136 results about "Electret" patented technology

The invention discloses a ferroelectric electret material based on 3D printing and a preparation method and application thereof, and belongs to the technical field of functional materials and intelligent devices, the ferroelectric electret material comprises solid layers and porous layers, the solid layers are bonded to the two sides of the porous layers, and the porous layers are arranged in one of #-shaped grids or circular grids. By optimizing 3D printing parameters and autonomously regulating and controlling a ferroelectric electret material and a foam structure (pore size, pore shape, porosity and thickness), the ferroelectric electret material can stably store charges after polarization. According to the ferroelectric electret material based on 3D printing and the preparation method and application thereof, the printing precision is improved, the solid layer and the porous layer are prepared separately, the cell size is reduced, and the ferroelectric electret material with excellent piezoelectric performance for 3D printing is obtained; and moreover, accurate control of the foam structure of the ferroelectric electret material, material diversification and preparation process simplification are realized, and the ferroelectric electret material has remarkable advantages in performance and application potential.

The invention belongs to the technical field of sensing, and relates to a flexible and ultrathin non-contact screen sensor and a preparation method thereof. A three-layer structural design is adopted, the electret polymer film is taken as a core material, the characteristics of lightness, thinness, flexibility and full transparency of the electret polymer film are fully utilized, and the electrostatic induction effect of the electret is combined, so that the screen sensor integrating high flexibility, ultra-lightness, full transparency and non-contact sensing characteristics is realized; meanwhile, the array arrangement of the screen sensor can be flexibly designed to realize non-contact contour recognition and sensing, and various application requirements are met. Compared with the prior art, the invention has the advantages of controllable thickness, large-area film formation, low cost, simple structure, simple preparation flow and processing technology and the like.

The invention discloses semiconductor etching equipment and a particulate matter online cleaning method, which are applied to the technical field of semiconductor manufacturing equipment, and the equipment comprises at least one process cavity module, at least one auxiliary processing module and a central transmission robot, an upper electrode plate, a lower electrode plate and a simulation wafer made of an electret material are arranged in the auxiliary processing module, and the auxiliary processing module can be charged or discharged by applying high voltage; when the particles in the process cavity need to be cleaned, the charged simulation wafer is transmitted to the process cavity, the particles are adsorbed by electrostatic force and then transmitted back to the auxiliary cavity for discharging, and finally the auxiliary cavity is cleaned. According to the invention, a'transfer type 'online cleaning concept is initiated, particulate pollutants can be efficiently removed under the condition that the vacuum and process states of a process cavity are not damaged at all, the vacuum breaking and aging process required by a traditional mode is thoroughly avoided, the equipment utilization rate and the production yield are remarkably improved, and the breakthrough of a semiconductor etching equipment maintenance technology is realized.

The invention relates to the technical field of sensors, in particular to an electret-based high-sensitivity flexible vibration sensor and a preparation method thereof, and the method comprises the following steps: S1, plating an electrode I on the bottom surface of an electret PTFE film, and cutting the electret PTFE film into a required shape; s2, charging the electret PTFE film by adopting a corona charging device; s3, preparing an integrated multifunctional mass block comprising a suspension film by adopting a template pouring method; s4, plating an electrode II on the bottom surface of the suspended film; and S5, adopting a PI annular double-sided adhesive tape as a supporting layer, and bonding the electret PTFE thin film and the suspension thin film to obtain the high-sensitivity flexible vibration sensor based on the electret. A sensor capable of maintaining sensitivity without an external power supply can be prepared.

The present invention discloses a coalescence and demulsification device and method based on an electret electrostatic field, wherein the coalescence and demulsification device comprises a shell, a liquid distribution tray, a boiling stop baffle, a multi-media coalescence module, an enhanced sedimentation module, and an electret module arranged on both sides of the multi-media coalescence module and at the same height as the multi-media coalescence module, wherein the liquid distribution tray is externally connected to a liquid inlet, and an oil outlet and a water outlet are arranged on the shell corresponding to the enhanced sedimentation module. The device uses an electret module to replace the traditional electrode assembly of an external active high-voltage power supply to generate an electrostatic field. After electret charging, the electret module can generate an electrostatic field without an external power supply, making the structure of the demulsification device simpler and more compact; in addition, the electret is a permanent body, which can be used for a long time after being electret once, and greatly reduces energy consumption compared to the traditional electrode assembly of an external power supply, and has good economic benefits.

