447 results about "Coplanar waveguide" patented technology

The invention discloses a negative group delay system based on SSPP, and belongs to the technical field of microwave communication. A fundamental mode negative group velocity is innovatively generated based on an artificial surface plasmon SSPP, and an SSPP system with negative group delay is realized. The system comprises two parts, namely an amplifier circuit and an SSPP waveguide with a negative group delay unit. The SSPP waveguide with the negative group delay characteristic comprises two coplanar waveguide parts, two transition parts and an SSPP waveguide part, the SSPP waveguide part comprises a unit for generating negative group velocity and a plurality of basic units, and further comprises a microwave dielectric substrate. The amplifier is composed of an amplifier chip, a peripheral capacitor inductor of the amplifier chip and a direct-current power supply. An input signal passes through the system, and advanced transmission of the signal can be realized. The problems of narrow bandwidth, large loss and non-adjustable structure in the prior art are effectively solved, and the antenna has wide application prospects in the fields of 5G communication, radar signal processing, array antenna systems and the like.

The invention discloses an integration and optimization method of a multilayer circuit board in a photovoltaic inverter, and the method comprises at least seven layers of functional stacked structures which are an electromagnetic shielding layer, a power device layer, a first insulating dielectric layer, a control circuit layer, a second insulating dielectric layer, a heat dissipation substrate layer and a mechanical strengthening layer from top to bottom in sequence. Wherein the power device layer adopts a three-dimensional embedded packaging technology to integrate an IGBT module and a SiC MOSFET module, and a gate drive circuit of the power device layer is embedded into a first insulating dielectric layer in a coplanar waveguide structure; the heat dissipation substrate layer is provided with a micro-channel array with gradient apertures, and the inner wall of each micro-channel is subjected to anodic oxidation treatment to form an Al2O3 ceramic layer with the thickness of 20-50 microns.

The utility model discloses an integrated liquid crystal phased array for satellite ground communication. Comprising an upper quartz glass substrate, a lower quartz glass substrate, a liquid crystal medium arranged between the upper quartz glass substrate and the lower quartz glass substrate, polyimide films arranged above and below the liquid crystal medium, a coplanar waveguide transmission line and a slow-wave liquid crystal phase shift feed network which are arranged on the upper surface of the lower quartz glass substrate, and a plurality of slot coupling patch antenna units arranged on the upper surface of the upper quartz glass substrate, the metal ground is arranged on the lower surface of the upper substrate; the coplanar waveguide transmission line is connected with the slow-wave liquid crystal phase shift feed network, a plurality of coupling gaps are formed in the metal ground, and slow-wave liquid crystal phase shifters of the slow-wave liquid crystal phase shift feed network are correspondingly coupled with the gap coupling patch antenna units through the coupling gaps. And each slot coupling patch antenna unit is independently regulated and controlled through a corresponding slow-wave liquid crystal phase shifter so as to realize dual-beam and two-dimensional scanning. The liquid crystal phased array has the characteristics of double beams, two-dimensional scanning, high gain and easy integration.

The invention discloses a miniaturized sensor for measuring the dielectric constant of a dielectric material, and belongs to the technical field of microwave sensing. The sensor structure comprises a top metal patch signal layer, a middle dielectric substrate layer and a bottom metal grounding layer, wherein the top-layer metal patch structure comprises five parts, namely a 50-ohm microstrip line, a 1 / 4 wavelength impedance change line, a coplanar waveguide with a coupling slot, a substrate integrated waveguide and a sensing unit, and the top layer and the grounding layer are connected through a metalized through hole of the middle layer; and a complementary split-ring resonator sensing unit of a stepped impedance fractal structure is etched on the top metal layer and is used as a sensing area for placing a solid material for dielectric constant measurement. According to the sensor, the purpose of miniaturization of the sensor is achieved through loading of the resonant ring unit, the measurement sensitivity is high, the measurement error is small, and the sensor is suitable for dielectric constant measurement of dielectric materials.

The embodiment of the invention provides a circuit board and electronic equipment, relates to the technical field of signal transmission, and is used for solving the problem of signal crosstalk between different channels in the circuit board. A signal layer of the circuit board can comprise a first dielectric layer, a first grounding part and a second grounding part of two adjacent signal channels. The signal channel can comprise a transmission line arranged on the first dielectric layer, and a first grounding part and a second grounding part of the transmission line are located on the same side surface of the first dielectric layer to form a coplanar waveguide. The first grounding part and the second grounding part are located between the two adjacent signal channels and are arranged at intervals. The first grounding part and the second grounding part are used for providing different backflow paths to flow backflow signals of two adjacent signal channels, so that crosstalk between different backflow signals is reduced.

