The invention discloses a
semiconductor stainless steel TTN film cleaning device and process, the
semiconductor stainless steel TTN film cleaning device comprises an automatic mechanical arm, a soaking basket, a chemical liquid mixing soaking tank I, a pure
water rinsing tank, a high-pressure washing tank, a chemical liquid mixing soaking tank II, a pure water soaking tank and a blow-
drying tank, and the automatic mechanical arm is arranged above all tank bodies; the working end is connected with the soaking basket,
ultrasonic vibration plates are arranged in the first chemical liquid mixing soaking tank and the second chemical liquid mixing soaking tank, a high-pressure
water washing nozzle is arranged in the high-pressure
water washing tank, a CDA high-pressure
nozzle is arranged in the blow-
drying tank, and the automatic cleaning device is composed of the soaking tank, a pure water tank, high-pressure
water washing, CDA blowing and the like. Components are not manually conveyed and cleaned in the soaking basket any more, the required operation tank body is selected, the equipment can quickly complete conveying and operation, the cleaning tank adopts an external circulation filtering device, the cleanness of circulating liquid
medicine is ensured, and the
corrosion-resistant
ultrasonic vibration plate is adopted in the cleaning tank, so that the cleaning efficiency is improved. The
cavitation effect, the acceleration effect and the direct inflow effect of ultrasonic
waves in liquid are utilized for indirectly dispersing and stripping a
dirt layer of the liquid, and the cleaning purpose is achieved. The whole cleaning device adopts closed-loop
process operation, and the effectiveness of component cleaning is guaranteed.