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145 results about "Reference cavity" patented technology

Integrated silicon chip for testing acceleration, pressure and temperature, and manufacturing method thereof

The invention relates to an integrated silicon chip for testing acceleration, pressure and temperature, and the manufacturing method thereof. The invention is characterized in manufacturing the pressure sensor, temperature sensor and accelerometers of thermoelectric pile on to one chip by the same micro processing technology. The acceleration is detected by adopting thermal convection type accelerometers, using polysilicon resistor as heater, using a thermoelectric pile composed of two pairs of metals (such as aluminium and tungsten-titanium) and P type or N type polysilicon to detect the temperature difference in the sealed cavity caused by acceleration. The high accurate absolute pressure sensor is manufactured by using silicon nitride film with low stress as the core structure layer of the pressure sensor chip, and forming force sensitive resistor track by polysilicon film, forming vacuum reference cavity by TEOS bolt in LPCVD furnace. At the same time, the temperature sensor is composed by using polysilicon thermistor to detect temperature change. The integrated chip achieves the advantages of microminiaturization, low cost, high precision, high reliability and high stability.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Fiber bragg grating combined optical fiber laser gas detection system with reference cavity compensation

The invention provides a fiber bragg grating combined optical fiber laser gas detection system with reference cavity compensation. The fiber bragg grating combined optical fiber laser gas detection system comprises an optical fiber laser, an optical isolator, a coupler, a second wavelength division multiplexer, a third wavelength division multiplexer, a first photoelectric detector, a second photoelectric detector, a third photoelectric detector, a fourth photoelectric detector, and a feedback control unit which are sequentially connected, wherein the optical fiber laser comprises a laser diode pumping source, a first wavelength division multiplexer, an active optical fiber, a first fiber bragg grating and a second fiber bragg grating and respectively emits a first wavelength laser beam and a second wavelength laser beam, the coupler is used for carrying out power beam splitting on light beams, the light beams subjected to the beam splitting are respectively introduced into a reference air chamber and a detection air chamber, the second wavelength division multiplexer is connected with the reference air chamber, the third wavelength division multiplexer is connected with the detection air chamber, the first photoelectric detector and the second photoelectric detector are connected to the second wavelength division multiplexer, the third photoelectric detector and the fourth photoelectric detector are connected to the third wavelength multiplexer to generate a first optical intensity signal, a second optical intensity signal, a third optical intensity signal and a fourth optical intensity signal; the feedback control unit receives the first optical intensity signal, the second optical intensity signal, the third optical intensity signal and the fourth optical intensity signal and uses a comparing result as a feedback signal for regulating the optical fiber laser.
Owner:BEIJING INFORMATION SCI & TECH UNIV

Tire pressure monitoring alarm device

ActiveCN101830152AUnderstand the stress situation in real timeTimely supplement pressureTyre measurementsReference cavityAlarm device
The invention discloses a tire pressure monitoring alarm device, which comprises a bottom nut which is screwed at a valve core and a shell which is screwed on the nut, the top of the shell is sealed by a lens, and the shell is internally provided with an alarm circuit board, a battery, an elastic metal sheet, a reference cavity component and an inflating valve spring sequentially from top to bottom; the anode of the alarm circuit board is connected with the anode of the battery, and the cathode of the alarm circuit board is connected with the elastic metal sheet below the cathode of the battery; and the elastic metal sheet attaches to another elastic metal sheet on the top surface of a reference cavity at the top of the reference cavity component, and the space above the reference cavity inside the shell is sealed as a monitoring cavity. The pressure of the reference cavity and the initial pressure of the tire are the same, the pressure in the monitoring cavity and the real-time pressure of the tire are the same, and when the pressure difference of the reference cavity and the monitoring cavity reaches a certain value, the elastic metal sheets are deformed to contact with the cathode of the battery, thus conducting the alarm circuit board. By adopting the monitoring device, the tire pressure can be known in real time, and pressure can be timely supplemented to the tire with low pressure, thus keeping good manipulability and safety performance of an automobile.
Owner:DONGGUAN NANNAR ELECTRONICS TECH