The invention provides a defected ground-based broadband high-isolation MIMO (Multiple Input Multiple Output) mobile phone antenna. Each face-to-face inverted-F antenna pair is connected with an inverted-L branch knot; lumped capacitors are arranged at the joints of the radiation arms and the vertical lines where the feeding points are located; 2N linear slots are formed in the feeding points of the N dual-port antenna pairs on the edge of the metal ground; a T-shaped gap is formed in the middle position of the two antennas of each dual-port antenna pair; an antenna pair gap is formed between the two dual-port antenna pairs on the same side; the feed branch knot is printed in the linear slot, and the tail end of the feed branch knot is provided with a lumped capacitor. According to the invention, the distribution of floor current is changed through the T-shaped gap, and the decoupling characteristic of the MIMO mobile phone antenna is realized. By loading the inverted L branches on the inverted F antenna, introducing the coplanar waveguide structure and loading the lumped capacitor, the working bandwidth of the MIMO mobile phone antenna is effectively widened.

The invention provides a single-feed broadband circularly polarized patch antenna for navigation. The single-feed broadband circularly polarized patch antenna comprises a first dielectric plate, a second dielectric plate, a third dielectric plate, a metal shielding box and a coaxial cable, an antenna radiator is printed on the first dielectric plate, a coplanar waveguide structure is printed on the second dielectric plate, and a feed structure is printed on the third dielectric plate; the coaxial cable feeds power to the coplanar waveguide structure on the second dielectric plate through the feed structure on the third dielectric plate; and the coplanar waveguide structure on the second dielectric plate feeds the antenna radiator on the first dielectric plate in a coupling manner. The coplanar waveguide structure and the patch antenna are combined, the axial ratio bandwidth of the single-feed circularly polarized antenna is successfully improved through the coplanar waveguide coupling feed technology, the maximum working bandwidth of the single-feed circularly polarized antenna is improved by more than one time, and the problem that the single-feed circularly polarized antenna is narrow in bandwidth and difficult to apply to satellite navigation is solved. And the method has extremely high applicability and flexibility in multi-system and multi-band satellite navigation application.

The invention describes a Josephson parametric amplifier and a manufacturing method thereof. The broadband Josephson parametric amplifier comprises: a substrate; a coplanar waveguide disposed on the substrate, the coplanar waveguide having an impedance that varies in a length direction thereof, in which the coplanar waveguide includes a conductor separated from a first ground plane by a first gap and separated from a second ground plane by a second gap; and a non-linear resonator disposed on the substrate and coupled to the coplanar waveguide.

The invention provides a wafer-level cluster coplanar waveguide electrode array, a preparation method and a test system. The coplanar waveguide electrode array comprises an insulating substrate and a plurality of coplanar waveguide electrodes which are arranged in a periodic array; each coplanar waveguide electrode comprises a central transmission section, a probe pad and a gradual transition section; through the design of the central transmission section and the gradual transition section of the coplanar waveguide configuration, the whole-course impedance matching from an external probe to a nano gap is ensured, so that nanosecond and even picosecond-level ultrafast electric pulses can be transmitted to the cluster function unit with extremely low loss and distortion; through overlay and multi-step photoetching and in combination with a negative feedback electromigration technology, a nano gap is manufactured with high success rate, and a cluster function unit is integrated; besides, a test system integrating a coplanar waveguide electrode array and a high-end test instrument is used for exciting and capturing the ultrafast response of a cluster functional unit, and the single write-in time of a cluster device is directly pushed to a subnanosecond level (lt;

The invention provides a grounding coplanar waveguide to coaxial interconnection structure radiation field analytical model construction method, and belongs to the technical field of system packaging, and the method comprises the steps: according to the structure of the upper half plane of a grounding coplanar waveguide and the characteristics that the current of the upper half plane and the current of the lower half plane are equal in amplitude and reverse in direction; obtaining an electric field model, a magnetic field model and a directional diagram model of the grounding coplanar waveguide far region radiation field; regarding the similar axes as a plurality of antenna arrays, and obtaining an electric field model, a magnetic field model and a directional diagram of a similar axis far-region radiation field; and superposing the electric field model, the magnetic field model and the directional diagram of the variable grounding coplanar waveguide and the quasi-coaxial far region radiation field to obtain a grounding coplanar waveguide-to-quasi-coaxial radiation analysis model. The invention aims to solve the problem that a radiation model of a grounding coplanar waveguide-to-similar coaxial interconnection structure does not exist when the electromagnetic radiation characteristic between interconnection lines of a high-density packaging body is researched at present.

