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802 results about "Capacitive coupling" patented technology

Capacitive coupling is the transfer of energy within an electrical network or between distant networks by means of displacement current between circuit(s) nodes, induced by the electric field. This coupling can have an intentional or accidental effect.

Blade lightning protection channel online test method and system based on pulse current method

The invention provides a blade lightning protection channel online test method and system based on a pulse current method, and belongs to the technical field of blade lightning protection detection.The method comprises the steps that a pulse waveform is generated through a pulse current generator to simulate lightning impulse, and the lightning impulse is injected into the surface of a lightning arrester of a blade lightning protection system; measuring channel currents at different positions of the surface of the lightning arrester in the length direction by using a distributed sensor; a high-voltage differential probe is used for collecting and measuring the waveform of an incident wave and the waveform of a reflected wave of an injection point; detecting blade surface potential distribution by using a capacitive coupling sensor; comparing the waveform of the incident wave, the waveform of the reflected wave and the theoretical waveform, determining a time domain reflection coefficient and a frequency domain impedance spectrum, and determining a fault type; after the fault type is determined, the fault point is positioned based on the channel current and the blade surface potential distribution, the lightning impulse is simulated through the pulse waveform, the lightning protection channel is further tested, shutdown is not needed, the testing efficiency of the blade lightning protection channel is effectively improved, and the power generation efficiency is ensured.
Owner:HUANENG TONGCHUAN ZHAOJIN COAL POWER CO LTD

Programmable in-memory computing accelerator for low-precision deep neural network inference

A programmable in-memory computing (IMC) accelerator for low-precision deep neural network inference, also referred to as PIMCA, is provided. Embodiments of the PIMCA integrate a large number of capacitive-coupling-based IMC static random-access memory (SRAM) macros and demonstrate large-scale integration of IMC SRAM macros. For example, a 28 nm prototype integrates 108 capacitive-coupling-based IMC SRAM macros of a total size of 3.4 megabytes (Mb), demonstrating one of the largest IMC hardware to date. In addition, a custom instruction set architecture (ISA) is developed featuring IMC and single-instruction-multiple-data (SIMD) functional units with hardware loop to support a range of deep neural network (DNN) layer types. The 28 nm prototype chip achieves a peak throughput of 4.9 tera operations per second (TOPS) and system-level peak energy-efficiency of 437 TOPS per watt (TOPS / W) at 40 megahertz (MHz) with a 1 volt (V) supply.
Owner:THE TRUSTEES OF COLUMBIA UNIV IN THE CITY OF NEW YORK +1

Amplifier compensation techniques for switched capacitor circuits

InactiveUS20050046460A1Computing operations for integral formationNegative-feedback-circuit arrangementsCapacitive couplingCapacitance
A system and method are used to maintain a variance in feedback factors of an amplifier between the first and second phases either below a threshold value or within a specified range. The system includes the amplifier and first through third capacitances. The amplifier is coupled between an input node and an output node that operates during first and second phases of operation. The first capacitance is coupled across the amplifier and between the input node and the output node during the first and second phases of operation. The second capacitance is coupled to the input node during the first phase of operation. The third capacitance is coupled to one of the input and output nodes during one or both of the first and second phases of operation.
Owner:AVAGO TECH WIRELESS IP SINGAPORE PTE

