208 results about "Spot scanning" patented technology

The invention discloses a method for realizing high-quality stripping of large-size diamond by double-laser composite modification, which comprises the following steps: placing and fixing a sample on a three-dimensional mobile platform, and the upper surface of the sample is a crystal face (100); laser generated by an ultrafast laser generator penetrates through the upper surface of a sample and is focused into the sample, and then the laser generated by the ultrafast laser generator is used for performing first spot scanning on the sample to form an independent lattice structure; laser generated by the ultrafast laser generator is adopted to carry out secondary spot scanning on the sample to form a crack interconnected lattice structure; performing third-time line scanning on the sample by using laser generated by a nanosecond laser generator; and ultrasonically stripping the sample in water bath. By adopting a dual-laser composite modification process and combining bionic'honeycomb 'and'turtle shell' crack structure design, the crack is effectively guided to directionally extend along the crystal face (100), the problem of oblique crack when the stripping face is the crystal face (111) in the past is avoided, and the integrity and flatness of the stripping face are greatly improved.

The invention discloses a pre-detection system and a pre-detection method for an electronic gun. The pre-detection system comprises a deflection lens cone, a measurement lens cone and a control module, the measuring lens cone and the deflection lens cone are respectively and electrically connected with the control module; during pre-detection, the to-be-detected electron gun lens cone is installed right above the deflection lens cone, and the control module is electrically connected with the electron gun lens cone. The control module is used for controlling the electron gun to emit an electron beam and controlling the electron beam to deflect in a first direction and a second direction through the deflection lens cone, so that the electron beam performs point-by-point scanning on a first scanning range; an electron beam collecting device in the measuring barrel lens is used for collecting a current value corresponding to each scanning point, and the control module is further used for generating a grayscale image based on the current values and adjusting the position of the electron gun according to the position of a hot spot in the grayscale image until the center of the hot spot coincides with the center of the image. The maintenance efficiency of the electron microscope equipment can be improved, the maintenance difficulty is reduced, and the downtime is shortened.

According to the multi-beam confocal mask defect detection system and method based on the fiber laser array, a multi-point scanning light field is obtained on the basis of the fiber laser array to serve as an illumination light source, the scanning light field can be regulated and controlled on the basis of arrangement of the laser array, and through the combined action of a motion table and a multi-face rotating mirror, the defect of the multi-beam confocal mask is detected. Rapid and accurate mask two-dimensional scanning imaging is achieved, and high-resolution detection of mask defects is achieved on the basis of a confocal microscopic imaging method in cooperation with a high-power microscope objective and a photomultiplier. Compared with a traditional point scanning type mask defect detection system, the system has the advantages that the detection resolution is high, the scanning speed is high, a multi-point scanning light field can be freely regulated and controlled, and no extra diffraction optical element needs to be introduced.

The invention relates to the field of material sorting, in particular to a material sorting method, a material sorting device, material sorting equipment and a storage medium. The material sorting method is applied to the material sorting equipment and comprises the steps that fixed-point scanning is conducted through a ray scanning device, and a ray projection image of a material is obtained; performing first processing on the ray projection image, and determining plane contour information of the material; point cloud data of the materials in the transmission process are collected from the positions above the materials through a laser radar; matching the point cloud data with the plane contour information, and determining target point cloud data corresponding to the material in the point cloud data; determining a target gravity center position of the material based on the target point cloud data; the sorting device sorts the materials according to the target gravity center position. Errors possibly caused by a single scanning mode can be reduced, the determination accuracy of the target gravity center position is improved, and therefore the material processing time is shortened, and the sorting efficiency is improved.

The present invention discloses a Bragg peak broadening method for a point scanning proton or heavy ion beam and a radiotherapy system. The Bragg peak broadening method is characterized in that a porous material is placed on the path of the point scanning proton or heavy ion beam, the porous material is perpendicular to the beam travel direction, and the point scanning proton or heavy ion beam generates energy stratification (Energy Straggling) after passing through the porous material, thereby broadening the Bragg peak of the proton or heavy ion beam. This method can broaden the Bragg peak of the proton or heavy ion beam, can reduce the number of energy layers required for proton or heavy ion treatment, and thus can improve the treatment efficiency of the point scanning proton or heavy ion equipment.

