The invention discloses a coplanar parallel
capacitance-piezoelectric multi-mode
tactile sensor and a preparation method thereof. The coplanar parallel
capacitance-piezoelectric multi-mode
tactile sensor comprises a substrate, a lower
electrode, a middle functional layer, an upper
electrode and a packaging
protection layer which are sequentially arranged from bottom to top, the middle functional layer is a high-molecular
polyvinylidene fluoride (PVDF)
polymer film layer; the middle functional layer is divided into a
capacitance functional area and a piezoelectric functional area which are coplanar and parallel, the piezoelectric functional area is located in the middle area of the
polymer film layer, and the capacitance functional area surrounds the periphery of the piezoelectric functional area; the packaging
protection layer is arranged at the top of the upper
electrode; different functional areas of a capacitance functional area and a piezoelectric functional area are arranged on the same film layer surface, so that a capacitance
dielectric film layer and a piezoelectric functional film layer are designed to be the same film layer, in combination with an in-situ
plasma polarization process, directional high-
voltage polarization
processing is carried out on film surfaces of different areas of the same film layer, the overall thickness of the sensor after packaging can be effectively reduced, and the packaging cost is reduced. The sensor precision is improved.