The spin-orbit torque-based device comprises a microwave transmission layer and a microwave absorption layer, and the microwave absorption layer is arranged on the upper surface of the microwave transmission layer; the microwave transmission layer is a CPW coplanar waveguide, and the microwave absorption layer is a ferromagnetic layer / strong spin coupling layer heterojunction. Through the heavy metal / ferromagnetic layer heterojunction, spin-orbit torque is generated by the spin Hall effect in the heavy metal layer to influence the magnetic property of the ferromagnetic layer, the current is directly used as a regulation and control mode, an electromagnet or coil current does not need to be additionally arranged outside the device, and the problem of large size is solved. Meanwhile, the spin-orbit torque is actually regulated and controlled by the current density, microwave tuning of milliampere-level current is achieved by controlling the size of a device, the advantage of low power consumption is achieved, and meanwhile the potential of constructing a device with extremely low power consumption is achieved. And the functional layer can be realized only by the coplanar waveguide and the double-layer film heterojunction, so that the structure is simple and clear.

The invention provides a superconducting resonator for high-resolution detection of a magnetic material and a design method of the superconducting resonator. The method comprises the following steps: determining a to-be-detected magnetic material layer; determining the resonant frequency of the resonator according to the to-be-detected magnetic material layer; constructing a simulation model, wherein the simulation model comprises a substrate; the resonator is formed on the substrate, microwave lines located on the surface of the substrate are formed at the two ends of the resonator, the microwave lines form a coplanar waveguide, and the resonator is coupled with the microwave lines; grounding layers located on the surface of the substrate are arranged on the two sides of the resonator. Determining an initial air gap, an initial coupling length and a length of the resonator according to the resonant frequency and the material of the substrate; according to the simulation model, performing simulation by adopting the initial air gap, the initial coupling length and the length of the resonator to obtain a quality factor of the resonator; and adjusting the initial air gap and the initial coupling length according to the quality factor until the quality factor of the resonator meets the requirement, and determining the air gap and the coupling length of the resonator.

The invention discloses a broadband double-layer interconnection structure based on a silicon adapter plate technology, and belongs to the technical field of radio frequency microsystems. According to the method, a three-dimensional compensation structure is formed by adding square conductive metal and TSVs into lower-layer metal at one end, close to a transition structure, of an original coplanar waveguide transmission line, and a resonance point with return loss of-51dB is introduced at 17.59 GHz, so that the broadband interconnection effect that the return loss of 0-33GHz is smaller than or equal to-20dB is achieved, and the in-band insertion loss fluctuation value is reduced by 11.6% compared with that of the original structure. Compared with a traditional interconnection structure broadband design, the method has the advantages that on the premise that the plane area is not increased, the broadband interconnection design difficulty is greatly reduced through the three-dimensional structure design.

The invention relates to an electro-optical Mach-Zehnder modulator (1) comprising an input divider, first and second main waveguides (10p, 20p), and an output combiner (3). It also includes a first coplanar RF line (30) associated with the first main waveguide (10p). Finally, it includes a first additional waveguide (10a), not coupled to the input divider (2) and the output combiner (3), and having a positioning relative to a central track (33), a dimensioning and a doping profile symmetrical to those of the first main waveguide (10p), with respect to a plane of symmetry (Ps), orthogonal to the main plane (XY), parallel to the first main (10p) and additional (10a) waveguides, and passing through a center of the central track (33).

The invention discloses a grounding coplanar waveguide with low radiation loss and high signal uniformity, and belongs to the field of magnetic parameter measurement. The grounding coplanar waveguide comprises a bottom metal grounding layer, a medium substrate, a grounding through hole, a signal line, a split signal line and two side metal grounding layers. The dielectric substrate is arranged above the metal grounding layer, two-side metal grounding layers are arranged above two sides of the dielectric substrate, the two-side metal grounding layers are respectively provided with more than two columns of grounding through holes to form a through hole array, a split signal line is arranged in the middle position above the dielectric substrate, and two ends of the split signal line are respectively connected with signal lines. One end of the split signal line is connected with a signal input end, and the other end is connected with a signal output end; the bottom metal grounding layer and the two side metal grounding layers are connected through grounding through holes. According to the invention, the phenomenon of broadening of a test curve caused by non-uniform distribution of a surface magnetic field is avoided, so that the test precision is improved to a great extent, and the radiation loss at a high-frequency position of the grounded coplanar waveguide is reduced.

