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1414results about "Converting sensor output" patented technology

Biped robot state estimation method based on multi-sensor information

The invention belongs to the technical field of robots, and discloses a biped robot state estimation method based on multi-sensor information, and the method comprises the steps: obtaining the data of an inertial measurement unit, a joint encoder and a joint sensor on a biped robot; a self-adaptive threshold contact state detection algorithm based on current sensing information is designed, and the contact state of the sole and the environment is judged in real time; determining a supporting phase of the robot according to the contact state, and applying a dynamic reference system conversion mechanism of supporting phase perception; constructing a state estimator based on invariant extended Kalman filter IEKF, defining a state vector including the posture, position and speed of the robot, performing state prediction by using IMU data, and performing state updating in combination with contact state information, kinematics information and the like; and outputting accurately estimated robot state information. According to the method, the adaptive contact detection and the IEKF are introduced, so that the state estimation precision and robustness of the biped robot in the dynamic walking process are effectively improved.
Owner:ROBOTICS RESEARCH CENTER OF YUYAO CITY +1

Angular displacement sensor based on electric field modulation

An angular displacement sensor based on electric field modulation. The sensor comprises a stator base (1) and a rotor base (2) which are arranged one above the other. One or more pole-pair units are provided on the side surface of the stator base (1) facing the rotor base (2), each pole-pair unit comprises at least three sensing electrode groups which are arranged at intervals circumferentially around the center of the stator base (1), and each sensing electrode group comprises one excitation electrode (1-1) and one sensing electrode (1-2) which are spaced apart circumferentially around the center of the stator base (1); and modulation unit groups, the number of which matches that of pole-pair units and which can respectively correspond to the pole-pair units circumferentially around the center of the rotor base (2) are provided on the side surface of the rotor base (2) facing the stator base (1), each modulation unit group comprises one modulation unit F (2-1) and one modulation unit G (2-2) which are arranged circumferentially around the center of the rotor base (2), and the modulation unit F (2-1) can correspond to at least one sensing electrode group in the pole-pair units circumferentially around the center of the rotor base (2).
Owner:CHONGQING UNIV OF TECH

Dynamic compensation method and system for measurement error of optical encoder and storage medium

The invention relates to a quantum dot optical encoder measurement error dynamic compensation method and system and a storage medium. The method comprises the following steps: acquiring a multi-color-gamut code channel image according to a quantum dot optical encoder; constructing a sub-pixel level compensation network model; a code channel fine feature extraction network, a causal inference network, a decision network, a sub-pixel level positioning network, a coding and decoding network and Q learning are introduced, so that a single-factor measurement error compensation agent is constructed; parallel decomposition multi-subtask model training is adopted, the output of a causal inference network is combined, and the compensation agent strategy proportion of each influence factor is calculated, so that a measurement error compensation agent under the influence of multiple factors is constructed; and measuring error dynamic compensation is completed. By adopting the method, decoupling of coupling errors of internal and external factors can be realized, and error compensation can be performed in a more targeted manner by analyzing the strategy ratio of each compensation sub-agent, so that the measurement precision is improved.
Owner:GUANGDONG UNIV OF TECH

System and method for acoustically detecting temperature changes

The present disclosure relates to a system (100) for acoustically detecting a temperature change, the system (100) comprising: at least one conversion element (10) for converting a temperature change into a characteristic sound; an acoustic sensor (40) configured to be mechanically connected to the structure (50) at a distance from the at least one conversion element (10); and a processor (42, 62) coupled to the acoustic sensor (40), in which the at least one conversion element (10) comprises an actuation portion (20) having at least one material having thermal expansion properties such that a change in temperature causes a movement of the actuation portion (20) that causes the conversion element (10) to generate a characteristic sound and conduct the characteristic sound into the structure (50), the acoustic sensor (40) is configured to record a characteristic sound generated by the conversion element (10) as a structural sound propagating through the structure (50), and the processor (42, 62) is configured to detect a temperature change based on the characteristic sound recorded by the acoustic sensor (40).
Owner:ELIGUARD AB

