58 results about "Reference cavity" patented technology

The invention discloses an optical fiber sensor and a preparation method thereof, and belongs to the technical field of optical fiber sensing, and the optical fiber sensor comprises an optical fiber body adopting a splicing structure of a single-mode optical fiber, a tapering coreless optical fiber and a single-mode optical fiber; the cascaded F-P structure comprises a sensing cavity and a reference cavity which are arranged on the tapering coreless optical fiber; the metal enhancement layer comprises a silver film and a gold nanorod array which are sequentially arranged on the surface of the tapering coreless optical fiber, the thickness of the silver film is 30-50 nm, the length-diameter ratio of gold nanorods is 3: 1-5: 1, and the diameter of the gold nanorods is 40-60 nm; the sensitive material coating comprises a polydimethylsiloxane (PDMS) film coated on the surface of the sensing cavity and a polyvinyl alcohol (PVA) film coated on the surface of the gold nanorod array, the thickness of the PDMS film is 3-7 microns, and the concentration of the PVA film is 2-4 wt%; according to the optical fiber sensor and the preparation method thereof provided by the invention, a synergistically enhanced sensing system is formed, and high sensitivity, amplification and multi-parameter detection capability are considered at the same time.

The embodiment of the application provides a novel capacitive infrasound sensor and an infrasound detection method, and belongs to the technical field of pipeline leakage detection. The novel capacitive infrasound sensor is characterized in that the novel capacitive infrasound sensor comprises: a detection cavity, which is connected with a pipeline to be detected through an acoustic sampling channel and is used for sensing infrasonic pressure pulsation caused by pipeline leakage; a reference cavity, which is connected with an external environment through a micropore array to form a pressure relief path with a preset time constant and is used for providing a stable reference pressure in a low frequency band; a capacitive sensing unit located between the detection cavity and the reference cavity, which is used for converting a differential pressure change between the detection cavity and the reference cavity into an electric signal; and a chopping demodulation circuit connected with the capacitive sensing unit, which is used for inhibiting low-frequency noise and DC drift in a demodulation process and obtaining a stable infrasound signal output. The scheme of the application realizes high-fidelity introduction of an infrasound signal for pipeline leakage detection while ensuring safety and reliability.

Provided is a pressure sensor, including: a first substrate; a second substrate having a pressure-sensitive membrane, a pressure reference cavity is provided between the pressure-sensitive membrane and the first substrate, the pressure-sensitive membrane is configured to deform; a capacitor having a first / second electrode plate, the first electrode plate being disposed on the first substrate, the second electrode plate being disposed on the pressure-sensitive membrane; a detection inductor having coil structures, each coil structure includes a first trace, a second trace and a conductive post; the first trace is disposed on a side of the first substrate, the second trace is disposed on the other side of the first substrate, orthographic projections of the first trace and the second trace on the first substrate intersect, the first trace is connected to the second trace at an intersection position; the detection inductor and the capacitor form a resonant circuit.

The invention relates to the technical field of physical quantity precision measurement, in particular to a piston effective area measurement system and method. The system comprises an optical pressure measuring device and a piston pressure gauge pressure measuring device. The optical pressure measuring device comprises a box body, a measuring cavity, a reference cavity and a laser refractometer. The measuring cavity is used for filling a gas medium; the reference cavity maintains a vacuum state; the laser refractometer emits laser to the measuring cavity and the reference cavity. The piston pressure gauge pressure measuring device comprises a piston pressure gauge which comprises an air cylinder and a piston. The piston divides the cylinder into a first space and a second space. The gas source is communicated with the second space and the measuring cavity through the three-way valve, the refractive index of gas in the measuring cavity is obtained through the laser refractometer, and the pressure of the gas is determined through the refractive index of the gas. Calibration of the effective area of the piston is traced to basic physical constants and high-precision measured physical quantities, the pressure is accurately measured, and high precision and reliability of a calibration result are guaranteed.

The invention provides a metalized vacuum sensor, which comprises a first silicon wafer, a metalized glass sheet, a second silicon wafer and a metal electrode, and is characterized in that the second silicon wafer, the metalized glass sheet and the second silicon wafer are sequentially arranged; the metal electrode is arranged on the surface of the first silicon wafer, one side surface, close to the glass layer, of the second silicon wafer is provided with a capacitor cavity, and the other side surface is provided with a reference cavity; the metalized glass sheet comprises a glass layer and a metal layer arranged on the glass layer, and the metal layer and the metal electrode are located on the two surfaces of the glass layer respectively; the vacuum sensor is also provided with a connecting part which is communicated with the metal layer and the metal electrode. According to the vacuum sensor, the capacitance cavity and the medium cavity are separated, so that measurement values are not affected when different media are measured; the invention also provides a preparation process of the metallized vacuum sensor.

