548results about "Fluid pressure measurement using ohmic-resistance variation" patented technology

The invention discloses a preparation method of a cellulose acetate / thermoplastic polyurethane / polypyrrole composite conductive nanofiber aerogel composite pressure sensing material. The preparation method comprises the following steps: (1) preparing a cellulose acetate and thermoplastic polyurethane spinning solution; (2) preparing a cellulose acetate / thermoplastic polyurethane composite nanofiber membrane; (3) preparing cellulose acetate / thermoplastic polyurethane short nano dispersion liquid; (4) preparing a cellulose acetate / thermoplastic polyurethane / polypyrrole polymerization solution; and (5) preparing the cellulose acetate / thermoplastic polyurethane / polypyrrole composite conductive nanofiber aerogel. According to the preparation method, a high-temperature thermal annealing process is not needed, and the prepared nanofiber composite aerogel has high conductivity, ultralow volume density, high compression deformation performance and high pressure resistance sensing sensitivity.

The invention provides a data error compensation method for a biological net port flowmeter, and belongs to the technical field of ocean detection. A multi-dimensional sensor is arranged at a biological net port to collect fluid parameters, a deep learning model is used for recognizing multi-phase flow characteristics, and a corresponding compensation strategy is selected; based on a correlation analysis algorithm, compensation processing frequency is dynamically adjusted to achieve self-adaptive balance of precision and efficiency, the flow state change degree is monitored through the Euclidean distance, compensation parameters are hierarchically adjusted to ensure system stability, a parallel processing architecture is adopted to execute coarse compensation and fine compensation algorithms at the same time, and results are fused according to weights. Finally, dynamic and accurate compensation of the measurement error of the biological net port flowmeter in the complex multiphase flow environment is achieved, and the technical problem that in the prior art, the biological net port flowmeter cannot achieve dynamic and accurate error compensation in the complex multiphase flow environment is solved.

The invention discloses a diamond piezoresistive material and pressure sensing application thereof, and particularly relates to a boron-doped diamond-based piezoresistive material and an application method thereof in a sensor, a gradient doping structure and heterogeneous layer design are adopted, and the diamond piezoresistive material with high sensitivity, high linearity, temperature stability, corrosion resistance and radiation resistance is constructed; by optimizing a CVD process and a pattern etching structure, stable piezoresistive response in an environment of-60 DEG C to 250 DEG C is realized, the cycle life exceeds 10 times, and the high-reliability piezoresistive sensor is suitable for high-reliability sensing devices under extreme working conditions such as aerospace engines, deep sea detection equipment and nuclear reactors.

The invention discloses a flexible piezoresistive sensor and a preparation method and application thereof, the flexible piezoresistive sensor comprises an upper layer flexible conductive member, the upper layer flexible conductive member comprises an upper layer flexible substrate and an upper layer conductive layer, one surface of the upper layer flexible substrate is provided with a microstructure formed by sand paper reverse molding, and the upper layer conductive layer is embedded in the surface of the microstructure; the lower-layer flexible conductive member comprises a lower-layer flexible substrate, a lower-layer conductive layer and an elastic conductive layer; the lower-layer flexible substrate is provided with an arc-shaped stripe array microstructure; the elastic conductive layer includes a polymer matrix and a conductive filler dispersed therein. Through the double-gradient design of the gradient conductivity and the gradient structure, the core contradiction that a traditional flexible piezoresistive sensor is difficult to consider high sensitivity and wide linear range at the same time is successfully solved by utilizing the deep coupling and synergistic effect of the conductivity gradient and the structure gradient, and synchronous improvement of the sensitivity and the linear range is realized.

