High-precision roll angle interferometric measuring device based on blazed grating

Abstract

The invention relates to a high-precision roll angle interferometric measuring device based on blazed gratings. The high-precision roll angle interferometric measuring device comprises a dual-frequency laser source, a blazed grating wedge-shaped plate moving along with a measured member, a light interference device and a phase detection device. The dual-frequency laser source outputs an incident light beam comprising two components of different frequencies and orthogonal linear polarization directions to the light interference device, the incident light beam is reflected twice through the blazed grating wedge-shaped plate under the action of the light interference device to form four measuring light beams in spatial parallel, the interference light beams are formed in the light interference device and output to the phase detection device, phase displacement of the measuring light beams is detected by the phase detection device, and a roll angle is determined according to the relationship between the phase displacement and a roll angle of the wedge-shaped plate. The high-precision roll angle interferometric measuring device has the advantages of high anti-interference capability, high measuring accuracy, simple optical structure, few optical component and angle measuring resolution capable of reaching sub-micro radian, and can meet different precision measurement requirements by adopting the gratings of different grating constants.

Description

technical field [0001] The invention relates to a photoelectric measurement technology, in particular to a high-precision roll angle interference measurement device based on a blazed grating. Background technique [0002] As the key equipment in the field of precision machinery manufacturing, the precise measurement of the geometric position of CNC machine tools and machining centers is the basic guarantee of machining accuracy. As a crucial link in the field of precision machining and precision measurement, the precision motion system directly affects the accuracy of the processed workpiece. Therefore, improving the accuracy of the motion positioning system has become a key task in the development of tools, machine tools and even the manufacturing industry. [0003] In recent years, the precision requirements for ultra-precise displacement are getting higher and higher. In the grating scribing table and various large-scale precision scanning positioning devices, such as sc...

AI Technical Summary

Problems solved by technology

The measurement method based on the wedge-shaped flat plate [Zhang Zhuo et al. Grating wedge-shaped flat plate and the angle measuring device using the flat plate, Chinese Patent No.: 200410013761.7, 2004] can realize a wide range of roll angle measurement, but it uses a wedge-shaped flat plate to work, pitching and yaw errors are difficult to eliminate

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