The application provides a pressure and heat
multiplexing sensor and a preparation method thereof, the pressure and heat
multiplexing sensor has a suspended structure thermoelectric
pile and can simultaneously measure pressure and temperature. Further, the pressure and heat
multiplexing sensor adopts a bridge structure, from bottom to top, a substrate, a support layer, a thermoelectric
pile, an
infrared absorption layer and a rigid packaging layer, the thermoelectric
pile adopts a multi-stage series structure, the hot
junction area of the thermoelectric pile is located in the center area of the micro-bridge suspended structure, the cold
junction area is located on the support layer on the top of the substrate, the center area of the micro-bridge suspended structure is formed into a cavity structure by isotropic
dry etching from the back, the
infrared absorption layer covers the center area of the micro-bridge suspended structure, and the rigid packaging layer covers the upper surface of the sensor. The application can simultaneously measure pressure and temperature, is manufactured by using standard
CMOS process general materials and manufacturing methods, meets the integrated and miniaturized demand of the intelligent sensing field, and is expected to be widely applied.