Off-axis magnetic encoder data calibration compensation method

The invention discloses a data calibration compensation method for an off-axis magnetic encoder, and the method comprises the following steps: S1, calibration initialization: carrying out the initialization of used peripherals, calibration parameters and an encoder chip, and making preparations for calibration; s2, forcibly dragging the motor to align: forcibly dragging a motor rotor to rotate to a position 0 of a nearest electrical angle by adopting a non-inductive control mode, and recording a calibration initial position; s3, calculating calibration data by rotating the motor: recording a data compensation result of the encoder by taking the original data of the encoder as an index; the calibration method does not need other equipment to drive the motor to coaxially rotate for calibration, the stator magnetic field is directly utilized to calibrate the motor, system errors caused by external equipment are avoided, the accurate relative position relation between the electron magnetic field and the rotor magnetic field can be obtained, the driving efficiency is higher, the driving dead zone is smaller, and the calibration precision is higher. And various coaxiality and roundness error data of the off-axis magnetic encoder can be improved.
Owner:SHENZHEN KEWEITAI ENTERPRISE DEV CO LTD

Linear displacement sensor based on electric field self-coupling

A linear displacement sensor based on electric field self-coupling, comprising a moving scale base (1) and a fixed scale base (2). One or more paired electrode units are provided on the side surface of the moving scale base (1) facing the fixed scale base (2); each paired electrode unit comprises at least three sensing electrode groups spaced in the length direction of the moving scale base (1); each sensing electrode group comprises one excitation electrode (1-1) and one sensing electrode (1-2) spaced in the length direction of the moving scale base (1). A plurality of modulation unit groups arranged in the length direction of the fixed scale base (2) are provided on the side surface of the fixed scale base (2) facing the moving scale base (1); in the length direction of the fixed scale base (2), all the paired electrode units on the moving scale base (1) can respectively correspond to the same number of adjacent modulation unit groups on the fixed scale base (2); each modulation unit group comprises one modulation unit F(2-1) and one modulation unit G(2-2); the modulation unit F(2-1) can correspond to at least one sensing electrode group in the paired electrode units in the length direction of the fixed scale base (2).
Owner:CHONGQING UNIV OF TECH

Positioning method based on quantum dot optical encoder

The invention discloses a positioning method based on a quantum dot optical encoder, and the method comprises the steps: constructing an HSV three-channel feature extraction network which comprises three feature extraction channels based on an improved U-Net structure, inputting a to-be-measured image into the three feature extraction channels based on the improved U-Net structure, and carrying out the detection of the to-be-measured image through the three feature extraction channels based on the improved U-Net structure, the method comprises the following steps of: obtaining an H-channel feature map, an S-channel feature map and a V-channel feature map correspondingly, performing channel fusion and feature extraction on the H-channel feature map, the S-channel feature map and the V-channel feature map to obtain a first feature map, and performing code channel positioning processing on the first feature map to obtain a positioning result; and performing feature extraction on the positioning result through the HSV three-channel feature extraction network to obtain a second feature map, and performing coding processing and displacement prediction on the second feature map to obtain a measurement result. According to the invention, the measurement precision of the quantum dot optical encoder can be improved.
Owner:GUANGDONG UNIV OF TECH

Incremental photoelectric encoder alignment detection and calibration system based on phase relation

The invention provides an incremental photoelectric encoder alignment detection and calibration system based on a phase relation. The system is characterized in that the system is composed of a light source (1), a code disc (2), an incremental photoelectric encoder chip (3) and a signal processing and calibration system (4), wherein the incremental photoelectric encoder chip (3) is composed of a photoelectric signal acquisition module (31), an incremental signal generation module (32), a zero signal generation module (33), a phase analysis module (34), an alignment state determination module (35) and a feedback compensation module (36). By analyzing the phase relation between the zero signal and the increment signal, the alignment deviation and direction of the encoder and the code disc are judged, digital compensation is executed on the zero signal or the increment signal, automatic alignment detection and self-adaptive calibration are achieved, and therefore assembly errors and position errors caused by optical deviation are reduced, and the precision of the encoder is improved. And the precision, the stability and the reliability of the encoder system are improved.
Owner:TIME VISION TECH (SHANGHAI) CO LTD

Downhole tool, well system, and method employing a sensor positioned proximate a signal noise source powered by a downhole power source, the sensor configured to sense for noise and send uphole operational data embedded within the noise