A sensor (10) for detecting at least one predetermined component in a gaseous fluid (12) containing several components is proposed. The sensor (10) comprises a sensor element (20) with at least one heatable measuring membrane (22) in a measuring chamber (16), a reference membrane (32) in a reference chamber (34), and at least one electrical measuring bridge (48). The sensor (10) is further configured to detect an electrical resistance of the measuring bridge (48) and to detect a pressure acting on the measuring bridge (48) based on the detected electrical resistance of the measuring bridge (48). The measuring bridge (48) is arranged on the measuring membrane (22) and / or the reference membrane (32) and / or an additional membrane (60). A fuel cell system (62) with a sensor (10) is also proposed.

The invention provides a preparation method of an anti-aging optical resonant cavity, and relates to the field of optical instrument manufacturing and application. Comprising the steps of zero expansion point measurement, drift rate measurement, aging pretreatment, monitoring and compensation of the optical resonant cavity. The zero expansion point measurement and the drift distance measurement can be obtained by adopting different methods such as a reference cavity beat frequency method, an optical comb measurement method and an optical clock measurement method; the aging pretreatment comprises two modes of high-temperature accelerated aging and long-term stable storage, so that the performance of the material reaches a stable state; and monitoring and compensating, namely compensating the linear drift rate by measuring the frequency drift rate. The problem that the ULE glass is inevitably aged in long-term use is solved.

The invention discloses a method for measuring the gas content in a die casting, and belongs to the technical field of material detection. The method comprises the following steps: loading a sample into the closed desorption cavity; vacuumizing and pre-degassing the cavity by using an oil-free high-vacuum acquisition module formed by connecting a molecular pump and a dry-type screw pump in series; stepwise heating is carried out on the sample through program temperature control; the released gas is guided into a differential pressure sensing metering unit through a low-thermal-conductivity aluminum oxide ceramic isolation tube; the unit comprises a reference cavity and a measuring cavity which are arranged in the same constant temperature device, and the gas inflow rate is dynamically represented by measuring the pressure difference between the two cavities; and based on the ideal gas state equation and a calculation model containing cavity thermal expansion compensation, calculating the amount of the gas substance in unit time in real time. The problems of poor precision and repeatability caused by oil pollution, thermal interference and discontinuous metering are solved, and continuous, dynamic and high-repeatability automatic measurement of the gas content in the die casting is realized.

The present application relates to pressure pipeline air tightness detection technical field, and disclose a kind of cold storage refrigeration pipeline prefabrication welding and air tightness test method;For solving the problem that stable, repeatable, traceable qualification and threshold quantization of small leakage cannot be achieved in traditional method;The method, first determine boundary data unit and valve position isolation check, access dry nitrogen, reference cavity, double pressure link and near and far end temperature measuring point, initial parameter record;Pipe link and valve position switching self-check are completed under the working condition of reference cavity;Precharge and target pressure are staged inflation, and pressure temperature threshold value is gated to stabilize voltage;Main pressure maintaining period synchronously obtains the pressure temperature data of section to be detected and reference cavity, and periodically rechecks cross verification drift, triggers condition according to partition single valve single step isolation recheck, obtains small leakage stable repeatable traceable determination conclusion.

To enable an increase in repetition rates of a passively mode-locked laser by a factor of up to 1000 up to a frequency range of 1 to 40GHz while maintaining comb characteristics of a harmonically mode-locked (HML) frequency comb laser.SOLUTION: The HML laser may include a reference cavity having a beam splitter that is common mode to the reference cavity and the main cavity, and is further configured to generate an output for the HML optical frequency comb. The bulk as well as the fiber reference cavities can be implemented with ultra-low expansion thermal expansion materials that enable the use of HML lasers as precision frequency references and frequency synthesizers for the microwave, millimeter wave, and optical frequency domains. HML dual-frequency combs with minimal differential noise between the two combs can reference both combs to the same reference cavity.SELECTED DRAWING: Figure 2A

