95 results about "Electret" patented technology

The invention discloses a ferroelectric electret material based on 3D printing and a preparation method and application thereof, and belongs to the technical field of functional materials and intelligent devices, the ferroelectric electret material comprises solid layers and porous layers, the solid layers are bonded to the two sides of the porous layers, and the porous layers are arranged in one of #-shaped grids or circular grids. By optimizing 3D printing parameters and autonomously regulating and controlling a ferroelectric electret material and a foam structure (pore size, pore shape, porosity and thickness), the ferroelectric electret material can stably store charges after polarization. According to the ferroelectric electret material based on 3D printing and the preparation method and application thereof, the printing precision is improved, the solid layer and the porous layer are prepared separately, the cell size is reduced, and the ferroelectric electret material with excellent piezoelectric performance for 3D printing is obtained; and moreover, accurate control of the foam structure of the ferroelectric electret material, material diversification and preparation process simplification are realized, and the ferroelectric electret material has remarkable advantages in performance and application potential.

The invention discloses semiconductor etching equipment and a particulate matter online cleaning method, which are applied to the technical field of semiconductor manufacturing equipment, and the equipment comprises at least one process cavity module, at least one auxiliary processing module and a central transmission robot, an upper electrode plate, a lower electrode plate and a simulation wafer made of an electret material are arranged in the auxiliary processing module, and the auxiliary processing module can be charged or discharged by applying high voltage; when the particles in the process cavity need to be cleaned, the charged simulation wafer is transmitted to the process cavity, the particles are adsorbed by electrostatic force and then transmitted back to the auxiliary cavity for discharging, and finally the auxiliary cavity is cleaned. According to the invention, a'transfer type 'online cleaning concept is initiated, particulate pollutants can be efficiently removed under the condition that the vacuum and process states of a process cavity are not damaged at all, the vacuum breaking and aging process required by a traditional mode is thoroughly avoided, the equipment utilization rate and the production yield are remarkably improved, and the breakthrough of a semiconductor etching equipment maintenance technology is realized.

The invention relates to the technical field of sensors, in particular to an electret-based high-sensitivity flexible vibration sensor and a preparation method thereof, and the method comprises the following steps: S1, plating an electrode I on the bottom surface of an electret PTFE film, and cutting the electret PTFE film into a required shape; s2, charging the electret PTFE film by adopting a corona charging device; s3, preparing an integrated multifunctional mass block comprising a suspension film by adopting a template pouring method; s4, plating an electrode II on the bottom surface of the suspended film; and S5, adopting a PI annular double-sided adhesive tape as a supporting layer, and bonding the electret PTFE thin film and the suspension thin film to obtain the high-sensitivity flexible vibration sensor based on the electret. A sensor capable of maintaining sensitivity without an external power supply can be prepared.

The invention discloses a marine riser eight-arc cylindrical vortex-induced vibration suppression and power generation device which comprises a marine riser, a protection module, a power transmission module and a power generation module. The protection module comprises a mounting inner pipe and a mounting outer pipe; the mounting outer pipe comprises a middle section with an arc-shaped notch; working cabins are arranged at two ends of the middle section; thrust rods are arrayed on the circumference of the working cabin; an arc-shaped shell is arranged at one end of the thrust rod; the power transmission module comprises a rotating impeller, a fixed rod, a driving straight bevel gear and an eccentric disc; the driving straight bevel gear is meshed with a two-way straight bevel gear; the two-way straight bevel gear is meshed with a driven straight bevel gear; the driven straight bevel gear penetrates through the working cabin and is connected with the eccentric disc; the eccentric disc is connected with a thrust rod through a straight groove connecting rod; the power generation module comprises an arc-shaped piezoelectric plate on an arc-shaped shell, and the arc-shaped shell comprises an upper bottom plate embedded with an upper electrode and a lower bottom plate embedded with a lower electrode; and an electret is arranged on the lower electrode. While ocean current energy is converted into electric energy, vortex-induced vibration of the stand pipe is restrained.

