Microelectronic mechanical dual channel microwave power detection system and preparation method thereof

A micro-electromechanical and microwave power technology, which is used in electrical power measurement by thermal method, components of TV systems, generators/motors, etc., can solve problems such as small signal amplitude, increase area, improve sensitivity, and facilitate integration Effect

Inactive Publication Date: 2014-05-07
NANJING UNIV OF POSTS & TELECOMM
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the disadvantage of traditional microwave power sensors is that the measured signal amplitude is relatively small, and an external coupler or attenuator is required to measure a signal with a large amplitude.

Method used

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  • Microelectronic mechanical dual channel microwave power detection system and preparation method thereof
  • Microelectronic mechanical dual channel microwave power detection system and preparation method thereof

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Embodiment Construction

[0029] The invention will be described in further detail below in conjunction with the accompanying drawings.

[0030] Such as figure 1 As shown, when the microwave power to be measured is small, the MEMS fixed support beam cannot be pulled down, and is connected to the thermoelectric MEMS microwave power sensor through the coplanar waveguide transmission line, and the microwave power to be measured is detected by the thermoelectric MEMS microwave power sensor; when the microwave power to be measured When it is larger, the MEMS fixed beam is pulled down and connected to the MEMS fixed beam capacitive microwave power sensor through the coplanar waveguide transmission line, and the microwave power to be measured is detected by the MEMS fixed beam capacitive microwave power sensor. Using these two detection methods can not only expand the range of microwave signal detection, but also when the microwave signal is too large, the MEMS fixed-beam capacitive microwave power sensor can...

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Abstract

The invention discloses a dual channel microwave power detection system based on a microelectronic mechanical microwave power sensor and a preparation method thereof. The system has the advantages of simple structure, large measurement range and no direct current power consumption. The system is based on a gallium arsenide substrate. A coplanar waveguide transmission line (A), a thermoelectric MEMS microwave power sensor (B) and an MEMS clamped beam capacitor type microwave power sensor (C) are designed on the substrate. When the power of a microwave signal is small, the thermoelectric MEMS microwave power sensor carries out detection according to the one-to-one corresponding relationship between the thermopile output voltage and the microwave power. When the power of the microwave signal is large, the MEMS clamped beam capacitor type microwave power sensor carries out detection. A square mass block is designed on an MEMS clamped beam above the coplanar waveguide transmission line. The area with the coplanar waveguide transmission line is increased, and at the same time the weight of the center position of the MEMS clamped beam is increased. Static power is more likely to cause large deformation of the MEMS clamped beam, and the system sensitivity is improved.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical systems, in particular to a dual-channel microwave power detection system based on a fixed beam structure and a preparation method thereof. Background technique [0002] In the microwave research of microelectromechanical systems (MEMS), microwave power is an important parameter to characterize microwave signals. In the research of each link of microwave signal generation, transmission and reception, the detection of microwave power is essential. The most common microwave power detector is a microwave power sensor based on the principle of thermoelectric conversion. It converts the microwave signal into heat through the load resistance, and then uses the Seebeck effect of the thermopile to convert the heat into direct current proportional to the microwave power to be measured. voltage output. However, the disadvantage of the traditional microwave power sensor is that the measured...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R21/02B81B7/02B81C1/00
Inventor 王德波
Owner NANJING UNIV OF POSTS & TELECOMM
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