergent surface, of the surface blazed grating and is used for inhibiting high-order mode loss so as to realize single-mode emergent.

The invention discloses an optical path system of a ball-borne ultraviolet spectrograph, which belongs to the field of optical instrument design, solves the problems of low broadband efficiency and poor image quality of the existing optical path, and comprises a front-end receiving and transmitting module comprising a light collecting lens (f is equal to 200mm), an ultraviolet enhanced integrating sphere (the reflectivity is greater than or equal to 90%) and an ultraviolet optical fiber; and the rear-end spectrum detection module comprises a slit (10 [mu] m wide), a collimating lens (f = 79 + / -0.4 mm), a reflection blazed grating, an imaging lens (f = 106 + / -0.4 mm) and a back-illuminated ultraviolet CCD (6.5 [mu] m pixel). The lenses are all made of fused quartz or calcium fluoride materials suitable for the ultraviolet band, and other elements are processed through film coating and the like, so that it is guaranteed that an optical path covers 200-400 nm. And a long slit and aberration optimization design is adopted, so that the spatial dimension image quality is remarkably improved. The optical path has the advantages of being wide in wave band, high in luminous flux, high in image quality and high in integration level.

Aspects of the present disclosure includes methods of forming a waveguide. The method of forming a waveguide includes depositing a mandrel disposed over a substrate. Portions of the mandrel are etched to form a trench. A spacer material is deposited over the mandrel and the substrate. The spacer material is etched to form a spacer in the trench. The mandrel is etched using ion beam etching (IBE). The mandrel and the substrate are etched to form a blazed grating. The spacer is removed.