The invention provides an ion detection module and a preparation method thereof.The single-channel ion detection module is prepared on the basis of the microfluidic technology, the ion detection module comprises a cavity and a bottom plate from top to bottom, the cavity and the bottom plate are connected in a sealed mode, and an annular counter electrode and a working electrode are arranged at the bottom of a test cavity; the surfaces of the electrodes are electroplated with gold layers, so that the test sensitivity and accuracy are improved; a reference cavity, a liquid complexing part cavity and a test cavity are vertically stacked around the same coaxial shaft, the reference cavity is filled with electrolyte, and the liquid complexing part cavity is electrically connected with test liquid, so that the process of feeding, storing and emptying a sample to be tested can be realized, and meanwhile, the test cavity, the liquid complexing part and the reference cavity are integrated in the vertical direction; the portable heavy metal detection is easy to realize.

The invention provides an ultra-stable optical reference cavity zero expansion temperature determination method and a temperature control method. The ultra-stable optical reference cavity zero expansion temperature determination method comprises the following steps: establishing a heat transfer model of a multi-layer temperature control system comprising a temperature control layer, a shielding layer and a reference cavity from outside to inside; setting a heat parameter group of the heat transfer model, wherein the heat parameter group comprises shielding layer heat capacity, reference cavity heat capacity, a heat conduction coefficient between a temperature control layer and a shielding layer, a heat conduction coefficient between the shielding layer and a reference cavity, a heat radiation coefficient between the temperature control layer and the shielding layer, a heat radiation coefficient between the shielding layer and the reference cavity and reference cavity zero expansion temperature; and the optimal value of each thermal parameter in the thermal parameter group is obtained through fitting, and the zero expansion temperature of the reference cavity is determined.

In an aspect, a pressure sensor for determining pressure in an environment comprises: a source for emitting a coherent reference light characterized by a reference light frequency; a first lock-in mechanism configured to send an electrical signal to the source based on a reference resonance frequency; a reference cavity; wherein the reference cavity is characterized by the reference resonance frequency; a modulator configured a reference light to generate at least a first sideband frequency such that an output of said modulator is a measurement light characterized by at least the first sideband frequency; a frequency synthesizer configured to drive the modulator; a second lock-in mechanism configured to send an electrical signal to the frequency synthesizer based on a measurement resonance frequency; and a measurement cavity configured to receive at least a portion of the measurement light; wherein the measurement cavity is characterized by the measurement resonance frequency; and wherein the pressure of the environment is determined based on the reference resonant frequency and the measurement resonance frequency.

The invention belongs to the technical field of environmental monitoring, and discloses a hydroxyl radical online generation and reference inspection method and device and application, and the device comprises a laser splitting unit, a laser collimation and focus lens group, a laser incident cavity, a reference cavity, a laser emergent cavity and an atmospheric hydroxyl radical measurement cavity. The device not only can continuously and stably generate high-concentration hydroxyl radicals, but also can monitor resonance fluorescence signals generated by the hydroxyl radicals in real time, has the advantages of high signal-to-noise ratio, low cost, good adaptability, stable and reliable operation and the like, and can be used as a key core component of a free radical measurement system by a laser-induced fluorescence method. The method not only can be directly applied to dye laser wavelength monitoring and locking, but also can be applied to dye laser wavelength calibration instead of a wavemeter.

The present application relates to medical devices and physiological pressure analysis monitoring technical field, disclose a double cavity series pressure sensor signal calibration device, including device ontology, and integrated in the double cavity series structure, pressure transmission assembly, sealing assembly and calibration interface in device ontology;Double cavity series structure includes static reference cavity and dynamic calibration cavity which are connected in turn along the pressure transmission direction, static reference cavity and dynamic calibration cavity realize pressure conduction through the through connection channel;Pressure transmission assembly is arranged in the double cavity series structure, for generating stable reference pressure in static reference cavity, generating dynamic simulation pressure in dynamic calibration cavity and transmitting to calibration interface;Sealing assembly is arranged in the inner wall of static reference cavity, dynamic calibration cavity and connection channel, and calibration interface is arranged at the end of device ontology, for detachable docking with implantable pressure sensor.The device can consider static and dynamic pressure calibration requirements.

