87 results about "Reference cavity" patented technology

The invention discloses an on-chip time-frequency transmission system and method based on an octave optical comb and an electro-optical modulation optical comb, and the method comprises the steps: constructing a chip-based optical reference cavity through the technologies of vacuum optical cement, photoresist backflow and the like, and achieving an on-chip ultra-stable laser through a phase modulator and a reflection separation optical path; an on-chip laser source pumping micro-ring resonant cavity is utilized to generate an octave optical frequency comb, frequency multiplication is carried out on the on-chip laser source pumping micro-ring resonant cavity and an additional laser source to realize detection and locking of carrier envelope offset frequency (fceo), frequency beating is carried out on the on-chip laser source pumping micro-ring resonant cavity and the on-chip ultra-stable laser device to realize frequency beating (fbeam) locking, and the laser source is utilized to generate an electro-optical modulation optical frequency comb through a circulating phase modulator to realize frequency beating and locking of the on-chip ultra-stable laser device. And the optical time frequency is locked with the locked octave optical comb, is sent to a far end after polarization control and light amplification, and simultaneously receives an electro-optical modulation optical comb at the far end and performs linear light sampling, so that the transmission of the optical time frequency is realized. The optical fiber or space optical link time-frequency transmission device can realize optical fiber or space optical link time-frequency transmission, and has the advantages of low overall noise, high transmission precision, compact structure, small size, low power consumption and the like.

The invention discloses an optical fiber sensor and a preparation method thereof, and belongs to the technical field of optical fiber sensing, and the optical fiber sensor comprises an optical fiber body adopting a splicing structure of a single-mode optical fiber, a tapering coreless optical fiber and a single-mode optical fiber; the cascaded F-P structure comprises a sensing cavity and a reference cavity which are arranged on the tapering coreless optical fiber; the metal enhancement layer comprises a silver film and a gold nanorod array which are sequentially arranged on the surface of the tapering coreless optical fiber, the thickness of the silver film is 30-50 nm, the length-diameter ratio of gold nanorods is 3: 1-5: 1, and the diameter of the gold nanorods is 40-60 nm; the sensitive material coating comprises a polydimethylsiloxane (PDMS) film coated on the surface of the sensing cavity and a polyvinyl alcohol (PVA) film coated on the surface of the gold nanorod array, the thickness of the PDMS film is 3-7 microns, and the concentration of the PVA film is 2-4 wt%; according to the optical fiber sensor and the preparation method thereof provided by the invention, a synergistically enhanced sensing system is formed, and high sensitivity, amplification and multi-parameter detection capability are considered at the same time.

The embodiment of the application provides a novel capacitive infrasound sensor and an infrasound detection method, and belongs to the technical field of pipeline leakage detection. The novel capacitive infrasound sensor is characterized in that the novel capacitive infrasound sensor comprises: a detection cavity, which is connected with a pipeline to be detected through an acoustic sampling channel and is used for sensing infrasonic pressure pulsation caused by pipeline leakage; a reference cavity, which is connected with an external environment through a micropore array to form a pressure relief path with a preset time constant and is used for providing a stable reference pressure in a low frequency band; a capacitive sensing unit located between the detection cavity and the reference cavity, which is used for converting a differential pressure change between the detection cavity and the reference cavity into an electric signal; and a chopping demodulation circuit connected with the capacitive sensing unit, which is used for inhibiting low-frequency noise and DC drift in a demodulation process and obtaining a stable infrasound signal output. The scheme of the application realizes high-fidelity introduction of an infrasound signal for pipeline leakage detection while ensuring safety and reliability.

