The invention relates to the technical field of
composite film defect detection equipment, and particularly discloses low-
dielectric polyimide composite film defect detection equipment and a detection method thereof.The low-
dielectric polyimide composite film defect detection equipment comprises a rack, the top end of the rack is fixedly connected with an
assembly frame, and one side of the
assembly frame is rotationally connected with a first guide roller; the part, located on the lower side of the first guide roller, of the
assembly frame is rotationally connected with a second guide roller, the part, located on one side of the first guide roller and the second guide roller, of the assembly frame is fixedly connected with an
ion wind bar, and the part, located on one side of the
ion wind bar, of the assembly frame is provided with a first ash removal mechanism; a second dust removal mechanism is arranged on the side, located on the first dust removal mechanism, of the assembly frame, a first tensioning roller is arranged on the side, away from the second dust removal mechanism, of the assembly frame, through the synergistic effect of the
multiple stages of dust
removal units, the dust removal effect on the surface of the low-
dielectric polyimide composite film is improved, and interference of residual dust on detection accuracy is effectively avoided.