The invention relates to the technical field of water and soil conservation and ecological restoration, in particular to an ecological slope water and soil loss monitoring and restoring system and method.The system comprises a monitoring and restoring node, a monitoring and restoring node and a monitoring and restoring node, the monitoring and restoring node is internally provided with a double-micropore channel for measuring the conductivity of a water sample in a layered mode, and a pore water pressure sensor and a pressure release valve are used for conducting pore pressure monitoring and micro pressure release; a double-verification logic module is built in, two-stage necessity verification and two-stage effectiveness evaluation are achieved, and then the instability risk is accurately judged and self-adaptive repair is achieved. The ecological slope water and soil loss monitoring and repairing system and method solve or at least relieve the problems that an existing system is difficult to distinguish transient disturbance and real instability precursor and lacks intervention effect evaluation and self-adaptive optimization, the instability precursor and disturbance can be accurately distinguished, intervention can be effectively evaluated, self-adaptive optimization is achieved, and the ecological slope water and soil loss monitoring and repairing system and method are provided. And the intelligence, intervention credibility and long-term reliability of the system are improved.

The invention relates to the technical field of underground energy storage, in particular to a gas storage cavern grouting confining pressure real-time monitoring system and method based on the piezoresistive effect, and the system comprises a grouting reinforcement module which is used for injecting grout into a target gas storage cavern and laying a lining to form a grouting reinforcement area; the resistance detection module is used for detecting resistivity distribution characteristics of the grouting reinforcement area in real time; the confining pressure monitoring module is used for analyzing the resistivity distribution characteristics based on a preset piezoresistive modified slurry resistivity-surrounding rock stress relation model to obtain the actual stress state of surrounding rock; and the early warning regulation and control module is used for triggering an early warning signal based on the actual stress state of the surrounding rock and releasing gas. According to the invention, continuous and non-contact measurement of the surrounding rock stress state of the gas storage cavern can be realized.

The invention relates to the technical field of pressure sensors, and discloses a piezoresistive multi-range MEMS pressure sensor and a processing method thereof. The piezoresistive multi-range MEMS pressure sensor comprises: a pressed diaphragm; the mass blocks comprise a central mass block and a fixed mass block; the insulating layer is clamped between the pressed diaphragm and the mass block; the piezoresistor is arranged on one side, deviating from the mass block, of the pressed diaphragm; the at least two supporting frames are located in the pressure groove, each supporting frame surrounds the center mass block and is spaced from the center mass block, the supporting frame adjacent to the center mass block is connected with the center mass block through a first connecting beam, and the supporting frame adjacent to the fixed mass block is connected with the fixed mass block through a second connecting beam; every two adjacent supporting frames are connected through a third connecting beam. The piezoresistive multi-range MEMS pressure sensor disclosed by the invention is simple in structure and easy to process, and not only realizes multi-range acting force detection, but also realizes micro-range high overload measurement.

The invention relates to a low-noise high-precision pressure measuring circuit which comprises a bridge type sensor, an alternating-current excitation signal source, a phase-sensitive detector, a low-pass filter, a reference signal source and a signal conditioning amplifier. The alternating current excitation signal source modulates a differential voltage signal generated by the bridge type sensor to a high-frequency alternating current excitation signal generated by the alternating current excitation signal source to obtain a high-frequency pressure signal; the high-frequency pressure signal is amplified by the signal conditioning amplifier to form a modulated signal; the phase-sensitive detector performs frequency mixing on the modulated signal and a reference signal generated by a reference signal source to obtain a frequency mixing signal; the frequency mixing signal is filtered by a low-pass filter to form a direct-current voltage signal for pressure measurement; the reference signal generated by the reference signal source and the high-frequency AC excitation signal generated by the AC excitation signal source have the same frequency. According to the circuit, signals are modulated to a high-frequency area with low noise energy to be processed by adopting alternating-current excitation and coherent detection technologies, the signals and noise are effectively separated, and extremely high measurement resolution and precision are achieved.

The invention discloses a sandy gravel stratum grouting diffusion simulation system and method, and relates to the technical field of grouting simulation, the system comprises a test mold, a latex film is attached to the inner wall surface of the test mold, the test mold is filled with a sandy gravel material, and the bottom of the test mold is connected with a slurry storage barrel through a grouting pipe; a plurality of resistive film pressure sensors are arranged between the inner wall surface of the test mold and the outer wall surface of the latex film, and the resistive film pressure sensors collect pressure data in the slurry diffusion process in real time in the grouting process; the sandy gravel stratum environment of an actual engineering site is truly restored through the test mold and the flexible film, and the resistive film pressure sensor is used for collecting pressure signals in the slurry diffusion process in real time when the sandy gravel stratum is grouted; diffusion characteristics of grout at different time in the grouting process and distribution characteristics of grouting pressure at different positions in a stratum are obtained through data analysis, and a theoretical basis is provided for actual construction through data fitting.