The application discloses a kind of capacitive thin film vacuum gauge tuning measuring devices, can complete the debugging work of batch before vacuum gauge completes packaging, and efficiency is high, cost controllable.The device, main vacuum chamber pumping assembly is connected main vacuum chamber by first pumping connection pipeline, for maintaining the pressure of main vacuum chamber at background state;Test chamber pumping assembly is connected each test chamber by second pumping connection pipeline, for maintaining the pressure of test chamber at background state;Gas distribution assembly is connected each test chamber by gas supply pipeline, for supplying gas to test chamber;Test chamber is divided into different groups according to the range of measured vacuum gauge, and the pressure sensor of corresponding range is connected;Each test chamber provides more than one vacuum gauge connection end;The reference cavity of each measured vacuum gauge is connected bellows by first connecting piece, and the bellows corresponding to all measured vacuum gauges are connected into the main vacuum chamber;The measuring cavity of measured vacuum gauge is connected the test chamber of corresponding range by second connecting piece.

Provided is a pressure sensor, including: a first substrate; a second substrate having a pressure-sensitive membrane, a pressure reference cavity is provided between the pressure-sensitive membrane and the first substrate, the pressure-sensitive membrane is configured to deform; a capacitor having a first / second electrode plate, the first electrode plate being disposed on the first substrate, the second electrode plate being disposed on the pressure-sensitive membrane; a detection inductor having coil structures, each coil structure includes a first trace, a second trace and a conductive post; the first trace is disposed on a side of the first substrate, the second trace is disposed on the other side of the first substrate, orthographic projections of the first trace and the second trace on the first substrate intersect, the first trace is connected to the second trace at an intersection position; the detection inductor and the capacitor form a resonant circuit.

This invention belongs to the field of fiber optic sensing application technology, specifically relating to a high-sensitivity air microbubble strain sensor based on the vernier effect and its fabrication method. The sensor consists of a parallel microbubble sensing cavity Fabry-Perot interferometer and an air reference cavity Fabry-Perot interferometer. The microbubble sensing cavity Fabry-Perot interferometer is made by fusion splicing two single-mode optical fibers, with an ellipsoidal microbubble embedded at the center of its conical region. The air reference cavity Fabry-Perot interferometer is made by fusion splicing two single-mode optical fibers through a hollow capillary tube, with the two single-mode fiber segments forming an air cavity within the capillary tube. When the microbubble sensing cavity and the air reference cavity are connected in parallel, their signals overlap, resulting in an envelope modulation effect. Compared to using the microbubble sensing cavity alone, this significantly amplifies the sensitivity, improves the sensor's sensing performance, and achieves high-sensitivity air microbubble strain sensing.

The invention relates to the technical field of physical quantity precision measurement, in particular to a piston effective area measurement system and method. The system comprises an optical pressure measuring device and a piston pressure gauge pressure measuring device. The optical pressure measuring device comprises a box body, a measuring cavity, a reference cavity and a laser refractometer. The measuring cavity is used for filling a gas medium; the reference cavity maintains a vacuum state; the laser refractometer emits laser to the measuring cavity and the reference cavity. The piston pressure gauge pressure measuring device comprises a piston pressure gauge which comprises an air cylinder and a piston. The piston divides the cylinder into a first space and a second space. The gas source is communicated with the second space and the measuring cavity through the three-way valve, the refractive index of gas in the measuring cavity is obtained through the laser refractometer, and the pressure of the gas is determined through the refractive index of the gas. Calibration of the effective area of the piston is traced to basic physical constants and high-precision measured physical quantities, the pressure is accurately measured, and high precision and reliability of a calibration result are guaranteed.

The invention provides a metalized vacuum sensor, which comprises a first silicon wafer, a metalized glass sheet, a second silicon wafer and a metal electrode, and is characterized in that the second silicon wafer, the metalized glass sheet and the second silicon wafer are sequentially arranged; the metal electrode is arranged on the surface of the first silicon wafer, one side surface, close to the glass layer, of the second silicon wafer is provided with a capacitor cavity, and the other side surface is provided with a reference cavity; the metalized glass sheet comprises a glass layer and a metal layer arranged on the glass layer, and the metal layer and the metal electrode are located on the two surfaces of the glass layer respectively; the vacuum sensor is also provided with a connecting part which is communicated with the metal layer and the metal electrode. According to the vacuum sensor, the capacitance cavity and the medium cavity are separated, so that measurement values are not affected when different media are measured; the invention also provides a preparation process of the metallized vacuum sensor.