Shield gate trench MOSFET structure and manufacturing method thereof

PendingCN120769521ACapacitanceTrench mosfet
The invention provides a shield gate trench MOSFET (Metal-Oxide-Semiconductor Field Effect Transistor) structure and a manufacturing method thereof, according to the manufacturing method, a field oxide layer is formed twice (a first oxide layer and a second oxide layer), a polycrystalline silicon interlayer is introduced between the first oxide layer and the second oxide layer, and the polycrystalline silicon interlayer is only reserved on a side wall opposite to a non-floating shield gate layer after being etched twice, so that the field oxide layer is formed in the first oxide layer and the second oxide layer; and a floating shield grid layer is formed. As the floating shield grid layer is introduced to the side wall opposite to the non-floating shield grid layer, the field intensity of the middle area in the depth direction of the groove can be increased, and the overall voltage endurance capability is improved. The floating shield gate layer is introduced into the shield gate trench MOSFET structure, so that the voltage withstanding level of a device can be improved, and the voltage withstanding level of the device can be improved by utilizing a capacitive coupling effect between a part of the floating shield gate layer and a part of the floating shield gate layer and a capacitive coupling effect between a source electrode and the drain electrode. Therefore, gate-drain capacitance and source-drain capacitance of the device can be reduced, and switching speed of the device is improved.
Owner:HANGZHOU FULLSEMI SEMICON CO LTD

Feed network assembly, phase shifter and antenna device

The invention discloses a feed network component, a phase shifter and an antenna device, which are used for solving the problem that the transmission efficiency is influenced by resonance formed in opposite areas of metal plates. The invention provides a feed network assembly, a feed network comprises a cavity and a transmission structure, the cavity comprises an accommodating cavity, and the accommodating cavity is used for accommodating the transmission structure; the cavity further comprises a first side wall, the first side wall comprises a first sub-side wall and a second sub-side wall which are oppositely arranged and capacitively coupled, and at least one of the first sub-side wall and the second sub-side wall which are oppositely arranged and capacitively coupled comprises at least one slot. According to the invention, the open grooves are formed in the first sub-side wall and the second sub-side wall which are oppositely arranged and are in capacitive coupling, so that the oppositely arranged areas are reduced, the resonance is reduced, and the transmission efficiency is improved.
Owner:HUAWEI TECH CO LTD

Low-noise and high-precision analog front-end circuit for biological signal acquisition

The invention discloses a low-noise and high-precision analog front-end circuit for biological signal acquisition. The low-noise and high-precision analog front-end circuit comprises a chopping capacitance coupling type instrument amplifier circuit, a switched capacitor type programmable gain amplifier circuit and a Sigma-Delta analog-to-digital converter modulator circuit. T-type capacitance feedback, chopping modulation and programmable technologies are introduced on the basis of an existing amplifier, and the low-noise and programmable gain functions of the pre-amplifier are achieved. Through the three-order one-bit quantized feed-forward chopping type Sigma-Delta modulator, the signal to noise ratio and the effective bit number of the signal are improved. Compared with the prior art, the analog front-end circuit not only has the capability of changing the gain multiple according to the bio-electricity signal, but also has the low-noise and high-precision signal processing effect, and the problems that a traditional analog front-end circuit is large in noise and low in signal processing precision are solved. In addition, the biological signal acquisition-oriented circuit provided by the invention can also be used in other analog front ends, such as an audio processor and the like, and is wide in application range.
Owner:NORTHWESTERN POLYTECHNICAL UNIV

Extreme edge sheath tunability with non-movable edge ring

Embodiments described herein generally related to a substrate processing apparatus. In one embodiment, a process kit for a substrate processing chamber disclosed herein. The process kit includes an edge ring configured to circumscribe a substrate in the semiconductor processing chamber, at least one conductive pin electrically coupled to the edge ring, a sliding ring positioned beneath the edge ring and comprising at least one insert hole for receiving the at least one conductive, and an actuator operable to displace the sliding ring relative to the at least one conductive pin along a direction that changes an amount of capacitive coupling between the at least one conductive pin and the sliding ring.
Owner:APPLIED MATERIALS INC

