The invention discloses a low-stress
dielectric material for a glass substrate and a CTE gradient design method thereof, the low-stress
dielectric material is formed by mixing at least two basic
dielectric material components with different
thermal expansion coefficients in proportion, the
thermal expansion coefficient of each basic dielectric material layer is in gradient change from the first layer in contact with the glass substrate to the Nth layer in contact with the outermost layer, the difference value between the
thermal expansion coefficient of the first layer and the thermal expansion coefficient of the glass substrate is less than or equal to 0.5 ppm / K; the thermal expansion coefficient of the Nth layer matches the function requirement of the top layer of the device; the difference value of thermal expansion coefficients between adjacent
layers is not greater than a preset threshold value (1.0-2.0 ppm / K); the gradient change is realized by regulating and controlling the
volume fraction of the components of the basic dielectric material of each layer, and the aim is to minimize the internal and interface thermal stress of the multiple dielectric
layers. According to the low-stress dielectric material, the components and the thermal expansion coefficient of the low-stress dielectric material are improved, so that the thermal
stress level of an upper-layer medium of a glass substrate can be remarkably reduced, and the compatibility among various materials is higher, the adaptability is stronger, and the light
transmittance is better.