A sensor (10) for detecting at least one predetermined component in a gaseous fluid (12) containing several components is proposed. The sensor (10) comprises a sensor element (20) with at least one heatable measuring membrane (22) in a measuring chamber (16), a reference membrane (32) in a reference chamber (34), and at least one electrical measuring bridge (48). The sensor (10) is further configured to detect an electrical resistance of the measuring bridge (48) and to detect a pressure acting on the measuring bridge (48) based on the detected electrical resistance of the measuring bridge (48). The measuring bridge (48) is arranged on the measuring membrane (22) and / or the reference membrane (32) and / or an additional membrane (60). A fuel cell system (62) with a sensor (10) is also proposed.

The invention provides a preparation method of an anti-aging optical resonant cavity, and relates to the field of optical instrument manufacturing and application. Comprising the steps of zero expansion point measurement, drift rate measurement, aging pretreatment, monitoring and compensation of the optical resonant cavity. The zero expansion point measurement and the drift distance measurement can be obtained by adopting different methods such as a reference cavity beat frequency method, an optical comb measurement method and an optical clock measurement method; the aging pretreatment comprises two modes of high-temperature accelerated aging and long-term stable storage, so that the performance of the material reaches a stable state; and monitoring and compensating, namely compensating the linear drift rate by measuring the frequency drift rate. The problem that the ULE glass is inevitably aged in long-term use is solved.

The invention discloses a method for measuring the gas content in a die casting, and belongs to the technical field of material detection. The method comprises the following steps: loading a sample into the closed desorption cavity; vacuumizing and pre-degassing the cavity by using an oil-free high-vacuum acquisition module formed by connecting a molecular pump and a dry-type screw pump in series; stepwise heating is carried out on the sample through program temperature control; the released gas is guided into a differential pressure sensing metering unit through a low-thermal-conductivity aluminum oxide ceramic isolation tube; the unit comprises a reference cavity and a measuring cavity which are arranged in the same constant temperature device, and the gas inflow rate is dynamically represented by measuring the pressure difference between the two cavities; and based on the ideal gas state equation and a calculation model containing cavity thermal expansion compensation, calculating the amount of the gas substance in unit time in real time. The problems of poor precision and repeatability caused by oil pollution, thermal interference and discontinuous metering are solved, and continuous, dynamic and high-repeatability automatic measurement of the gas content in the die casting is realized.

The utility model discloses a polydimethylsiloxane sensitization optical fiber temperature and strain simultaneous measurement sensor. The sensor comprises an incident optical fiber, an optical fiber coupler, an optical fiber patch cord, a transmission optical fiber, a sensing cavity, a reference cavity and an emergent optical fiber, an optical signal enters the optical fiber coupler through the incident optical fiber and is divided into two beams of equal-intensity light in the coupler, the two beams of light are respectively input into the transmission optical fiber through the optical fiber patch cord and then enter the sensing cavity and the reference cavity which are coated with the polydimethylsiloxane, and the light is reflected by the cavities to form interference; the interference light is transmitted back to the optical fiber coupler through respective transmission optical fibers, so that a vernier spectrum is formed; the emergent optical fiber transmits an optical signal containing temperature strain information to a spectrograph, trough drift is analyzed through a dual-wavelength matrix demodulation method, and simultaneous measurement is achieved. According to the utility model, the vernier effect, the structural advantages of the Fabry-Perot interferometer and the advantage of high thermo-optic coefficient of polydimethylsiloxane are combined, and the vernier interferometer has the advantages of low cost, high sensitivity, high stability and the like.