The invention discloses a marine riser eight-arc cylindrical vortex-induced vibration suppression and power generation device which comprises a marine riser, a protection module, a power transmission module and a power generation module. The protection module comprises a mounting inner pipe and a mounting outer pipe; the mounting outer pipe comprises a middle section with an arc-shaped notch; working cabins are arranged at two ends of the middle section; thrust rods are arrayed on the circumference of the working cabin; an arc-shaped shell is arranged at one end of the thrust rod; the power transmission module comprises a rotating impeller, a fixed rod, a driving straight bevel gear and an eccentric disc; the driving straight bevel gear is meshed with a two-way straight bevel gear; the two-way straight bevel gear is meshed with a driven straight bevel gear; the driven straight bevel gear penetrates through the working cabin and is connected with the eccentric disc; the eccentric disc is connected with a thrust rod through a straight groove connecting rod; the power generation module comprises an arc-shaped piezoelectric plate on an arc-shaped shell, and the arc-shaped shell comprises an upper bottom plate embedded with an upper electrode and a lower bottom plate embedded with a lower electrode; and an electret is arranged on the lower electrode. While ocean current energy is converted into electric energy, vortex-induced vibration of the stand pipe is restrained.

The invention relates to a field emission cathode structure and a preparation method thereof. The method comprises the following steps: obtaining a first substrate layer with a polished surface, wherein the first substrate layer adopts a silicon wafer or a metal sheet; processing the first substrate layer into an arrayed grid mesh; sequentially depositing a metal conductive layer and a diffusion barrier layer on the outer surface of the grid mesh; depositing a SiNx electret layer on the diffusion barrier layer, and regulating and controlling nitrogen vacancy distribution of the SiNx electret layer through a gradient doping process; depositing an Al2O3 gradient heterojunction layer on the SiNx electret layer, and regulating and controlling the oxygen vacancy concentration of the Al2O3 gradient heterojunction layer through a gradient doping process to obtain a composite electret grid mesh; and aligning and bonding the composite electret grid mesh, the arrayed cathode emitter and the insulating layer to obtain the field emission cathode structure. By adopting the method, the high emission efficiency and stability of the cathode can be improved.

The present invention relates to a passive electronic signpost based on an energy harvester, which includes a plurality of electronic light-emitting signposts, a foot pedal, and a plurality of buttons. A power generation device for converting kinetic energy generated when the foot pedal is stepped on into electric energy is provided under the foot pedal, and a power generation device for converting kinetic energy generated when the button is touched into electric energy is provided under the button. The power generation device uses more than one electret thin film energy harvester, and the electret thin film energy harvester is electrically connected to the electronic light-emitting signpost one by one. The passive electronic signpost based on the energy harvester of the present invention does not need to install a power supply, and the line connection is relatively simple, the installation and maintenance costs are low, it does not affect the environment, and it increases the fun.

The present invention belongs to the field of electret technology, specifically a piezoelectric electret and a method for preparing the same. The method comprises the following steps: S1. applying a dispersion of polymer material A to a back plate and forming a film at high temperature to form a first laminate; S2. applying a coating liquid of a functional coating layer to the first laminate and drying to form a functional coating layer, wherein the coating liquid of the functional coating layer contains inorganic functional particles; S3. applying a dispersion of polymer material B to the functional coating layer and forming a film at high temperature to form a second laminate layer; thereby obtaining the electret. This method, by adding inorganic functional particles in the form of a coating, not only improves the bonding strength between the two material layers, but also protects the material from decomposition, thereby comprehensively improving the charge performance of the electret, particularly the charge stability in high temperature and high humidity environments.

Provided are: an electret material having high charge retention and stretchability; and a skin-attached electret environmental power generator using the electret material. A perfluoroelastomer containing iodine and / or bromine or a crosslinked elastomer obtained by crosslinking the elastomer is used as the electret material. These materials are stretchable and can form an electret by being charged by soft X-rays. In addition, the electret is formed on one of two comb-shaped electrodes arranged in a manner that the electrodes are parallel to each other, and a skin-attached electret environment power generator is formed.

The electrostatic device comprises: a fixed portion, a movable portion and an elastic support portion for elastically supporting the movable portion, which are formed on the same substrate; a first glass package, which is anodically bonded to one of the front and back surfaces of the substrate in a state where the fixed portion and the elastic support portion are separated from each other; and a second glass package, which is anodically bonded to the other of the front and back surfaces in a state where the fixed portion and the elastic support portion are separated from each other, and a closed space for arranging the movable portion is formed between the second glass package and the first glass package, an electret is formed on at least a portion of the fixed portion and the movable portion, and a first electrode connected to the fixed portion and exposed on the outer surface of the second glass package, and a second electrode connected to the elastic support portion and exposed on the outer surface of the second glass package are formed on the second glass package.

