The invention discloses a
dielectric-varied capacitive flexible three-dimensional force
tactile sensor. The
dielectric-varied capacitive flexible three-dimensional force
tactile sensor is characterized in that a flexible
printed circuit board is arranged, wherein a square common
electrode and four identical rectangular induction electrodes which are located on the periphery of the edges of the common
electrode in an
equidistant mode are printed on the
printed circuit board; the induction electrodes are in two-to-two symmetry with the center of the common
electrode serving as the symmetry point; a composite multi-
dielectric layer is fixed to the flexible
printed circuit board; the composite multi-
dielectric layer is formed by an inversely-concave PDMS
dielectric layer and an air
dielectric layer located in a groove of the PDMS dielectric layer; the composite multi-dielectric layer is buckled on the upper portion of the flexible printed circuit board, and the common electrode and the four induction electrodes are located in the air dielectric layer; a PDMS hemispheric
contactor is arranged on the composite multi-dielectric layer. According to the dielectric-varied capacitive flexible three-dimensional force
tactile sensor, the common electrode and the induction electrodes are located on the same plane; compared with a traditional capacitive tactile sensor of an up-down electrode structure, the dielectric-varied capacitive flexible three-dimensional force tactile sensor has the advantages of being simple in manufacturing process and capable of being easily arrayed.