Provided is a downhole tool, a well system, and a method. The downhole tool, in one aspect, includes a downhole device located proximate a downhole power source, the downhole device having circuitry coupled thereto, the circuitry configured to receive power from the downhole power source and measure operational data of the downhole device or downhole power source. The downhole tool, in accordance with another aspect, includes a signal noise source coupled with the circuitry, the signal noise source configured to receive the measured operational data from the circuitry and embed the operational data as noise. The downhole tool, in accordance with another aspect, includes a sensor positioned proximate the signal noise source, the sensor configured to sense for the noise and send uphole the operational data embedded within the noise.
Owner:HALLIBURTON ENERGY SERVICES INC

Position measuring device

A position measuring device including a first component group and a second component group. The first and second component groups are arranged so as to be movable relative to one another in a measurement direction. The first component group has a domain-wall memory including a domain-wall conductor running in a face. The second component group includes a first magnet and a second magnet. The first and second magnets are arranged end to end in the measurement direction, magnetized such that their magnetization directions run with an orthogonal directional component with respect to the face, and arranged such that they have opposite magnetization directions. The magnets are arranged and configured such that a distance in the measurement direction between the first magnet and the second magnet varies in size along a second direction that is oriented orthogonally to the measurement direction.
Owner:DR JOHANNES HEIDENHAIN GMBH

Phase shifter circuit of optical encoder and operating method thereof

There is provided a phase shifter circuit of an optical encoder. The phase shifter circuit receives a first signal, a second signal, a third signal and a fourth signal sequentially having a 90-degree phase shift, and includes a first cascaded resistor string, a second cascaded resistor string, a third cascaded resistor string and a fourth cascaded resistor string. The first, second, third and fourth cascaded resistor strings respectively delay the first, third, second and fourth signals by selecting a switch connected at a tap-out node of the first, second, third and fourth cascaded resistor strings to correct phase deviations between incremental signals and an index signal and / or between incremental signals.
Owner:PIXART IMAGING INC

System for inductive energy transfer

A system for inductive energy transmission may include a stationary induction charging device, a mobile induction charging device, and a positioning device configured to detect a relative position of respective charging coils of the charging devices during charging. The positioning device may include a transmitting device and a receiving device that are each arranged in a respective one of the charging devices. The transmitting device may include at least two transmitters that simultaneously emit a respective transmission signal with an associated predetermined frequency. The receiving device may include a receiver configured to output a superimposition of all received transmission signals as a time-dependent received signal. The positioning device may be configured to i) determine an associated amplitude for each transmission signal from the time-dependent received signal and / or ii) provide a position information item from the determined amplitudes. The position information item may represent the relative position of the coils.
Owner:MAHLE INT GMBH

Encoder, position detection method and device, storage medium and servo motor assembly

The invention provides an encoder, a position detection method and device, a storage medium and a servo motor assembly, and relates to the technical field of encoders. The encoder comprises a code disc, the code disc comprises a first code channel, and the first code channel is provided with a plurality of first detection parts which are distributed at equal intervals; n second code channels, each second code channel is provided with at least one second detection part, the second detection parts on any two second code channels are at least partially staggered in the circumferential direction of the code disc, and N is a positive integer; wherein the first code channel and the second code channels are each in a circular ring shape, and the first code channel and the N second code channels are coaxially arranged. According to the embodiment of the invention, the brand-new code disc is designed, the second code channel is added on the code disc to serve as the new vernier code channel, the vernier code channel can equally divide the code disc into the multiple repeated vernier code segments, the original M code channel and N code channel are changed into the multiple repeated vernier code segments, the electric signal of the second code channel is coded, and the code disc is more accurate. According to the encoder, repeated multiple vernier code segments can be distinguished, so that absolute positioning of the code disc is realized, and the detection precision of the encoder is effectively improved.
Owner:SUZHOU GAOCHUANG MOTION CONTROL TECHNOLOGY CO LTD

Redundant core in multicore optical fiber for safety

An optical fiber includes multiple optical cores configured in the fiber including a set of primary cores and an auxiliary core. An interferometric measurement system uses measurements from the multiple primary cores to predict a response from the auxiliary core. The predicted auxiliary core response is compared with the actual auxiliary core response to determine if they differ by more than a predetermined amount, in which case the measurements from the multiple primary cores may be deemed unreliable.
Owner:INTUITIVE SURGICAL OPERATIONS INC