Anti-irradiation D trigger based on interconnection line crosstalk calculation

The invention relates to an anti-radiation D flip-flop based on interconnection line crosstalk calculation. The anti-radiation D flip-flop comprises a cascade structure of a master latch module and a slave latch module, the primary latch module converts an input signal into a dual-node redundant signal through a first interconnection line crosstalk circuit (CC1), and logic storage of triggering high output only by dual high input is realized by capacitive coupling of L1-L3 and L2-L3; the slave latch module generates redundant signals L4 / L5 through a second interconnection line crosstalk circuit, and error correction is carried out on CC2 output and direct transmission signals in combination with a Muller C unit. The D flip-flop only needs 16 transistors with the minimum size, and the number of the transistors is reduced by 67% compared with that of a traditional TMR; asynchronous reset is supported, and the L3 / L6 is forced to be charged to a high level during reset; the capacitive coupling strength is controlled through metal layer wiring, and the reliability of a spaceflight electronic system in a radiation environment is remarkably improved.
Owner:58TH RES INST OF CETC

Vehicle electromagnetic compatibility radiation anti-interference test method and device, vehicle and medium

The invention provides a vehicle electromagnetic compatibility radiation anti-interference test method and device, a vehicle and a medium, and relates to the field of vehicle testing, and the method comprises the steps: shielding a wire harness between a first domain controller and a second domain controller, and obtaining a wire harness shielding result; the shielding layer located at the first domain controller end or the shielding layer located at the second domain controller end is grounded, the shielding layer at the other domain controller end is suspended, and capacitive coupling is formed between the shielding layer and the ground plane; and carrying out electromagnetic compatibility radiation anti-interference test on the vehicle according to a wire harness shielding result and capacitive coupling. According to the invention, the wire harness between the first domain controller and the second domain controller is fully shielded, so that a high-frequency interference coupling path can be blocked; and the shielding layer of the first domain controller end or the second domain controller end is grounded, and then the shielding layer of the other domain controller end is suspended to form single-end grounding, so that high-frequency interference can be prevented from entering a communication link through wiring harness coupling.
Owner:CHONGQING SELIS PHOENIX INTELLIGENT INNOVATION TECH CO LTD

Electro-magnetic shield to prevent bearing and / or gearbox damage due to shaft induced voltage in electric motors

Common mode voltage discharge shields are disposed over end turns of stator windings for a three phase electric traction motor within an electric vehicle. The common mode voltage discharge shields are capacitively coupled to the end turns to a ground strap, providing a low impedance path for common mode voltages accumulating at a neutral for electric traction motor as a result of high frequency switching of the motor drive voltage to produce desired torque. An insulating layer separates the common mode voltage discharge shields from the end turns. Accumulation of the common mode voltage in excess of a bearing breakdown voltage, and the associated potential for discharge through bearings between the stator and rotor and electrical discharge machining, is reduced or eliminated.
Owner:WHS ENERGY SOLUTIONS LLC

System and method for differential parallel touch sensing

Systems and methods for touch sensing are provided. An input device includes a display and a touch sensor. The touch sensor has a sensing area with a plurality of sensor pixels forming rows and columns. Each sensor pixel includes a first electrode having first capacitive coupling areas and a second electrode having second capacitive coupling areas. The first capacitive coupling areas are configured to capacitively couple with one or more adjacent sensor pixels disposed in a same row and the second capacitive coupling areas are configured to capacitively couple with one or more adjacent sensor pixels in a same column. The first electrode is configured to electrically connect to one or more sensor pixels in the same column and the second electrode is configured to electrically connect to one or more sensor pixels in the same row. The sensor pixels are configured to facilitate parallel touch sensing in multiple orientations.
Owner:SYNAPTICS INC

Superconducting quantum circuit apparatus

A superconducting quantum circuit apparatus includes a qubit; and a first wiring with a wiring used as a transmission of a signal to generate a magnetic flux to be applied to the qubit and a wiring used as a transmission of a signal input by capacitive coupling to and / or output, by capacitive coupling from the qubit, combined together thereinto, as a single wiring.
Owner:NEC CORP

Computation error compensation test method and system based on capacitive coupling storage and calculation integrated chip

