600 results about "Coplanar waveguide" patented technology

The invention discloses a directional diagram reconfigurable antenna capable of switching feed through an MEMS switch, and belongs to the field of radio frequency front-end devices. The directional diagram reconfigurable antenna is composed of a micro-strip radiation unit, a guide parasitic unit, a composite beam ohmic contact type MEMS switch, a one-to-four feed network, a direct current bias line, a test patch bonding pad, a coplanar waveguide, a gradual change micro-strip line, a dielectric substrate and a metal ground backboard. The two-stage MEMS switches are erected on the one-to-four feed network, when the two-stage switches on a certain feeder line are turned on, radio frequency current can flow to the corresponding basic radiation unit through the feeder line to generate an inclined beam facing the quadrant, and the two basic radiation units on the front side can be enabled by simultaneously turning on the four switches on the front side to generate an inclined beam facing the quadrant. And generating an inclined beam in the front side positive direction. The antenna adopts a single-layer board design, the dielectric substrate does not need to be punched, the structure is simple, manufacturing is convenient, the adopted MEMS switch is small in loss and high in isolation degree, and rapid printing and manufacturing can be achieved through the surface etching process.

The invention discloses a negative group delay system based on SSPP, and belongs to the technical field of microwave communication. A fundamental mode negative group velocity is innovatively generated based on an artificial surface plasmon SSPP, and an SSPP system with negative group delay is realized. The system comprises two parts, namely an amplifier circuit and an SSPP waveguide with a negative group delay unit. The SSPP waveguide with the negative group delay characteristic comprises two coplanar waveguide parts, two transition parts and an SSPP waveguide part, the SSPP waveguide part comprises a unit for generating negative group velocity and a plurality of basic units, and further comprises a microwave dielectric substrate. The amplifier is composed of an amplifier chip, a peripheral capacitor inductor of the amplifier chip and a direct-current power supply. An input signal passes through the system, and advanced transmission of the signal can be realized. The problems of narrow bandwidth, large loss and non-adjustable structure in the prior art are effectively solved, and the antenna has wide application prospects in the fields of 5G communication, radar signal processing, array antenna systems and the like.

The invention belongs to the field of antennas, and discloses a millimeter wave broadband circularly polarized antenna array and a manufacturing method thereof. The fourth metal layer is used for receiving and transmitting electromagnetic waves based on the sequential rotation feed network; the fourth metal layer is also used for serving as a ground plane of the grounding coplanar waveguide; the third dielectric layer is used for transmitting the received electromagnetic waves to the third metal layer; metal via holes are introduced into the third dielectric layer to realize the performance of the grounding coplanar waveguide; the third metal layer is used for coupling electromagnetic waves to the first radiation layer and the second radiation layer based on slot coupling; the third metal layer is also used for serving as a ground plane of the grounded coplanar waveguide; the first radiation layer and the second radiation layer are respectively used for directionally radiating electromagnetic waves to a free space; metal via holes are introduced into the first radiation layer and the second radiation layer, so that the performance of the magnetoelectric dipole antenna is realized; the millimeter wave antenna meets the requirement of a millimeter wave mobile communication working frequency band, and has the characteristics of large axial ratio bandwidth, easiness in processing, low loss and stable directional diagram.

The invention discloses a frequency synthesizer, and relates to the technical field of communication hardware. The frequency synthesizer comprises a six-layer substrate and a plurality of elements, layout and wiring are reasonably performed in the six-layer substrate, the elements are placed in a limited space, then a coplanar waveguide transmission line model is adopted for a loop filter part, and shielding holes are selected to be added to the position away from the metal edge to reduce return loss and insertion loss. According to the frequency synthesizer, the return loss reaches-30dB or below, the insertion loss is lower than 0.05 dB, a bonding pad and a through hole are adopted for connection aiming at an output high-frequency signal line, a metal column type quasi-coaxial structure and a shielding hole are added to optimize the return loss and the insertion loss, the frequency synthesizer is miniaturized and high in performance, and the frequency synthesizer is suitable for high-integration and miniaturized application scenes.