The invention discloses a through needle temperature and pressure sensor and an assembly process, and relates to the technical field of temperature and pressure sensors, and the sensor comprises a ceramic pressure core body and an NTC assembly. An NTC (Negative Temperature Coefficient) through needle for outputting a temperature signal is arranged on the ceramic pressure core body in a penetrating manner; the NTC assembly comprises an NTC chip, a lead wire sleeve, a fixing seat and a metal sheath, a lead wire of the NTC chip is sleeved in the lead wire sleeve and extends out to be arranged through the fixing seat, and the metal sheath is sleeved outside the lead wire sleeve and the NTC chip and is fixed on the fixing seat; the lead of the NTC chip is connected with the NTC through pin through electric resistance welding, so that the connection reliability is improved, and meanwhile, the soldering tin rosin is prevented from sputtering to pollute the fixed seat and the ceramic pressure core body; the structure of the temperature pressure sensor is simplified, the reliability of electric connection is improved, and a signal path is rationalized through lead wire arrangement, metal sheath protection and electric resistance welding direct connection; the problems of complex structure, circuit virtual connection and low reliability of the existing temperature and pressure sensor are effectively solved.

A pressure sensor and a pressure interface are disclosed. The pressure sensor comprises: a pressure interface, wherein the pressure interface comprises a cylindrical ceramic base and a ceramic diaphragm arranged at one end part of the ceramic base; the ceramic diaphragm is connected with the ceramic base, the strain gauge is connected with the ceramic diaphragm, and the ceramic base and the ceramic diaphragm are integrally manufactured. As the pressure sensor adopts the ceramic base and the ceramic diaphragm which are integrated, additional assembly and sealing are not needed, the risk of leakage is avoided, and the cost is low at the same time. Moreover, the pressure sensor is made of a ceramic material which is in contact with the pressure medium, so that the pressure sensor can be applied to corrosive pressure media and the like.

The invention relates to the technical field of sensors, in particular to a temperature and humidity pressure sensor which comprises a port seat, a PCB mainboard supporting seat, a PCB mainboard, a terminal seat assembly and a shell, the port seat is provided with a pressure detection special channel and a temperature and humidity detection special channel which are separated, and a pressure sensing module is mounted through a sensing position at the top of a boss. A traditional complex inner plane machining structure is abandoned, and the special channel meets the requirements of two types of detection on the fluid state through differential design. The PCB mainboard supporting seat is provided with a positioning structure and a through groove, accurate positioning and stable electric connection of the PCB mainboard and the sensing module are guaranteed, the terminal seat assembly adopts a buckle and guiding design to improve the assembling efficiency, reliable protection is achieved in cooperation with a double-sealing structure, synchronous and accurate detection of temperature, humidity and pressure parameters is achieved on the whole, assembling is convenient, the production cost is low, and the product quality is improved. The method is suitable for various working condition scenes; the problems that the detection precision of the same flow channel of an existing integrated sensor is mutually disturbed, and the machining technology is complex can be effectively solved.

The invention provides a power saving method and system for a battery power supply pressure transmitter, and particularly relates to the technical field of industrial sensor energy saving. The method comprises the steps of firstly obtaining a pressure value measured by a pressure transmitter, calculating a pressure change rate according to the pressure value, then generating a PID control instruction according to the pressure change rate, and freezing integral term operation when an error between the pressure value and a set value is smaller than a preset threshold value. And processing the pressure change rate by adopting a prediction algorithm, outputting a pressure stationary period judgment result, and dynamically adjusting the sampling frequency based on the result. And when the judgment result indicates a stable state, triggering pulse signal output to replace RS485 communication. According to the method, invalid energy consumption waste in the pressure stable period is effectively reduced, the service life of the equipment battery is prolonged, and the energy-saving performance and practicability of the battery power supply pressure transmitter are improved.