The invention provides a calculation error compensation test method and system based on a capacitive coupling storage and calculation integrated chip. The method comprises the steps of collecting manufacturing process deviation parameters of chips of a preset batch, processing to obtain process deviation errors, obtaining temperature factor parameters of the chips, processing to obtain temperature drift errors, obtaining overall errors of the chips, judging whether error compensation needs to be carried out on the chips or not, and if error compensation needs to be carried out, further judging a specific compensation mode. Comprising a classification compensation mode and an overall compensation mode, if the compensation mode is the classification compensation mode, corresponding compensation is performed on each error, and if the compensation mode is the overall compensation mode, overall compensation is performed on the chip, so that the calculation error compensation test technology based on the capacitance coupling storage and calculation integrated chip is realized.
Owner:SHENZHEN QUANXING TECH CO LTD

Insulator zero value detection robot control method

The invention relates to the field of power equipment detection and intelligent robot control, and discloses an insulator zero value detection robot control method. The method comprises the following steps: deploying a rail-mounted robot on a power transmission line, and synchronously acquiring infrared thermal imaging, ultraviolet corona, capacitance coupling voltage and laser contour four-dimensional data; performing space-time alignment and multi-modal feature extraction on the multi-source information; generating an insulator unit-level health score through cross-modal attention fusion; and judging a zero-value fault according to the scoring threshold value and triggering a rechecking or confirming process. The system comprises a double-wheel clamping driving mechanism, a multi-source sensing array and a central controller. According to the invention, full-automatic, high-precision and high-safety detection in an electrified state is realized, and the recognition accuracy and the operation efficiency are remarkably improved.
Owner:GANSU TRANSMISSION & DISTRIBUTION ENG CO

Capacitive coupling type current steering digital-to-analog converter for transmitting switch control signal

The invention relates to the technical field of integrated circuits, in particular to a capacitive coupling type current steering digital-to-analog converter for transmitting switch control signals, which comprises a current steering unit and a switch signal control unit. The switching signal control unit comprises two capacitance coupling type level shifters; the current steering unit comprises a current source and transistors M1-M4, source electrodes of the transistors M1-M4 are connected with one end of the current source, and the other end of the current source is grounded; drain electrodes of the transistors M1-M2 are connected to form a positive output signal, and drain electrodes of the transistors M3-M4 are connected to form a negative output signal; the grid electrodes of the transistors M1-M2 are connected with a first capacitive coupling type level shifter, and the transistors M3-M4 are connected with a second capacitive coupling type level shifter; the on and off of the transistors M1-M4 are controlled through the two capacitance coupling type level shifters; the cross coupling unit is introduced to assist in transmitting switch control signals, and the dynamic performance of the digital-to-analog converter is improved.
Owner:CHONGQING GIGACHIP TECH CO LTD +1

Electronic device comprising antenna

An electronic device is provided. The electronic device includes a first housing comprising a first space and comprising a conductive portion, a second housing comprising a second space and slidably coupled to the first housing, a flexible display disposed to be supported by the first housing and the second housing and having a display area expanding when being transitioned from a slide-in state to a slide-out state, and a wireless communication circuit disposed in the first space and configured to transmit or receive a wireless signal in a designated frequency band via the conductive portion, wherein the electronic device comprises a conductive stub disposed in the second housing and disposed to be connectable through capacitive coupling to at least a part of the conductive portion in the slide-in state.
Owner:SAMSUNG ELECTRONICS CO LTD

Superconducting quantum circuit

Please delete the Abstract of the Disclosure, and replace it with the following: A superconducting quantum circuit includes first to fourth qubits and a coupler including a loop circuit connected between one end and other end of the coupler and a capacitor connected in parallel to the loop circuit, wherein the loop circuit includes n (n>=2) first Josephson junctions arranged in series and a second Josephson junction arranged in parallel with the n first Josephson junctions with a junction size smaller than that of the first Josephson junction, the first and second qubits capacitively coupled to the one end of the coupler, the third and fourth qubits capacitively coupled to the other end of the coupler, a magnitude of a coupling coefficient of the four-body interaction by the coupler being configurable based on circuit parameters including at least the n and α (0<α<1) which is a ratio of a Josephson energy between the second Josephson junction and the first Josephson junction.
Owner:NEC CORP