Non-Hermite elastic system and application thereof

The invention discloses a non-Hermite elastic system and application thereof. The system comprises a first resonator, a second resonator and a coupling module. The coupling module is composed of a sensing-actuating feedback system and comprises a first sensor and a first actuator which are arranged on a first resonator, and a second sensor and a second actuator which are arranged on a second resonator. And the sensors are used for detecting the deformation of the corresponding resonators. The actuators are used for driving the corresponding resonators to deform. Excitation signals of the first actuator and the second actuator are obtained by multiplying sensing signals of the first sensor and the second sensor by a transfer function. The transfer function makes the two natural frequencies of the non-Hermi elastic system tend to be consistent near a singular point. The bifurcation value of the inherent frequency of the system near the singular point is very sensitive to the parameter change of the system, so that the cantilever beam mass measurement device and the crack propagation detection device with ultrahigh sensitivity can be obtained.
Owner:浣江实验室 +1

Heat exchanger comprising a fiber-optic sensor for determining a tube wall thickness of a heat-transfer tube of the heat exchanger and method for operating such a heat exchanger

A heat exchanger and method for operating a heat exchanger. The heat exchanger, in particular a high-pressure heat exchanger for urea synthesis, includes multiple heat-transfer tubes for transporting a first fluid in order to transfer heat between the first fluid and a second fluid via the heat-transfer tubes. In order to improve a usability, a fiber-optic sensor is respectively arranged on one or more of the heat-transfer tubes. The fiber-optic sensor is designed to interferometrically ascertain an elastic oscillation, in particular a natural oscillation, of the respective heat-transfer tube during operation of the heat exchanger, in order to determine a tube wall thickness of the respective heat-transfer tube during operation of the heat exchanger.
Owner:SCHOELLER BLECKMANN NITEC GMBH

Device, in particular a control device, for recognizing movements of a magnet carrier

The invention relates to a device (1), in particular a control device (1), for recognizing movements of a magnet carrier (20), wherein the device comprises a control unit (62), wherein the device comprises a first sensor (9), wherein the first sensor can determine the direction of a magnetic field acting on the first sensor (9) relative to a preferred direction (A), wherein the control unit (62) is configured such that the control unit (62) outputs an output signal and / or a control signal based on the direction of a magnetic field acting on the first sensor (9) relative to a preferred direction (A).
Owner:TONIES GMBH

Harmonic error compensation method and circuit of magnetic encoder

The invention provides a harmonic error compensation method and circuit of a magnetic encoder. The circuit comprises a plurality of harmonic error compensation channels and a compensation module. Each harmonic error compensation channel receives an angle signal theta with harmonic noise and generates a harmonic error compensation signal based on the angle signal theta with harmonic noise, and the harmonic error compensation signal generated by the mth harmonic error compensation channel is akm * sin (km * theta) + bkm * cos (km * theta); and the compensation module is configured to add the harmonic error compensation signal generated by each harmonic error compensation channel and the angle signal theta with the harmonic noise to obtain a compensated angle signal theta *. Therefore, real-time harmonic error compensation is realized in hardware through the estimated compensation coefficient of the harmonic, the angle measurement precision is improved, and meanwhile, hardware resources are saved.
Owner:MEMSIC SEMICON WUXI

Position precision compensation method for radiation-resistant absolute photoelectric encoder

The invention discloses a position precision compensation method for an irradiation-resistant absolute photoelectric encoder. The position precision compensation method mainly comprises a dual-sensing Kalman filtering method and a Double Deep Q-Network reinforcement learning method. The dual-sensing module of the photoelectric encoder can start the auxiliary sensor after the main sensor is damaged due to radiation damage, so that the overall radiation resistance of the encoder is improved. According to the method, position data obtained by the auxiliary sensor is used as parameters of a state estimation equation in the double-sensor Kalman filtering method and used for compensating position errors of the main sensor in radiation damage, and hyper-parameters in the Kalman filtering algorithm are optimized through the DDQN reinforcement learning method. According to the position precision compensation method for the radiation-resistant absolute photoelectric encoder, the radiation resistance of the absolute photoelectric encoder can be improved, precision reduction caused by radiation damage is compensated, and the problem of position loss occurring when a main sensor is switched to an auxiliary sensor is solved.
Owner:HUNAN UNIV

System and method for recording and recovering power-down position of virtual multi-turn absolute value encoder