The present application relates to pressure pipeline air tightness detection technical field, and disclose a kind of cold storage refrigeration pipeline prefabrication welding and air tightness test method;For solving the problem that stable, repeatable, traceable qualification and threshold quantization of small leakage cannot be achieved in traditional method;The method, first determine boundary data unit and valve position isolation check, access dry nitrogen, reference cavity, double pressure link and near and far end temperature measuring point, initial parameter record;Pipe link and valve position switching self-check are completed under the working condition of reference cavity;Precharge and target pressure are staged inflation, and pressure temperature threshold value is gated to stabilize voltage;Main pressure maintaining period synchronously obtains the pressure temperature data of section to be detected and reference cavity, and periodically rechecks cross verification drift, triggers condition according to partition single valve single step isolation recheck, obtains small leakage stable repeatable traceable determination conclusion.

The air tightness detection valve group comprises a pilot air source, a working air source, a first pneumatic control valve group and a first pilot valve. The first pneumatic control valve set comprises a valve body, a piston arranged in the pilot cavity and a sliding block connected with the piston and arranged in the working cavity, the valve body is provided with the pilot cavity, the working cavity, a testing cavity and a reference cavity, and the valve body is provided with a first air inlet channel communicating with the working cavity and a working air source and further provided with a second air inlet channel communicating with the first pilot valve and the pilot cavity. The test cavity is provided with a third air inlet channel communicated with the working cavity, and the reference cavity is provided with a fourth air inlet channel communicated with the working cavity. The sliding block is arranged on the same side of the third air inlet channel and the fourth air inlet channel. The first pilot valve introduces or discharges pilot gas into or out of the pilot cavity through the second gas inlet channel to push the piston to drive the sliding block to move in the working cavity in the first direction so as to synchronously control connection or disconnection between the test cavity and the working cavity and between the reference cavity and the working cavity and between the test cavity and the working cavity and between the reference cavity and the working cavity. The air tightness detection valve provided by the utility model has better detection precision.

The invention discloses an absolute gravimeter based on an optical lattice clock and a working method thereof, and belongs to the technical field of gravity measurement. The absolute gravimeter comprises an optical lattice clock physical device, a lattice light laser, a first polarization beam splitter prism, a first optical reference cavity, a second polarization beam splitter prism, an optical frequency comb, a first acoustic optical modulator, a first linear polarization polarizer, a convex lens, a concave reflector, a clock laser laser, a third polarization beam splitter prism and a second optical reference cavity. And a second acousto-optic modulator and a second linear polarization polarizer. Different from a traditional absolute gravimeter based on laser interference and atom interference, the absolute gravimeter provided by the invention has the advantages that the gravitational acceleration sensed by atoms can be determined by measuring the Watille-Stark sideband spacing in a shallow light lattice and the lattice light wavelength along the gravity direction of the light lattice; the absolute gravimeter has the potential of reducing the measurement error of gravity acceleration to 0.1 mu Gal or even lower, and the precision of the absolute gravimeter is higher than that of a traditional absolute gravimeter by more than one order of magnitude.

To enable an increase in repetition rates of a passively mode-locked laser by a factor of up to 1000 up to a frequency range of 1 to 40GHz while maintaining comb characteristics of a harmonically mode-locked (HML) frequency comb laser.SOLUTION: The HML laser may include a reference cavity having a beam splitter that is common mode to the reference cavity and the main cavity, and is further configured to generate an output for the HML optical frequency comb. The bulk as well as the fiber reference cavities can be implemented with ultra-low expansion thermal expansion materials that enable the use of HML lasers as precision frequency references and frequency synthesizers for the microwave, millimeter wave, and optical frequency domains. HML dual-frequency combs with minimal differential noise between the two combs can reference both combs to the same reference cavity.SELECTED DRAWING: Figure 2A

The invention provides an ion detection module and a preparation method thereof.The single-channel ion detection module is prepared on the basis of the microfluidic technology, the ion detection module comprises a cavity and a bottom plate from top to bottom, the cavity and the bottom plate are connected in a sealed mode, and an annular counter electrode and a working electrode are arranged at the bottom of a test cavity; the surfaces of the electrodes are electroplated with gold layers, so that the test sensitivity and accuracy are improved; a reference cavity, a liquid complexing part cavity and a test cavity are vertically stacked around the same coaxial shaft, the reference cavity is filled with electrolyte, and the liquid complexing part cavity is electrically connected with test liquid, so that the process of feeding, storing and emptying a sample to be tested can be realized, and meanwhile, the test cavity, the liquid complexing part and the reference cavity are integrated in the vertical direction; the portable heavy metal detection is easy to realize.

