903results about How to "Precise size control" patented technology

A pattern is formed by coating a resist composition comprising a polymer comprising recurring units having an optionally acid labile group-substituted naphthol group, an acid generator, and an organic solvent onto a substrate, baking to form a resist film, exposing the resist film to high-energy radiation, baking, and developing the exposed film with an organic solvent developer to form a negative pattern wherein the unexposed region of film is dissolved and the exposed region of film is not dissolved. In the process of image formation via positive/negative reversal by organic solvent development, the resist film has a high dissolution contrast and controlled acid diffusion. By subjecting the resist film to exposure through a mask having a lattice-like pattern and organic solvent development, a fine hole pattern can be formed at a high precision of dimensional control.

A pattern is formed by applying a resist composition comprising a polymer comprising recurring units having an acid labile group-substituted hydroxyl group, an acid generator, and an organic solvent onto a substrate, prebaking the composition to form a resist film, exposing the resist film to high-energy radiation to define exposed and unexposed regions, baking, and developing the exposed film with an organic solvent developer to form a negative pattern wherein the unexposed region of film is dissolved and the exposed region of film is not dissolved.

A resist composition is provided comprising a polymer comprising recurring units having a hydroxyl group substituted with an acid labile group, an onium salt PAG capable of generating a sulfonic acid, imide acid or methide acid, and an onium salt PAG capable of generating a carboxylic acid. A resist film of the composition is improved in dissolution contrast during organic solvent development, and from which a hole pattern having minimized nano-edge roughness can be formed via positive/negative reversal.

A process for economical and efficient fabrication of gate electrodes no larger than 50 nm, which is beyond the limit of exposure, is characterized by gate-electrode trimming and mask trimming with high resist selectivity which are performed in combination. The process is also preferably characterized by performing trimming and drying cleaning in a vacuum environment and may also include steps of inspecting dimensions and contamination in a vacuum environment. The process can be implemented to provide the effects of forming a gate no longer than 50 nm (beyond the limit of exposure) without restrictions on the resist thickness; reducing contamination resulting from transfer of wafers from one step to next, thereby improving yields; preventing resist from hydrolysis by ArF laser, thereby reducing roughening which adversely affects the gate width; and ensuring stable yields despite variation in dimensions and contamination owing to the additional dry cleaning step and feed-forward control based on CD inspection and contamination inspection.

The invention discloses a cross epitaxial growth method of a semiconductor film, which comprises the following steps: (1) a nucleated metallic catalyst film is evaporated on a substrate material and island-shaped metallic catalyst particles which are evenly distributed on the substrate are obtained after the film is annealed; (2) in external equipment, a crystal nucleus is formed on the bottom of island-shaped metallic particles; and then nano-column arrays grow longitudinally; (3) a wet etching method is used for eliminating the metallic catalyst on a nano-column to obtain semiconductor nano-column array structures with the same orientation and height; (4) the etched nano-column is put into the external equipment and a lateral epitaxy technology is used for integrating the nano-column arrays into a flat surface; and then a semiconductor epitaxial film with the required thickness grows on the flat surface. As cross epitaxy occurs in nano area, defects and diffusion of residual stress can be effectively restrained and the quality of film crystals is more uniform than that of film crystals prepared by the traditional method, thus improving the crystal quality of two-dimensional semiconductor films; furthermore, the invention has simple method and wide applicability.

A pattern is formed by applying a resist composition comprising a polymer comprising recurring units having a nitrogen atom bonded to an acid labile group, an acid generator, and an organic solvent onto a substrate, prebaking to form a resist film, exposing the resist film to high-energy radiation, baking, and developing the exposed film with an organic solvent developer to form a negative pattern wherein the unexposed region of film is dissolved and the exposed region of film is not dissolved.

The invention provides a resin matrix composite with a super-hydrophobic bionic surface and a preparation method of the resin matrix composite. The method comprises steps as follows: the surface of a matrix of the resin matrix composite is polished until the surface turns white; the matrix of the resin matrix composite is processed through ultrafast laser, and a microstructure is formed on the surface; a first coating is sprayed on the microstructure surface of the matrix of the resin matrix composite through a pneumatic type paint spray gun to form a bonding layer, a second coating containing nanosilicon dioxide particles is sprayed to form a surface hydrophobic function layer, and the resin matrix composite with the super-hydrophobic bionic surface is obtained. The preparation method is simple to operate and facilitates production, the prepared resin matrix composite with the super-hydrophobic bionic surface can allow water drops to freely slip off, and the real self-cleaning super-hydrophobic function is realized.

