69 results about "Electret" patented technology

The invention discloses a ferroelectric electret material based on 3D printing and a preparation method and application thereof, and belongs to the technical field of functional materials and intelligent devices, the ferroelectric electret material comprises solid layers and porous layers, the solid layers are bonded to the two sides of the porous layers, and the porous layers are arranged in one of #-shaped grids or circular grids. By optimizing 3D printing parameters and autonomously regulating and controlling a ferroelectric electret material and a foam structure (pore size, pore shape, porosity and thickness), the ferroelectric electret material can stably store charges after polarization. According to the ferroelectric electret material based on 3D printing and the preparation method and application thereof, the printing precision is improved, the solid layer and the porous layer are prepared separately, the cell size is reduced, and the ferroelectric electret material with excellent piezoelectric performance for 3D printing is obtained; and moreover, accurate control of the foam structure of the ferroelectric electret material, material diversification and preparation process simplification are realized, and the ferroelectric electret material has remarkable advantages in performance and application potential.

The invention discloses semiconductor etching equipment and a particulate matter online cleaning method, which are applied to the technical field of semiconductor manufacturing equipment, and the equipment comprises at least one process cavity module, at least one auxiliary processing module and a central transmission robot, an upper electrode plate, a lower electrode plate and a simulation wafer made of an electret material are arranged in the auxiliary processing module, and the auxiliary processing module can be charged or discharged by applying high voltage; when the particles in the process cavity need to be cleaned, the charged simulation wafer is transmitted to the process cavity, the particles are adsorbed by electrostatic force and then transmitted back to the auxiliary cavity for discharging, and finally the auxiliary cavity is cleaned. According to the invention, a'transfer type 'online cleaning concept is initiated, particulate pollutants can be efficiently removed under the condition that the vacuum and process states of a process cavity are not damaged at all, the vacuum breaking and aging process required by a traditional mode is thoroughly avoided, the equipment utilization rate and the production yield are remarkably improved, and the breakthrough of a semiconductor etching equipment maintenance technology is realized.

The invention relates to the technical field of sensors, in particular to an electret-based high-sensitivity flexible vibration sensor and a preparation method thereof, and the method comprises the following steps: S1, plating an electrode I on the bottom surface of an electret PTFE film, and cutting the electret PTFE film into a required shape; s2, charging the electret PTFE film by adopting a corona charging device; s3, preparing an integrated multifunctional mass block comprising a suspension film by adopting a template pouring method; s4, plating an electrode II on the bottom surface of the suspended film; and S5, adopting a PI annular double-sided adhesive tape as a supporting layer, and bonding the electret PTFE thin film and the suspension thin film to obtain the high-sensitivity flexible vibration sensor based on the electret. A sensor capable of maintaining sensitivity without an external power supply can be prepared.

The invention relates to a field emission cathode structure and a preparation method thereof. The method comprises the following steps: obtaining a first substrate layer with a polished surface, wherein the first substrate layer adopts a silicon wafer or a metal sheet; processing the first substrate layer into an arrayed grid mesh; sequentially depositing a metal conductive layer and a diffusion barrier layer on the outer surface of the grid mesh; depositing a SiNx electret layer on the diffusion barrier layer, and regulating and controlling nitrogen vacancy distribution of the SiNx electret layer through a gradient doping process; depositing an Al2O3 gradient heterojunction layer on the SiNx electret layer, and regulating and controlling the oxygen vacancy concentration of the Al2O3 gradient heterojunction layer through a gradient doping process to obtain a composite electret grid mesh; and aligning and bonding the composite electret grid mesh, the arrayed cathode emitter and the insulating layer to obtain the field emission cathode structure. By adopting the method, the high emission efficiency and stability of the cathode can be improved.

An electret (1) is produced by subjecting a composite oxide containing two or more metal elements to a polarization treatment. The composite oxide is a crystalline or non-crystalline oxide containing two different trivalent metal elements A and B and has a basic composition represented by the formula A3B5O12. The composite oxide has a band gap energy of 3 eV or more. Metal element A includes at least one element selected from trivalent rare-earth elements, and metal element B includes at least one element selected from trivalent typical elements.

