Spectrometer using MOEMS movable blazed grating array

Abstract

The invention provides a spectrometer which has small volume, simple structure and low cost and uses an MOEMS movable blazed grating array. The spectrometer comprises a light source, a collimating device, a grating or a prism, an imaging device, an MOEMS movable blazed grating array and a driving circuit thereof, and a detector, wherein the collimating device parallels the light beams coming fromthe light source; the grating or the prism receives and disperses the light beams; the imaging device images the dispersed light beams on the MOEMS movable blazed grating array and diffracts the MOEMSmovable blazed grating array to obtain a light beam, and then images the obtained light beam to the detector; the MOEMS movable blazed grating array and the driving circuit thereof are used for diffracting the dispersed light beam; and the MOEMS movable blazed grating array comprises a plurality of parallel MOEMS movable blazed gratings which can be grouped for deflection motion under the controlof the driving circuit so as to gate light beams of different bands. The spectrometer has the advantages of high luminous flux, high light energy utilization rate, high signal-to-noise ratio and thelike, can be widely used in the fields of biochemical analysis, food safety monitoring, etc.

Description

technical field [0001] The invention relates to a MOEMS grating spectrometer. Background technique [0002] At present, there are relatively mature spectrometers on the market, mainly including filter type, raster scanning type, Fourier transform type, array detection type, acousto-optic tuning type, etc., but each has its own advantages and disadvantages. Filter type: simple structure, low cost, large luminous flux, and durable; but poor flexibility, low resolution, single detection object, only suitable for special purposes; grating scanning type: through the rotation of the grating, the monochromatic light is separated by wavelength High and low are sequentially passed through the sample into the detector. This kind of spectroscopic technology is mature and widely used; due to the mechanical wear of the scanning mechanism of this instrument, its wavelength measurement accuracy and reproducibility are poor, and the measurement time of the full spectrum is long; Fourier tr...

AI Technical Summary

Problems solved by technology

However, due to the existence of the moving mirror, the long-term online reliability of the instrument is limited. In addition, there are strict requirements on the use and placement environment of the instrument, which is expensive and bulky; array detection type: the array detection side instrument has a fixed optical path and no moving parts. , high measurement accuracy, good reliability, and relatively high signal-to-noise ratio

But there is also the problem that the near-infrared detection array is extrem

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