The invention relates to the technical field of encoders, and discloses a system and a method for recording and recovering a power failure position of a virtual multi-turn absolute value encoder. The system comprises: a virtual multi-turn absolute value encoder; the nonvolatile storage module is used for storing a multi-circle real-time record and a multi-circle actual numerical value of the recovery algorithm module at each power-off moment; the multi-turn real-time recording and recovery algorithm module comprises an initialization compensation unit and a real-time calculation recording unit, and the initialization compensation unit is used for reading the multi-turn actual numerical value of the multi-turn real-time recording and recovery algorithm module at the last power-off moment from the nonvolatile storage module in the power-on initialization stage and calculating the real-time calculation recording unit according to the multi-turn actual numerical value of the multi-turn real-time recording and recovery algorithm module. The real-time calculating and recording unit is used for calculating a multi-circle actual value at the current moment and a multi-circle position actual value at the current moment according to the multi-circle compensation value; and feeding back the actual value of the multi-circle position at the current moment to the external equipment and recording the actual value of the multi-circle position at the current moment into the nonvolatile storage module.
Owner:AEROSPACE SCI & ENG INTELLIGENT ROBOT CO LTD

Spool position estimation apparatus, aircraft hydraulic actuator apparatus, spool position estimation method, and spool position estimation program

A position estimation apparatus includes: a supplying unit that supplies a high-frequency signal Sh to a solenoid for driving a spool of an electromagnetic valve; an acquisition unit that acquires electrical information Je related to the solenoid supplied with the high-frequency signal Sh, and an estimation unit that estimates a position of the spool based on a result of comparison between the electrical information Je acquired by the acquisition unit and the high-frequency signal Sh supplied from the supplying unit.
Owner:NABTESCO CORP

Optical temperature sensor

To provide an optical temperature sensor capable of preventing damage to a protective window.SOLUTION: An optical temperature sensor provided herein comprises a cylindrical fiber probe having an optical fiber inserted therethrough, and a protective window made of sapphire and located on a tip end side of the fiber probe. The protective window has a surface on a side opposite the optical fiber in an axial direction of the fiber probe formed as a first surface and a surface on a side of the optical fiber formed as a second surface, where the first surface is an a-plane of sapphire.SELECTED DRAWING: Figure 4
Owner:FUTABA CORPORATION

Integrated ice protection with prognostics and health management

Provided are embodiments for method and system for performing an integrated ice protection with prognostics and health management using fiber optic sensors. Embodiments can include reading a signal from each sensor of an array of sensors installed on a surface of a structure or equipment, wherein each sensor is a fiber optic sensor, and generating a map based on reading the signal from each sensor, wherein the map monitors a condition of the surface detected by each sensor. Embodiments can also include determining at least one of an abnormal condition or a failure based at least in part on reading the signal from each sensor; and performing at least one of adjusting power control for the structure or equipment or communicating the abnormal condition or failure of the structure or equipment.
Owner:GOODRICH CORP

Dual encoder module

A dual encoder module (1) comprising: a first encoder rotor unit (3) comprising a first support (31) , a first rotor (32) , a first bearing (33) , and a first holder (34) , wherein the first holder (34) is constructed to hold the first rotor (32) and be coupled to the first support (31) via the first bearing (33) ; a second encoder rotor unit (4) comprising a second support (41) , a second rotor (42) , a second bearing (43) , and a second holder (44) , wherein the second holder (44) is constructed to hold the second rotor (42) and be coupled to the second support (41) via the second bearing (43) ; and an encoder stator (2) configured to be clamped and secured between the first support (31) and the second support (41) , such that a first side of the encoder stator (2) is spaced from the first rotor (32) with a first air gap and a second side of the encoder stator (2) is spaced from the second rotor (42) with a second air gap; wherein the first holder (34) is further constructed to be fixed onto a first rotary shaft (5) and the second holder (44) is further constructed to be fixed onto a second rotary shaft (6), such that the first rotor (32) can rotate with the first rotary shaft (5) and the second rotor (42) can rotate with the second rotary shaft (6). A robot is also disclosed.
Owner:ABB (SCHWEIZ) AG +4

Position sensor assembly

Embodiments described herein are directed to a position sensor that includes a first receiver coil electrically coupled to a first multiplier to generate a first output, a second receiver coil electrically coupled to a second multiplier to generate a second output, a transmitter coil electrically coupled to an oscillator, the oscillator electrically coupled to a third multiplier to generate a third output, a phase-locked loop electrically coupled to the oscillator and the transmitter coil, a summing circuit configured to receive the first output and the second output and configured to generate a signal, a phase detector configured to receive the signal and the third output, the phase detector outputting a sense signal that is indicative of an angle of the motor position sensor, and a pair of op amps electrically coupled to the phase detector. The op amps configured to output an analog differential signal and a differential phase signal.
Owner:KSR IP HOLDINGS LLC