An electret (1) has a substrate (10) and an electret layer (2) formed on the surface of the substrate (10), the electret layer (2) being obtained by electrically charging an inorganic dielectric film (20) including an outer layer film (3) and an inner layer film (4) laminated in the thickness direction (X) of the substrate (10), the outer layer film (3) being a film mainly composed of a first inorganic dielectric material, and the inner layer film (4) being a film mainly composed of a second inorganic dielectric material. The first inorganic dielectric material is a composite metal compound containing two or more different metal elements, contains at least a trivalent metal element, and has a band gap energy of 3 eV or more, and the inner layer film (4) is a film having a second inorganic dielectric material different from the first inorganic dielectric material as a main component.

To provide an electret apparatus that enables formation, within a short time, of an electret having uniformly mixed regions processed to positive and negative polarities, and that allows achievement of high collection efficiency of a nonwoven fabric.SOLUTION: An electret apparatus comprising a grounding electrode 2 and an applying electrode 3 that directly clamp a nonwoven fabric s to be processed, wherein the applying electrode 3 is in a roller shape composed of a metallic core member 3a to which a negative voltage is applied from a direct current power supply 4, and a resistor layer 3b provided on a surface of the core member 3a, such that corona discharge is generated from the applying electrode 3 and induced discharge is generated from the grounding electrode 2.SELECTED DRAWING: Figure 1

The invention discloses a use method of a passive air humidity detection device based on an electret. The use method comprises a delivery stage and a use stage, and in the delivery stage, the use method comprises the following steps: carrying out humidity detection under different humidity conditions to obtain different electric field change amplification signals; the signals are amplified according to different electric field changes and substituted into a preset humidity calculation model, and a slope correction coefficient and a zero correction coefficient are obtained through calculation; in the using stage, the using method comprises the steps that humidity detection is carried out according to a preset humidity calculation model by adopting the slope correction coefficient and the zero correction coefficient. The passive air humidity detection device based on the electret has high reliability and stability, the use method of the detection device is divided into a factory leaving stage and a use stage, the detection device is corrected in the factory leaving stage, the humidity value of the current environment is calculated according to the correction result in the use stage, and the humidity value of the current environment is calculated according to the correction result. And the accuracy and precision of humidity detection are improved.

To derive a general formula of a compound exhibiting a giant surface potential when formed into a membrane, and realize a membrane with a large surface potential useful as an electret material.SOLUTION: The membrane contains a compound represented by the general formula (1) in the figure. In the general formula (1), R represents a fluoroalkyl group; and none to two of the X, Y and Z represent fluoroalkyl groups while the remainder represents substituents other than fluoroalkyl groups.SELECTED DRAWING: None

The electret (1) is obtained by subjecting an inorganic dielectric (2) to a charge treatment. The inorganic dielectric (2) is formed from a metal compound containing Al and / or Mg, and the total molar fraction of Al and Mg in the entire metal elements contained in the metal compound is more than 50%. The metal compound contains a metal oxide or a metal salt, and may be an oxide or salt containing Al, an oxide or salt containing Mg, or a composite oxide containing Al and Mg.

A method for manufacturing an electret melt blown nonwoven fabric in which a small amount of water is sprayed across in the width direction with high precision, to reduce the drying load and to perform the electret processing more uniformly even in the wide width, is provided as follows; when a non-electroconductive polymer is melt-spun from a spinneret having a plurality of spinning holes in the width direction and a spun yarn is collected by a yarn collection device provided below to form a melt blown nonwoven fabric, water is sprayed by a spray nozzle to the spun yarn between the spinneret and the yarn collection device to electretize the melt blown nonwoven fabric, the spray nozzle includes a plurality of water discharge openings arranged in the width direction and a pair of air discharge openings that are opened continuously or intermittently in the width direction and arranged to face each other so as to sandwich the plurality of water discharge openings, and air discharged from the air discharge openings is made to collide with water discharged from the plurality of water discharge openings to spray the water on the spun yarn.

A power generation device (1) is provided with: a power generation section (10) having an electret (2) having a first electrification surface (21) and a second electrification surface (22), a first electrode (31) formed on the first electrification surface (21), and a second electrode (32) formed on the second electrification surface (22); and at least one of an electricity storage section (41) and an output section (42) electrically connected to the power generation section (10). The electret (2) is an electret formed by subjecting an electret material containing an inorganic dielectric having a band gap energy of 4 eV or more to polarization treatment. At least one of the first electrode (31) and the second electrode (32) is disposed on at least one of the corresponding first electrification surface (21) and the second electrification surface (22) in a state in which it becomes a part of a current collecting surface (20) exposed.