The invention discloses an integration and optimization method of a multilayer circuit board in a photovoltaic inverter, and the method comprises at least seven layers of functional stacked structures which are an electromagnetic shielding layer, a power device layer, a first insulating dielectric layer, a control circuit layer, a second insulating dielectric layer, a heat dissipation substrate layer and a mechanical strengthening layer from top to bottom in sequence. Wherein the power device layer adopts a three-dimensional embedded packaging technology to integrate an IGBT module and a SiC MOSFET module, and a gate drive circuit of the power device layer is embedded into a first insulating dielectric layer in a coplanar waveguide structure; the heat dissipation substrate layer is provided with a micro-channel array with gradient apertures, and the inner wall of each micro-channel is subjected to anodic oxidation treatment to form an Al2O3 ceramic layer with the thickness of 20-50 microns.

The utility model discloses an integrated liquid crystal phased array for satellite ground communication. Comprising an upper quartz glass substrate, a lower quartz glass substrate, a liquid crystal medium arranged between the upper quartz glass substrate and the lower quartz glass substrate, polyimide films arranged above and below the liquid crystal medium, a coplanar waveguide transmission line and a slow-wave liquid crystal phase shift feed network which are arranged on the upper surface of the lower quartz glass substrate, and a plurality of slot coupling patch antenna units arranged on the upper surface of the upper quartz glass substrate, the metal ground is arranged on the lower surface of the upper substrate; the coplanar waveguide transmission line is connected with the slow-wave liquid crystal phase shift feed network, a plurality of coupling gaps are formed in the metal ground, and slow-wave liquid crystal phase shifters of the slow-wave liquid crystal phase shift feed network are correspondingly coupled with the gap coupling patch antenna units through the coupling gaps. And each slot coupling patch antenna unit is independently regulated and controlled through a corresponding slow-wave liquid crystal phase shifter so as to realize dual-beam and two-dimensional scanning. The liquid crystal phased array has the characteristics of double beams, two-dimensional scanning, high gain and easy integration.

The invention discloses a miniaturized sensor for measuring the dielectric constant of a dielectric material, and belongs to the technical field of microwave sensing. The sensor structure comprises a top metal patch signal layer, a middle dielectric substrate layer and a bottom metal grounding layer, wherein the top-layer metal patch structure comprises five parts, namely a 50-ohm microstrip line, a 1 / 4 wavelength impedance change line, a coplanar waveguide with a coupling slot, a substrate integrated waveguide and a sensing unit, and the top layer and the grounding layer are connected through a metalized through hole of the middle layer; and a complementary split-ring resonator sensing unit of a stepped impedance fractal structure is etched on the top metal layer and is used as a sensing area for placing a solid material for dielectric constant measurement. According to the sensor, the purpose of miniaturization of the sensor is achieved through loading of the resonant ring unit, the measurement sensitivity is high, the measurement error is small, and the sensor is suitable for dielectric constant measurement of dielectric materials.

The invention discloses a compact broadband wide-beam dipole antenna array based on a high-order mode, which comprises two sub-arrays, the two sub-arrays share a dielectric substrate of which the upper surface and the lower surface are partially coated with copper, the equal-amplitude feed is carried out through a one-to-two power division feed structure, the two sub-arrays are bilaterally symmetrical about the central axis of the dielectric substrate, and the upper surface and the lower surface of the dielectric substrate are partially coated with copper. Each sub-array comprises a substrate integrated waveguide cavity and a plurality of pairs of side-by-side dipoles which are connected through a grounding coplanar waveguide, the substrate integrated waveguide cavity is formed by arranging metalized via holes at equal intervals and works in a TE510 high-order mode, the dipoles are placed in the center of the periphery of each electric field loop of the substrate integrated waveguide cavity, and the ground coplanar waveguide is connected with the substrate integrated waveguide cavity. High directivity of an H plane and unilateral radiation with 3dB beam width of an E plane can be obtained by placing the radiation arms of the dipoles according to a radiation field superposition and cancellation rule. The problems that an existing wide-beam antenna is complex in structure, and the technical scheme is difficult to achieve are solved.