The invention provides a method and device for calibrating atomic and molecular spectral frequencies, and relates to the technical field of quantum precision measurement, and the method comprises the steps: obtaining a free spectral path of an ultra-stable optical reference cavity; synchronously acquiring an atomic molecule spectral signal and a transmission signal of the ultra-stable optical reference cavity; wherein the atomic molecule spectral signal and the transmission signal are respectively generated by laser output by the same single-frequency laser after beam splitting; and performing frequency calibration on the atomic molecular spectral signal based on the free spectral path. The method has the advantages of high precision, high stability, relatively simple system and controllable cost.

Provided in the present invention are a differential capacitance diaphragm vacuum gauge and a production device therefor. The vacuum gauge comprises a housing, a fixed electrode plate and a diaphragm, wherein the housing is provided with a gas intake pipe and a gas filling pipe; the fixed electrode plate is arranged inside the housing; the diaphragm is arranged inside the housing, and divides the interior of the housing into an upper chamber and a lower chamber; the fixed electrode plate is located in the upper chamber, and a preset distance is provided between the fixed electrode plate and the diaphragm; the lower chamber is in communication with the gas intake pipe and forms an open measurement chamber; the gas filling pipe is in communication with the upper chamber and forms a closed reference chamber; and a preset volume of gas filled by means of the gas filling pipe is provided in the closed reference chamber, so that the closed reference chamber is in a preset positive high-pressure state. The closed reference chamber is filled with gas to a certain pressure by means of the gas filling pipe, so that the reference chamber is in a constant high-pressure state, thereby achieving a simple structure and the effect of easy manufacturing.

The application relates to the technical field of gas sensor control devices, and discloses a gas sensor control device which comprises a sealed box, the outer wall of the sealed box is provided with a side plate, the inner cavity of the sealed box is provided with a reference cavity, and the inner cavity of the reference cavity is fixedly provided with a reference gas sensor. The gas sensor control device and the control method are characterized in that the reference cavity and the measuring cavity are arranged, the reference cavity is filled with high-purity nitrogen in a sealed mode, the reference gas sensor, the temperature and humidity sensor and the TEC temperature control module are arranged, and a stable zero point reference is formed; the zero point reference cavity is constructed, the reference cavity outputs a pure environmental interference signal, the measuring cavity outputs a mixed signal of concentration and interference, the controller performs difference operation, the environmental influence can be eliminated, the real gas concentration is output, the current of the TEC plate is controlled according to the environmental temperature, the direction of the current is changed, the hot end and the cold end of the TEC plate are changed, and the working temperature of the sensors in the measuring cavity and the reference cavity is adjusted.

Harmonically modelocked (HML) frequency comb lasers can allow an increase of the repetition rate of passively modelocked laser by up to a factor of 1000 to the frequency range of 1-40 GHz, while preserving their comb properties. An HML laser can include a reference cavity with a beam splitter that is a common mode to the reference cavity and a main cavity, while further configured for also producing an output for the HML optical frequency comb. Bulk as well as fiber reference cavities can be implemented with ultra-low expansion thermal expansion materials that allow the use of HML lasers as precision frequency references and frequency synthesizers for the microwave, mm wave and optical frequency domain. HML dual frequency combs with minimal differential noise between the two combs can reference both combs to the same reference cavity. Harmonic modelocking can also facilitate optical parametric oscillation inside the reference cavity.

The invention provides a vacuum sensor with a silicon stopper electrode structure. The vacuum sensor comprises a first silicon wafer, a first glass sheet and a second glass sheet which are respectively arranged on two surfaces of the first silicon wafer, and a stopper arranged on the second glass sheet, the two surfaces of the first silicon wafer are respectively provided with a reference cavity and a capacitor cavity, the first glass sheet is arranged on the surface, provided with the reference cavity, of the first silicon wafer, the second glass sheet is arranged on the surface, provided with the capacitor cavity, of the first silicon wafer, and the check block is located in the capacitor cavity; meanwhile, the invention also provides a preparation process of the vacuum sensor with the silicon stop block electrode structure for preparing the vacuum sensor. According to the vacuum sensor with the silicon stop block electrode structure, the first glass sheet is arranged on the first silicon wafer, and the reference cavity prepared on the first silicon wafer is controllable, so that the formed film is jacked by the first glass sheet when moving towards the first glass sheet under the action of atmospheric pressure, the film is prevented from being broken due to continuous movement, and the quality of the film is improved. And the preparation yield of the vacuum sensor is improved.