Rotation detection device

PendingJP2026103931AConverting sensor outputOptical pickupRotational axis
The magnetic sensor and optical sensor can be easily positioned so that their respective design positions are correct for the magnet and optical disc, respectively. [Solution] The rotation detection device 1 comprises a substrate 2 having an insertion hole 10 for a rotating shaft 100, a magnetic field forming member 3 that rotates with the rotating shaft 100, a plurality of magnetic sensors 20 arranged around the magnetic field forming member 3, a casing 22 provided on the substrate 2 that houses the plurality of magnetic sensors 20, an optical sensor 6 provided on the substrate 2 on the opposite side from the plurality of magnetic sensors 20, and an optical disk 5 positioned opposite the substrate 2 with the optical sensor 6 in between, which rotates with the rotating shaft 100. The device has an adjustment mechanism that allows the position of the plurality of magnetic sensors 20 relative to the magnetic field forming member 3 to be adjusted by adjusting the position of the casing 22 relative to the substrate 2 while the substrate 2 is positioned by adjusting the position of the optical sensor 6 relative to the optical disk 5.
Owner:HIROSE ELECTRIC CO LTD

Position recognition method and system

The embodiment of the present specification provides a position recognition method and system, wherein the position recognition method is applied to a position recognition system, the system comprises a power supply rail provided with positioning mark information and an electronic price tag installed on the power supply rail, and the electronic price tag is provided with a photoelectric tube pair, wherein the electronic price tag reads the positioning mark information on the corresponding power supply rail based on the photoelectric tube pair, and determines the target position of the power supply rail according to the positioning mark information. By determining the target position of the electronic price tag on the power supply rail according to the positioning mark information of the electronic price tag on the power supply rail, the self-positioning capability of the electronic price tag is realized at low cost, and the positioning accuracy can be ensured.
Owner:SHANGHAI HEMA ZHIYAN TECHNOLOGY CO LTD

Temperature insensitive inductor

An inductor for use as a passive electronic component. The inductor has a hollow ceramic tube, a metal target rod located inside the hollow ceramic tube, a coil wound on the outside of the hollow ceramic tube and including a first end and a second end, and a first terminal engaging the first end of the coil and a second terminal engaging the second end of the coil. The metal target rod is fixed relative to the coil at a position so that the inductor has a zero temperature coefficient. Also provided is an LC resonant circuit including the inductor.
Owner:LRT SENSORS LLC

Rotation sensor for a steering system and steering system for a motor vehicle

The invention relates to a rotation sensor (4) for a steering system (1) of a motor vehicle, comprising a magnet element (41) which can be mounted on a steering shaft (10) and which can be rotated about an axis (L), and two stator elements (42a, 42b) which are fixedly arranged coaxially with respect to the magnet element and are axially spaced apart from each other, the stator elements (42a, 42b) are operatively connected to at least one sensor element (6) via two flux conductors (5a, 5b), the flux conductors (5a, 5b) each having a converging section (51a, 51b) connected to the stator elements (42a, 42b), a coupling section (58a, 58b) connected to the converging section and a compensation section (52a, 52b), and the sensor element (6) is arranged between the two coupling sections (58a, 58b) which are axially opposite one another. In order to be able to achieve an optimized construction and to reduce the production effort, the invention proposes that the compensation sections (52a, 52b) of the two flux conductors (5a, 5b) are arranged in the axial direction without overlapping.
Owner:THYSSENKRUPP PRESTA AG +1

Position Sensor

ActiveJP7807951B2Converting sensor output
To detect a position of a movable part with a resolution finer than before.SOLUTION: A position sensor includes: a bridge circuit 1 that is a sensor circuit including a magneto resistance effect element; a magnet 11 that linearly moves on a plane 9 crossing a sensor plane 6 on which a thin film resistor pattern of the magneto resistance effect element is formed; a sensor output detection unit 21 that detects output of the bridge circuit 1; an angle calculation unit 22 that calculates an angle of a magnetic field generated by the magnet 11 on the basis of the output of the bridge circuit 1; and a position calculation unit 23 that calculates coordinates of the magnet 11 on the basis of the angle of the magnetic field.SELECTED DRAWING: Figure 6
Owner:AZBIL CORP