The present application provides an
electret-based electrostatic
flat panel driver, comprising a transparent substrate, an
anchor point arranged on the transparent substrate, a movable flat
electrode connected to the
anchor point through an
elastic beam, a fixed
electrode arranged on the upper surface of the transparent substrate and opposite to the movable flat
electrode, used to drive the movable flat electrode to make at least one of the out-of-plane
translational motion and the out-of-plane torsional motion, an emission electrode arranged on the lower surface of the movable flat electrode, used to receive the excitation light irradiated from the lower surface of the transparent substrate and release electrons, and an
electret film formed by the charged film arranged on the upper surface of the fixed electrode and used to capture and fix the electrons released from the emission electrode to provide a bias
voltage for the fixed electrode. The present application also provides a corresponding manufacturing method of the electrostatic
flat panel driver. The electrostatic
flat panel driver of the present application can be compatible with the
electret into the electrostatic flat panel driver to reduce the electrostatic driving
voltage.