175 results about "Uv treatment" patented technology

A method for the ultraviolet (UV) treatment of etch stop and hard mask film increases etch selectivity and hermeticity by removing hydrogen, cross-linking, and increasing density. The method is particularly applicable in the context of damascene processing. A method provides for forming a semiconductor device by depositing an etch stop film or a hard mask film on a substrate and exposing the film to UV radiation and optionally thermal energy. The UV exposure may be direct or through another dielectric layer.

Embodiments of the present invention generally relate to methods for forming a flowable carbon-containing film on a substrate. In one embodiment, an oxygen-containing gas is flowed into a remote plasma region to produce oxygen-containing plasma effluents, and a carbon-containing gas is combined with the oxygen-containing plasma effluents in a substrate processing region which contains the substrate. A carbon-containing film is formed in trenches which are formed on the substrate and a low K dielectric material is deposited on the carbon-containing film in the trenches. The carbon-containing film is decomposed by an UV treatment and airgaps are formed in the trenches under the low K dielectric material.

Skin disorders such as, for example, atopic dermatitis, dyshidrosis, eczema, lichen planus, psoriasis, and vitiligo, are treated by applying high doses of ultraviolet light to diseased regions of a patients skin. The dosage employed exceeds 1 MED, an MED being determined for the particular patient being treated, and may range from about 1 MED to about 20 MED or higher. The ultraviolet light has a wavelength within the range of between about 295 nanometers to about 320 nanometers and preferably is between about 300 nanometers and about 310 nanometers. High doses of ultraviolet light are preferably restricted to diseased tissue areas so as to avoid risk of detrimental side affects in healthy skin, which is more susceptible to damage from UV light. Cooling the skin prior to and / or while exposing the skin to the UV light can be used to reduce tissue damage resulting from exposure to the UV light. Higher doses of UV light can therefore be employed without injurious affects. A specialized handpiece provides a beam profile especially suitable for application of controlled doses. A specialized delivery device is useful for UV treatment of tissue within the mouth.

A method for the ultraviolet (UV) treatment of carbon-containing low-k dielectric and associated apparatus enables process induced damage repair. The methods of the invention are particularly applicable in the context of damascene processing to recover lost low-k property of a dielectric damaged during processing, either pre-metallization, post-planarization, or both. UV treatments can include an exposure of the subject low-k dielectric to a constrained UV spectral profile and / or chemical silylating agent, or both.

A keyboard and touchpad or mouse UV treatment system with optical sensor and inclined slide is described. A proximity sensor, microcontroller firmware, and motorized mechanism allow activation of the sanitization cycle by personnel with contaminated hands without risk of additional spreading of pathogens to other personnel and patients. The inclined slide provides stability when operated on a desk, and the microcontroller and optical sensor determine the proper exposure time to compensate for lamp aging and variations in lamp output.

A method of fabricating a semiconductor device is provided. First, a semiconductor substrate and a dielectric layer positioned on the semiconductor substrate are prepared. Subsequently, the dielectric layer is etched to form a hole structure in the dielectric layer. Afterward, a degas process is performed. An ultraviolet (UV) treatment is carried out to the semiconductor substrate in the degas process so as to expel at least a gas contained in the dielectric layer. Next, a barrier layer is formed on the sidewall and on the bottom of the hole structure. Furthermore, the hole structure is filled with a conductive material. Since the UV treatment can degas the dielectric layer efficiently, the formed semiconductor device can have a fine and stable structure.

The present invention provides a method of forming a semiconductor structure having an ultra low-K dielectric material that adheres well to the substrate. The method includes depositing a low-K material on the top surface of a substrate at a low temperature of no more than 250° by a CVD or spin-on process. The dielectric material is then cured by placing the substrate with the dielectric film in an environment where the temperature is regulated at about 400° or less as the dielectric film is being subjected to a plasma treatment or an E-beam treatment or UV treatment. The environment may further include one or more gases or a mixture of gases selected from the group consisting of H2, N2, NH3, CO2, all hydride gases and a mixture of these gases.

A disinfectant treatment for self-contained potable water systems. A lamp or lamps within the interior of at least one component system in which water is resident. During operation of the system. As the water tank, water heater, water filter, or other component which holds a volume of water. By putting a radioactive and a microbial effect in response to exposure to UV radiation may be formed of the vessel or other component. The radioactive material may be tin dioxide, titanium dioxide, or other material that produces hydroxyl ions in response to UV exposure. The hydroxyl ions flow from the vessel or other component into the piping and other components so as to attack / inhibit microbial action throughout the system. The lamps are mounted within quartz sleeves for immersion in water or other components. The quartz sleeves to prevent vibration damage. May also be used to of the system so as to prevent friction freeze damage.