The invention discloses a multi-station cooperative efficient production process for carbon fiber pipe automatic weaving, and the process comprises the following modules: a multi-dimensional tension monitoring module which is used for deploying a fiber grating sensor array along a fiber path, and collecting the axial / transverse tension data of a fiber bundle in real time; the environment compensation module integrates a temperature and humidity sensor and an air pressure monitoring device, and constructs an environment disturbance model according to the following specific formula: Finv = 0.05 deltaT + 0.03 deltaH + 0.02 deltaP; the dynamic regulation and control actuator adopts a micro-displacement platform driven by piezoelectric ceramics; and the intelligent decision control module is used for controlling the dynamic regulation and control actuator to carry out tension control by obtaining the measurement data of the environment compensation module and the monitoring data of the multi-dimensional tension monitoring module, and the control formula is G = 0.2 mu m / N. Through four innovations of multi-dimensional perception, environment compensation, high-speed execution and intelligent decision making, precision and self-adaption of carbon fiber tension control are achieved, and the method is particularly suitable for carbon fiber pipe production work with strict mechanical property requirements.

The utility model provides an integrated pressure sensing chip and an integrated pressure sensor, and the integrated pressure sensing chip comprises a substrate which is provided with a first surface and a second surface which are opposite to each other, and the first surface is provided with a groove and a through hole which are adjacent to each other; the first covering layer and the second covering layer are arranged on the first surface, the first covering layer is arranged on the groove, and the second covering layer is arranged on the through hole; the first resistive layer is arranged in the first covering layer, and the second resistive layer is arranged in the second covering layer; the isolation layer and the compensation layer are sequentially stacked on the first covering layer and the second covering layer respectively; and the conductive connecting piece penetrates through the compensation layer and the isolation layer and is electrically led out of the first resistance layer and the second resistance layer respectively. The integration level and the application range of the integrated pressure sensor can be improved.

The invention discloses a manufacturing method of a flexible piezoresistive sensor, which comprises the steps of conductive composite material preparation, sensitive layer microstructure forming, sensor integrated assembly and the like, and is characterized in that conductive particles and an elastic polymer matrix are uniformly compounded to form an integrated sensitive layer structure; an interface problem caused by Young modulus mismatch in a traditional two-layer structure is eliminated from a material source, meanwhile, a micro geometric structure is elaborately designed and copied on the surface of the sensitive layer, and an externally applied pressure signal is ingeniously converted into effective local stress concentration. According to the structural design, the change rate of the contact area between the sensitive layer and the electrode can be amplified, so that the sensor can generate remarkable electric signal response to tiny pressure change.

The invention belongs to the technical field of flexible sensors, and relates to a flexible underwater pressure sensor and a preparation method and application thereof. The flexible underwater pressure sensor comprises a conductive sensing layer with a pyramid microstructure on the surface, wherein the conductive sensing layer comprises a polydimethylsiloxane thin film with a pyramid microstructure unit and a silver nanowire thin film which is uniformly and conformally attached to the surface of the polydimethylsiloxane thin film; the electrode layer is located on the surface of the side, with the microstructure, of the conductive sensing layer; and the packaging layer is used for performing waterproof packaging on the sensor. The sensor provided by the invention adopts a flexible piezoresistive sensing technology, can work underwater, can at least detect the water depth of 4.5 cm, and has stable response to the water depth of 5mm. Moreover, the preparation process is simple, large-scale preparation can be realized, and the preparation method has a wide application prospect.

