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Three-axis piezoelectric accelerometer

An accelerometer and axial pressure technology, applied in multi-dimensional acceleration measurement, acceleration measurement using inertial force, etc., can solve the problems of poor consistency and large size, and achieve the effect of avoiding crosstalk and improving dynamic bandwidth

Inactive Publication Date: 2015-07-08
XIAMEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Traditional accelerometers are mostly single-axis accelerometers, which require three single-axis assemblies to detect three axes, so it will inevitably lead to defects such as large volume and poor consistency

Method used

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Embodiment Construction

[0020] Such as figure 1 As shown, the embodiment of the present invention is provided with a mass block A, and the mass block A is an octagonal cylinder. On the two symmetrical sides of the mass block A, a left beam 21, a right beam 22, a front beam 23 and a rear beam 24 are arranged, and each beam They are all rectangular parallelepiped, with four piezoelectric sheets 1, 2, 15, 16 symmetrically distributed on the upper surface of the left beam 21, and four piezoelectric sheets 13, 14, 5, 6. There are four piezoelectric sheets 7, 8, 11, 12 symmetrically distributed on the upper surface of the front beam 23, and four piezoelectric sheets 3, 4, 9, 10 symmetrically distributed on the upper surface of the rear beam 24, each Metal electrodes are arranged above and below the piezoelectric sheet; the mass block is integrally structured with the left beam 21 , the right beam 22 , the front beam 23 and the rear beam 24 . exist figure 1 , mark B is the supporting structure.

[0021] ...

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Abstract

The invention discloses a three-axis piezoelectric accelerometer, and relates to accelerometers. According to the three-axis piezoelectric accelerometer, the sensitivity of the accelerometer can be improved, and the frequency bandwidth of the accelerometer is increased. The three-axis piezoelectric accelerometer is provided with a weight block which is an octolateral cylinder. A left beam, a right beam, a front beam and a rear beam are arranged on two symmetrical edges of the weight block, and all the beams are in a cuboid shape. Four piezoelectric patches are symmetrically distributed on the upper surface of the left beam, four piezoelectric patches are symmetrically distributed on the upper surface of the right beam, four piezoelectric patches are symmetrically distributed on the upper surface of the front beam, four piezoelectric patches are symmetrically distributed on the upper surface of the rear beam, and metal electrodes are arranged above and below each piezoelectric patch. The weight block, the left beam, the right beam, the front beam and the rear beam are of an integrated structure.

Description

technical field [0001] The invention relates to an accelerometer, in particular to a three-axis piezoelectric accelerometer capable of detecting acceleration in three directions. Background technique [0002] Accelerometer is a kind of inertial device. The micro-accelerometer manufactured by MEMS technology is widely used in civil aviation, vehicle control, robot, high-speed rail and other fields due to its small size, low power consumption, light weight, and good reliability. Micro accelerometers can be divided into capacitive, resistive, resonant, tunnel effect, thermal, piezoelectric, etc. Capacitive or resistive are generally used in MEMS. When the capacitive micro-accelerometer measures the displacement of the mass block, the upper and lower capacitances change to obtain the capacitance change difference, and then obtain the acceleration. For this reason, a small capacitive plate gap is required; When deformed, the fixed piezoresistive film is also deformed, and its re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/18G01P15/09
Inventor 郭航王建艳
Owner XIAMEN UNIV
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