An electret (1) is produced by subjecting a composite oxide containing two or more metal elements to a polarization treatment. The composite oxide is a crystalline or non-crystalline oxide containing two different trivalent metal elements A and B and has a basic composition represented by the formula A3B5O12. The composite oxide has a band gap energy of 3 eV or more. Metal element A includes at least one element selected from trivalent rare-earth elements, and metal element B includes at least one element selected from trivalent typical elements.

An electret (1) has a substrate (10) and an electret layer (2) formed on the surface of the substrate (10), the electret layer (2) being obtained by electrically charging an inorganic dielectric film (20) including an outer layer film (3) and an inner layer film (4) laminated in the thickness direction (X) of the substrate (10), the outer layer film (3) being a film mainly composed of a first inorganic dielectric material, and the inner layer film (4) being a film mainly composed of a second inorganic dielectric material. The first inorganic dielectric material is a composite metal compound containing two or more different metal elements, contains at least a trivalent metal element, and has a band gap energy of 3 eV or more, and the inner layer film (4) is a film having a second inorganic dielectric material different from the first inorganic dielectric material as a main component.

To provide an electret apparatus that enables formation, within a short time, of an electret having uniformly mixed regions processed to positive and negative polarities, and that allows achievement of high collection efficiency of a nonwoven fabric.SOLUTION: An electret apparatus comprising a grounding electrode 2 and an applying electrode 3 that directly clamp a nonwoven fabric s to be processed, wherein the applying electrode 3 is in a roller shape composed of a metallic core member 3a to which a negative voltage is applied from a direct current power supply 4, and a resistor layer 3b provided on a surface of the core member 3a, such that corona discharge is generated from the applying electrode 3 and induced discharge is generated from the grounding electrode 2.SELECTED DRAWING: Figure 1

The invention discloses a use method of a passive air humidity detection device based on an electret. The use method comprises a delivery stage and a use stage, and in the delivery stage, the use method comprises the following steps: carrying out humidity detection under different humidity conditions to obtain different electric field change amplification signals; the signals are amplified according to different electric field changes and substituted into a preset humidity calculation model, and a slope correction coefficient and a zero correction coefficient are obtained through calculation; in the using stage, the using method comprises the steps that humidity detection is carried out according to a preset humidity calculation model by adopting the slope correction coefficient and the zero correction coefficient. The passive air humidity detection device based on the electret has high reliability and stability, the use method of the detection device is divided into a factory leaving stage and a use stage, the detection device is corrected in the factory leaving stage, the humidity value of the current environment is calculated according to the correction result in the use stage, and the humidity value of the current environment is calculated according to the correction result. And the accuracy and precision of humidity detection are improved.

To derive a general formula of a compound exhibiting a giant surface potential when formed into a membrane, and realize a membrane with a large surface potential useful as an electret material.SOLUTION: The membrane contains a compound represented by the general formula (1) in the figure. In the general formula (1), R represents a fluoroalkyl group; and none to two of the X, Y and Z represent fluoroalkyl groups while the remainder represents substituents other than fluoroalkyl groups.SELECTED DRAWING: None

The electret (1) is obtained by subjecting an inorganic dielectric (2) to a charge treatment. The inorganic dielectric (2) is formed from a metal compound containing Al and / or Mg, and the total molar fraction of Al and Mg in the entire metal elements contained in the metal compound is more than 50%. The metal compound contains a metal oxide or a metal salt, and may be an oxide or salt containing Al, an oxide or salt containing Mg, or a composite oxide containing Al and Mg.

In a vibration power generation element that uses vibration from the outside to output alternating current from an output line, there is provided: an intermediate electrode that is not connected to the output line; a plurality of electret electrodes that are arranged opposite to the intermediate electrode and have an electret on at least a portion of the surface of the surface opposite to the intermediate electrode; a holding portion that holds the intermediate electrode and the plurality of electret electrodes so that they can vibrate freely relative to each other; and a charge injector that injects charges having opposite characteristics to those of the electrets formed on the surfaces of the plurality of electret electrodes into the intermediate electrode.