The invention relates to a field emission cathode structure and a preparation method thereof. The method comprises the following steps: obtaining a first substrate layer with a polished surface, wherein the first substrate layer adopts a silicon wafer or a metal sheet; processing the first substrate layer into an arrayed grid mesh; sequentially depositing a metal conductive layer and a diffusion barrier layer on the outer surface of the grid mesh; depositing a SiNx electret layer on the diffusion barrier layer, and regulating and controlling nitrogen vacancy distribution of the SiNx electret layer through a gradient doping process; depositing an Al2O3 gradient heterojunction layer on the SiNx electret layer, and regulating and controlling the oxygen vacancy concentration of the Al2O3 gradient heterojunction layer through a gradient doping process to obtain a composite electret grid mesh; and aligning and bonding the composite electret grid mesh, the arrayed cathode emitter and the insulating layer to obtain the field emission cathode structure. By adopting the method, the high emission efficiency and stability of the cathode can be improved.

The present invention belongs to the field of electret technology, specifically a piezoelectric electret and a method for preparing the same. The method comprises the following steps: S1. applying a dispersion of polymer material A to a back plate and forming a film at high temperature to form a first laminate; S2. applying a coating liquid of a functional coating layer to the first laminate and drying to form a functional coating layer, wherein the coating liquid of the functional coating layer contains inorganic functional particles; S3. applying a dispersion of polymer material B to the functional coating layer and forming a film at high temperature to form a second laminate layer; thereby obtaining the electret. This method, by adding inorganic functional particles in the form of a coating, not only improves the bonding strength between the two material layers, but also protects the material from decomposition, thereby comprehensively improving the charge performance of the electret, particularly the charge stability in high temperature and high humidity environments.

Provided are: an electret material having high charge retention and stretchability; and a skin-attached electret environmental power generator using the electret material. A perfluoroelastomer containing iodine and / or bromine or a crosslinked elastomer obtained by crosslinking the elastomer is used as the electret material. These materials are stretchable and can form an electret by being charged by soft X-rays. In addition, the electret is formed on one of two comb-shaped electrodes arranged in a manner that the electrodes are parallel to each other, and a skin-attached electret environment power generator is formed.

An electret (1) is produced by subjecting a composite oxide containing two or more metal elements to a polarization treatment. The composite oxide is a crystalline or non-crystalline oxide containing two different trivalent metal elements A and B and has a basic composition represented by the formula A3B5O12. The composite oxide has a band gap energy of 3 eV or more. Metal element A includes at least one element selected from trivalent rare-earth elements, and metal element B includes at least one element selected from trivalent typical elements.

An electret (1) has a substrate (10) and an electret layer (2) formed on the surface of the substrate (10), the electret layer (2) being obtained by electrically charging an inorganic dielectric film (20) including an outer layer film (3) and an inner layer film (4) laminated in the thickness direction (X) of the substrate (10), the outer layer film (3) being a film mainly composed of a first inorganic dielectric material, and the inner layer film (4) being a film mainly composed of a second inorganic dielectric material. The first inorganic dielectric material is a composite metal compound containing two or more different metal elements, contains at least a trivalent metal element, and has a band gap energy of 3 eV or more, and the inner layer film (4) is a film having a second inorganic dielectric material different from the first inorganic dielectric material as a main component.

To provide an electret apparatus that enables formation, within a short time, of an electret having uniformly mixed regions processed to positive and negative polarities, and that allows achievement of high collection efficiency of a nonwoven fabric.SOLUTION: An electret apparatus comprising a grounding electrode 2 and an applying electrode 3 that directly clamp a nonwoven fabric s to be processed, wherein the applying electrode 3 is in a roller shape composed of a metallic core member 3a to which a negative voltage is applied from a direct current power supply 4, and a resistor layer 3b provided on a surface of the core member 3a, such that corona discharge is generated from the applying electrode 3 and induced discharge is generated from the grounding electrode 2.SELECTED DRAWING: Figure 1

The invention discloses a use method of a passive air humidity detection device based on an electret. The use method comprises a delivery stage and a use stage, and in the delivery stage, the use method comprises the following steps: carrying out humidity detection under different humidity conditions to obtain different electric field change amplification signals; the signals are amplified according to different electric field changes and substituted into a preset humidity calculation model, and a slope correction coefficient and a zero correction coefficient are obtained through calculation; in the using stage, the using method comprises the steps that humidity detection is carried out according to a preset humidity calculation model by adopting the slope correction coefficient and the zero correction coefficient. The passive air humidity detection device based on the electret has high reliability and stability, the use method of the detection device is divided into a factory leaving stage and a use stage, the detection device is corrected in the factory leaving stage, the humidity value of the current environment is calculated according to the correction result in the use stage, and the humidity value of the current environment is calculated according to the correction result. And the accuracy and precision of humidity detection are improved.

