2309 results about "Carbon film" patented technology

A method of forming a transparent hydrocarbon-based polymer film on a substrate by plasma CVD includes: introducing a main gas consisting of a hydrocarbon gas (CαHβ, wherein α and β are natural numbers) and an inert gas at a flow ratio (R) of CαHβ / inert gas of 0.25 or less into a CVD reaction chamber inside which a substrate is placed; and forming a hydrocarbon-based polymer film on the substrate by plasma polymerization of the gas at a processing temperature (T) wherein T≦(−800R+500).

Methods of forming carbon films, structures and devices including the carbon films, and systems for forming the carbon films are disclosed. A method includes depositing a metal carbide film using atomic layer deposition (ALD). Metal from the metal carbide film is removed from the metal carbide film to form a carbon film. Because the films are formed using ALD, the films can be relatively conformal and can have relatively uniform thickness over the surface of a substrate.

Embodiments of the present invention generally relate to methods for forming a flowable carbon-containing film on a substrate. In one embodiment, an oxygen-containing gas is flowed into a remote plasma region to produce oxygen-containing plasma effluents, and a carbon-containing gas is combined with the oxygen-containing plasma effluents in a substrate processing region which contains the substrate. A carbon-containing film is formed in trenches which are formed on the substrate and a low K dielectric material is deposited on the carbon-containing film in the trenches. The carbon-containing film is decomposed by an UV treatment and airgaps are formed in the trenches under the low K dielectric material.

The invention relates to a general conductive carbon film based on Graphene and a preparation method. The method for preparing the carbon film mainly comprises the following steps: (1) preparing water-soluble single-layer or multi-layer grapheme; (2) preparing organic soluble single-layer or multi-layer Graphene; (3) shaping the solution (or dispersion liquid) containing the Graphene in 1 or 2 by methods of spin coating, spraying, soaking or casting and the like to prepare a film based on the single-layer or multi-layer Graphene; and (4) chemically reducing or roasting the film obtained in 3 to prepare the carbon film based on the single-layer or multi-layer Graphene. The method can be used for preparing the carbon film on various matrixes such as steel, glass, ceramics, quartz, carbon materials, organic substances and the like.

The present invention relates to a method of protecting a microelectronic device during device packaging, including the steps of applying a water-insoluble, temporary protective coating to a sensitive area on the device; performing at least one packaging step; and then substantially removing the protective coating, preferably by dry plasma etching. The sensitive area can include a released MEMS element. The microelectronic device can be disposed on a wafer. The protective coating can be a vacuum vapor-deposited parylene polymer, silicon nitride, metal (e.g. aluminum or tungsten), a vapor deposited organic material, cynoacrylate, a carbon film, a self-assembled monolayered material, perfluoropolyether, hexamethyldisilazane, or perfluorodecanoic carboxylic acid, silicon dioxide, silicate glass, or combinations thereof. The present invention also relates to a method of packaging a microelectronic device, including: providing a microelectronic device having a sensitive area; applying a water-insoluble, protective coating to the sensitive area; providing a package; attaching the device to the package; electrically interconnecting the device to the package; and substantially removing the protective coating from the sensitive area.

A stent includes a tubular stent body 11, a diamond-like carbon film 12 formed on the surface of the stent body 11 and having an activated surface, and a polymer layer 13 immobilized on the surface of the diamond-like carbon film. The polymer layer 13 contains a drug 14 having an effect to prevent restenosis, and the drug 14 is gradually released from the polymer layer 13.

A piston ring is formed over the entire surface with a gas nitrided layer. A diamond-like carbon film is formed in a thickness of 0.5 to 30 micrometers over the gas nitrided layer at the upper and lower surfaces. The diamond-like carbon film has a surface structure in which diamond-like carbon has been deposited in nodular shapes in sizes of 0.5 to 5 micrometers. The diamond-like carbon is configured with any one of an amorphous carbon structure, an amorphous carbon structure having partly a diamond structure, or an amorphous carbon structure having partly a graphite structure.