The invention belongs to the technical field of acoustic-electric conversion, and discloses a sound production monomer and electronic equipment, and the sound production monomer comprises a shell, at least one first polar structure, at least one second polar structure and a vibrating diaphragm. The first polar structure is arranged on the shell; the second polar structures are arranged on the shell, the first polar structures and the second polar structures are alternately arranged in the first direction, and the first direction is the thickness direction of the shell; the vibrating diaphragm is arranged in the shell, the inner periphery of the vibrating diaphragm is correspondingly connected to the second polar structure, the outer periphery of the vibrating diaphragm is connected to the shell, and the first polar structure and the second polar structure are matched with each other to drive the vibrating diaphragm to vibrate; when one of the first polar structure and the second polar structure includes an electrode layer, the other of the first polar structure and the second polar structure includes an electret layer. The sound production monomer and the electronic equipment provided by the invention meet the requirements of lightness and thinness, and have relatively high low-frequency sensitivity.

An electret (1) is formed by subjecting an inorganic dielectric body (2) to a charging process. The inorganic dielectric body (2) is composed of a metal compound containing at least either Al or Mg, and the total mole fraction of Al and Mg among all the metal elements contained in the metal compound is greater than 50%. The metal compound may contain a metal oxide or a metal salt and may be an Al-containing oxide or salt, a Mg-containing oxide or salt, or a mixed oxide containing both Al and Mg.

Provided is an acoustic device capable of effectively using voice even in noise. The present invention is provided with: a base body part (14) that can be worn by a user and that, when worn by the user, curves with a sound source on an inner side in a worn state; and an electret condenser microphone (20) that has flexibility, is mounted on the base body part (14) with the sound source on the inner side, and is curved so as to follow the shape of the base body part (14). By the curvature of the electret condenser microphone (20), a focal point of sound is formed on the inner side of the electret condenser microphone device (20). A plurality of directional surfaces (46A1 to 46A9) facing the focal point of sound are formed on the electret condenser microphone (20).

The application discloses a kind of semiconductor etching equipment and particle on-line cleaning method, applied to semiconductor manufacturing equipment technical field, wherein equipment includes at least one process cavity module, at least one auxiliary processing module and central transmission robot;Auxiliary processing module is equipped with upper and lower electrode plate and is made of electret material Simulation wafer, can be charged or discharged by applying high voltage electricity to it;When needing to clean process cavity particle, charged simulation wafer is transmitted to process cavity, and particle is adsorbed by using electrostatic force and then transmitted back to auxiliary cavity to discharge, and finally auxiliary cavity can be cleaned.The application initiates "transfer type" on-line cleaning concept, can efficiently remove particle pollutants without damaging process cavity vacuum and process state, completely avoids the need for vacuum breaking and aging process of traditional mode, significantly improves equipment utilization and production yield, and realizes the breakthrough of semiconductor etching equipment maintenance technology.

The invention discloses an electret-based pipeline wind speed measurement system, a calculation method, a calculation device and a medium. The method comprises the following steps: acquiring actual voltage, actual temperature and actual humidity in an electret in real time; determining current wind speed data of the to-be-measured pipeline according to the current actual voltage; determining a current offset voltage value and a current sensitivity coefficient of the electret according to the current actual temperature and the current actual humidity; and according to the current offset voltage value, the current sensitivity coefficient and the current wind speed data, determining a current wind speed value in the to-be-measured pipeline. According to the technical scheme, the influence of environmental factors such as temperature and humidity on the measurement result is eliminated, the precision of pipeline wind speed measurement is remarkably improved, and reliable data support is provided for pipeline airflow monitoring of industrial scenes such as tobacco.

The utility model belongs to loudspeaker technical field discloses a kind of electrostatic loudspeaker and electronic equipment, electrostatic loudspeaker includes shell, first polarity structure, second polarity structure, vibration structure. First polarity structure is equipped with at least one, first polarity structure is set in shell;Second polarity structure is equipped with at least one, second polarity structure is set in shell, and second polarity structure and first polarity structure are along first direction vibration structure alternately arranged;When one of the two of first polarity structure and second polarity structure includes electrode layer, the other of the two includes electret layer;First direction vibration structure is the thickness direction of shell;Vibration structure is set in shell, and vibration structure is conductor;The inner periphery of vibration structure is connected to second polarity structure, and the outer periphery of vibration structure is connected to shell. The electrostatic loudspeaker and electronic equipment provided by the utility model have long service life.

