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38results about How to "Vibration insensitive" patented technology

Synchronous phase-shifting Fizeau interference device capable of measuring in real time

The invention aims to provide a synchronous phase-shifting Fizeau interference device capable of performing real-time high-accuracy measurement on the surface appearance of an object. A synchronous phase-shifting technology is combined with a Fizeau interference method, and the technical problems that the traditional interferometer has low stability and low measurement accuracy and cannot measure objects in real time and the like are solved. The synchronous phase-shifting Fizeau interference device capable of measuring in real time comprises an illumination unit, an interference unit and a synchronous phase-shifting unit. Due to the adoption of a coaxial interference light path, a space-bandwidth product of a charge coupled device (CCD) is fully utilized; and compared with an off-axis light path, the coaxial interference light path has a higher spatial resolution; a flat glass plate in the traditional Fizeau interferometer is replaced by a 1 / 4 wave plate, so that object light and reference light have orthogonal polarization directions, and the compactness of the structure of the device is kept under the synchronous phase-shifting; and moreover, four phase-shifting interference patterns can be obtained through single exposure, and the real-time property of measurement is realized on the premise of guaranteeing a high spatial resolution.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI

Digital Mohr phase shifting interference surface shape measurement method based on region location fitting algorithm

The invention discloses a digital Mohr phase shifting interference surface shape measurement method based on a region location fitting algorithm. The method comprises the following steps: establishinga virtual interferometer, acquiring an ideal system residual wavefront on an image surface of the virtual interferometer, and pre-marking a solving error region; acquiring a single-breadth actual interferogram in an actual interferometer; solving a surface shape error by using a digital Mohr phase shifting interference method to obtain the surface shape error with the solving error region; selecting data in a solving correctness region for fitting of the surface shape error to obtain a fitting coefficient; and reconstructing the surface shape error by the fitting coefficient to finally obtaina surface shape error result without the solving error region. The digital Mohr phase shifting interference surface shape measurement method solves the problem of a solving error occurring at a largeresidual aberration wavefront caused by the adoption of the digital Mohr phase shifting interference method; the measurement dynamic range of the digital Mohr phase shifting method is extended to beequivalent to that of a traditional phase shifting method; and meanwhile, the real-time, anti-shock and high-precision advantages of the original digital Mohr phase shifting interference method are maintained.
Owner:BEIJING INST OF SPACECRAFT ENVIRONMENT ENG

Phase shift interference microscopic device and method based on Zernike phase contrast imaging

The invention relates to a phase shift interference microscopic device and method based on Zernike phase contrast imaging. The device comprises an illuminating unit, a microscopic amplifying unit and a phase contrast imaging unit which are arranged in sequence along the incident direction of light; the illuminating unit comprises a beam expanding system, a multi-beam illumination generating unit and a beam contraction collimating unit which are arranged in sequence along the light path direction; the beam expanding system comprises a laser, a light intensity controller and a beam expanding unit which are arranged in sequence along the light path direction; the multi-beam illumination generating unit comprises an axicon lens, a first lens, a rotary scatterer, a second lens and an amplitudemask plate which are arranged in sequence along a light path; a tested sample is arranged on a focal surface between a first objective lens and a second objective lens; and the tested sample and a CCD (Charge Coupled Device) camera meet an objective image relation. Due to the adoption of the device and the method, the vignetting effect of the conventional Zernike phase contrast imaging is avoided, quantitative measurement of a phase object is realized, and the light path has the advantages of low coherent noise, high vibration resistance, high transverse resolution and the like.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI

Synchronous phase-shifting Fizeau interference device capable of measuring in real time

The invention aims to provide a synchronous phase-shifting Fizeau interference device capable of performing real-time high-accuracy measurement on the surface appearance of an object. A synchronous phase-shifting technology is combined with a Fizeau interference method, and the technical problems that the traditional interferometer has low stability and low measurement accuracy and cannot measure objects in real time and the like are solved. The synchronous phase-shifting Fizeau interference device capable of measuring in real time comprises an illumination unit, an interference unit and a synchronous phase-shifting unit. Due to the adoption of a coaxial interference light path, a space-bandwidth product of a charge coupled device (CCD) is fully utilized; and compared with an off-axis light path, the coaxial interference light path has a higher spatial resolution; a flat glass plate in the traditional Fizeau interferometer is replaced by a 1 / 4 wave plate, so that object light and reference light have orthogonal polarization directions, and the compactness of the structure of the device is kept under the synchronous phase-shifting; and moreover, four phase-shifting interference patterns can be obtained through single exposure, and the real-time property of measurement is realized on the premise of guaranteeing a high spatial resolution.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI

Laser ultrasonic nondestructive testing equipment and method adopting light deflection method

The invention relates to laser ultrasonic nondestructive testing equipment adopting a light deflection method, which is characterized in that a beam splitter is arranged at the emergent ends of a laser and is provided with two emergent ends; a galvanometer is arranged at one emergent end of the beam splitting device; an energy attenuation device is arranged at the other emergent end of the beam splitting device; a first positive lens is arranged at the emergent end of the energy attenuation device; a second positive lens and the first positive lens are arranged on the same side; a third positive lens is arranged at the emergent end of the second positive lens; a shading device is arranged between the second positive lens and the third positive lens and is used for partially shading a light beam emitted from the second positive lens to the third positive lens; a photodiode is arranged at the emergent end of the third positive lens; and a signal processing end is electrically connected with the laser, the galvanometer and the photodiode respectively. The equipment has the advantages that ultrasonic signals are detected through the optical non-interference technology, equipment is easier to debug, laser ultrasonic signal excitation and ultrasonic signal receiving can be completed only through one laser, cost is extremely low, and laser excitation and laser receiving are synchronous in real time.
Owner:宝宇(武汉)激光技术有限公司
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