A gas sensor chip for performing a thermal conductivity measurement comprises: a measuring cavity which has an opening so that an ambient gas can flow into the measuring cavity, a reference cavity which is filled with a reference gas and hermetically sealed, a first and a second measuring cavity bar which are arranged side by side and freestanding in the measuring cavity, a first and a second reference cavity bar which are arranged side by side and freestanding in the reference cavity, wherein each of the measuring cavity bar and the reference cavity bar has a first and a second conductor element which are electrically insulated from each other and which, based on an operating mode of the gas sensor chip, can each be operated as a sensor element and / or as a heating element for a thermal conductivity measurement of the ambient gas.

The invention discloses a high-temperature and high-frequency force-sensitive chip packaging structure based on nano-silver sintering and flush packaging, which comprises a kovar alloy shell and a chip main body, and is characterized in that a nano-silver sintering interconnection layer is arranged between an SOI force-sensitive chip in the chip main body and an aluminum nitride ceramic substrate; a low-melting-point glass sealing ring is arranged on the periphery of a back cavity of the SOI force-sensitive chip, a high-vacuum reference cavity is defined by the low-melting-point glass sealing ring, and a sensitive diaphragm of the SOI force-sensitive chip and the front end face of the kovar alloy shell are arranged in a coplanar mode. The process comprises the following steps of: 1, pre-treating and metalizing a substrate; 2, coating the nano-silver paste and inversely mounting the chip; 3, sintering and interconnecting the nano-silver; 4, glass ring sealing and vacuum cavity preparation; and 5, forming a flush structure and releasing stress. According to the invention, the sensitive diaphragm of the SOI force sensitive chip and the front end face of the shell are arranged in a coplanar manner, so that the lumen effect is eliminated, and the reliability of the sensor is improved; the process effectively inhibits thermal stress, improves structural stability and is suitable for the field of hot end monitoring.

A sensor calibration system includes a gas sensor configured to measure a thermal conductivity of a target gas. The gas sensor includes a reference chamber containing a reference gas, a measurement chamber containing a measurement gas, and a calibration circuit. The reference gas has a first thermal conductivity profile and the measurement gas has a, different, second thermal conductivity profile that are dependent on a first environmental stimulus and a second environmental stimulus. The calibration circuit is configured to, while the first environmental stimulus is varied and the second environmental stimulus is fixed, acquire a plurality of measurements. Each measurement of the plurality of measurements is representative of a difference in thermal conductivity between thermal conductivities of the reference gas and the measurement gas. The calibration circuit is configured to determine a target gas sensitivity of the gas sensor to the target gas based on the plurality of measurements.

The invention provides an automobile pressure sensor semiconductor device based on an MEMS technology. The method belongs to the technical field of crossing of a micro electro mechanical system (MEMS) technology and intelligent automobile electronics. The device comprises a three-dimensional heterogeneous sensitive structure, a thermal activation type vacuum reference cavity, an on-chip intelligent diagnosis engine, a signal conditioning circuit module, a multi-source stress isolation layer and an anti-interference packaging shell, and is characterized in that the three-dimensional heterogeneous sensitive structure is used for simultaneously sensing coupling stress; the signal output end of the microprocessor is connected with the signal input end of the signal conditioning circuit module; the thermal activation type vacuum reference cavity is in thermal coupling connection with the three-dimensional heterogeneous sensitive structure and is used for providing a stable vacuum reference datum to eliminate environmental drift; through the three-dimensional heterogeneous sensitive structure, the pressure, the shearing force and the bending moment in the vertical direction can be synchronously and independently sensed, the comprehensive measurement capability of complex coupling stress is remarkably improved, and richer mechanical dimension information is provided for chassis control systems, battery safety systems and the like.

The application provides a monolithic integrated multifunctional composite sensor and a preparation method thereof, and adopts single-silicon single-surface silicon microfabrication technology to predefine and cover a first micro groove of a gas flow sensing unit, to form a pressure reference cavity and a pressure sensitive diaphragm first, to predefine a single-crystal silicon thermocouple arm and a heating resistor pattern through the first micro groove and a side wall protection, to protect the pressure sensing unit through a heat insulation medium layer, to form a heat insulation cavity and a temperature sensing unit, to finally realize integration of the gas flow sensing unit, the pressure sensing unit and the temperature sensing unit on the same monolithic wafer, and to realize the structure of the heat insulation cavity and the pressure reference cavity in the same single-crystal silicon substrate. The method replaces traditional double-sided processing technology, solves the problem that a traditional composite chip is difficult to realize small size, avoids a complex process caused by a traditional silicon-silicon or silicon-glass bonding structure, greatly reduces process difficulty and cost, improves the yield of the composite chip, and improves the reliability of the sensor.