An antenna package includes an antenna device and a circuit board bonded to the antenna device. The circuit board includes a core layer, a feeding line formed on the core layer and bonded to the antenna device, and a CPW ground formed on the core layer to be physically separated from the feeding line and the antenna device.

A coplanar waveguide (CPW) structure on a micro-electromechanical system (MEMS) device may comprise a glass device substrate that hosts a MEMS component on a first surface of the glass device substrate. The glass device substrate may have an associated set of metal layers that are used for fabrication of the MEMS component. The CPW structure may further comprise a glass cap having a top metal layer and a bottom metal layer. The CPW structure may further comprise a CPW signal path on the first surface of the glass device substrate, and a CPW ground plane on the first surface of the glass device substrate along a side of the CPW signal path. The CPW ground plane may comprise the bottom metal layer of the glass cap and at least one metal layer of the set of metal layers that are used for fabrication of the at least one MEMS component.

An atom chip for an ultracold-atom sensor, the chip includes an XY-plane normal to a Z-axis, the atom chip comprising: first and second coplanar waveguides suitable for propagating microwaves at respective angular frequencies ωa and ωb, the waveguides being placed symmetrically on either side of the X-axis and being referred to as X-wise guides, first and second coplanar waveguides suitable for propagating microwaves at respective angular frequencies ω′a and ω′b, the waveguides being placed symmetrically on either side of an axis the projection of which in the XY-plane is along an axis Y′ that is different from the X-axis and that is contained in the XY-plane, and being referred to as Y′-wise guides, the X-wise guides being electrically insulated from the Y′-wise guides, an intersection of the guides forming a parallelogram of center O defining an origin of the reference frame XYZ, at least a first conductive wire and a second conductive wire the respective projections of which in the XY-plane are secant at O and make between them an angle larger than or equal to 20°, the conductive wires being suitable for being passed through by DC currents.

The invention relates to the technical field of microwave probes, in particular to a novel microwave probe, and aims to solve the problem that a test result has a large error due to radiation of a radio frequency probe based on a coplanar waveguide signal transmission principle, the novel microwave probe comprises a cable, the end part of the cable is provided with a signal pin and a wrapping ground pin, the signal pin is fixed on a conductor in the center of the cable, the wrapping ground pin is fixed on a conductor on the outer ring of the cable, a notch is formed in one side of the wrapping ground pin, and the signal pin is embedded in the notch of the wrapping ground pin to form wrapping of the wrapping ground pin on the signal pin; an air gap is formed between the wrapping ground pin and the signal pin so as to restrain radiation. The invention has the effect of improving the radiation effect.

The invention discloses an on-chip fully-integrated optical circulator based on phase modulation. The on-chip fully-integrated optical circulator comprises a substrate, a buried oxide layer, an optical waveguide layer, an upper cladding and a metal layer used for manufacturing metal electrodes, the substrate, the buried oxide layer, the optical waveguide layer, the upper cladding and the metal layer are stacked, the optical waveguide layer comprises two input / output optical waveguide groups, a four-port resonant cavity and two metal electrode pairs, and the metal layer comprises four modulation areas; four ports of the resonant cavity are respectively connected with four interfaces of the modulation area, each input / output optical waveguide group is connected by a bent optical waveguide and coupled to the resonant cavity, the middle of the metal electrode pair is bent to form a coplanar waveguide electrode, and the middle of each two ends of the modulation area is connected by the coplanar waveguide electrode. The fully-integrated optical circulator is realized under the silicon-based substrate for the first time, is compatible with current mainstream optical integration platforms such as SOI, LNOI and LTOI, and can be widely applied to large-scale photonic integrated chips, such as the fields of optical communication, optical sensing, on-chip optical interconnection and the like.

An antenna module implemented as a multi-layered package includes: a printed circuit board (PCB) having a plurality of layers; a radio frequency integrated circuit (RFIC) disposed on a first surface among outermost surfaces of the PCB; a first array antenna disposed on a second surface, perpendicular to the first surface, among the outermost surfaces of the PCB; a second array antenna disposed on a third surface, perpendicular to the first and second surfaces, among the outermost surfaces of the PCB; and a third array antenna disposed on a fourth surface, perpendicular to the second and third surfaces, among the outermost surfaces of the PCB. First to third signal lines connected to the first to third array antennas form first to third coplanar waveguide structures in which first to third ground regions are formed, respectively.

