The invention relates to the technical field of
thermoelectric effect and
heat flux density detection, and discloses an atomic layer
thermopile heat flux sensor with
water cooling and preparation and
assembly methods, the
heat flux sensor comprises a sensor
chip and a cooling
assembly, the bottom layer of the sensor
chip is a substrate layer with the 001
crystal face beveled by 15 degrees, and the bottom layer of the sensor
chip is a substrate layer with the 001
crystal face beveled by 15 degrees. A layered
heat flow sensitive film on the substrate is a YBa2Cu3O7-
delta film grown through pulse
laser deposition, and double-layer
metal electrodes are prepared at the two ends of the surface of the YBa2Cu3O7-
delta film; and the cooling
assembly is used for carrying out
water cooling on the sensor chip and packaging the sensor chip. According to the invention, a YBa2Cu3O7-
delta thin film with a large inclination angle is prepared on a
single crystal lanthanum aluminate LaAlO3 substrate which is beveled by 15 degrees; the high-temperature-resistant Ni / Pt and Ni / W double-layer
electrode is prepared on the surface of the YBa2Cu3O7-delta thin film, annealing is carried out, the
contact strength of the YBa2Cu3O7-delta thin film and an
electrode material is improved, the
contact resistance is reduced, and the
electric signal strength is improved; the cooling assembly improves the stability of the device in a large-heat-flow and long-time working scene.