The application belongs to the technical field of environmental monitoring, and discloses a hydrogen-oxygen radical online generation and reference checking method, device and application. The device comprises a laser light splitting unit, a laser collimation and focusing lens group, a laser incidence cavity, a reference cavity, a laser emission cavity and an atmospheric hydrogen-oxygen radical measurement cavity. The device can not only continuously and stably generate high-concentration hydrogen-oxygen radicals, but also can monitor the resonance fluorescence signal generated by the hydrogen-oxygen radicals in real time. The device has the advantages of high signal-to-noise ratio, low cost, good adaptability, stable and reliable operation, etc. As a key core component of a laser-induced fluorescence method radical measurement system, the device can be directly applied to wavelength monitoring and locking of a dye laser, and can be used for wavelength calibration of the dye laser instead of a wavelength meter.

A pressure transducer and a preparation method thereof, and a detection device are disclosed, which relate to the technical field of pressure transducers. The pressure transducer includes: a first substrate; a second substrate including a pressure sensitive film, a sealed pressure reference chamber being provided between the pressure sensitive film and the first substrate, the pressure sensitive film being capable to be deformed in a direction towards or away from the first substrate, and the second substrate being a glass substrate; a first polar plate, a part or all area of the first polar plate is arranged on the pressure sensitive film; and a second polar plate arranged on a side of the first substrate facing the pressure sensitive film, and a part or all area of the second polar plate being directly opposite to the first polar plate to form a capacitor with the first polar plate.

The invention relates to the technical field of sensors, and provides a thin-film capacitive pressure sensor, which comprises a metal shell provided with an accommodating space, the bottom of the accommodating space is provided with a support connecting part, and the support connecting part is provided with a gas channel for introducing to-be-detected gas; the core structure is arranged in the accommodating space and comprises an electrode plate, an elastic film and a connecting layer which are sequentially arranged at intervals, the connecting layer is connected with the supporting connecting part, the electrode plate, the elastic film and the connecting layer are sealed through a seal welding area to form a plate capacitor, and a first vacuum reference cavity is formed between the electrode plate and the elastic film; a process cavity is defined by the elastic film and the connecting layer and is communicated with the gas channel; the problem of thermal stress mismatch and the problem of sensor temperature drift caused by mismatch of thermal expansion coefficients are solved.

The invention discloses a PDH laser frequency locking system for generating sidebands based on a nonlinear SOA. The PDH laser frequency locking system comprises a seed laser source, a first coupler, a second coupler, a first acousto-optic frequency shifter, a second acousto-optic frequency shifter, a semiconductor optical amplifier, a circulator, a reference cavity, a photoelectric detector, a frequency mixer, a demodulation filtering module and a servo controller. A nonlinear SOA is used for replacing a traditional electro-optical modulator to efficiently generate a multi-sideband signal needed by PDH frequency locking, the system cost and complexity are remarkably reduced, and the flexibility and strength of sideband generation are improved; meanwhile, through the collaborative design of the double acousto-optic frequency shift and the SOA nonlinear effect, accurate matching of the sideband frequency interval and the free spectral range of the reference cavity is achieved, and the signal-to-noise ratio and the frequency locking stability of the PDH error signal are greatly improved.

The application discloses a dynamic real-time correction method and system under multi-physical field coupling, and the method comprises the following steps: S100, an integrated double-cavity sensor containing a strain sensing cavity and an environmental reference cavity is constructed, so that the reference cavity only outputs a coupling signal of water pressure and temperature; S200, a variational modal decomposition is performed on a measurement signal and a reference signal, a false modal component is identified and removed, and an observation signal and an environmental fingerprint signal are reconstructed; S300, a high-dimensional phase space vector is constructed, a trajectory feature thereof is analyzed, and a hysteresis loop state of the sensor is identified; S400, a multi-core correlation vector machine regression model is established, and preliminary corrected structural deformation data are obtained; and S500, a long-period trend item in the signal is extracted, a pure equipment drift amount is calculated and removed, and a final deformation value is output. The multi-source interference coupling problems of water pressure, temperature, turbulent noise and equipment creep in the underwater environment are solved, and the adaptability, anti-interference ability and data reliability of the underwater measurement scene are improved.