Media-compatible electrically isolated pressure sensor for high temperature applications

A pressure sensor is described with sensing elements electrically and physically isolated from a pressurized medium. An absolute pressure sensor has a reference cavity, which can be at a vacuum or zero pressure, enclosing the sensing elements. The reference cavity is formed by bonding a recessed cap wafer with a gauge wafer having a micromachined diaphragm. Sensing elements are disposed on a first side of the diaphragm. The pressurized medium accesses a second side of the diaphragm opposite to the first side where the sensing elements are disposed. A spacer'wafer may be used for structural support and stress relief of the gauge wafer. In one embodiment, vertical through-wafer conductive vias are used to bring out electrical connections from the sensing elements to outside the reference cavity. In an alternative embodiment, peripheral bond pads on the gauge wafer are used to bring out electrical connections from the sensing elements to outside the reference cavity. In various embodiments, a regular silicon-on-insulator wafer or a double silicon-on-insulator wafer may be used as the gauge wafer, and appropriate micromachining steps are adopted to define the diaphragm. A layer of corrosion resistant material is deposited on the surface of the diaphragm that is accessed by the pressurized medium.
Owner:NAGANO KEIKI

Low-permeability rock particle penetration rate measuring system and measuring method

ActiveCN106769778AAchieve high-precision inversionImproving Permeability Measurement AccuracyPermeability/surface area analysisParticle penetrationRate of penetration
The invention discloses a low-permeability rock particle penetration rate measuring system and measuring method. The penetration rate measuring system comprises a high-pressure air source device, a reference cavity, a sample cavity, an inlet pressure intensity detecting device, an automatic valve, a ball valve, a pressure difference detecting device and a control device, wherein the automatic valve and the ball valve are sequentially arranged on a pipeline communicating the reference cavity and the sample cavity; the pressure difference detecting device and the automatic valve are connected in parallel; the control device is respectively connected with the automatic valve and the pressure difference detecting device; an output pipeline of the high-pressure air source device communicates with the reference cavity or the sample cavity; the inlet pressure intensity detecting device is arranged on the output pipeline of the high-pressure air source device; an air exhaust opening is formed in a pipeline of the inlet pressure intensity detecting device and the high-pressure air source device. The high-pressure air source device is connected with the reference cavity or the sample cavity; the change of the pressure intensity inside the reference cavity and the sample cavity can be controlled; the pressure intensity difference is detected through the pressure difference detecting device, so that the control device can accurately obtain a pressure intensity change curve and the particle penetration rate of rock to be measured.
Owner:TSINGHUA UNIV

Permeability measurement system and method for low-permeability rock ore particles

The invention provides a permeability measurement system and method for low-permeability rock ore particles. The permeability measurement system comprises a high-pressure air source device, a reference cavity, a suction and exhaust valve and two symmetrically-arranged sample side devices; each sample side device comprises a sample cavity, an isolation valve and a balance valve, the sample cavity is communicated with the reference cavity through a circulation pipeline to receive high pressure air transmitted from the reference cavity; the isolation valve is arranged at the position of the circulation pipeline and close to the sample cavity; the balance valve is arranged at the position of the circulation pipeline and close to the reference cavity; the two sample cavities are respectively used for accommodating to-be-detected low-permeability rock ore particles and impermeable solids, the impermeable solids and the to-be-detected low-permeability rock ore particles are identical in particle size and volume, and the sample side devices are arranged at the same height. The permeability measurement system is simple and easy to maintain, small in dimension and high in safety; the permeability measurement system and method has the advantages that credibility and measurement precision of permeability of low-permeability rock ores are remarkably increased.
Owner:苏州开洛泰克科学仪器科技有限公司