The invention discloses a coplanar waveguide-rectangular waveguide horizontal conversion feed structure and a waveguide slot antenna, and belongs to the technical field of radar antennas. The structure mainly comprises a rectangular waveguide conversion section of which one end is connected with a rectangular waveguide and the other end is connected with a coplanar waveguide conversion section, and the rectangular waveguide conversion section is used for converting a dominant mode signal transmitted by the coplanar waveguide into a dominant mode signal transmitted by the rectangular waveguide; and one end of the coplanar waveguide conversion section is connected with the rectangular waveguide conversion section, the other end of the coplanar waveguide conversion section is connected with the coplanar waveguide feeder line, and the coplanar waveguide conversion section is used for performing impedance conversion on the input impedance of the rectangular waveguide conversion section and matching the impedance with the characteristic impedance of the coplanar waveguide feeder line. According to the invention, effective conversion of microwave or millimeter wave signals between the coplanar waveguide and the rectangular waveguide can be realized without vertical transition, and the antenna has the characteristics of simple structure, low profile, simple process and low loss.

The invention discloses a terahertz MEMS composite membrane switch based on a glass substrate, and belongs to the field of terahertz wireless communication equipment. The MEMS switch is of a three-dimensional structure and sequentially comprises a metal ground, a glass substrate, a coplanar waveguide signal transmission line, a silicon nitride dielectric layer and an MEMS composite film from bottom to top. The MEMS composite film is equivalent to a clamped beam structure, and an anchor area of the MEMS composite film is connected with a signal ground of the CPW; the composite film is composed of a gold film and a silicon dioxide film, the composite film, a silicon nitride dielectric layer below and a CPW signal line form a parallel plate capacitor, bias voltage is loaded through a direct-current voltage signal transmission line connected with an anchor area, the height of the MEMS composite film is changed, then the plate capacitance value is changed, and switching between the on state and the off state of a transmission signal is achieved. The MEMS switch of the composite film has the advantages of low insertion loss and high isolation in terahertz frequency band application, and can be applied to radio frequency devices such as phase shifters, attenuators, reconfigurable filters and the like.

The invention discloses a space-time modulation filtering circulator based on a substrate integrated waveguide, which consists of a top metal patch, a dielectric substrate, a bottom metal floor, a large metalized through hole and a small metalized through hole, and comprises a rectangular SIW cavity I, a rectangular SIW cavity II, a rectangular SIW cavity III, a pentagonal SIW cavity I, a pentagonal SIW cavity II, a pentagonal SIW cavity III and a circulator central junction, the rectangular SIW cavities are traditional SIW cavities resonating in a fundamental mode, and the pentagonal SIW cavities are space-time modulation SIW cavities; the pentagonal SIW cavity I, the pentagonal SIW cavity II and the pentagonal SIW cavity III are coupled and cascaded through a circulator central junction; the rectangular SIW cavities I, II and III are cascaded with the pentagonal SIW cavities I, II and III in a magnetic coupling mode; the rectangular SIW cavity I, the rectangular SIW cavity II and the rectangular SIW cavity III are fed by the coplanar waveguide transmission line I, the coplanar waveguide transmission line II and the coplanar waveguide transmission line III; according to the space-time modulation SIW filtering circulator provided by the invention, ferrite materials are not needed, the circulator function is realized by adopting three tuning elements, the design complexity of the space-time modulation circulator is reduced, and the frequency selectivity is improved.

A coplanar waveguide wire electrode structure and a modulator includes a metal electrode and an optical waveguide. The metal electrode includes ground electrodes and a signal electrode. Connecting arms are arranged on both sides of the signal electrode. The inner sides of the ground electrodes are provided with other connecting arms. The tail ends of the connecting arms of the signal electrode are provided with signal wire extension electrodes, and the tail ends of the connecting arms of the ground electrodes are provided with ground wire extension electrodes. A distance is provided between the signal wire extension electrodes and the ground wire extension electrodes. The optical waveguide passes through the spaces between the signal wire extension electrodes and the ground wire extension electrodes. By extending the metal electrode, the distance between the electrodes is actually shortened.