To derive a general formula of a compound exhibiting a giant surface potential when formed into a membrane, and realize a membrane with a large surface potential useful as an electret material.SOLUTION: The membrane contains a compound represented by the general formula (1) in the figure. In the general formula (1), R represents a fluoroalkyl group; and none to two of the X, Y and Z represent fluoroalkyl groups while the remainder represents substituents other than fluoroalkyl groups.SELECTED DRAWING: None

The electret (1) is obtained by subjecting an inorganic dielectric (2) to a charge treatment. The inorganic dielectric (2) is formed from a metal compound containing Al and / or Mg, and the total molar fraction of Al and Mg in the entire metal elements contained in the metal compound is more than 50%. The metal compound contains a metal oxide or a metal salt, and may be an oxide or salt containing Al, an oxide or salt containing Mg, or a composite oxide containing Al and Mg.

A method for manufacturing an electret melt blown nonwoven fabric in which a small amount of water is sprayed across in the width direction with high precision, to reduce the drying load and to perform the electret processing more uniformly even in the wide width, is provided as follows; when a non-electroconductive polymer is melt-spun from a spinneret having a plurality of spinning holes in the width direction and a spun yarn is collected by a yarn collection device provided below to form a melt blown nonwoven fabric, water is sprayed by a spray nozzle to the spun yarn between the spinneret and the yarn collection device to electretize the melt blown nonwoven fabric, the spray nozzle includes a plurality of water discharge openings arranged in the width direction and a pair of air discharge openings that are opened continuously or intermittently in the width direction and arranged to face each other so as to sandwich the plurality of water discharge openings, and air discharged from the air discharge openings is made to collide with water discharged from the plurality of water discharge openings to spray the water on the spun yarn.

A power generation device (1) is provided with: a power generation section (10) having an electret (2) having a first electrification surface (21) and a second electrification surface (22), a first electrode (31) formed on the first electrification surface (21), and a second electrode (32) formed on the second electrification surface (22); and at least one of an electricity storage section (41) and an output section (42) electrically connected to the power generation section (10). The electret (2) is an electret formed by subjecting an electret material containing an inorganic dielectric having a band gap energy of 4 eV or more to polarization treatment. At least one of the first electrode (31) and the second electrode (32) is disposed on at least one of the corresponding first electrification surface (21) and the second electrification surface (22) in a state in which it becomes a part of a current collecting surface (20) exposed.

The present invention relates to a dimming system and a self-powered method thereof, which realizes the self-powering of a dimming film and belongs to the field of dimming. The dimming system includes an electret generator, a rectifier, a reset switch, a dimming film structure and a voltage management module. The electret generator can convert external mechanical stimulation into electrical energy. The output end of the electret generator is connected to the input end of the rectifier, the output end of the rectifier is connected to the dimming film structure, and the reset switch, the dimming film structure and the voltage management module are connected in parallel with the dimming film structure to obtain a self-powered dimming system that does not require an external power supply. The self-powered dimming film prepared by the present invention does not require an external power supply. It can realize the function of regulating the light transmittance of the dimming film structure by applying external stimulation, and its initial optical state can be switched by rotating the polarizer, which greatly expands the scope of application. Therefore, it can be used in the fields of architecture, automobiles, electronics, etc.

The invention belongs to the technical field of acoustic-electric conversion, and discloses a sound production monomer and electronic equipment, and the sound production monomer comprises a shell, at least one first polar structure, at least one second polar structure and a vibrating diaphragm. The first polar structure is arranged on the shell; the second polar structures are arranged on the shell, the first polar structures and the second polar structures are alternately arranged in the first direction, and the first direction is the thickness direction of the shell; the vibrating diaphragm is arranged in the shell, the inner periphery of the vibrating diaphragm is correspondingly connected to the second polar structure, the outer periphery of the vibrating diaphragm is connected to the shell, and the first polar structure and the second polar structure are matched with each other to drive the vibrating diaphragm to vibrate; when one of the first polar structure and the second polar structure includes an electrode layer, the other of the first polar structure and the second polar structure includes an electret layer. The sound production monomer and the electronic equipment provided by the invention meet the requirements of lightness and thinness, and have relatively high low-frequency sensitivity.