The invention discloses an X-ray-based scanning imaging system and method, and the system comprises an X-ray machine target spot which is used for generating an X-ray beam; the collimator is used for modulating the X-ray beam into a linear light beam; when the linear light beam irradiates an object, scanning an object image column by column, and when pixel points in the same column are scanned, no adjacent pixels are overlapped in each scanning; and the detector is used for receiving an X-ray signal scattered by the chopping device through the scanned object. According to the scheme, the imaging method is redesigned by taking the algorithm as the core according to the physical principle of image degradation, and the purpose of improving the performance is achieved.

The invention discloses an implementation method and device for fast scanning CRDS sensing, and relates to the technical field of ring-down cavities, and the method comprises the following steps: employing a PID algorithm to control and adjust the temperature and pressure in a ring-down cavity to stabilize the resonance mode of the ring-down cavity, and carrying out the collection operation of a cavity mode signal after the adjustment of the temperature and pressure is completed; obtaining a wavelength value of the laser light source after entering the etalon based on the transmittance value, feeding back the wavelength value to a wavelength controller, and adjusting the laser to a spectrum detection wavelength by using the wavelength controller; scanning operation is executed based on the detection wavelength to determine the resonant wavelength, secondary scanning is performed with the resonant wavelength as the center to obtain a ring-down curve, and gas characteristic absorption line measurement is completed through point-by-point scanning. According to the invention, the etalon, the precise wavelength locking and adjusting system and the unique cavity mode scanning mode are utilized to realize high-repetition-frequency rapid scanning of the ring-down signal, so that the triggering speed of the ring-down event is improved.

The invention discloses an electron beam composite scanning filling melting forming method and device, and relates to the technical field of additive manufacturing. A melting forming method for electron beam composite scanning filling comprises the following steps that a three-dimensional digital model of a part to be printed is established and sliced and layered, and layered scanning data are obtained; dividing a contour edge area and an internal area of the section of the part based on the hierarchical scanning data; based on a random discrete point algorithm, generating a random discrete point scanning path of the contour edge area; generating a continuous line scanning filling path of the internal region based on a parallel equidistant line filling method; in the contour edge area, according to a random discrete spot scanning path, a pulsed electron beam is adopted for spot scanning, filling and melting; and in the internal area, according to a continuous line scanning filling path, a focused electron beam is adopted for line scanning filling melting, single-layer filling melting is completed, and then filling melting is completed layer by layer till the part is formed. According to the method, collaborative optimization of the surface quality and the printing efficiency is achieved, and the problem that at the present stage, the surface roughness of an electron beam powder bed printing part is too high is solved.

The invention discloses a super-resolution microscopic imaging method for removing Poisson background noise. According to the invention, switching modulation of different frequencies is carried out on the signal light and the suppression light split by the illumination light source at the same time, and the frequency of the signal light is read by the detection end, so that noise interference caused by the suppression light is removed. The method aims at most point scanning super-resolution microscopy methods, such as stimulated radiation depletion microscopy, saturated absorption competition microscopy, fluorescence differential microscopy and the like. The method can be applied to the fields of biomedical imaging and material science requiring high signal-to-noise ratio and high contrast.

A hyperspectral imaging system is characterized by comprising an imaging unit, an optical fiber scanning device, an optical fiber spectrometer, a data processing unit and a control unit, the imaging unit comprises an imaging lens and a micro-lens array, the imaging lens images a target object onto the micro-lens array, the optical fiber scanning device scans an optical signal processed by the imaging unit, and the optical fiber spectrometer performs spectrum separation on light with different wavelengths in the scanned optical signal to form spectrum data; and the data processing unit processes the spectral data and reconstructs a hyperspectral image of the target object by using the spectral data. And only an important area is scanned point by point in an optical fiber scanning mode, and hyperspectral data acquisition of a local interested target is concerned, so that unnecessary overhead of full-frame data acquisition is greatly reduced. For an application scene needing quick or real-time monitoring, the directional scanning mode greatly shortens the required integral acquisition time, and reduces the overall time delay of the system.