The invention provides a quantum device and a preparation method thereof, and the quantum device comprises a superconducting ferromagnet structure which comprises a superconducting layer and a ferromagnet layer disposed on the superconducting layer; and the detector comprises a coplanar waveguide resonator, the coplanar waveguide resonator is in alternating current coupling with the superconducting ferromagnet structure, and the coplanar waveguide resonator is configured to detect the superconducting ferromagnet structure. According to the invention, the circuit quantum electrodynamics is introduced into the research of the superconducting ferromagnet structure, the coupling strength between the superconducting ferromagnet structure and the coplanar waveguide resonator is improved, and the accurate detection of the superconducting ferromagnet structure in the microwave range is realized; the efficiency and speed of quantum information processing are improved by realizing high-efficiency conversion and transmission between the magnetic vibrator and the photons.

The invention discloses a patch antenna for W-band millimeter wave imaging. The patch antenna for W-band millimeter wave imaging comprises a dielectric substrate, a radiation patch, a feed line, a coplanar waveguide structure, a first parasitic patch and a second parasitic patch, the surface of one side of the dielectric substrate is provided with the radiation patch and the feed line, and the other side of the dielectric substrate is provided with the grounding plate. The feed line is connected with the radiation patch; the coplanar waveguide structure is arranged on the dielectric substrate and is coplanar with the feed line; the coplanar waveguide structure comprises a first ground plane, a second ground plane and a third ground plane, the first ground plane and the second ground plane are arranged on two sides of the feed line, and the third ground plane is arranged on one side of the radiation patch; the first parasitic patch and the second parasitic patch are arranged on the two sides of the radiation patch. According to the invention, the working bandwidth of the patch antenna is effectively improved, a stable gain curve in a working frequency band is realized, the generation of surface waves is inhibited, and the radiation efficiency is improved.

The invention provides an ultra wide band millimeter wave transition structure based on gold wire bonding, and relates to the technical field of millimeter wave chip packaging, and the transition structure comprises a substrate, a rectangular cavity, a chip, a parallel gold wire connection structure, a stepped grounding coplanar waveguide GCPW matching structure, and a plurality of blind holes. The substrate comprises a top dielectric layer, a middle metal layer and a bottom metal layer, the rectangular cavity is arranged on the top dielectric layer; the chip is fixed in the rectangular cavity; the parallel gold wire connecting structure is used for connecting the chip and the stepped grounding coplanar waveguide GCPW matching structure; and the plurality of blind holes vertically penetrate through the substrate, are positioned in an area right below the edge of the rectangular cavity and gold wire bonding, are connected with the middle metal layer and the bottom metal layer, and are used for suppressing self-excited oscillation. According to the method provided by the invention, the transition from the chip to the substrate with the average loss lower than 0.28 dB is realized within the frequency band of 30-100GHz.

The invention discloses a metal parallel RF MEMS switch with a high capacitance ratio in a terahertz wave band, and belongs to the field of radio frequency front-end devices. The overall structure is composed of a branch port metal block, a direct current bias line, a microstrip line matching structure, a metal beam MEMS switch, a metal electrode of a metal beam, a silicon nitride insulating layer, a silicon-based substrate, a coplanar waveguide metal ground and a metal ground. A metal anchor point of the metal beam is connected to the coplanar waveguide metal ground, a direct current port on the right upper side is connected to the coplanar waveguide metal ground through a direct current bias line, and a direct current port on the left upper side is connected to the metal electrode through a direct current bias line. Different direct-current voltages can be input into the direct-current port on the left side to control the state of the metal beam lifting up and the state of being adsorbed to the electrode, and the states correspond to the on-off state of the switch. The parallel MEMS switch designed by the invention works between 103.33 G and 170G, and ensures that the isolation degree in an off state is higher than 33.67 dB; and the insertion loss in a conducting state is lower than 0.8 dB. The reaction time of microsecond magnitude is achieved, and destructive deformation is not prone to occurring; the structure is simple.

An antenna structure, printed circuit, and radar sensor chip are disclosed. The antenna structure includes: a coplanar waveguide feeding structure for providing electromagnetic wave signals, and a substrate integrated waveguide resonant cavity for radiating electromagnetic wave signals. The substrate integrated waveguide resonant cavity is formed by a first metal layer, a second metal layer, and metallized vias connecting the first and second metal layers. The substrate integrated waveguide resonant cavity is a single, integral space. The first metal layer of the substrate integrated waveguide resonant cavity has at least two slot radiating sections, each slot radiating section including at least two slot elements arranged along a first direction, and the slot radiating sections are arranged along a second direction. The coplanar waveguide feeding structure includes at least one feeding section coupled to the substrate integrated waveguide resonant cavity to transmit a feeding signal to the substrate integrated waveguide resonant cavity. The feeding section in the coplanar waveguide feeding structure feeds the slot radiating sections adjacent to it.