The invention relates to a method for preparing a graphene biosensor, belonging to the technical field of electrochemistry. The method comprises the following steps of: immersing a processed gold electrode into graphene oxide and a sodium sulphate solution, electrically depositing the electrode through a control electric potential, taking out the electrode, washing the electrode by using water, after drying the electrode at room temperature, putting the electrode in a chloroauric acid solution, electrically depositing the electrode through the control electric potential, taking out the electrode, washing the electrode by using water, and drying the electrode at room temperature; putting a modified electrode in a conductive polymer monomer and a supporting electrolyte solution, polymerizing the electrode through the control electric potential by adopting a cyclic voltammetry, taking out the electrode, washing the electrode by using water, and drying the electrode at room temperature; and activating the modified electrode in an EDC/NHS (Dichloroethane/N-Hydroxysuccinimide) solution, and immersing the modified electrode in a vomiting toxin antibody. The method disclosed by the invention is used for fixing graphene, gold nanoparticles and conducting polymers through electro-deposition; therefore, the method is very green and environment-friendly; furthermore, the thickness of a coating and sizes and distribution densities of the gold nanoparticles can be precisely controlled, thus, the batch production repeatability of the modified electrode is good.

The invention discloses a preparation method of a metal nanostructure. The preparation method comprises the steps of (1) manufacturing a mask plate; (2) providing a clean and dry base plate, uniformly coating a positive ultraviolet photoresist on the base plate, and pre-baking to ensure that the positive ultraviolet photoresist is solidified to form a photoresist base plate; (3) overlapping the mask plate on the photoresist base plate, and performing exposure, development, residual adhesive removal and hardening under ultraviolet light to obtain a forming mold with shape grooves of a nanostructure graph; (4) depositing a metal in the forming mold by adopting a chemical synthetic method; (5) soaking the forming mold deposited with the metal in an acetone solution, and performing ultrasonic adhesive removal to obtain the metal nanostructure of the nanostructure graph. The preparation method disclosed by the invention is simple in process and high in efficiency; the shape, size and position of the prepared metal nanostructure can be accurately controlled, and the light extraction efficiency and light absorption efficiency of a metal nanostructure material are effectively improved.

The present invention discloses the preparation process of microcapsule with included anticancer medicine. The process adopts colloid particle containing polyelectrolyte as template, assembles polyelectrolytes with dislike charges via layer-by-layer self-assembling to the surface of colloid particle, and dissolves or decomposes the colloid particle to obtain hollow polymer microcapsule containing polyelectrolyte. The microcapsule has wall micro structure and thickness capable of being regulated precisely in nanometer size, and the contained polyelectrolyte can interact with the medicine so as to include the medicine into the microcapsule. The included medicine has controllable release speed. Introducing polyelectrolyte with grafted polyglycol to the surface of the microcapsule can raise the biocompatibility of the microcapsule. The process of the present invention is simple, feasible and repeatable, and suitable for inclusion and controllable release of various kinds of water soluble anticancer medicine.

The invention relates to a two-fluid jet system, which comprises a pneumatic module, a hydraulic module, a control module and a two-fluid jet valve, wherein the control module is respectively connected with a gas pipe and a liquid pipe of the two-fluid jet valve through the pneumatic module and the hydraulic module. The two-fluid jet system is based on the microchannel gas-liquid flow movement principle, namely the control module is used for controlling gas-liquid flow velocity ratio or flow ratio of the pneumatic module and the hydraulic module, so that liquid jet of slug flow is realized in a microchannel. The two-fluid jet system is applicable to fluid jet in the fields of semiconductor film preparation, composite preparation, electronic package, MEMS (micro-electromechanical systems), spraying, ink jet, powder metallurgy, biomedicine, food processing, welding, combustion, chemical engineering and the like.

The method is: Put many glass pipe in order to form a specific structure (photon crystal optical fibre prefab stick) in the glass cannula. The thin glass pipe is longer then the others. The equipment controls the pressure of photon-crystal optical fibre prefab stick. In another word is to vacuum the glass cannula, to input the thin glass pipe of 10 -1 mbar air.

Taught herein is inter alia a concrete wall modulus comprising a concrete-steel wall having one or more steel mesh plates; at least two form panels being physically connected to the concrete-steel wall; a plurality of steel plates; and a plurality of jointing pieces; wherein the form panels are made in part of polystyrene foam; at least two form panels are arranged in parallel to one another; and at least two the form panels are interconnected by a plurality of the jointing pieces by means of the steel plates.

The invention provides a preparation method of particle size controllable mono-disperse polyacrylamide gel microspheres. The preparation method comprises the following steps of: preparing disperse phase solution and continuous phase solution; controlling flow velocities and viscosities of the disperse phase and the continuous phase; and converging the disperse phase and the continuous phase to obtain polyacrylamide solution droplets with different particle sizes and uniform diameter size, wherein the droplets are subjected to polymerization reaction to obtain the particle size controllable mono-disperse polyacrylamide gel microspheres. The invention also relates to a preparation device of the particle size controllable mono-disperse polyacrylamide gel microspheres and the mono-disperse polyacrylamide gel microspheres obtained thereby. By adjusting the flow velocities and the viscosities of the disperse phase and the continuous phase or the size of capillary tubes, accurate control over the particle size of the microspheres can be realized; and the particle size of the prepared microspheres is within a range of 10-1,000 mum.