The invention provides an ultra-stable optical reference cavity zero expansion temperature determination method and a temperature control method. The ultra-stable optical reference cavity zero expansion temperature determination method comprises the following steps: establishing a heat transfer model of a multi-layer temperature control system comprising a temperature control layer, a shielding layer and a reference cavity from outside to inside; setting a heat parameter group of the heat transfer model, wherein the heat parameter group comprises shielding layer heat capacity, reference cavity heat capacity, a heat conduction coefficient between a temperature control layer and a shielding layer, a heat conduction coefficient between the shielding layer and a reference cavity, a heat radiation coefficient between the temperature control layer and the shielding layer, a heat radiation coefficient between the shielding layer and the reference cavity and reference cavity zero expansion temperature; and the optimal value of each thermal parameter in the thermal parameter group is obtained through fitting, and the zero expansion temperature of the reference cavity is determined.

In an aspect, a pressure sensor for determining pressure in an environment comprises: a source for emitting a coherent reference light characterized by a reference light frequency; a first lock-in mechanism configured to send an electrical signal to the source based on a reference resonance frequency; a reference cavity; wherein the reference cavity is characterized by the reference resonance frequency; a modulator configured a reference light to generate at least a first sideband frequency such that an output of said modulator is a measurement light characterized by at least the first sideband frequency; a frequency synthesizer configured to drive the modulator; a second lock-in mechanism configured to send an electrical signal to the frequency synthesizer based on a measurement resonance frequency; and a measurement cavity configured to receive at least a portion of the measurement light; wherein the measurement cavity is characterized by the measurement resonance frequency; and wherein the pressure of the environment is determined based on the reference resonant frequency and the measurement resonance frequency.

The invention belongs to the technical field of environmental monitoring, and discloses a hydroxyl radical online generation and reference inspection method and device and application, and the device comprises a laser splitting unit, a laser collimation and focus lens group, a laser incident cavity, a reference cavity, a laser emergent cavity and an atmospheric hydroxyl radical measurement cavity. The device not only can continuously and stably generate high-concentration hydroxyl radicals, but also can monitor resonance fluorescence signals generated by the hydroxyl radicals in real time, has the advantages of high signal-to-noise ratio, low cost, good adaptability, stable and reliable operation and the like, and can be used as a key core component of a free radical measurement system by a laser-induced fluorescence method. The method not only can be directly applied to dye laser wavelength monitoring and locking, but also can be applied to dye laser wavelength calibration instead of a wavemeter.

The present application relates to medical devices and physiological pressure analysis monitoring technical field, disclose a double cavity series pressure sensor signal calibration device, including device ontology, and integrated in the double cavity series structure, pressure transmission assembly, sealing assembly and calibration interface in device ontology;Double cavity series structure includes static reference cavity and dynamic calibration cavity which are connected in turn along the pressure transmission direction, static reference cavity and dynamic calibration cavity realize pressure conduction through the through connection channel;Pressure transmission assembly is arranged in the double cavity series structure, for generating stable reference pressure in static reference cavity, generating dynamic simulation pressure in dynamic calibration cavity and transmitting to calibration interface;Sealing assembly is arranged in the inner wall of static reference cavity, dynamic calibration cavity and connection channel, and calibration interface is arranged at the end of device ontology, for detachable docking with implantable pressure sensor.The device can consider static and dynamic pressure calibration requirements.