The invention discloses a terahertz wave band composite beam RF MEMS switch with low driving voltage, and belongs to the field of radio frequency front-end devices. The device is composed of a direct current port metal block, a direct current bias line, a microstrip line matching structure, a composite beam MEMS switch, a composite beam middle conduction structure, a metal electrode of a composite beam, a silicon nitride insulating layer, a quartz glass substrate, a coplanar waveguide metal ground and a metal ground. The composite beam MEMS switch is formed by combining a silicon dioxide material clamped beam and a metal beam adsorbed below the silicon dioxide material clamped beam, a direct current port is connected to the anchor point position of the metal beam and a metal electrode through a direct current bias line, and different direct current voltages can be input through the direct current port to control the lifting state of the composite beam and the pull-down state of the composite beam adsorbed to the electrode. The two switches respectively correspond to an off state and an on state of the switch. The composite beam MEMS switch works below 140GHz, so that low driving voltage, low insertion loss and high isolation are realized. The reaction time of microsecond magnitude is achieved, destructive deformation is not prone to occurring, the structure is simple, and manufacturing is easy.

The invention belongs to the technical field of filters, and relates to a high-roll-off rectangular micro coaxial line low-pass filter which comprises a rectangular micro coaxial line. The two rectangular micro coaxial line-coplanar waveguide transition structures are located at the two ends of the rectangular micro coaxial line respectively to form an input port and an output port which are used for being connected with external elements. The loading structure based on the stepped impedance open-circuit branch knot and the defected ground loading structure are positioned in the middle of the rectangular micro coaxial line; the loading structure based on the stepped impedance open-circuit branches comprises a plurality of open-circuit branches which are uniformly distributed on the two sides of the rectangular micro coaxial line and are in a mirror image arrangement state by taking the center line of the rectangular micro coaxial line as a reference line, and the lengths of the open-circuit branches are gradually reduced from the middle to the two sides; the defected ground loading structure comprises a plurality of defected grounds, each defected ground is correspondingly arranged between two adjacent open circuit branches, and the lengths of the plurality of defected grounds are gradually reduced from the middle to the two sides. The low-loss and high-suppression band-pass filter has the advantages of being low in loss, high in roll-off, high in suppression degree, wide in stop band and good in transmission performance.

The invention discloses a lithium niobate electro-optical modulator based on interdigital electrodes. The lithium niobate electro-optical modulator comprises a coplanar waveguide electrode structure containing periodically arranged interdigital electrodes, two groups of six modulation waveguides, two groups of four optical waveguide delay lines, two groups of multimode interference couplers, an input waveguide, an output waveguide and a pair of coupling gratings. According to the device, an interdigital electrode structure is used for constructing six electro-optical modulation sections in an upper group and a lower group, and optical waveguide delay lines are used for aligning phases of different electro-optical modulation sections to form an upper group of modulation arms and a lower group of modulation arms. An optical signal enters the input waveguide from the coupling grating on the left side, is divided into two beams through the multi-mode interference coupler, is subjected to equal-size and opposite modulation effects on the upper and lower groups of modulation arms, is combined and coupled in the second multi-mode interference coupler to generate an intensity modulation effect, and is output through the output waveguide and the coupling grating. The electro-optical modulator provided by the invention can be further expanded on the number of times of electrode multiplexing, and is compatible with other multiplexing technologies at the same time.