A water treatment tank for use with water purification apparatus including an ultra-violet lamp within an encapsulating sleeve onto which incoming water is directed to provide a thin laminar flow about the bulb. The lower compartment has cooling coils about the walls for cooling the water therein relative to the water in the upper compartment. A surrounding sleeve may be located intermediate the encapsulating sleeve and an outer vessel in the tank. A leak detector is located in the encapsulating sleeve. The leak detector and outer vessel are believed to provide safety to users in the event of internal breakage in the tank. A reflective surface is also utilized to direct UV light into portions of the faucets formerly obscured from UV treatment. The faucets preferably provide self-sanitizing capability and an information center selectively displays time until next service, cost savings over bottled water and information related to the dispenser.

Embodiments of the present invention provide apparatus and methods for performing UV treatment and chemical treatment and / or deposition in the same chamber. One embodiment of the present invention provides a processing chamber including a UV transparent gas distribution showerhead disposed above a substrate support located in an inner volume of the processing chamber, a UV transparent window disposed above the UV transparent gas distribution showerhead, and a UV unit disposed outside the inner volume. The UV unit is configured to direct UV lights towards the substrate support through the UV transparent window and the UV transparent gas distribution showerhead.

A device that permits the in-home UV treatment of drinking water such as tap water is disclosed. The device employs a bare low-energy UV lamp suspended below a reflector and above a free surface of water flowing within the device. The water is supplied from a tap or other store of drinking water and proceeds through the device by the force of gravity. The device itself is not pressurized. The flow of water within the device is exposed to UV radiation from the UV lamp and is disinfected as a result. In the illustrated embodiment, the device is of a small size to permit its use, for example, directly at a tap for drinking water within the home. The flow rate of the device is commensurate with the normal flow rate of tap water, preferably less than about 8 liters per minute. The lamp power for safely disinfecting the water can be less than 20 watts, and in the illustrated embodiment the lamp is a low-pressure Hg lamp.

A method of manufacturing a semiconductor device having a damascene structure contains a process of forming a first interlayer insulating film (6) and a second interlayer insulating film (4) formed of a low dielectric-constant film on a substrate, forming via holes (9) by using a first resist pattern (1a) formed on the second interlayer insulating film, conducting an organic peeling treatment using organic peeling liquid containing amine components and then forming a second resist pattern (1b) on the second interlayer insulating film. After the wet treatment, before a second antireflection coating (2b) is coated so as to be located below the second resist pattern is coated, at least one of an annealing treatment, a plasma treatment, a UV treatment and an organic solvent treatment is carried out to remove amine components which inhibit the catalysis reaction of acid occurring in the resist at the light exposure, thereby preventing degradation of the resolution of the second resist pattern (1b).

A method of manufacturing an optical film by a solution casting method, in which a poor peeling region of a metal support can be eliminated by casting a dope on the surface of the metal support after a surface treatment film is formed on the surface of the metal support by atmospheric pressure plasma treatment or excimer UV treatment. Consequently, limitation on the conditions of film production is reduced and productivity is enhanced. Furthermore, since peeling of the film is enhanced, lateral variation in peeling position is reduced and variation in retardation value is reduced sharply, and thereby an optical film having optical characteristics excellent in transparency and flatness can be manufactured. Consequently, a method for manufacturing an optical film, an optical film, a polarizing plate and a display device which meet the demands of a high quality thin and wide protective film for polarizing plate can be provided.

Fluid purification or treatment apparatus (10) for treating or purifying contaminated liquids such as water which includes at least one upright elongated primary treatment chamber (11) having an inlet (14) for fluid to be treated at an upper end of the chamber (11) such that fluid flows downwardly through the chamber (11) and means (20 or 24) for introducing a sterilizing agent such as ozone or ozone enriched air into a lower end of the chamber (11) for bubbling upwardly through liquid flowing downwardly through the chamber (11), means (16) at the upper end of the chamber (11) for removing waste and an ultraviolet lamp (29) for UV treatment of the liquid, the ultraviolet lamp (29) being located in a separate chamber (12) connected to the primary treatment chamber (11) or within the primary treatment chamber (11). A plurality of chambers (11) and (12) may be provided for multiple treatment of the liquid.