Systems and methods for delivering pulsed electromagnetic field therapy via operator-guided capacitive coupling

Systems and techniques may generally be used for delivering pulsed electrostatic fields for therapeutic purposes. In one aspect, an electrostatic-field therapy apparatus may include a power source; a pulse-rate generator that may produce gating pulses; a solid-state switching stage with at least one transistor whose control terminal receives the gating pulses and whose conduction path periodically switches current from the power source; a step-up transformer whose primary winding couples to the switching stage and whose secondary winding may output high-potential pulses; an electrode coupled to the secondary winding; and a dielectric layer disposed over the electrode so that, when a body region is placed adjacent the dielectric layer, the high-potential pulses may be capacitively transferred through the dielectric as a therapeutic electrostatic field.
Owner:LLOYD HAVELOCK DAVID

Capacitively coupled plasma-enhanced atomic layer deposition method

A plasma-enhanced atomic layer deposition method and the associated reactor, the method including a supply of a substrate into a plasma reactor including a reaction chamber, and a plurality of atomic layer deposition cycles on the exposed surface of the substrate, including an injection in the reaction chamber of a precursor based on a first species, a plasma treatment of the exposed surface of the substrate by a plasma by capacity coupling between the plate and the lateral wall of the reaction chamber, by applying a radiofrequency power to the plate. Capacitive coupling makes it possible to create a plasma localised in the vicinity of the substrate, at low and finely adjustable ion energy and density.
Owner:UNIVERSITE GRENOBLE ALPES +1

Inductive stylus sensing

Electrodes configurable for capacitive touch sensing or inductive sensing are disclosed. The electrodes are formed from a plurality of tiled (connected) sense pixels, each sense pixel including two or four conductive elements. The conductive elements within the plurality of sense pixels of an electrode are connected to form conductive pathways within the electrode. These conductive pathways enable each electrode to be configured as a touch electrode for single-ended or differential capacitive touch sensing, or into one or two loops for inductive sensing. In pixels with four conductive elements, two conductive elements are formed with a comb shape for maximizing current conduction during inductive sensing and maximizing capacitive coupling during touch sensing, and two conductive elements are formed as bypasses. In electrodes formed from sense pixels with four conductive elements, each conductive pathway within the electrode is formed as an alternating series of comb-shaped conductive elements and bypasses.
Owner:APPLE INC

Wireless microphone dipole RF antenna

A handheld wireless microphone has improved resilience against intermittent dropouts due to the placement of hands on the body of the handheld wireless microphone. A robust, dipole RF antenna is provided in the body of the handheld microphone. One antenna element is a conductive cone or truncated cone at the bottom of the microphone body, which is surrounded by a conductive cup and an insulated gap layer to form a capacitive coupling configuration that mitigates interference of RF radiation by human flesh. The other antenna element is conductive and serves as the frame of the microphone body.
Owner:SOUND DEVICES LLC

High gain planar dipole antenna with decade gain-bandwidth

Disclosed is a novel dipole antenna design having symmetric poles, each pole having a half circle resonator and an oval resonator that are electrically connected by a straight choke section; the dipole shape permits a wideband dipole response with a transition frequency between a lower and upper frequency band. A cross bar and capacitively-coupled stubs tune at the transition frequency to create a continuous impedance and gain-bandwidth. The dipole and the crossbar and stubs are formed on opposite surface or sides of a substate. Data demonstrates the novel dipole antenna can exceed the gain-bandwidth of the state-of-the-art bowtie by approximately 5 times, that is, its gain-bandwidth is 10:1 versus the standard bowtie gain-bandwidth of 2:1 at broadside.
Owner:UNITED STATES OF AMERICA THE AS REPRESENTED BY THE SEC OF THE ARMY

Radio stimulation surgical suture for promoting peripheral nerve healing and preparation method and application thereof