The power generation device (1) comprises: an electret (2) having a first charged surface (21) and a second charged surface (22); a first power generation unit (10A) comprising first and second electrodes (31, 32) formed on the first and second charged surfaces (21), wherein the first electrode is arranged on the first charged surface (21) in a state where it is exposed as part of a current collector surface (20); a second power generation unit (10B) comprising a third electrode (33) and a second electrode, the third electrode (33) being spaced apart from the first charged surface (21) and being movable in parallel; and at least one of an energy storage unit (41) and an output unit (42). The electret (2) is an electret formed by electretizing an electret material containing an inorganic dielectric with a band gap energy of 4 eV or more through a polarization treatment.

The application discloses a self-focusing ultrasonic transducer, a sweeping robot and an acoustic impedance calculation method, and relates to the technical field of self-focusing ultrasonic transducers.The self-focusing ultrasonic transducer comprises a support, the bottom of the support is provided with a concave spherical surface, the periphery of the concave spherical surface is provided with an annular plane, the upper end of the support is provided with a connecting joint; a cross-linked polypropylene piezoelectric electret film, the upper and lower surfaces of the cross-linked polypropylene piezoelectric electret film are printed with conductive silver paste and covered in the concave spherical surface; a shielding wire, one end of the shielding wire is connected with the lower surface edge of the cross-linked polypropylene piezoelectric electret film, and the other end is connected with the connecting joint and used as a positive electrode; a silver film, the silver layer is plated on the surface of the support, the upper surface of the cross-linked polypropylene piezoelectric electret film is connected with the connecting joint and used as a negative electrode. The self-focusing ultrasonic transducer can realize self-focusing of acoustic energy, and can identify and detect the acoustic resistance of a reflected object, identify different materials of the reflected object, and control the robot to switch different working modes according to different materials.

The invention discloses a preparation method of an ultralow-resistance large-flow electret air filter based on a triangular corrugated structure. The preparation method comprises the following steps: preparing polymer master batches with high dielectric properties by compounding a high polymer material and a functional filler; then forming a microporous film substrate with a three-dimensional intercommunication network by using a phase separation technology; then regulating and controlling the surface morphology of the film by adopting a physical bombardment means to increase active sites; and finally, through triangular corrugated structure forming and multi-stage electret treatment, a filter element body with an optimized flow channel and stable charge distribution is constructed. The core innovation of the invention lies in that a triangular corrugated configuration is combined with an electret technology; the corrugated structure not only obviously increases the effective filtering area, but also forms a turbulent flow promoting effect through a specific geometrical shape, so that the airflow resistance is greatly reduced; and the composite electret process implemented step by step enables the charges to be deeply injected and stably anchored in the material through a synergistic effect, so that the service life of the charges is effectively prolonged.

An electret (1) has an electret layer (2). The electret layer is formed by subjecting a composite film, in which inorganic dielectric particles (21) are dispersed and held in a base film (22), to a polarization treatment. The inorganic dielectric particles consist mainly of an inorganic dielectric material with a band gap energy of 4 eV or more.

To provide an electret capable of maintaining a high surface potential for a long time even in a high temperature environment and having excellent in thermal and temporal stability.SOLUTION: An electret 1 includes a substrate 10 and an electret layer 2 formed on its surface. The electret layer 2 is obtained by subjecting an inorganic dielectric film 20 including an outer layer film 3 and an inner layer film 4 stacked in a thickness direction X of the substrate 10 to a charge treatment. The outer layer film 3 is a composite metal compound containing two or more different metal elements, and is a film containing, as a main component, a first inorganic dielectric material containing at least a trivalent metal element and having a band gap energy of 3 eV or more. The inner layer film 4 is a film mainly containing a second inorganic dielectric material different from the first inorganic dielectric material.SELECTED DRAWING: Figure 1

This invention relates to the field of cable accessory technology, and more particularly to an electret-type high-voltage heat-shrinkable cable accessory for dissipating electrical stress and its manufacturing method. The method includes obtaining the actual electric field strength at the stress cone interface to determine whether the initial stress cone thickness range needs adjustment; for cases where adjustment of the initial stress cone thickness range is not required, verifying the adaptability of the thickness range by simulating the maximum electric field strength; after successful verification, detecting the surface temperature data of the stress cone under stable power transmission conditions and adjusting the local thickness according to the temperature growth rate; if verification fails, detecting abnormal temperature fluctuation values ​​under fluctuating power transmission conditions and adjusting the adjustment value of the stress cone thickness range according to the abnormal temperature fluctuation values, wherein the initial thickness range is set based on the historical highest power transmission. This invention precisely adjusts the stress cone thickness used in wind power generation by considering the ratio of abnormal change areas, the number of abnormal change regions, and the temperature growth rate.