The application provides a pressure signal fitting method and device, the method comprises: applying pressure to each sensing point in a pressure sensor, measuring the relationship between pressure and resistance of each sensing point, and integrating to obtain the pressure-resistance relationship; the pressure-resistance relationship is corrected through a numerical filtering algorithm, and the corrected pressure-resistance relationship is fitted to obtain an optimized pressure-resistance relationship; the switching of the voltage sensing circuit sensing points is carried out through an integrated analog electronic switch, the voltage of the stressed multiple array sensing points is measured; the resistance of the multiple array sensing points is calculated according to the measured voltage combined with the acquisition circuit; and the pressure of the multiple array sensing points is calculated through the optimized pressure-resistance relationship; based on the area of the stress area and the non-stress area of the multiple array sensing points, the actual stress of the multiple array sensing points is calculated through the relationship between force and pressure.

The invention discloses a dynamic calculation method based on piezoresistance-resistance composite vacuum transmitter switching, and relates to the technical field of vacuum transmitters, and the method comprises the steps: obtaining a vacuum degree trend coefficient through a piezoresistance gauge vacuum degree acceleration and a resistance gauge vacuum degree acceleration; obtaining a sensitivity compensation coefficient and a vacuum degree change coefficient based on the vacuum degree trend coefficient, then obtaining a vacuum degree change abnormal coefficient based on the vacuum degree change coefficient, and finally determining the final vacuum degree based on the vacuum degree trend coefficient, the sensitivity compensation coefficient and the vacuum degree change abnormal coefficient. The output voltage of the piezoresistance-resistance composite vacuum transmitter can be obtained through the vacuum degree, the signal output smoothness can be effectively improved, the measurement accuracy is improved, and seamless signal connection is achieved.

The invention relates to the technical field of flexible pressure sensors, and provides a low-temperature-drift flexible pressure sensor and a preparation method thereof.The low-temperature-drift flexible pressure sensor comprises an upper insulating layer, an upper sensor layer, a pressure isolation microstructure layer, a lower sensor layer and a lower insulating layer which are arranged from top to bottom; the electrodes of the first piezoresistive sensor group in the upper sensor layer are exposed to the external environment through the electrode holes of the upper insulating layer, and the electrodes of the second piezoresistive sensor group in the lower sensor layer are exposed to the external environment through the electrode holes and the communicating holes in the pressure isolation microstructure layer; the pressure isolation microstructure layer is provided with a concave part which covers the second piezoresistive sensor group; the two piezoresistive sensor groups are identical and are electrically connected to form a Huygens bridge circuit. The low-temperature-drift flexible pressure sensor realizes the compensation of the temperature drift of the sensor, reduces the influence of the temperature on the measurement precision of the sensor, has a high integration level, and facilitates the measurement of the surface of integrated equipment.

The invention discloses a flexible deep sea pressure sensor, a corresponding fully-integrated temperature-depth sensing system and a temperature compensation algorithm. The invention relates to the technical field of ocean detection sensors, and the structural design of the flexible deep sea pressure sensor constructs a composite structure with high-pressure sensitivity and mechanical flexibility through the collaborative optimization of multiple parameters of LIG (laser-induced graphene) thickness, cross-linking agent proportion of PDMS (polydimethylsiloxane) and packaging thickness. And the contradiction between the sensitivity and the measuring range of the flexible material in the deep sea high-pressure environment is broken through. A fully-integrated temperature-depth sensing system adopting the pressure sensor and a corresponding temperature compensation algorithm also have the same technical effects.

The invention belongs to the technical field of flexible electronics, and relates to a flexible piezoresistive sensor based on an MXene multilevel heterostructure and a preparation method of the flexible piezoresistive sensor. The method comprises the steps that MXene nanosheets are attached to the surface of a thermoplastic polyurethane nanofiber substrate through electrostatic self-adsorption, a nanofiber composite layer is obtained, UIO-66-NH2 is dispersed in the thermoplastic polyurethane nanofiber substrate, and the surface of the thermoplastic polyurethane nanofiber substrate is modified with a first chitosan modification layer; the MXene nanosheets are embedded into the three-dimensional network of the polyurethane foam skeleton through dipping and extruding operation, a porous foam composite layer is obtained, and the surface of the polyurethane foam skeleton is modified with a second chitosan modification layer; and combining the nanofiber composite layer and the porous foam composite layer through a conductive adhesive containing silver paste, and carrying out packaging treatment to form the MXene multistage heterostructure with tightly combined interfaces. Based on the method, through the synergistic effect of the multistage heterostructures, high sensitivity, wide pressure detection range and high stability are realized at the same time.