The invention discloses a monopole directional diagram reconfigurable antenna based on RF MEMS switch control, and belongs to the field of radio frequency front-end devices. The antenna is composed of a monopole radiation unit, parasitic units located on the left side and the right side of the monopole radiation unit, a composite beam ohmic contact type MEMS switch, a direct current bias line, a test patch bonding pad, a coplanar waveguide, a gradient microstrip line, a dielectric substrate and a metal ground backboard. When the MEMS switch on the parasitic unit is switched on, the length of the parasitic unit is slightly smaller than that of the monopole radiation unit, and the parasitic unit plays a role of a director. When the MEMS switch is turned off, the first-stage leading unit is divided into two parts from the fracture, the length of the first-stage leading unit is far smaller than that of the monopole radiation unit, and backflow is generated by the open circuit of the terminal, so that the effect of reducing and offsetting the second-stage leading unit is achieved. When the switch on one side is pulled down, a directional diagram generates beam deflection towards the side where the switch is closed, the adjustable deflection angle can reach 41 degrees, the gain can reach 6.14 dB, the beam width is about 90 degrees, when the switches on the two sides are both switched off, the beam deflection is 0 degree, the directional diagram points to the positive Z axis, and the gain is 5.15 dB.

The invention discloses a millimeter wave polarization and directional diagram reconfigurable antenna, and belongs to the field of radio frequency front-end devices. The antenna is composed of symmetrical rectangular radiation patches, and a semicircular defect, a quarter circle defect, a rectangular branch load, an orthogonal bidirectional feed network, a T-shaped power dividing feed network, a composite beam ohmic contact type MEMS switch, a direct current bias line, a test patch bonding pad, a coplanar waveguide, a gradient matching structure, a dielectric substrate and a metal ground backboard which are located on the radiation patches. When the single-side MEMS switch on the T-shaped power dividing feed network is switched on, energy flows to the radiation unit on the side, and the leftward or rightward wave beam inclination effect can be achieved. When the MEMS on the two sides are both switched on, the radiation pattern points to the Z positive axis, no beam deflection exists, and therefore the pattern reconfigurable function in the left direction, the middle direction and the right direction can be achieved. When a switch on the orthogonal bidirectional feed network is closed, the size of the long line can realize 90-degree phase delay, and two orthogonal degenerate modes are synthesized into a circularly polarized wave to cover a complete half-power beam width.

The embodiment of the invention provides a circuit board and electronic equipment, relates to the technical field of signal transmission, and is used for solving the problem of signal crosstalk between different channels in the circuit board. A signal layer of the circuit board can comprise a first dielectric layer, a first grounding part and a second grounding part of two adjacent signal channels. The signal channel can comprise a transmission line arranged on the first dielectric layer, and a first grounding part and a second grounding part of the transmission line are located on the same side surface of the first dielectric layer to form a coplanar waveguide. The first grounding part and the second grounding part are located between the two adjacent signal channels and are arranged at intervals. The first grounding part and the second grounding part are used for providing different backflow paths to flow backflow signals of two adjacent signal channels, so that crosstalk between different backflow signals is reduced.

The invention provides a defected ground-based broadband high-isolation MIMO (Multiple Input Multiple Output) mobile phone antenna. Each face-to-face inverted-F antenna pair is connected with an inverted-L branch knot; lumped capacitors are arranged at the joints of the radiation arms and the vertical lines where the feeding points are located; 2N linear slots are formed in the feeding points of the N dual-port antenna pairs on the edge of the metal ground; a T-shaped gap is formed in the middle position of the two antennas of each dual-port antenna pair; an antenna pair gap is formed between the two dual-port antenna pairs on the same side; the feed branch knot is printed in the linear slot, and the tail end of the feed branch knot is provided with a lumped capacitor. According to the invention, the distribution of floor current is changed through the T-shaped gap, and the decoupling characteristic of the MIMO mobile phone antenna is realized. By loading the inverted L branches on the inverted F antenna, introducing the coplanar waveguide structure and loading the lumped capacitor, the working bandwidth of the MIMO mobile phone antenna is effectively widened.

The invention belongs to the technical field of wireless communication and microwave antennas, and particularly discloses a transparent antenna for receiving ADS-B (Automatic Dependent Surveillance-Broadcast) signals, which comprises a phase delayer and is formed by matching a miniaturized coplanar waveguide feed inverted F transparent antenna and a coplanar waveguide feed bent line transparent antenna. The substrates of the two antennas are transparent acrylic substrates, and the antenna body structure and the grounding plate are made of an extremely fine metal grid structure used by film photoetching, so that the transparency of the antennas is ensured by the method. According to the invention, 83% of optical transparency in the working bandwidth can be realized, 1090MHz aircraft ADS-B signals can be received, the structure is simple, the size is small, the weight is light, and the concealment is strong.