The invention provides a method and device for calibrating atomic and molecular spectral frequencies, and relates to the technical field of quantum precision measurement, and the method comprises the steps: obtaining a free spectral path of an ultra-stable optical reference cavity; synchronously acquiring an atomic molecule spectral signal and a transmission signal of the ultra-stable optical reference cavity; wherein the atomic molecule spectral signal and the transmission signal are respectively generated by laser output by the same single-frequency laser after beam splitting; and performing frequency calibration on the atomic molecular spectral signal based on the free spectral path. The method has the advantages of high precision, high stability, relatively simple system and controllable cost.

The application discloses a kind of method and device for simultaneously measuring gas refractive index and concentration based on quantum light source, the method is: step one, entangled light or compressed light emitted by quantum light source is collimated after passing through optical isolation and polarization state conversion, after being split, respectively incident to reference cavity and measurement cavity, wherein, reference cavity and measurement cavity are both composed of two SPDC crystals arranged side by side, and reference cavity and measurement cavity are placed inside vacuum chamber, and the vacuum chamber is filled with the gas to be measured;The distance between the two SPDC crystals of reference cavity and the nearest distance between the two SPDC crystals of measurement cavity are different;Step two, the laser emitted from reference cavity and measurement cavity respectively passes through optical filtering, focuses after filtering out pump light, and then respectively incident to beam splitter, the laser passing through beam splitter is divided into transmitted light and reflected light, two transmitted lights are detected and received by CCD camera, and the concentration value of the gas to be measured is obtained by analyzing its interference pattern;Two reflected lights are detected and received by frequency meter, and the refractive index value of the gas to be measured is obtained by analyzing the double-cavity beat frequency before and after the vacuum chamber is filled with the gas to be measured.The application can realize the simultaneous measurement of gas refractive index and gas concentration, and solve the problem of high sensitivity detection of gas refractive index and gas concentration.

Provided in the present invention are a differential capacitance diaphragm vacuum gauge and a production device therefor. The vacuum gauge comprises a housing, a fixed electrode plate and a diaphragm, wherein the housing is provided with a gas intake pipe and a gas filling pipe; the fixed electrode plate is arranged inside the housing; the diaphragm is arranged inside the housing, and divides the interior of the housing into an upper chamber and a lower chamber; the fixed electrode plate is located in the upper chamber, and a preset distance is provided between the fixed electrode plate and the diaphragm; the lower chamber is in communication with the gas intake pipe and forms an open measurement chamber; the gas filling pipe is in communication with the upper chamber and forms a closed reference chamber; and a preset volume of gas filled by means of the gas filling pipe is provided in the closed reference chamber, so that the closed reference chamber is in a preset positive high-pressure state. The closed reference chamber is filled with gas to a certain pressure by means of the gas filling pipe, so that the reference chamber is in a constant high-pressure state, thereby achieving a simple structure and the effect of easy manufacturing.

The application relates to the technical field of gas sensor control devices, and discloses a gas sensor control device which comprises a sealed box, the outer wall of the sealed box is provided with a side plate, the inner cavity of the sealed box is provided with a reference cavity, and the inner cavity of the reference cavity is fixedly provided with a reference gas sensor. The gas sensor control device and the control method are characterized in that the reference cavity and the measuring cavity are arranged, the reference cavity is filled with high-purity nitrogen in a sealed mode, the reference gas sensor, the temperature and humidity sensor and the TEC temperature control module are arranged, and a stable zero point reference is formed; the zero point reference cavity is constructed, the reference cavity outputs a pure environmental interference signal, the measuring cavity outputs a mixed signal of concentration and interference, the controller performs difference operation, the environmental influence can be eliminated, the real gas concentration is output, the current of the TEC plate is controlled according to the environmental temperature, the direction of the current is changed, the hot end and the cold end of the TEC plate are changed, and the working temperature of the sensors in the measuring cavity and the reference cavity is adjusted.

