The invention discloses an ultra-low voltage cold start oscillator delay unit based on a deep trap MOS tube. The delay unit comprises PMOS (P-channel Metal Oxide Semiconductor) tubes M1, M3 and M5 andNMOS (N-channel Metal Oxide Semiconductor) tubes M2, M4 and M6, which are manufactured by adopting a deep trap process, wherein substrates of the M1 and M2, substrates of the M3 and M4 and substratesof the M5 and M6 are respectively connected, and a signal input end Vin of the delay unit is connected to the substrates of the PMOS tubes and the NMOS tubes; the gate electrodes of M1 and M2, the gate electrodes of M3 and M4 and the gate electrodes of M5 and M6 are respectively connected and then connected to a signal input end Vin of the delay unit, a drain electrode of M1 is connected with a drain electrode of M2 and serves as a common drain electrode X port, a source electrode of M1 is connected with a power supply, and a source electrode of M2 is grounded. Under the condition of ensuringlow input power supply voltage, the output voltage swing of the delay unit is improved, the direct-current gain of the delay unit is increased, and oscillation can be generated under lower power supply voltage.