The invention belongs to the technical field of wearable energy, and particularly relates to a multiphase soft metal elastomer direct-current generator and a preparation method thereof. The direct-current generator comprises a flexible porous dielectric layer, a liquid metal embedded layer, an electret encapsulation layer, a bottom electrode layer and a top electrode layer. The liquid metal embedded layer is formed by printing liquid metal on the lower surface of the flexible porous dielectric layer, the bottom electrode layer is arranged on the lower surface of the liquid metal embedded layer, the top electrode layer is arranged on the upper surface of the flexible porous dielectric layer, and the electret packaging layer is fixed on the upper surface of the top electrode layer. A solid-liquid-gas three-phase interface is constructed, elasticity modulus matching of a multi-phase interface and built-in electric field driving force are formed, a friction electricity-ion charge division cooperation interface based on the flexible porous dielectric layer / liquid metal embedded layer is achieved, high-voltage and direct-current output is achieved, and the device has the advantages of being high in output, good in stability, simple in structure and low in cost.

A method for manufacturing an electret melt blown nonwoven fabric in which a small amount of water is sprayed across in the width direction with high precision, to reduce the drying load and to perform the electret processing more uniformly even in the wide width, is provided as follows; when a non-electroconductive polymer is melt-spun from a spinneret having a plurality of spinning holes in the width direction and a spun yarn is collected by a yarn collection device provided below to form a melt blown nonwoven fabric, water is sprayed by a spray nozzle to the spun yarn between the spinneret and the yarn collection device to electretize the melt blown nonwoven fabric, the spray nozzle includes a plurality of water discharge openings arranged in the width direction and a pair of air discharge openings that are opened continuously or intermittently in the width direction and arranged to face each other so as to sandwich the plurality of water discharge openings, and air discharged from the air discharge openings is made to collide with water discharged from the plurality of water discharge openings to spray the water on the spun yarn.

The invention discloses a broadband electrostatic vibration energy collector with an adjustable response bandwidth and a test method thereof, the electrostatic vibration energy collector is of a parallel plate structure, and the electrostatic vibration energy collector comprises a top plate; an insulating stopper; the suspension spring plate with the mass block is used as a movable electret electrode; the adjusting bolt is used for controlling a vertical gap between the suspension spring plate and the insulation stop block; the reset spring is used for resetting the insulation stop block; the bottom plate is used for supporting and fixing the electrode; the insulating support frame is used for supporting the bottom plate, the suspension spring plate, the insulating stop block and the top plate; wherein the suspension spring plate is composed of four same double-clamping gradient folding beams and is connected with the mass block; the electrostatic vibration energy collector realizes broadband energy collection under different vibration frequencies by adjusting the height of the adjusting bolt. According to the invention, the output voltage and the bandwidth can be optimized, so that energy storage devices such as a capacitor or a lithium battery can be charged more effectively.

A power generation device (1) is provided with: a power generation section (10) having an electret (2) having a first electrification surface (21) and a second electrification surface (22), a first electrode (31) formed on the first electrification surface (21), and a second electrode (32) formed on the second electrification surface (22); and at least one of an electricity storage section (41) and an output section (42) electrically connected to the power generation section (10). The electret (2) is an electret formed by subjecting an electret material containing an inorganic dielectric having a band gap energy of 4 eV or more to polarization treatment. At least one of the first electrode (31) and the second electrode (32) is disposed on at least one of the corresponding first electrification surface (21) and the second electrification surface (22) in a state in which it becomes a part of a current collecting surface (20) exposed.

The present invention relates to a dimming system and a self-powered method thereof, which realizes the self-powering of a dimming film and belongs to the field of dimming. The dimming system includes an electret generator, a rectifier, a reset switch, a dimming film structure and a voltage management module. The electret generator can convert external mechanical stimulation into electrical energy. The output end of the electret generator is connected to the input end of the rectifier, the output end of the rectifier is connected to the dimming film structure, and the reset switch, the dimming film structure and the voltage management module are connected in parallel with the dimming film structure to obtain a self-powered dimming system that does not require an external power supply. The self-powered dimming film prepared by the present invention does not require an external power supply. It can realize the function of regulating the light transmittance of the dimming film structure by applying external stimulation, and its initial optical state can be switched by rotating the polarizer, which greatly expands the scope of application. Therefore, it can be used in the fields of architecture, automobiles, electronics, etc.

The invention belongs to the technical field of acoustic-electric conversion, and discloses a sound production monomer and electronic equipment, and the sound production monomer comprises a shell, at least one first polar structure, at least one second polar structure and a vibrating diaphragm. The first polar structure is arranged on the shell; the second polar structures are arranged on the shell, the first polar structures and the second polar structures are alternately arranged in the first direction, and the first direction is the thickness direction of the shell; the vibrating diaphragm is arranged in the shell, the inner periphery of the vibrating diaphragm is correspondingly connected to the second polar structure, the outer periphery of the vibrating diaphragm is connected to the shell, and the first polar structure and the second polar structure are matched with each other to drive the vibrating diaphragm to vibrate; when one of the first polar structure and the second polar structure includes an electrode layer, the other of the first polar structure and the second polar structure includes an electret layer. The sound production monomer and the electronic equipment provided by the invention meet the requirements of lightness and thinness, and have relatively high low-frequency sensitivity.