A storage apparatus, comprising a compartment; and a box assembly, which is arranged in the compartment. The box assembly comprises: a first side wall; a second side wall arranged opposite the first side wall; a first conductive layer arranged on the second side wall; a first electret membrane, which is arranged on the first side wall, located between the first side wall and the first conductive layer and arranged parallel to the first conductive layer; and an adjusting component, which is used for adjusting the electric field intensity between the first conductive layer and the first electret membrane.

This invention discloses a flexible force-electric coupling sensor and its fabrication method. It includes a first electret layer, a first insulating layer, a core electrode, a second insulating layer, and a second electret layer stacked sequentially; and a sensing electrode is provided. The first and second electret layers store permanent charges and are symmetrically arranged with the core electrode as the plane of symmetry. When deformation occurs, a potential difference or current can be formed between the sensing electrode and the core electrode. The interfaces between the first and second electret layers and the core electrode are provided with concave-convex structures. The flexible force-electric coupling sensor and its fabrication method provided by this invention, by providing concave-convex structures on the opposite surfaces of the two electret layers in a symmetrical sensor structure, effectively increases the field plate area and concentrates the charge at the protrusions, thereby enhancing the amplitude of potential or electric field changes during deformation, and thus increasing the open-circuit voltage or short-circuit charge, significantly improving the sensitivity of the flexible force-electric coupling sensor.

The invention relates to a method for manufacturing an optoelectronic device comprising a diode array (10) and a photoluminescent pad arranged opposite at least one diode, the method comprising the steps of: making an electret layer (E1) on the diode array (10) by local polarization or depolarization, optically, to form a surface potential pattern (M1); making a photoluminescent pad (P1) by contacting the electret layer (E1) with a gel-like solution containing photoluminescent particles (p1) and then depositing the photoluminescent particles (p1) on an upper surface (F1) of the electret layer (E1) opposite the predetermined surface potential pattern (M1), thereby forming the photoluminescent pad (P1).

The utility model belongs to loudspeaker technical field discloses a kind of loudspeaker and electronic equipment, and loudspeaker includes shell and sounding unit, and the shell wall of shell is provided with first sound outlet;Sounding unit is equipped with second sound outlet, and second sound outlet is communicated with first sound outlet;Sounding unit includes fixed assembly, at least one diaphragm, at least one first polarity structure and at least one second polarity structure;Fixed assembly is installed in shell, and diaphragm is conductive structure, and diaphragm is correspondingly arranged with first polarity structure, and diaphragm is connected between fixed assembly and corresponding first polarity structure, and first polarity structure and second polarity structure are alternately arranged along first direction, and second polarity structure is equipped on both sides of first polarity structure;When one of first polarity structure and second polarity structure includes electrode layer, the other of both includes electret layer.The loudspeaker and electronic equipment provided by the utility model have good acoustic effect and long service life.

An electret includes a substrate, and an electret layer formed on a surface of the substrate. The electret layer is an inorganic dielectric layer that has been electrically charged. The inorganic dielectric layer includes an outer layer and an inner layer that are stacked in a thickness direction of the substrate. The outer layer contains a first inorganic dielectric material as a main component which is a composite metal compound including different metal elements and has a bandgap energy of 3 eV or more. At least one of the different metal elements being a trivalent metal element. The inner layer contains a second inorganic dielectric material as a main component which is different from the first inorganic dielectric material.

To provide a fine element capable of independently designing an air gap and an electret.SOLUTION: A movable electrode part 3 and a fixed substrate 2 are arranged so as to face the movable electrode part 3 at an interval. The fixed substrate 2 is provided with a recessed hole 2c. Self-organizing electrets 9 of a polar molecular material are arranged in the 2c of the recessed holes by forming films on the fixed electrodes 8. The self-organizing electrets 9 are formed on the fixed electrodes 8 in the 2a of the concave holes so as to be flush with or protrude from the 2c of the upper surface of the fixed substrate 2.SELECTED DRAWING: Figure 1