Harmonically modelocked (HML) frequency comb lasers can allow an increase of the repetition rate of passively modelocked laser by up to a factor of 1000 to the frequency range of 1-40 GHz, while preserving their comb properties. An HML laser can include a reference cavity with a beam splitter that is a common mode to the reference cavity and a main cavity, while further configured for also producing an output for the HML optical frequency comb. Bulk as well as fiber reference cavities can be implemented with ultra-low expansion thermal expansion materials that allow the use of HML lasers as precision frequency references and frequency synthesizers for the microwave, mm wave and optical frequency domain. HML dual frequency combs with minimal differential noise between the two combs can reference both combs to the same reference cavity. Harmonic modelocking can also facilitate optical parametric oscillation inside the reference cavity.

A back pressure regulator includes: a body including: a process surface including at least one inlet orifice and a plurality of outlet orifices; an inlet port communicating with an exterior of the body and with the at least one inlet orifice; an outlet port communicating with the exterior of the body and with the outlet orifices; a reference housing defining a reference cavity; a diaphragm secured between the body and the reference housing such that the diaphragm contacts the process surface, the diaphragm movable between a closed position and an open position; a transfer assembly disposed in the reference cavity, positioned against the reference side of the diaphragm; and an actuator configured to apply a force against the transfer assembly, in response to an electrical input.

The invention provides a temperature calibration method, and relates to the technical field of semiconductor equipment, and the temperature calibration method comprises the steps: setting n comparison process temperatures, obtaining a process result index of a reference cavity at each comparison process temperature, and obtaining an actual measurement temperature needed by a to-be-matched cavity to achieve the same process result index, obtaining n actually measured temperatures corresponding to the comparison process temperatures; based on the Planck black body radiation law, the radiance matching ratio of each comparison process temperature to the corresponding actually-measured temperature is calculated, and a relation model between the radiance matching ratio and the actually-measured temperature is established; and for any actually measured temperature of the to-be-matched cavity, a corresponding radiance matching ratio is obtained through interpolation based on the relation model, and the calibrated temperature of the to-be-matched cavity is calculated by using the radiance matching ratio obtained through interpolation. According to the method, the consistency of process result indexes among the process cavities is improved, and the influence of factors such as internal mechanical assembly difference of the process cavities and a temperature field-flow field coupling effect on a temperature measurement result is reduced.

The invention provides a vacuum sensor with a silicon stopper electrode structure. The vacuum sensor comprises a first silicon wafer, a first glass sheet and a second glass sheet which are respectively arranged on two surfaces of the first silicon wafer, and a stopper arranged on the second glass sheet, the two surfaces of the first silicon wafer are respectively provided with a reference cavity and a capacitor cavity, the first glass sheet is arranged on the surface, provided with the reference cavity, of the first silicon wafer, the second glass sheet is arranged on the surface, provided with the capacitor cavity, of the first silicon wafer, and the check block is located in the capacitor cavity; meanwhile, the invention also provides a preparation process of the vacuum sensor with the silicon stop block electrode structure for preparing the vacuum sensor. According to the vacuum sensor with the silicon stop block electrode structure, the first glass sheet is arranged on the first silicon wafer, and the reference cavity prepared on the first silicon wafer is controllable, so that the formed film is jacked by the first glass sheet when moving towards the first glass sheet under the action of atmospheric pressure, the film is prevented from being broken due to continuous movement, and the quality of the film is improved. And the preparation yield of the vacuum sensor is improved.

A gas sensor chip for performing a thermal conductivity measurement comprises: a measuring cavity which has an opening so that an ambient gas can flow into the measuring cavity, a reference cavity which is filled with a reference gas and hermetically sealed, a first and a second measuring cavity bar which are arranged side by side and freestanding in the measuring cavity, a first and a second reference cavity bar which are arranged side by side and freestanding in the reference cavity, wherein each of the measuring cavity bar and the reference cavity bar has a first and a second conductor element which are electrically insulated from each other and which, based on an operating mode of the gas sensor chip, can each be operated as a sensor element and / or as a heating element for a thermal conductivity measurement of the ambient gas.