An electret (1) is formed by subjecting an inorganic dielectric body (2) to a charging process. The inorganic dielectric body (2) is composed of a metal compound containing at least either Al or Mg, and the total mole fraction of Al and Mg among all the metal elements contained in the metal compound is greater than 50%. The metal compound may contain a metal oxide or a metal salt and may be an Al-containing oxide or salt, a Mg-containing oxide or salt, or a mixed oxide containing both Al and Mg.

To provide an electret film having high piezoelectricity and excellent in-plane uniformity of piezoelectricity, and a laminated piezoelectric sheet in which the electret film and an electrode are laminated.SOLUTION: With an electret film, an absolute value of a piezoelectric constant d33 is 40pC / N or more, and a coefficient of variations of the absolute value of the piezoelectric constant in a measurement area 400 cm2 is 0.5 or less.SELECTED DRAWING: None

The non-contact sensor comprises an electret layer and an electrode layer which are arranged in a stacked mode, the electret layer comprises a charge transmission layer and a charge blocking layer, the charge transmission layer comprises a first polymer matrix and conductive particles, and the migration rate of charges in the charge transmission layer can be increased by adding the conductive particles; the electret layer is arranged on the surface of the electret layer, charges are promoted to migrate from the surface into the charge transmission layer, new charges can be generated at the positions where the charges migrated from the surface are located, the surface charge density and the charge quantity in the electret layer are increased, and under the action of the charge blocking layer, the charges can be prevented from leaking to the electrode layer from the charge transmission layer, charge dissipation is reduced, and the efficiency is improved. The charges can be stably stored in the electret layer for a long time; thus, under the action of the charge transport layer and the charge barrier layer, the charge storage capacity is increased, the sensing distance is increased, the efficiency and accuracy of remote detection are improved, and the performance of the non-contact sensor is improved.

Provided is an acoustic device capable of effectively using voice even in noise. The present invention is provided with: a base body part (14) that can be worn by a user and that, when worn by the user, curves with a sound source on an inner side in a worn state; and an electret condenser microphone (20) that has flexibility, is mounted on the base body part (14) with the sound source on the inner side, and is curved so as to follow the shape of the base body part (14). By the curvature of the electret condenser microphone (20), a focal point of sound is formed on the inner side of the electret condenser microphone device (20). A plurality of directional surfaces (46A1 to 46A9) facing the focal point of sound are formed on the electret condenser microphone (20).

The invention discloses a micro mechanical antenna forming method and an antenna system thereof, and belongs to the technical field of antennas. An antenna based on a super-lubricity high-speed micromechanical system is adopted, an electromagnetic dielectric layer is located on a sliding block, and the sliding block is in super-lubricity contact with a substrate. The electromagnetic dielectric layer is an electrified electret or ferroelectric or permanent magnet material or a composite structure of the materials. The sliding block is driven by alternating electric field force or magnetic field force or ultrasonic sound pressure to do reciprocating motion on the dielectric layer at a set motion frequency, reciprocating motion of the electromagnetic dielectric layer causes an alternating electromagnetic field so as to radiate electromagnetic waves, or the sliding block reciprocates under the action of an electric field or a magnetic field in electric field waves so as to receive electromagnetic wave signals. The problems of small electromagnetic medium movement stroke, low movement speed, low movement frequency and the like of a traditional micro mechanical antenna are solved. The antenna is widely applied to the technical field of micro-mechanical antennas.

The application discloses a kind of semiconductor etching equipment and particle on-line cleaning method, applied to semiconductor manufacturing equipment technical field, wherein equipment includes at least one process cavity module, at least one auxiliary processing module and central transmission robot;Auxiliary processing module is equipped with upper and lower electrode plate and is made of electret material Simulation wafer, can be charged or discharged by applying high voltage electricity to it;When needing to clean process cavity particle, charged simulation wafer is transmitted to process cavity, and particle is adsorbed by using electrostatic force and then transmitted back to auxiliary cavity to discharge, and finally auxiliary cavity can be cleaned.The application initiates "transfer type" on-line cleaning concept, can efficiently remove particle pollutants without damaging process cavity vacuum and process state, completely avoids the need for vacuum breaking and aging process of traditional mode, significantly improves equipment utilization and production yield, and realizes the breakthrough of semiconductor etching equipment maintenance technology.