A magnetic recording medium which allows high density recording and has excellent durability can be obtained. A magnetic recording medium includes: a plurality of ferromagnetic material dots arranged on a soft magnetic layer formed on a non-magnetic substrate so as to be separated from one another; and carbon films which are formed on the respective ferromagnetic material dots, each carbon film having a smooth film face shape in a section passing through the center of each ferromagnetic material dot and a film thickness gradually decreasing from the center of the ferromagnetic material dot toward an outer edge thereof.

The present invention relates to a doped multi-layer core-shell silicon-based composite material for a lithium ion battery, and a preparation method thereof. Other than being doped with a necessary lithium element, the material is also doped with at least a non-metallic element and a metal element; the material has a structure in which a silicon oxide particle doped with elements is taken as a core, and a multilayer composite film which is tightly coated on the surface of the core particle is taken as a shell; the core particle contains uniformly dispersed monoplasmatic silicon nanoparticles,the content of doping elements gradually decreases from the outside to the inside without a clear interface, and a dense lithium silicate compound is formed on the surface of the core particle by embedding and doping the lithium element; and the multilayer composite film is a carbon film layer and a doped composite film layer composed of the carbon film layer and other elemental components. The doped multi-layer core-shell silicon-based composite material provided by the present invention has a high capacity, good rate performance, high coulombic efficiency, good cycle performance, a low expansion rate, and other electrochemical characteristics when the material is used for the negative electrode of lithium ion battery.

A sliding structure for an automotive engine includes a sliding member with a sliding portion and a lubricant applied to the sliding portion so that the sliding portion can make sliding contact with a counterpart member via the lubricant. The sliding member is either of a piston ring, a piston pin, a cam lobe, a cam journal, a plain bearing, a rotary vane and a timing chain. The sliding portion has a base made of a steel or aluminum material and a hard carbon film formed on the base to coat the sliding portion. The hard carbon film has a thickness of 0.3 to 2.0 μm, a Knoop hardness of 1500 to 4500 kg / mm2, a surface roughness Ry (μm) satisfying the following equation: Ry<{(0.75−Hk / 8000)×h+0.07 / 0.8}, where h is the thickness (μm) of the film; and Hk is the Knoop hardness (kg / mm2) of the film.

A method for manufacturing an electron source includes the steps of covering a substrate provided with a first electrode and a second electrode by a container, introducing a gas composed of a carbon compound into the container, and forming a carbon film by applying a voltage between the first electrode and the second electrode. The relationship 1 / (4 / Cx-1 / Cz)>=Sout>=4Sact-Cin is satisfied, where Cin is the conductance from the gas inlet to the position of the substrate nearest to the gas inlet, Cx is the conductance from the position of the substrate nearest to the gas inlet to the position of the substrate nearest to the gas outlet, Sout is the effective exhaust rate, Sact is the consumption rate of the gas, and Cz is the conductance from the substrate to the gas outlet. An apparatus for manufacturing an electron source and a method for manufacturing an image-forming apparatus are also disclosed.

A method and article of manufacture of amorphous diamond-like carbon. The method involves providing a substrate in a chamber, providing a mixture of a carbon containing gas and hydrogen gas with the mixture adjusted such that the atomic molar ratio of carbon to hydrogen is less than 0.3, including all carbon atoms and all hydrogen atoms in the mixture. A plasma is formed of the mixture and the amorphous diamond-like carbon film is deposited on the substrate. To achieve optimum bonding an intervening bonding layer, such as Si or SiO.sub.2, can be formed from SiH.sub.4 with or without oxidation of the layer formed.

In a touchpad with single-layered PCB structure, a PCB has a bottom layer with a sensor area and a component area thereon, the sensor area includes two directional traces directly connected to the component area, respectively, and carbon film wires in the sensor area for interconnecting one or more of the directional traces.