An electret (1) is formed by subjecting an inorganic dielectric body (2) to a charging process. The inorganic dielectric body (2) is composed of a metal compound containing at least either Al or Mg, and the total mole fraction of Al and Mg among all the metal elements contained in the metal compound is greater than 50%. The metal compound may contain a metal oxide or a metal salt and may be an Al-containing oxide or salt, a Mg-containing oxide or salt, or a mixed oxide containing both Al and Mg.

Provided is an acoustic device capable of effectively using voice even in noise. The present invention is provided with: a base body part (14) that can be worn by a user and that, when worn by the user, curves with a sound source on an inner side in a worn state; and an electret condenser microphone (20) that has flexibility, is mounted on the base body part (14) with the sound source on the inner side, and is curved so as to follow the shape of the base body part (14). By the curvature of the electret condenser microphone (20), a focal point of sound is formed on the inner side of the electret condenser microphone device (20). A plurality of directional surfaces (46A1 to 46A9) facing the focal point of sound are formed on the electret condenser microphone (20).

The application discloses a kind of semiconductor etching equipment and particle on-line cleaning method, applied to semiconductor manufacturing equipment technical field, wherein equipment includes at least one process cavity module, at least one auxiliary processing module and central transmission robot;Auxiliary processing module is equipped with upper and lower electrode plate and is made of electret material Simulation wafer, can be charged or discharged by applying high voltage electricity to it;When needing to clean process cavity particle, charged simulation wafer is transmitted to process cavity, and particle is adsorbed by using electrostatic force and then transmitted back to auxiliary cavity to discharge, and finally auxiliary cavity can be cleaned.The application initiates "transfer type" on-line cleaning concept, can efficiently remove particle pollutants without damaging process cavity vacuum and process state, completely avoids the need for vacuum breaking and aging process of traditional mode, significantly improves equipment utilization and production yield, and realizes the breakthrough of semiconductor etching equipment maintenance technology.

The invention discloses an electret-based pipeline wind speed measurement system, a calculation method, a calculation device and a medium. The method comprises the following steps: acquiring actual voltage, actual temperature and actual humidity in an electret in real time; determining current wind speed data of the to-be-measured pipeline according to the current actual voltage; determining a current offset voltage value and a current sensitivity coefficient of the electret according to the current actual temperature and the current actual humidity; and according to the current offset voltage value, the current sensitivity coefficient and the current wind speed data, determining a current wind speed value in the to-be-measured pipeline. According to the technical scheme, the influence of environmental factors such as temperature and humidity on the measurement result is eliminated, the precision of pipeline wind speed measurement is remarkably improved, and reliable data support is provided for pipeline airflow monitoring of industrial scenes such as tobacco.

The utility model belongs to loudspeaker technical field discloses a kind of electrostatic loudspeaker and electronic equipment, electrostatic loudspeaker includes shell, first polarity structure, second polarity structure, vibration structure. First polarity structure is equipped with at least one, first polarity structure is set in shell;Second polarity structure is equipped with at least one, second polarity structure is set in shell, and second polarity structure and first polarity structure are along first direction vibration structure alternately arranged;When one of the two of first polarity structure and second polarity structure includes electrode layer, the other of the two includes electret layer;First direction vibration structure is the thickness direction of shell;Vibration structure is set in shell, and vibration structure is conductor;The inner periphery of vibration structure is connected to second polarity structure, and the outer periphery of vibration structure is connected to shell. The electrostatic loudspeaker and electronic equipment provided by the utility model have long service life.

The power generation device (1) comprises: an electret (2) having a first charged surface (21) and a second charged surface (22); a first power generation unit (10A) comprising first and second electrodes (31, 32) formed on the first and second charged surfaces (21), wherein the first electrode is arranged on the first charged surface (21) in a state where it is exposed as part of a current collector surface (20); a second power generation unit (10B) comprising a third electrode (33) and a second electrode, the third electrode (33) being spaced apart from the first charged surface (21) and being movable in parallel; and at least one of an energy storage unit (41) and an output unit (42). The electret (2) is an electret formed by electretizing an electret material containing an inorganic dielectric with a band gap energy of 4 eV or more through a polarization treatment.