The invention belongs to the technical field of antennas, and discloses a dual circularly polarized leaky-wave antenna based on a substrate integrated waveguide, which comprises a feed structure and a radiation structure, the feed structures are symmetrically arranged at the two ends of the radiation structure, and the feed structures and the radiation structure are substrate integrated waveguides; the feed structure is used for converting received external electromagnetic energy into guided electromagnetic waves and has the characteristic of widening impedance; wherein a gradient coplanar waveguide transmission line is designed in the feed structure; the radiation structure is used for converting the guided electromagnetic waves transmitted by the feed structure into circularly polarized electromagnetic waves in a free space; wherein a grid window leaky wave structure is designed in the radiation structure; by combining the leaky-wave antenna and the substrate integrated waveguide technology, the gradient coplanar waveguide transmission line is designed on the feed structure, and the grid window leaky-wave structure is designed on the radiation structure, so that the millimeter wave working frequency band requirement is met, and the antenna has the characteristics of wide axial ratio bandwidth, low side lobe, large scanning range, low profile and low cost.

The invention provides a single-feed broadband circularly polarized patch antenna for navigation. The single-feed broadband circularly polarized patch antenna comprises a first dielectric plate, a second dielectric plate, a third dielectric plate, a metal shielding box and a coaxial cable, an antenna radiator is printed on the first dielectric plate, a coplanar waveguide structure is printed on the second dielectric plate, and a feed structure is printed on the third dielectric plate; the coaxial cable feeds power to the coplanar waveguide structure on the second dielectric plate through the feed structure on the third dielectric plate; and the coplanar waveguide structure on the second dielectric plate feeds the antenna radiator on the first dielectric plate in a coupling manner. The coplanar waveguide structure and the patch antenna are combined, the axial ratio bandwidth of the single-feed circularly polarized antenna is successfully improved through the coplanar waveguide coupling feed technology, the maximum working bandwidth of the single-feed circularly polarized antenna is improved by more than one time, and the problem that the single-feed circularly polarized antenna is narrow in bandwidth and difficult to apply to satellite navigation is solved. And the method has extremely high applicability and flexibility in multi-system and multi-band satellite navigation application.

The invention describes a Josephson parametric amplifier and a manufacturing method thereof. The broadband Josephson parametric amplifier comprises: a substrate; a coplanar waveguide disposed on the substrate, the coplanar waveguide having an impedance that varies in a length direction thereof, in which the coplanar waveguide includes a conductor separated from a first ground plane by a first gap and separated from a second ground plane by a second gap; and a non-linear resonator disposed on the substrate and coupled to the coplanar waveguide.

The invention provides a wafer-level cluster coplanar waveguide electrode array, a preparation method and a test system. The coplanar waveguide electrode array comprises an insulating substrate and a plurality of coplanar waveguide electrodes which are arranged in a periodic array; each coplanar waveguide electrode comprises a central transmission section, a probe pad and a gradual transition section; through the design of the central transmission section and the gradual transition section of the coplanar waveguide configuration, the whole-course impedance matching from an external probe to a nano gap is ensured, so that nanosecond and even picosecond-level ultrafast electric pulses can be transmitted to the cluster function unit with extremely low loss and distortion; through overlay and multi-step photoetching and in combination with a negative feedback electromigration technology, a nano gap is manufactured with high success rate, and a cluster function unit is integrated; besides, a test system integrating a coplanar waveguide electrode array and a high-end test instrument is used for exciting and capturing the ultrafast response of a cluster functional unit, and the single write-in time of a cluster device is directly pushed to a subnanosecond level (lt;