Built-in high-temperature wireless pressure sensor

The invention relates to a pressure sensor, in particular to a built-in high-temperature wireless pressure sensor. The built-in high-temperature wireless pressure sensor is provided with a pressure sensitive film, a sensor upper covering plate, a capacitor upper counter electrode, a capacitor lower counter electrode, an inductance coil, a sensor base and a pressure reference cavity, wherein a square groove is formed in the sensor upper covering plate to form the pressure sensitive film, the capacitor upper counter electrode is manufactured on the back surface of the sensor upper covering plate, a groove shaped like a Chinese character 'hui' is formed in the sensor base, the capacitor lower counter electrode and the inductance coil are manufactured on the sensor base, the upper surface of the capacitor lower counter electrode is flush with the upper surface of the inductance coil, and the inductance coil is manufactured in the groove shaped like the Chinese character 'hui'. The capacitor upper counter electrode, the capacitor lower counter electrode and the inductance coil are all made of silicon doped with metal, the capacitor upper counter electrode and the capacitor lower counter electrode form a parallel plate capacitor, the capacitor upper counter electrode and the inductance coil lead out wires at the upper layer and wires at the lower layer respectively, the sensor upper covering plate and the sensor base are bonded, the wires at the upper layer make tight contact with the wires at the lower layer, the capacitor upper counter electrode, the inductance coil and the capacitor lower counter electrode are connected in series to form a standard RLC loop, and the pressure reference cavity is formed.
Owner:XIAMEN UNIV

MEMS resonant pressure sensor based on Si-Si-Si-glass wafer bonding technology and manufacturing process thereof

The invention discloses a MEMS resonant pressure sensor based on Si-Si-Si-glass wafer bonding technology and a manufacturing process thereof. The order of the MEMS resonant pressure sensor from top tobottom is a Si pressure sensitive layer, a Si resonator layer, a Si pit substrate layer, a glass pit substrate layer, a Si pressure sensitive layer and a Si resonator layer. The Si resonator layer and the Si pit substrate layer are bonded by a Si-Si bonding process. The Si pit substrate layer and the glass pit substrate layer are bonded by a Si-glass anodic bonding process. A first SiO2 layer isarranged between the Si pressure sensitive layer and the Si resonator layer, and a second SiO2 layer is arranged between the Si resonator layer and the Si pit substrate layer. According to the MEMS resonant pressure sensor of the invention, the process difficulty of MEMS micro-nano processing and high vacuum packaging is reduced; residual stress and thermal stress are effectively reduced; reliability and vacuum and long-term maintenance of the vacuum reference cavity are improved; temperature compensation accuracy is improved; the overall accuracy and stability of the pressure sensor is improved.
Owner:BEIJING RES INST OF TELEMETRY +1

Testing device for testing low-temperature adsorption performance of gas

The invention discloses a testing device for testing a low-temperature adsorption performance of gas. The testing device comprises a low-temperature device, a gas adsorption device and a gas inlet pipeline, wherein the low-temperature device comprises a refrigerating machine, a sample cavity which is arranged on a secondary cold head of the refrigerating machine and is used for storing a sample for testing, a shielding cover which covers the secondary cold head of the refrigerating machine and the sample cavity, and a vacuum cover which covers the shielding cover and enables a primary cold head of the refrigerating machine, the secondary cold head of the refrigerating machine and the sample cavity to be in a vacuum environment; the sample cavity is connected with an adsorption device reference cavity in the gas adsorption device through a gas conveying pipeline. According to the testing device provided by the invention, the refrigerating machine is used as a cold source, and problems that a low-temperature adsorption performance testing device excessively depends on low-temperature liquid so that experimental operations are complicated and a lot of raw materials of the low-temperature liquid are wasted in the prior art are solved.
Owner:TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI

Coronary artery load detecting system and method

The invention provides a coronary artery load detecting system and a coronary artery load detecting method. The coronary artery load detecting method comprises the following steps: S1, acquiring the cross sectional area of a reference cavity, and acquiring voltage values of a main device at a position corresponding to the cross sectional area of the reference cavity under the lower frequency state and the high frequency state respectively; S2, acquiring the voltage values of the main device at positions of the bottom end or top end of a to-be-tested object under the lower frequency state and the high frequency state respectively under the same current; S3, driving the main device to move at uniform speed, and acquiring the voltage value of the main device in the movement process under the same current and under the lower frequency state; and S4, acquiring the cross sectional areas of all the positions of the to-be-tested object according to the preset fixed current value, the cross sectional area of the cavity, and the acquired voltage values. According to the system and the method, the voltage values of all the positions of the to-be-tested object are acquired through the frequency conversion manner, and further, the cross sectional areas of all the positions of the to-be-tested object are analyzed; and the parameters including the plaque parameters and the FFR of all the positions of the to-be-tested object are acquired according to the cross sectional areas, the operation and processing processes are greatly simplified, and the detection cost is reduced.
Owner:SUZHOU RAINMED MEDICAL TECH CO LTD