The invention discloses an airborne laser radar collimation axis error correction method based on an oval scanning track, belongs to the technical field of error correction, is used for collimation axis error correction, and comprises the following steps: correcting points of the oval scanning track and correcting a normal vector of a reflector; performing forward fixed-point scanning on an object to be measured by using the laser radar to obtain a forward oval scanning track, performing backward fixed-point scanning to obtain a backward oval scanning track, and obtaining points of the corrected oval scanning track; and calculating a scaling factor, and correcting the normal vector of the reflector to complete collimation axis error correction. The method does not need external auxiliary equipment, does not depend on ground control points or regular ground feature information, is suitable for complex application scenes without deployment and control, without overlapping areas and the like, and improves the adaptability, correction precision and engineering practicability of the system; the practicability in a field complex environment is remarkably improved, and the method is suitable for single-route flight in an uncontrolled area; the method has a trajectory scale distortion correction capability, and enhances the spatial consistency of sounding point clouds.

The invention provides an automatic focusing scanning imaging device and method based on a bright and dark field confocal objective lens. The device comprises a spatial modulation illumination module, the bright and dark field confocal objective lens, an annular light beam differential confocal module, a dark field confocal detection module and a bright field differential interference contrast imaging module. According to the invention, the bright and dark field confocal objective lens based on the combination of the parabolic mirror and the bright field microscope objective lens is arranged, the focus point of the annular light beam reflected by the parabolic mirror coincides with the focus of the bright field microscope objective lens, and the annular light reflected by the surface of the sample realizes automatic focusing through the differential confocal module; dark-field scattering confocal detection is realized by dark-field scattering light reflected by sample surface and subsurface defects through the confocal module, bright-field imaging of a defect area is realized by the bright-field differential interference contrast imaging module, and bright-field and dark-field three-dimensional imaging of the sample surface and subsurface defects can be realized through point-by-point scanning of the sample in x, y and z directions.

The invention discloses a static flying spot scanning method based on a flying focus point x-ray source, and belongs to the technical field of x-ray scanning, and the method comprises the following steps: S1, providing a flying focus point x-ray source; s2, providing a static restraint device; s3, controlling the focus of the flying focus x-ray source to move or switch according to a preset scanning mode, so that x-rays irradiate the scanned object point by point through a hole groove or a spiral gap in the static constraint device, and performing flying spot scanning on the scanned object; and S4, collecting a scattering x-ray signal of the scanned object by using a detector, converting the scattering x-ray signal into an electric signal, carrying out analog-to-digital conversion, and carrying out signal processing to generate a scanning image. According to the static flying spot scanning method based on the flying focus point x-ray source, a traditional combination of a fixed focus point and a high-speed mechanical device is replaced by the combination of the electrically-controlled x-ray source capable of changing the focus point and the static constraint device, and the scanning performance is improved.

The invention provides an arrival wave angle estimation method based on a zero scanning leaky-wave antenna. A rectangular waveguide is selected as a basic structure to design a periodic leaky-wave antenna only working in a-1 harmonic state; designing necessary antenna simulation parameters; a first leaky-wave antenna is designed; adjusting the gap interval p, and designing a second leaky-wave antenna; obtaining pattern functions of the first leaky-wave antenna and the second leaky-wave antenna; proper amplitude and phase parameters are selected for directional diagram synthesis, and a new directional diagram function is obtained; constructing an array guiding matrix suitable for the MUSIC algorithm; signal sources are arranged at different positions, simulation testing is carried out through MATLAB, and the incoming wave angle estimation capability of the zero-point scanning leaky-wave antenna is verified. According to the invention, a feasible technical path is provided for high-precision positioning and tracking application in future 6G mobile communication. The antenna is especially suitable for application in millimeter wave and terahertz frequency bands, such as vehicle-mounted communication, unmanned aerial vehicle platforms, military electronic countermeasures and the like.

