The invention discloses laminated co-fired piezoelectric
ceramic with a hole in the center and application of the laminated co-fired piezoelectric
ceramic in a piezoelectric acceleration sensor. The piezoelectric
ceramic is prepared from at least two kinds of piezoelectric ceramic
powder with different
phase transition temperatures. The method comprises the following steps: preparing ceramic
slurry from piezoelectric ceramic
powder; preparing the ceramic
slurry into a thin film through a
tape casting process to obtain a film belt;
cutting the film belt, printing an upper
electrode structure, then stacking and hot-pressing the film belt by adopting an interdigital
electrode mode,
cutting the hot-pressed film belt into single independent laminated ceramic, and forming a circular through hole in the center of the single laminated ceramic; carrying out high-temperature
sintering on the single laminated ceramic, and then
polishing the end surface of the laminated ceramic; and finally, arranging an end
electrode on the end surface of the laminated ceramic and carrying out polarization treatment to obtain the perforated laminated co-fired piezoelectric ceramic. The piezoelectric ceramic is designed for the piezoelectric acceleration sensor, and can meet the comprehensive performance requirements of the piezoelectric acceleration sensor on high sensitivity,
wide band and high reliability.