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Method for growing thin films

PCT No. PCT / FI95 / 00658 Sec. 371 Date Sep. 25, 1996 Sec. 102(e) Date Sep. 25, 1996 PCT Filed Nov. 28, 1995 PCT Pub. No. WO96 / 17107 PCT Pub. Date Jun. 6, 1996A method for growing a thin film on a substrate. A substrate is placed in a reaction space. The substrate is subjected to at least two vapor phase reactants in the form of vapor phase pulses, repeatedly and alternately. Gas within the reaction space is purged between two successive vapor phase pulses essentially entirely by use of a pump connected to the reaction space. The reaction space is purged between two successive vapor phase pulses such that less than 1% of the residual components from the first vapor phase pulse remains prior to the inflow of the second vapor phase pulse.
Owner:ASM AMERICA INC

Sequential deposition/anneal film densification method

A silicon dioxide-based dielectric layer is formed on a substrate surface by a sequential deposition / anneal technique. The deposited layer thickness is insufficient to prevent substantially complete penetration of annealing process agents into the layer and migration of water out of the layer. The dielectric layer is then annealed, ideally at a moderate temperature, to remove water and thereby fully densify the film. The deposition and anneal processes are then repeated until a desired dielectric film thickness is achieved.
Owner:NOVELLUS SYSTEMS

Method and apparatus for treating article to be treated

A thermal treatment apparatus 1 includes a reaction tube 2 for containing wafers 10 contaminated with organic substances having a heater 12 capable of heating the reaction tube; a first gas supply pipe 13 for carrying oxygen gas into the reaction tube 2; and a second gas supply pipe 14 for carrying hydrogen gas into the reaction tube 2. Oxygen gas and hydrogen gas are supplied through the first gas supply pipe 13 and the second gas supply pipe 14, respectively, into the reaction tube 2, and the heater 12 heats the reaction tube 2 at a temperature capable of activating oxygen gas and hydrogen gas. A combustion reaction occurs in the reaction tube 2 and thereby the organic substances adhering to the wafers 10 are oxidized, decomposed and removed.
Owner:TOKYO ELECTRON LTD

Method for inserting spinal implants and for securing a guard to the spine

Apparatus and a method of inserting spinal implants is disclosed in which an intervertebral space is first distracted, a hollow sleeve having teeth at one end is then driven into the vertebrae adjacent that disc space. A drill is then passed through the hollow sleeve removing disc and bone in preparation for receiving the spinal implant which is then inserted through the sleeve.
Owner:WARSAW ORTHOPEDIC INC

Method and device for tissue removal and for delivery of a therapeutic agent or bulking agent

According to an aspect of the present invention, a medical device is provided, which comprises the following: (a) a hollow elongate body (e.g., a elongate cylinder, such as a needle) having distal and proximal ends; and (b) a rotatable member comprising a tissue morselizer and an elongate shaft (e.g., an auger-like tissue-drilling bit). In the devices of the present invention, the elongate shaft is disposed within the hollow elongate body and cooperates with the hollow elongate body to (i) advance material (e.g., morselated tissue) toward the proximal end of the hollow elongate body when the shaft is rotated in a first direction, and (ii) advance material (e.g., a therapeutic agent and/or a bulking agent) toward the distal end of the hollow elongate body when the shaft is rotated in a second direction that is opposite the first direction. According to another aspect of the invention a method of treatment is provided that comprises: (a) inserting the a medical device like that above into the tissue of a patient; (b) morselizing and removing tissue from within the patient while rotating the shaft in a first direction, thereby creating a void within the patient; and (c) introducing a therapeutic agent and/or a bulking agent into the void.
Owner:BOSTON SCI SCIMED INC

Catalysis and micro-electrolysis combined technology for high-concentration refractory organic wastewater

The invention relates to a catalysis and micro-electrolysis combined technology for high-concentration refractory organic wastewater; the organic wastewater is collected to an adjusting tank and enters an air floatation tank for air floatation treatment to remove part of the organic matters after the adjustment of water volume and water quality; the scruff is collected or recovered; the wastewatergoes through Ph adjustment and then enters a catalytic iron-carbon and micro-electrolysis unit to improve the biochemical quality; the effluent goes through Ph adjustment and then enters a sedimentation tank; the effluent of the sedimentation tank adopts anoxic-aerobic biochemistry treatment to remove the organic matters and ammonia nitrogen and then is emitted after reaching the standard; and the filler of the catalytic iron-carbon and micro-electrolysis unit comprises iron, carbon and a catalyst, wherein the mass ratio of the iron, carbon and catalyst is 1: (0.3-1.5): (0.01-0.5). The invention can effectively improve the micro-electrolysis electrochemical reaction efficiency and the degrading capability to the organic matters, and reduce the wastewater treatment cost with convenient technological operation.
Owner:CENT SOUTH UNIV

Power Line De-Icing Apparatus

A power line de-icing apparatus that incorporates both thermal and mechanical means to remove various forms of accumulated ice or wet snow from power lines. The apparatus uses a minimum amount of energy to first de-bond and then break off ice from the power line; using far less power than required to fully melt ice. The apparatus operates autonomously, activating heating and chisel mechanisms, and moving between power line support towers in response to both temperature and ice sensor inputs. This operation is repeated in both directions along the power line as long as icing continues to activate the sensors; removing ice more quickly than it can accumulate and thereby preventing mechanical or electrical damage to the power lines and supporting towers. The apparatus is self contained and powered inductively from the power line. It is installed onto the power line without the need for disconnecting the power line.
Owner:HUYNH TUNG +2

Method for Generating Energy in an Energy Generating Installation Having a Gas Turbine, and Energy Generating Installation Useful for Carrying Out the Method

In a method for generating energy in an energy generating installation (10) having a gas turbine (12), in a first step, an oxygen-containing gas is compressed in a compressor (13, 14) of the gas turbine (12), in a second step the compressed gas is supplied, with the addition of fuel, for combustion in a combustion chamber (15), in a third step the hot flue gas from the combustion chamber (15) is expanded in a turbine (16) of the gas turbine (12) so as to perform work, and, in a fourth step, a branched-off part stream of the expanded flue gas is recirculated into a part of the gas turbine (12) lying upstream of the combustion chamber (15) and is compressed. A reduction in the CO2 emission, along with minimal losses of efficiency, is achieved in that carbon dioxide (CO2) is separated from the circulating gas in a CO2 separator (19), and in that measures are taken to compensate for the efficiency losses in the gas turbine cyclic process which are associated with the CO2 separation.
Owner:ALSTOM TECH LTD

Method and Apparatus Using Electric Field for Improved Biological Assays

Disclosed are a method and apparatus that use an electric field for improved biological assays. The electric field is applied across a device having wells, which receive reactants, which carry a charge. The device thus uses a controllable voltage source between the first and second electrodes, which is controllable to provide a positive charge and a negative charge to a given electrode. By controlled use of the electric field charged species in a fluid in a fluid channel are directed into or out of the well by an electric field between the electrodes. The present method involves the transport of fluids, as in a microfluidic device, and the electric field-induced movement of reactive species according to various assay procedures, such as DNA sequencing, synthesis or the like.
Owner:THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIV
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