ActiveCN120078926ASuture equipmentsCoatingsSchwann cell migrationPeripheral neuron
The invention relates to the technical field of peripheral nerve injury suture, and particularly discloses a radio stimulation surgical suture for promoting peripheral nerve healing and a preparation method and application thereof, the radio stimulation surgical suture comprises a Mo core layer and a PLGA coating; the preparation method of the radio stimulation operation suture comprises the following steps: preparing a core layer by using metal Mo, spraying out a PLGA spinning solution through a spinning nozzle, curing in a coagulating bath to form a film, and forming a uniformly coated PLGA coating on the Mo core layer through a wet spinning technology to obtain the radio stimulation operation suture for promoting peripheral nerve healing, according to the prepared radio stimulation surgical suture, energy is obtained from an external electromagnetic field in an electromagnetic induction and capacitance coupling mode, and a stable electric field is formed on the suture and the local part of a wound, so that the electric field acts on damaged tissue. The suture can promote neuronal axon growth, Schwann cell migration and the like, and the nerve tissue regeneration efficiency is improved.
Owner:SHANGHAI BANGCHENG MEDICAL TECHNOLOGY CO LTD

Control Input Device for a Capacitive Touch Screen

A control input device and system are disclosed. The control input device has a mounting base to a capacitive touch screen; an actuator supported by and electrically insulated from the base with an electrically conducting surface and further including: an electrode that is touching, or adjacent to, the capacitive touch screen when the base is mounted, an electrical circuit between the electrode and the electrically conducting surface, the electrically conducting surface having a surface area that is selected such that the electrically conducting surface provides capacitive coupling to, or approaching, infinity whereby capacitive coupling between the electrode and the capacitive touch screen is detectable by the capacitive touch screen's controller, wherein, in use, the electrode is configured to undergo a change corresponding to a state of the actuator and the controller of the touch screen can determine the state of the actuator from the change to the electrode.
Owner:NEXTEQ PLC

Switch equipment fault detection device with built-in multi-channel sensor

The invention discloses a switch equipment fault detection device with a built-in multi-channel sensor, and relates to the technical field of switch equipment fault detection.The switch equipment fault detection device comprises a base and an adjusting assembly, universal wheels are arranged at the four corners of the bottom of the base, a handle is arranged on the upper portion of one side of the base, and a limiting plate is arranged on the other side of the base; a stabilizing assembly is arranged in the base, a support is fixed to one end of the top of the base, and the adjusting assembly is arranged on the upper portion of the support and comprises a servo motor. The ultrasonic sensor is used for capturing mechanical oscillation signals generated by partial discharge, the infrared temperature sensor is matched for monitoring abnormal temperature rise, the electric push rod drives the transient earth electricity tester to be attached to the cabinet wall, the transient earth voltage derived by electromagnetic waves is detected in a capacitive coupling mode, and the fault recognition rate is improved through multi-channel cooperation; the detection assembly can be controlled to move along the rectangular track and adjust the height, thereby achieving the full-coverage scanning of the outer surface of the switch cabinet.
Owner:JIEYANG POWER SUPPLY BUREAU GUANGDONG POWER GRID CO LTD

Programmable in-memory computing accelerator for low-precision deep neural network inference

A programmable in-memory computing (IMC) accelerator for low-precision deep neural network inference, also referred to as PIMCA, is provided. Embodiments of the PIMCA integrate a large number of capacitive-coupling-based IMC static random-access memory (SRAM) macros and demonstrate large-scale integration of IMC SRAM macros. For example, a 28 nm prototype integrates 108 capacitive-coupling-based IMC SRAM macros of a total size of 3.4 megabytes (Mb), demonstrating one of the largest IMC hardware to date. In addition, a custom instruction set architecture (ISA) is developed featuring IMC and single-instruction-multiple-data (SIMD) functional units with hardware loop to support a range of deep neural network (DNN) layer types. The 28 nm prototype chip achieves a peak throughput of 4.9 tera operations per second (TOPS) and system-level peak energy-efficiency of 437 TOPS per watt (TOPS / W) at 40 megahertz (MHz) with a 1 volt (V) supply.
Owner:THE ARIZONA BOARD OF REGENTS ON BEHALF OF THE UNIV OF ARIZONA +1