The invention discloses a super-resolution microscopic interference measurement method based on broadband annular radial polarized light, which comprises the following steps of: selecting a broadband spectrum extended surface light source, providing uniform illumination covering a field of view to be measured and having a certain aperture angle by adopting a Kohler illumination system, and designing a two-stage relay system, amplitude and polarization modulation of the full-view-field light beam is realized through the liquid crystal spatial light modulator and the vortex wave plate; the expanded surface light source and the large-numerical-aperture microscope objective are combined to focus broadband annular radial polarized light, so that super-resolution microscopic interference imaging of the sample is realized; the super-resolution morphology measurement of the microstructure surface is realized in combination with a phase shift coherent method, the problem of low efficiency caused by traditional laser spot scanning is solved, the transverse resolution limitation of traditional microscopic interference morphology measurement is broken through, and the morphology resolution of traditional microscopic interference measurement is improved.

The invention belongs to the technical field of infrared thermal imaging defect detection, and particularly discloses an in-situ infrared thermal imaging detection device based on low-frequency modulation magnetic field excitation, which comprises a magnet yoke, an infrared thermal imager, a computer, a modulation power supply and an excitation coil group, the excitation coil group at least comprises a first excitation coil, a second excitation coil, a third excitation coil and a fourth excitation coil; the modulation power supply respectively introduces low-frequency alternating currents with different phases and direct currents with different directions into the first excitation coil, the second excitation coil, the third excitation coil and the fourth excitation coil; through composite excitation of an orthogonal direct-current magnetic field and a low-frequency rotating alternating-current magnetic field, the device can form a rotating low-frequency alternating-current magnetic field in a to-be-detected pipeline, the rotating magnetic field uniformly sweeps a detection area in a plurality of periods, the influence of eddy current distribution direction sensitivity is eliminated, and large-area uniform heating is realized; the problem of low efficiency of a traditional spot scanning or line scanning mode is avoided, and the coverage area of single detection is remarkably increased.

The invention relates to the technical field of defect detection, in particular to a defect detection method and system based on a microwave frequency crystal resonator, and the method comprises the steps: forming a microwave probe through a microwave frequency crystal resonator array, placing a to-be-detected material below the microwave probe, and setting a scanning area and scanning step lengths in two directions on the surface of the material; controlling the probe to perform point-by-point scanning according to step length, and collecting a plurality of reflection coefficients of each sampling point to form an echo signal matrix; performing singular value decomposition on the matrix, applying an adjustable coefficient to a first singular value and a second singular value, and adaptively selecting an optimal coefficient according to imaging quality to reconstruct an echo signal; performing two-dimensional Fourier transform on the reconstructed matrix, constructing a spatial filter in combination with probe spacing and defect depth to perform phase compensation, performing two-dimensional Fourier transform to obtain a defect image, and performing threshold segmentation on the defect image to obtain a binary image only containing defects; and analyzing the connected regions to obtain the gravity center position of each defect and the defect area determined by the pixel number and the single pixel area. The problems of serious clutter interference, insufficient defect imaging contrast ratio, difficulty in quantitative evaluation of defect size and the like in the existing microwave detection can be solved.

The invention relates to the technical field of polyethylene pipeline welded joint defect detection, in particular to a polyethylene pipeline welded joint microwave detection device and method based on a separable annular guide rail. The detection device comprises a profile support, an axial movement control device, a separable annular guide rail assembly and a circumferential detection device. The detection method comprises the steps that the clamping jaw type control mechanism drives the motor to be connected with the semi-annular guide rail; the ultrasonic distance sensor array measures the relative position of the annular guide rail and the polyethylene pipeline in real time, and a distance model of the annular guide rail and the polyethylene pipeline is established; calculating the adjusting distance of the microwave probe, and pushing the microwave probe by an electric push rod according to the adjusting distance; performing axial line scanning analysis to obtain an axial coordinate of the welding joint; different scanning modes such as spot scanning are executed according to different detection signals; the electric push rod adaptively adjusts the distance of the microwave probe according to the distance model. The device has the characteristics of stability, reliability, high adaptability to pipelines with different pipe diameters, high detection efficiency and the like.