The invention provides a grounding coplanar waveguide to coaxial interconnection structure radiation field analytical model construction method, and belongs to the technical field of system packaging, and the method comprises the steps: according to the structure of the upper half plane of a grounding coplanar waveguide and the characteristics that the current of the upper half plane and the current of the lower half plane are equal in amplitude and reverse in direction; obtaining an electric field model, a magnetic field model and a directional diagram model of the grounding coplanar waveguide far region radiation field; regarding the similar axes as a plurality of antenna arrays, and obtaining an electric field model, a magnetic field model and a directional diagram of a similar axis far-region radiation field; and superposing the electric field model, the magnetic field model and the directional diagram of the variable grounding coplanar waveguide and the quasi-coaxial far region radiation field to obtain a grounding coplanar waveguide-to-quasi-coaxial radiation analysis model. The invention aims to solve the problem that a radiation model of a grounding coplanar waveguide-to-similar coaxial interconnection structure does not exist when the electromagnetic radiation characteristic between interconnection lines of a high-density packaging body is researched at present.

The spin-orbit torque-based device comprises a microwave transmission layer and a microwave absorption layer, and the microwave absorption layer is arranged on the upper surface of the microwave transmission layer; the microwave transmission layer is a CPW coplanar waveguide, and the microwave absorption layer is a ferromagnetic layer / strong spin coupling layer heterojunction. Through the heavy metal / ferromagnetic layer heterojunction, spin-orbit torque is generated by the spin Hall effect in the heavy metal layer to influence the magnetic property of the ferromagnetic layer, the current is directly used as a regulation and control mode, an electromagnet or coil current does not need to be additionally arranged outside the device, and the problem of large size is solved. Meanwhile, the spin-orbit torque is actually regulated and controlled by the current density, microwave tuning of milliampere-level current is achieved by controlling the size of a device, the advantage of low power consumption is achieved, and meanwhile the potential of constructing a device with extremely low power consumption is achieved. And the functional layer can be realized only by the coplanar waveguide and the double-layer film heterojunction, so that the structure is simple and clear.

An ultra-wide band dipole antenna assembly for transmitting or receiving electromagnetic signals is disclosed herein. The antenna assembly comprises a dipole antenna element and coplanar waveguide feeding network. The dipole antenna delivers the ultra-wide band matching through a pre-determined arrangement after the coplanar waveguide feeding network is applied.

The invention provides a terahertz chip pressure point, a chip and a connection method. The terahertz chip pressure point comprises a signal bonding pad and two grounding bonding pads arranged on the two sides of the signal bonding pad. The two grounding pads are respectively grounded, and the surfaces of the two grounding pads are connected. Under the condition that the two grounding bonding pads are grounded respectively, the surfaces of the two grounding bonding pads are additionally connected, it is guaranteed that the two grounding bonding pads are equal in potential, the better common-ground effect is achieved, pressure point parasitic inductance is reduced, high-frequency resonance is restrained, dielectric loss and radiation loss are reduced, and the signal transmission performance of coplanar waveguide pressure points can be improved.

The invention provides a superconducting resonator for high-resolution detection of a magnetic material and a design method of the superconducting resonator. The method comprises the following steps: determining a to-be-detected magnetic material layer; determining the resonant frequency of the resonator according to the to-be-detected magnetic material layer; constructing a simulation model, wherein the simulation model comprises a substrate; the resonator is formed on the substrate, microwave lines located on the surface of the substrate are formed at the two ends of the resonator, the microwave lines form a coplanar waveguide, and the resonator is coupled with the microwave lines; grounding layers located on the surface of the substrate are arranged on the two sides of the resonator. Determining an initial air gap, an initial coupling length and a length of the resonator according to the resonant frequency and the material of the substrate; according to the simulation model, performing simulation by adopting the initial air gap, the initial coupling length and the length of the resonator to obtain a quality factor of the resonator; and adjusting the initial air gap and the initial coupling length according to the quality factor until the quality factor of the resonator meets the requirement, and determining the air gap and the coupling length of the resonator.