A mobile water treatment system is disposed on a trailer of a truck. There is an intake filter, an intake hose, a pump or multiple pumps for water intake and sending water throughout the system, a filtering section that may include sand and / or bag filter or other types of filters, an ozone treatment section after the filters, a holding tank after the ozone section, a UV treatment section after the holding tank, and a chlorination tank. The water may then be sent to a water storage facility or other place as desired. The system includes a generator for power to run the system, and a controller for the system. The ozone section makes use of a misting nozzle in order to increase ozone contact time, and decrease ozone breakdown. The UV section makes use of a slightly downward tilted table with UV bulbs and reflectors above it, and preferably is mounted on a leveling system. A method of treating water uses the mobile system.

A UV treatment comprises an upper case 2 of a size allowing right and left feet to be placed thereupon, a bottom case 2 that supports the upper case 2, and a cover 3 attached to the upper case 2. Two front position UV radiation ports 10L and 10R that open in the up-down direction are provided on both the right and left sides at the front of the upper case 2. Central UV radiation ports 15L and 15R that open in the left and right direction are provided in the left-right direction center toward the back of the upper case 2. UV lamps 20L and 20R are disposed on the bottom case 3 in positions corresponding to the front position UV radiation ports 10L and 10R, and a UV lamp 20 is disposed at a position corresponding to the central UV radiation ports 15L and 15R. When left and right feet are placed above the front radiation ports 10L and 10R of the upper case 2, both the front of a foot and the inner sole can be irradiated simultaneously.

An water providing apparatus includes a input portion for receiving untreated water, a treatment portion for treating and outputting treated water having a UV treatment module for reducing pathogens, a filtering mechanism for reducing physical and chemical impurities, a UV analysis module for determining levels of the impurities in the untreated water and for determining levels of impurities in the treated water, a processing unit for determining whether the levels of impurities in the treated water exceed a threshold, a reporting module for outputting the levels of the impurities in the untreated and treated water to a remote monitoring service, and a water output portion for providing the treated water if safe, and for inhibiting output of the treated water if unsafe.

The present disclosure provides for light delivery assemblies and, more particularly to light delivery assemblies / systems that provide light to and / or illuminate / treat predetermined locations (e.g., surgical sites), and related methods of use. An exemplary light delivery assembly (e.g., a surgical site light) includes a shell / housing (e.g., a plastic shell / housing) with a cross-sectional shape similar to an inward-facing asymmetrical C. The shell / housing is shaped to be placed proximal to a site (e.g., surgical site) and emit light onto the site from a plurality of directions while inhibiting the light from radiating away from the outside of the shell / housing. Exemplary light delivery assemblies of the present disclosure can be utilized for a variety of different applications / treatments / uses (e.g., surgical applications, disinfection / sterilization especially UV in the UVC wavelength range, other UV treatment, infrared heating and treatment, therapy, IR light delivery, use of all / other wavelengths of light, etc.).

A device and method is proposed to enable the treatment of interior of bodily hollow organs and other interior cavities of a body for a number of harmful virus, fungal, and bacterial entities and autoimmune conditions by internal short wavelength ultraviolet light by use of specially equipped endoscope-like devices.

In order to improve the air quality in bounded spaces such as a room, an air treatment device and an air treatment method are disclosed. The air treatment device comprises a fan (16) for stimulating airflow through the air treatment device and an UV treatment chamber (20). An UV radiation source (11) radiates UV radiation in the UV treatment chamber to kill microorganisms in said airflow. The air treatment device is designed such that a high airflow may be generated, while all microorganisms present in the air flowing through the air treatment device are killed. With the high airflow and air cleaning capacity, the air treatment device may clean a bounded space in a short period of time.

A water-borne hazard detection and notification system deployed between water treatment facilities and water's points of use can include sensors (e.g., flow rate, microorganism detectors, and chemical detectors) and can be microprocessor controlled. Sensors detect microorganisms and / or chemicals within a water distribution system. Treatment areas can be deployed at various stages along a water distribution system, allowing for protection redundancy. Detector and / or treatment systems can be networked to remote monitoring systems (e.g., networked data / communications equipment located with agencies operating and command and control units) through wired and / or wireless network communication means and devices. Data networked monitoring and assessment can enable rapid deployment of counter measures (e.g., valve shut-off, UV treatment, field team deployment). Systems can be staged, providing for a system comprising more than one detection, shut-off and / or treatment. Staging can provide for concentrated redundancy prior to delivery of water to its point of use.

A method for producing dispersible carbon nanotubes of the invention comprises subjecting single-walled carbon nanotubes to UV treatment in the presence of ozone such that carboxyl groups are introduced into the single-walled carbon nanotubes and that the single-walled carbon nanotubes are fragmented. A carbon nanotubes obtained by the method has a good dispersibility.