The invention provides a modification processing method and processing system based on beam shaping, and the method comprises the following steps: obtaining three-dimensional light field distribution corresponding to a three-dimensional model through a holographic algorithm according to the three-dimensional model of a target modification structure, and generating a phase modulation diagram; loading the phase modulation diagram through a spatial light modulator, and modulating the wavefront phase of the incident laser, so that a light beam is focused on the surface of the material or in the material to form a preset spatial curved surface light field; and the spatial curved surface light field is focused on the material, so that the material in the light field region is subjected to nonlinear absorption or phase change, and a modified structure of a three-dimensional model is directly formed. According to the method, the limitation of traditional point-by-point scanning type machining is broken through, the machining efficiency and flexibility of a complex three-dimensional structure are remarkably improved, the method is suitable for scenes such as transparent material internal waveguide inscribing, curved surface splinter separation, large-area stripping, functionalized surface preparation and opaque material huge removal machining, and the machining efficiency and quality are remarkably improved.

An aberration-free laser spot scanning apparatus, comprising a resonant scanner (1), a first concave mirror (2), a second concave mirror (3), an X-axis galvanometer scanning mirror (4), a third concave mirror (5), a fourth concave mirror (6) and a Y-axis galvanometer scanning mirror (7) which are sequentially arranged in the direction of light beam propagation. Compared with existing laser spot scanning apparatuses that generally use a lens as an optical relay element between scanning mirrors, replacing the lens with a concave mirror to complete optical relay between scanning mirrors can avoid spherical aberration in a focusing transmission element, while also reducing the optical power loss generated by light transmission through a glass element, so that the aberration-free laser spot scanning apparatus can be applied to an optical microscopic imaging (e.g., laser confocal and two-photon imaging) system.

The invention discloses a solar cell and a preparation method thereof, and relates to the field of photovoltaic technology. According to the preparation method of the solar cell, the laser spot scanning speed is controlled, so that when the first doped silicon layer and the first dielectric layer of the exposure area are etched subsequently, the edge etching depth of the exposure area is shallower, the middle etching depth of the exposure area is deeper, and the first groove can have an inclined side wall. When the second doped silicon layer is subsequently prepared, the second doped silicon layer is not deposited below the first doped silicon layer. And then the first doped silicon layer and the second doped silicon layer can be completely separated by manufacturing the second groove, so that minority carrier recombination and electric leakage channels caused by contact of the first doped silicon layer and the second doped silicon layer are reduced, and the performance of the solar cell is improved. In addition, the preparation method is high in process efficiency.

The invention relates to the technical field of metallographic analysis, and discloses a dendritic segregation measurement method of large ingot type hot work die steel, which comprises the following steps: heat treatment; preparing a sample; and carrying out chemical corrosion and measurement analysis. During chemical corrosion, the metallographic sample is put into a beaker filled with a nitric acid alcohol solution to be corroded for 12-18 seconds, and when the surface of the metallographic sample has light gray lines, the metallographic sample is paused for 2-3 seconds, taken out, washed and blow-dried; during measurement and analysis, a scanning electron microscope is used for measurement, in the same field of view of the electron microscope, 10 points are randomly taken from the dendritic crystal trunk and the dendritic crystal respectively, the mass percentage of to-be-measured elements on each point is measured in a point scanning mode, and the segregation coefficient K is calculated. According to the method, a conventional heat treatment process is combined with the most common 4% nitric acid alcohol corrosive agent, the process is simple, and the success rate is 100%; compared with the prior art, the requirements on the formula, action time and action temperature of the corrosive agent are not required, and the method is simple and practical.

The invention relates to the field of optical detection, in particular to a large-aperture quasi-plane optical element in-situ contour detection method based on three measuring heads, which comprises the following steps: S1, planning a detection point and a detection path of a large-aperture quasi-plane optical element; s2, carrying out point-by-point scanning on detection points distributed on the large-aperture quasi-plane optical element according to the planned detection path by adopting a three-probe detection device; wherein lasers emitted by three laser measuring heads of the three-measuring-head detection device are obliquely incident to the surface of the large-aperture quasi-plane optical element respectively to form three measuring points, and distance values from the three laser measuring heads to the measuring points are obtained at the same time; s3, calculating space coordinates of the three measurement points by using the three distance values, and performing plane fitting to obtain two-dimensional slopes of the detection points; and S4, reconstructing the surface shape of the large-aperture quasi-plane optical element according to the two-dimensional slope of each detection point. According to the invention, large-range mirror surface contour detection can be realized, and the mirror surface contour detection precision can be improved.