The invention discloses a flexible stretchable ferroelectric electret multi-axial-force vector sensor and a preparation method, and relates to the technical field of flexible electronic devices. The sensor comprises four sensing units at different positions, each sensing unit is internally provided with an inclined cavity, the inclination directions of the cavities of the sensing units are different, every two of the four sensing units form a group, the two sensing units in the same group are arranged along a diagonal line, and the projections of the two groups of sensing units on a plane are rectangular; the sensing unit is composed of an upper module and a lower module. Through the innovative asymmetric inclined cavity array structure and the design of the sensing units in different directions, the cavity deformation of the ferroelectric electret film and the corresponding electric dipole moment change show remarkable anisotropy, sensing and distinguishing of three-dimensional multi-axial force vectors can be achieved, for example, normal pressure and tangential shear force can be effectively distinguished, and the sensing precision is improved. The technical bottleneck that a traditional sensor is difficult to realize multi-modal sensing in a complex mechanical scene is broken through.

The present invention provides: a film in which the amount of power generation that can be obtained when said film is applied, as an electret material, to a vibration-type power generation element is large, and which has excellent thermal stability of charges; an electret material using said film; a vibration-type power generation element; and a film production method. A film according to the present invention has the absolute value of the surface charge density being 0.5 mC / m2 or more, and the ratio of the elastic modulus at 150°C to the elastic modulus at 25°C being 0.6 or more.

The application discloses a self-focusing ultrasonic transducer, a sweeping robot and an acoustic impedance calculation method, and relates to the technical field of self-focusing ultrasonic transducers.The self-focusing ultrasonic transducer comprises a support, the bottom of the support is provided with a concave spherical surface, the periphery of the concave spherical surface is provided with an annular plane, the upper end of the support is provided with a connecting joint; a cross-linked polypropylene piezoelectric electret film, the upper and lower surfaces of the cross-linked polypropylene piezoelectric electret film are printed with conductive silver paste and covered in the concave spherical surface; a shielding wire, one end of the shielding wire is connected with the lower surface edge of the cross-linked polypropylene piezoelectric electret film, and the other end is connected with the connecting joint and used as a positive electrode; a silver film, the silver layer is plated on the surface of the support, the upper surface of the cross-linked polypropylene piezoelectric electret film is connected with the connecting joint and used as a negative electrode. The self-focusing ultrasonic transducer can realize self-focusing of acoustic energy, and can identify and detect the acoustic resistance of a reflected object, identify different materials of the reflected object, and control the robot to switch different working modes according to different materials.

The invention discloses a preparation method of an ultralow-resistance large-flow electret air filter based on a triangular corrugated structure. The preparation method comprises the following steps: preparing polymer master batches with high dielectric properties by compounding a high polymer material and a functional filler; then forming a microporous film substrate with a three-dimensional intercommunication network by using a phase separation technology; then regulating and controlling the surface morphology of the film by adopting a physical bombardment means to increase active sites; and finally, through triangular corrugated structure forming and multi-stage electret treatment, a filter element body with an optimized flow channel and stable charge distribution is constructed. The core innovation of the invention lies in that a triangular corrugated configuration is combined with an electret technology; the corrugated structure not only obviously increases the effective filtering area, but also forms a turbulent flow promoting effect through a specific geometrical shape, so that the airflow resistance is greatly reduced; and the composite electret process implemented step by step enables the charges to be deeply injected and stably anchored in the material through a synergistic effect, so that the service life of the charges is effectively prolonged.

An electret (1) has an electret layer (2). The electret layer is formed by subjecting a composite film, in which inorganic dielectric particles (21) are dispersed and held in a base film (22), to a polarization treatment. The inorganic dielectric particles consist mainly of an inorganic dielectric material with a band gap energy of 4 eV or more.

To provide an electret capable of maintaining a high surface potential for a long time even in a high temperature environment and having excellent in thermal and temporal stability.SOLUTION: An electret 1 includes a substrate 10 and an electret layer 2 formed on its surface. The electret layer 2 is obtained by subjecting an inorganic dielectric film 20 including an outer layer film 3 and an inner layer film 4 stacked in a thickness direction X of the substrate 10 to a charge treatment. The outer layer film 3 is a composite metal compound containing two or more different metal elements, and is a film containing, as a main component, a first inorganic dielectric material containing at least a trivalent metal element and having a band gap energy of 3 eV or more. The inner layer film 4 is a film mainly containing a second inorganic dielectric material different from the first inorganic dielectric material.SELECTED DRAWING: Figure 1

The invention relates to an electret atomic force microscope cantilever for measuring surface potentials and / or surface properties by means of an atomic force microscope with a cantilever with a cantilever tip, which is characterized in that at least the cantilever tip is coated with an electret thin film.