The present invention belongs to the field of antenna technology in wireless communication transmission, and discloses a dual radiator antenna, comprising: a first radiator, a second radiator and a coplanar waveguide, wherein the first radiator and the second radiator are connected by the coplanar waveguide, and the first radiator, the second radiator and the coplanar waveguide are all laid on a printed circuit board; wherein the first radiator comprises a first vibrator, a second vibrator and a third vibrator, and the second radiator comprises a fourth vibrator, a fifth vibrator and a sixth vibrator; the coplanar waveguide comprises a first ground wire, a second ground wire and a signal wire, wherein the first ground wire and the second ground wire are respectively located on both sides of the signal wire, and gaps are respectively provided between the first ground wire and the second ground wire and the signal wire; one end of the signal wire is connected to a feed circuit, and the other end is connected to the sixth vibrator in the second radiator; the two ends of the feed circuit are respectively connected to the signal wire and the third vibrator in the first radiator. The antenna of the present invention can achieve high gain and omnidirectional radiation.

The invention discloses a broadband double-layer interconnection structure based on a silicon adapter plate technology, and belongs to the technical field of radio frequency microsystems. According to the method, a three-dimensional compensation structure is formed by adding square conductive metal and TSVs into lower-layer metal at one end, close to a transition structure, of an original coplanar waveguide transmission line, and a resonance point with return loss of-51dB is introduced at 17.59 GHz, so that the broadband interconnection effect that the return loss of 0-33GHz is smaller than or equal to-20dB is achieved, and the in-band insertion loss fluctuation value is reduced by 11.6% compared with that of the original structure. Compared with a traditional interconnection structure broadband design, the method has the advantages that on the premise that the plane area is not increased, the broadband interconnection design difficulty is greatly reduced through the three-dimensional structure design.

An apparatus comprising a first layer, a second layer and a third layer. The first layer may comprise a plurality of first through via openings, a plurality of first blind openings and a coplanar waveguide input. The second layer may comprise a plurality of second through via openings, a plurality of second blind via openings and an aperture. The third layer may comprise a ground. The coplanar waveguide input may comprise a vertical transition to a waveguide. The first through via openings and the second through via openings may provide a through via between the first, second and third layer. The first blind via openings may provide a blind via from the first to the second layer. The second blind via openings may provide a blind via from the second to the third layer. The coplanar waveguide input may transmit an output from a circuit to the waveguide.

The invention relates to an electro-optical Mach-Zehnder modulator (1) comprising an input divider, first and second main waveguides (10p, 20p), and an output combiner (3). It also includes a first coplanar RF line (30) associated with the first main waveguide (10p). Finally, it includes a first additional waveguide (10a), not coupled to the input divider (2) and the output combiner (3), and having a positioning relative to a central track (33), a dimensioning and a doping profile symmetrical to those of the first main waveguide (10p), with respect to a plane of symmetry (Ps), orthogonal to the main plane (XY), parallel to the first main (10p) and additional (10a) waveguides, and passing through a center of the central track (33).

The invention discloses a grounding coplanar waveguide with low radiation loss and high signal uniformity, and belongs to the field of magnetic parameter measurement. The grounding coplanar waveguide comprises a bottom metal grounding layer, a medium substrate, a grounding through hole, a signal line, a split signal line and two side metal grounding layers. The dielectric substrate is arranged above the metal grounding layer, two-side metal grounding layers are arranged above two sides of the dielectric substrate, the two-side metal grounding layers are respectively provided with more than two columns of grounding through holes to form a through hole array, a split signal line is arranged in the middle position above the dielectric substrate, and two ends of the split signal line are respectively connected with signal lines. One end of the split signal line is connected with a signal input end, and the other end is connected with a signal output end; the bottom metal grounding layer and the two side metal grounding layers are connected through grounding through holes. According to the invention, the phenomenon of broadening of a test curve caused by non-uniform distribution of a surface magnetic field is avoided, so that the test precision is improved to a great extent, and the radiation loss at a high-frequency position of the grounded coplanar waveguide is reduced.