The invention discloses a gas pressure digital monitoring device and monitoring method for power equipment, and relates to the technical field of power equipment monitoring. The device comprises a valve body, a monitoring unit, a pressure adjusting unit, a gas pressure sensing terminal, a gas temperature sensing terminal, a first switch module, a second switch module and a stop valve. The valve body is provided with a first valve element, a second valve element, a first stop block, a second support block, an inter-valve connecting rod, a push rod and a push mechanism. A first port, a second port and a third port are formed in the surface of the valve body. The first valve element and the second valve element slide in the valve body to achieve switching of various communication positions of a first port and a third port in the surface of the valve body, and a proper closed space is provided for self-checking of a device signal output node. The monitoring unit obtains the gas pressure and temperature collected by the gas pressure sensing terminal and the gas temperature sensing terminal, completes comparison and verification of the terminals, and gives an alarm when high and low pressure, early leakage and mixing ratio abnormity of the gas are diagnosed; the device integrates the functions of high-precision measurement, state diagnosis, self-inspection and the like, the device is free of maintenance, the operation and maintenance efficiency is greatly improved, and the production cost is reduced.

The invention relates to the technical field of geotechnical engineering investigation, and particularly discloses a depth-adjustable sampling method for geotechnical investigation, which comprises the following steps: acquiring pore fluid pressure data in real time through a sensor group arranged at the front end of a sampler; based on the data, dynamically predicting an evolution trend of a pressure field in front of the sampler and generating a prediction result containing a pressure abnormal state and spatio-temporal information thereof; performing grading processing on the prediction result to obtain a pressure risk grade; carrying out collaborative decision making on the grade, the soil body sensitivity and the target sampling quality to generate a dynamic control strategy; and finally, the injection action of the sampler is adjusted in real time according to the strategy, the injection action comprises executing micro-amplitude withdrawing and re-injection circulation or gradual deceleration operation, and the control effect is ensured through closed-loop optimization. The method can actively inhibit the water attack and cavitation effect, and improves the quality and reliability of obtaining an undisturbed sample in a complex stratum.

This application relates to the field of semiconductor device technology and provides a method for fabricating a pressure sensor based on flip-chip bonding technology, as well as the pressure sensor itself. The method includes growing an oxide layer on a substrate; depositing a sensitive thin film layer on the oxide layer; depositing a piezoresistive resistor on the sensitive thin film layer; depositing a wiring layer on the sensitive thin film layer; depositing a silicon capping layer on the wiring layer; depositing stop structures of different heights and positions on the cavity of the silicon capping layer; the silicon capping layer, the sensitive thin film layer, and the wiring layer forming a closed cavity structure; the stop structures being enclosed within the closed cavity structure; etching through-silicon vias (TSVs) on the silicon capping layer and applying a redistribution layer process to connect the TSVs and the wiring layer; depositing a solder resist layer on the silicon capping layer; and etching the back side of the substrate to form a pressure-sensitive cavity. This application provides a protection method that effectively protects the component structure while maintaining or improving the response frequency and sensitivity to meet the requirements of high dynamic performance.

To provide a method for manufacturing a vacuum pressure sensor, a device including the vacuum pressure sensor, and / or a system including the vacuum pressure sensor.SOLUTION: The vacuum pressure sensor can comprise a weld ring and a header element welded to the weld ring. The header element may comprise one or more header pins hermetically sealed to the header element, a piezoresistive sensing element coupled to the header element and electrically coupled to the one or more header pins, a corrugated diaphragm coupled to the header element and the weld ring, the corrugated diaphragm defining, with the header element, a cavity configured to contain a material, and a plastic spacer disposed within the cavity. The vacuum pressure sensor may comprise a protruding sharp edge or a substantially flat edge without corner breaks of at least a portion of the header element in physical contact with the metal plate.SELECTED DRAWING: Figure 1