Single-silicon-wafer compound sensor structure with pressure sensor embedded in accelerometer and manufacturing method

The invention relates to a single-silicon-wafer compound sensor structure with a pressure sensor embedded in an accelerometer and a manufacturing method. The compound sensor structure comprises a single silicon wafer, and an accelerated speed sensor and a pressure sensor which are integrated on the single silicon wafer, wherein the accelerated speed sensor and the pressure sensor are integrated on the surface of the single silicon wafer; the pressure sensor is suspended at the central position of a mass block of the accelerated speed sensor; a pressure reference cavity is directly buried into the mass block. According to the single-silicon-wafer compound sensor structure, the size of a chip is greatly reduced by the accelerated speed sensor and the pressure compound sensor, and the manufacturing cost is reduced; the structure is combined with an IC process so that large-batch manufacturing can be realized; meanwhile, the pressure sensor is directly suspended at the central position of the mass block, namely the size of the chip can be reduced to the greatest extent, and the mutual crosstalk of a detection signal between the accelerated speed sensor and the pressure sensor is also effectively eliminated, so that the detection precision of the compound sensor is greatly improved.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Seawater salinity detection device with prism model capable of refracting for multiple times

The invention relates to a seawater salinity detection device with a prism model capable of refracting for multiple times, which comprises an upper computer, a right-angle prism and a signal acquisition and processing module; optical glass which is perpendicular to an emitting light path of a laser and two pieces of optical glass which form a group of prism models in a mode of forming an acute angle alpha 1 and an obtuse angle beta 1 with the emitting light path of the laser are arranged below the laser and a position sensitive device, and two pieces of optical glass, which form a group of prism models and form an acute angle alpha 2 and an obtuse angle beta 2 with the opposite direction of the emitting light path of the laser respectively, are arranged above the right-angle prism sequentially; and the optical glass and a shell of the device enclose an upper closed reference cavity filled with reference liquid, and the optical glass and a shell at the bottom end of the device enclose a lower closed reference cavity which is provided with the right-angle prism and filled with the reference liquid. The seawater salinity detection device has a simple structure and is convenient to use, and due to the adoption of the prism models, the deflection angles of light rays are expanded, the resolution, accuracy and interference resistant capacity are improved, the length of the instrument is shortened, and the equipment cost and measuring cost are reduced.
Owner:OCEANOGRAPHIC INSTR RES INST SHANDONG ACAD OF SCI

Transmission cavity frequency stabilizing system and method for realizing long-term laser frequency stabilization

The invention discloses a transmission cavity frequency stabilizing system and method for realizing long-term laser frequency stabilization and belongs to the field of precise laser frequency stabilization. The frequency stabilizing system mainly comprises a plurality of Ti-doped sapphire lasers, reference cavities, control boxes, a reference laser (helium-noon laser) with stable frequency, a polarization beam splitter, a Fabry-Perot transmission cavity, a photoelectric detector, a function signal generator, an adder, a data acquisition card, a computer and the like. The frequency stabilizing method comprises steps as follows: firstly, two Ti-doped sapphire lasers are locked on the respective reference cavities, and then the reference cavities are locked on the reference laser with stable frequency, so that two Ti-doped sapphire lasers with laser line width smaller than 100 kHz and long-term frequency drift smaller than plus/minus 1 MHz are obtained. The system and the method have the advantages that only one reference laser is used for locking the plurality of Ti-doped sapphire lasers with frequency to be stabilized simultaneously and can lock the Ti-doped sapphire lasers at any frequency within the tunable range, and the extensibility and the frequency stability are very high.
Owner:EAST CHINA NORMAL UNIV
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