Heat resisting stainless steel and its smelting process are both disclosed herewith. It comprises (wt%): C 0.05-0.10, Si 1.40-2.00, Ce 0.03-0.08, Cr 20.0-22.0, Ni10.0-12.0, N 0.14-0.20, and Mn 0.4-0.80, with impurities of P not more than 0.040 and S 0.030. It is produced by: (1) pouring mother liquid of stainless steel with C (1.2-2.5) into AOD furnace, (2) decarbonizing to C (0.05-0.10), (3) reducing steel liquid and desulfurizing, (4) floss removing and regulating components of steel liquid, (5) pouring out and adding B-iron and Al cakes, (6) feeding Ce wires, (7) regulating temperature and controlling impurities, and (8) continuously casting. It costs low and has good performance at high temperature.

The invention discloses a near-net forming method of the 3D braided fiber reinforced metal-based composite material, and belongs to the technical field of advanced composite materials. The method is characterized in that a vacuum air pressure infiltration preparation technology based on a liquid binder is adopted to assist in accurately controlling the shape and the size of a 3D braided fiber preform structure; in the 3D weaving process of the fiber preform, a liquid binder is adopted to accurately fix and shape the 3D braided fiber preform, then the size precision of the 3D braided fiber reinforced metal-based composite material is accurately controlled through the impregnated graphite mold of the embedded fiber preform, and deformation and local fiber polarization of the 3D braided fiberpreform in the infiltration process are prevented. The prepared 3D braided fiber reinforced metal-based composite material has high dimensional accuracy and excellent mechanical properties, the near-net forming of the 3D braided fiber reinforced metal-based composite material is realized, batch industrial production can be realized, the near-net forming method has a wide application prospect in the fields of aerospace, national defense, military and the like.

The invention relates to a respirator, and discloses a breathing pressure fuzzy control type respirator and a breathing pressure fuzzy control method. The breathing pressure fuzzy control type respirator controls action of each part by means of actual control output of fuzzy piping and instruments diagram (PID) controller in a template embodiment, and each sensor collects signal variable of each part and transfers to the fuzzy PID controller to do fuzzy control operation. An air suction electromagnetic proportional valve is capable of controlling opening of a valve hole to continuously vary in a certain range according to corresponding control signal (voltage or current signal). The fuzzy PID controller is capable of controlling flow which enters back stage gas channel to continuously vary in a certain range through controlling opening of each valve and further controlling airway pressure. Breath becomes more comfortable and safer after patients using the respirator.

The invention relates to a lithium battery and an electrode for the same, and a preparation method of a solid electrolyte film, and belongs to the technical field of materials, and solves the problems of the film electrode prepared by the traditional method that the requirement on equipment is high, the process is complicated, the energy consumption is high and the pollution of organic solvent exists. A computer laser printing technology is used for preparing the electrode, the solid electrolyte film, the lithium battery and a full-solid lithium battery on a printing substrate or a current collector through electrode active substances and solid electrolyte materials. The method not only can conveniently and precisely control the shape, the size and the thickness of the electrode and the battery and can be environment-friendly and simple in equipment, but also can realize the mass production, can greatly reduce the production cost of the battery and can reduce the environmental pollution of the organic solvent.

The invention provides a numerical control plate shearing and stacking production line, and belongs to the field of machinery. The numerical control plate shearing and stacking production line comprises a front feed mechanism, a main machine of a plate shearing machine and a rear discharge mechanism, wherein the front feed mechanism and the rear discharge mechanism are matched with and connected to the front end of the main machine of the plate shearing machine and the rear end of the main machine of the plate shearing machine respectively. The front feed mechanism comprises a bottom support, wherein a conveying platform is arranged on the bottom support, and a feeding clamp is matched above the conveying platform. The rear discharge mechanism comprises a bottom support, wherein a conveying belt is arranged on the bottom support, a discharge motor and a feed roller are arranged at the rear end of the bottom support, the discharge motor is in drive connection with the feed roller through a speed reducer, the feed roller is in matched transmission with the conveying belt, the discharge motor rotates forward and backward to drive the feed roller to conduct bidirectional rotation, and a material falling interval is arranged between the rear discharge mechanism and the main machine of the plate shearing machine. According to the numerical control plate shearing and stacking production line, disqualified materials do not need to be separated through manual work, and therefore the automation degree of equipment is greatly improved, the shearing accuracy is high, and the product percent of pass is high.

A high-precision valve resistant to abrasion and corrosion comprises a high-strength valve body resistant to abrasion and corrosion and 3D printed high-precision valve internal parts. The high-strength valve body resistant to abrasion and corrosion is made of raw materials in a cast mode, wherein special element matching is adopted for the raw materials. A 3D printing technology is adopted for manufacturing and assembling all the valve internal parts at the same time; finally, the high-strength valve body resistant to abrasion and corrosion and the 3D printed high-precision valve internal parts are assembled. The high-precision valve has the advantages that valve body is excellent in resistance to abrasion and corrosion; the production efficiency and precision of the valve internal parts are high, and the high-precision valve is convenient to assemble and stable in working.