The invention relates to the technical field of humidity monitoring, in particular to a real-time humidity monitoring system for an air compressor pipeline, which is characterized in that a signal acquisition module acquires humidity, pressure and temperature parameters in the air compressor pipeline in real time; the data processing module utilizes a dynamic compensation mechanism to generate an instantaneous error correction value according to pressure and temperature fluctuation so as to suppress instantaneous interference, meanwhile utilizes a long-term drift suppression mechanism to analyze historical data to generate a long-term drift correction value so as to compensate slow change of sensor performance, and fuses the instantaneous error correction value and the long-term drift correction value to obtain a high-precision correction humidity parameter; and the prediction and maintenance module predicts the system state and generates a predictive maintenance instruction based on the correction parameter and the long-term trend data, so that the problem of humidity measurement misalignment caused by environmental fluctuation and sensor drift is effectively solved, and the whole-process guarantee from accurate monitoring to prospective maintenance is realized.

The invention discloses a dual-channel oil-filled pressure core body and a preparation method, and relates to the technical field of pressure core bodies, the dual-channel oil-filled pressure core body comprises a first base assembly, a second base assembly and an integrated circuit board, the first base assembly is provided with a containing cavity and a first groove with opposite openings, and the second base assembly is provided with a second groove; the first groove is communicated with the first oil filling hole to form a first oil filling cavity; the first silicon piezoresistive chip is fixed at the bottom of the first groove, and the first diaphragm seals the opening of the first groove; the second base is provided with a second groove, the second groove is communicated with the second oil filling hole to form a second oil filling cavity, the second silicon piezoresistive chip is fixed at the bottom of the second groove, and the second diaphragm seals an opening of the second groove; the integrated circuit board is in electric signal connection with the first silicon piezoresistive chip and the second silicon piezoresistive chip through the first pin and the second pin. The dual-channel oil-filled pressure core body is simple in structure, high in measurement reliability and capable of meeting the use requirements of different scenes.

The invention discloses a directional crack induction assisted high-curvature snakelike double-lead structure micro-sensing device, and the device is characterized in that a conductive micro-ink layer and a conductive thin ink layer of a high-curvature snakelike double-lead structure micro-sensor have electromechanical characteristics of cooperatively realizing high-sensitivity resolution sensing, wide sensing range response and fatigue resistance; the characteristic is beneficial to preferential cracking of the conductive micro-ink layer during tensile strain, high-sensitivity resolution sensing is realized through directional micro-crack opening and closing deformation, and the conductive thin ink layer around the directional micro-crack opening and closing deformation is induced to form a snakelike conductive path; meanwhile, the conductive thin ink layer disperses stress through stretching and stretching, and the sensing ink layer of the high-curvature snakelike double-lead structure is integrally communicated, so that stable response in a wide sensing range is realized. The AQV212 relay integrated circuit has the characteristic of negative feedback regulation to intelligently control the operation of the sensing device, is connected with the high-curvature snakelike double-lead structure microsensor through a current collector wire, and can be used for biomedical monitoring and soft robots to adapt to driving sensing scenes of complex curved surfaces.

The invention discloses a gas flow rate related gas pressure sensor which is characterized in that the gas flow rate related gas pressure sensor comprises a first shell, a second shell and a substrate sheet arranged between the first shell and the second shell, the substrate sheet is made of an elastic material, a first gas cavity is formed between the first shell and the substrate sheet, and a second gas cavity is formed between the second shell and the substrate sheet. A second air cavity is formed between the second shell and the substrate sheet, and resistance strain gauges are distributed on the two sides of the substrate sheet; the first air cavity is communicated with the second cavity through an air guide channel; the air guide channel comprises a first horizontal channel section directly connected with the first air cavity, a second horizontal channel section directly connected with the second air cavity and a vertical channel section penetrating through the substrate sheet, and the first horizontal channel section is communicated with the second horizontal channel section through the vertical channel section; the first shell is provided with an input interface, and the second shell is provided with an output interface; the requirements on the gas type and the environment temperature are greatly reduced, and the applicability is greatly improved.