The application discloses a temperature and
humidity integrated sensor based on a paper folding structure, which comprises a
wireless transmission structure, a thermal driving beam structure, a paper folding beam structure and an interdigital capacitive
humidity sensing structure. When the ambient temperature is higher than a plurality of set temperature points, the paper folding beam structure is bent to cause a plurality of contact electrodes to contact with contact electrodes, an
LC resonant circuit is formed by the interdigital capacitive
humidity sensing structure and the
wireless transmission structure, the sequential contact of the contact electrodes and the contact electrodes causes the change of an induced
capacitance, and the resonant frequency is greatly changed. When the
ambient humidity changes, the
dielectric constant of a
film material in the interdigital capacitive humidity sensing structure changes to cause the
slight change of the interdigital
capacitance, so that the resonant frequency is slightly deviated near the
temperature jump point. The temperature and humidity resonant frequency sensing information is collected in a passive and
wireless mode through
electromagnetic coupling, the simultaneous measurement of the temperature and humidity sensor is realized, and the scheme has the advantages of multi-parameter sensing, passive and wireless and simple structure.