Self-shielding inductively coupled plasma radio frequency electrode and plasma processing equipment

The invention relates to the technical field of plasma sources, in particular to a self-shielding inductively coupled plasma radio frequency electrode and plasma processing equipment. The device at least comprises a spiral inductance coil, a middle shielding electrode and a grounding capacitor, wherein the spiral inductance coil is used for transmitting radio frequency energy to a plasma excitation area in an inductive coupling mode; the middle shielding electrode is connected to the middle coil part of the spiral inductance coil and used for shielding high-voltage areas at the upper end and the lower end of the spiral inductance coil; the grounding capacitor is used for adjusting the voltage in the middle of the spiral inductance coil, so that the voltage amplitude of the position where the middle shielding electrode is located is reduced to the lowest point, and the self-shielding effect is achieved. According to the invention, the electric field of a high-voltage area of the coil is effectively shielded, the capacitive coupling effect is obviously reduced, the problems of particle pollution, shortened equipment life, ion damage and the like of a traditional plasma source in a wafer processing process are solved, and the system stability and the process reliability are improved.
Owner:SHANGHAI JIYI TECH CO LTD

Superconducting quantum circuit

A superconducting quantum circuit includes first to fourth qubits, and a coupler including first and second electrodes and a nonlinear element bridging the first and second electrodes, wherein each of the first to fourth qubits includes a resonator including a SQUID loop circuit and a capacitor connected in parallel to the loop circuit, the first and second qubits and the third and fourth qubits capacitively coupled to the first and second electrodes of the coupler, respectively, wherein a magnitude relationship among a capacitance value C of a capacitive coupling between each of the first to fourth qubits and the coupler, a capacitance value CJ of the capacitor connected in parallel to the loop circuit for each of the first to fourth qubits, and a capacitance value Cg between the first and second electrodes of the coupler, is set to CJ>Cg>C.
Owner:NEC CORP

Sensor system and method for compensating for an offset of an angular rate signal

A sensor system. The sensor system comprises a MEMS gyroscope, comprising at least: a seismic mass, which can be excited to vibrate and has at least one electrode assembly for capacitively detecting a measurement signal, a drive circuit for generating a drive voltage for exciting and maintaining a defined vibratory movement of the seismic mass, there being a parasitic capacitive coupling between the drive circuit and the at least one electrode assembly, a detection circuit for reading out the measurement signal and for generating an angular rate signal on the basis of the measurement signal, characterized by circuitry means for compensating for an offset of the angular rate signal on the basis of the drive voltage.
Owner:ROBERT BOSCH GMBH

Method for measuring impedance of capacitive coupling plasma source

The invention provides a method for measuring impedance of a capacitively coupled plasma source, which comprises the following steps of: under the condition that plasma is not ignited, dividing a cavity into an upper part and a lower part along an electrical middle plane, and establishing an equivalent circuit model comprising five elements to be determined; three measurement ports are defined, five independent measurement boundary conditions are set, sweep frequency measurement is carried out by using a network analyzer, and multiple groups of Z parameter data are obtained; then, on each frequency point, joint fitting is carried out on a theoretical impedance expression of the equivalent circuit and actually measured data, and parameter values of all undetermined elements are solved; and finally, outputting a parameter curve of each element along with frequency change and a cavity equivalent impedance spectrum. According to the method, the problem that equivalent parameters cannot be identified is solved through multi-working-condition data redundancy, universal, accurate and reproducible measurement of the impedance of the pure cavity is realized, and a reliable quantitative basis is provided for matching network design, process window prediction and cavity optimization.
Owner:ANHUI XIRONG ZHAOBO TECH CO LTD