The invention discloses a deep sub-
wavelength scatterer particle size evaluation method based on coherent axial
diffraction calculation, and belongs to the technical field of
optical imaging and
microstructure analysis, and the deep sub-
wavelength scatterer particle size evaluation method comprises the following steps: obtaining an image, and preprocessing the image; quantifying the preprocessed image, obtaining the
scattered light energy concentration of each axial position of an image surface scatterer, obtaining the attenuation condition after
scattered light energy defocusing based on the
scattered light energy concentration, and compensating defocusing attenuation; the method comprises the following steps: extracting a
peak value position and a width of a main peak, carrying out
correlation analysis on the extracted
peak value position and width data of the main peak and the corresponding scatterer feature size based on a deep sub-
wavelength scatterer sample with a known feature size, and constructing a
peak value position mapping function and a peak width mapping function; and performing particle size evaluation based on the constructed function. According to the method, the problems of low
signal-to-
noise ratio, large out-of-focus interference, poor applicability and the like of a traditional method are solved, and the precision and the universality of particle size evaluation are remarkably improved.