The present invention discloses a Shack-Hartmann wavefront sensing system and method based on focus scanning. The detection light beam is conjugated with the scanning device through the first 4f system. The light beam after passing through the scanning device passes through the pinhole and the second 4f system, and finally enters the Shack-Hartmann wavefront sensor. During the focus scanning process, the scanning device deflects the light beam so that different positions of the focused light spot pass through the pinhole at the focal plane of the second 4f system respectively, and the light field phase gradient under different spectra is detected by the Shack-Hartmann wavefront sensor; during the reconstruction process, the light field phase gradient under different spectra is summed with the tilt phase compensated by the scanning device to obtain the corresponding real phase gradient. Finally, the real phase gradient under different spectra is synthesized into a complete phase gradient distribution by using the light spot synthesis method, thereby reconstructing a large dynamic range wavefront. The present invention can greatly improve the dynamic range of the Shack-Hartmann wavefront sensor and can effectively detect the wavefront of multiple guide stars.

The invention provides a near-field scanning rapid imaging device for the radio frequency performance of a multi-channel electrically tunable base station antenna, and relates to the technical field of radio frequency antenna testing, the device comprises a scanning assembly and a data processing module, the scanning assembly is composed of a radio frequency probe installed on a two-dimensional precision displacement platform and a vector network analyzer connected with the radio frequency probe, and the data processing module is connected with the scanning assembly. The scanning module is used for performing point-by-point scanning in an antenna near-field area along a preset plane grid path and collecting scattering parameters representing electromagnetic field characteristics at sampling points to form a near-field scanning data set; and the data processing module receives the data set, executes fast Fourier transform operation, and converts near-field data into far-field radiation characteristics so as to generate a far-field radiation pattern representing the radio frequency performance of the antenna. And the data processing module applies a preset static compensation matrix to the near-field data before conversion, so that the mutual coupling effect between the probe and the antenna is inhibited, and the accuracy of a measurement result is improved.

The invention discloses a supersonic speed laser spraying device and method, relates to the technical field of laser spraying, and realizes laser transmission and supersonic speed powder flow collaboration through cooperation of optical elements such as an output optical fiber, a collimating lens group and a convergent lens and a Laval nozzle structure. The method comprises the steps that multi-parameter closed-loop regulation and control are conducted, parameters such as the molten pool temperature and the powder flow divergence angle are monitored synchronously, and a process health index is constructed to trigger laser power, airflow pressure and powder feeding amount dynamic compensation; self-adaptive focus scanning is carried out, the focus position is adjusted in real time through a laser displacement sensor, and working modes are switched in linkage with a process health index; and lens abnormity diagnosis is carried out, a health index is constructed by using dual-wavelength transmissivity and wavefront distortion, and grading early warning and linkage powder feeding amount adjustment are carried out. According to the scheme, coating defects can be reduced, and the spraying precision and the system stability are improved.

The utility model relates to the technical field of electron beam lithography, in particular to an electron emitter. The electron emitter comprises a patterned light source, a lens unit and a photoelectric material unit; the patterned light source comprises a light source and a pattern generator, the lens unit is arranged between the pattern generator and the photoelectric material unit, and the pattern generator is used for modulating light beams emitted by the light source; after a light beam emitted by the light source is modulated by the pattern generator, an optical pattern with light and shade changes is generated, the optical pattern is irradiated on the surface of the photoelectric material unit after being amplified and imaged by the lens unit so as to generate an external photoelectric effect, and an electron beam with the optical pattern is formed. According to the electron beam lithography device, electron beams with optical patterns can be sent into the electron optical system to directly carry out patterning electron beam lithography treatment, and exposure carried out in a point-by-point electron beam scanning mode in the prior art is not needed, so that the electron beam lithography efficiency is greatly improved by the electron beam lithography device.

The application provides a point melting forming method and system based on an electron beam heat source, and the method comprises the following steps: model slicing and path planning, adaptively slicing a three-dimensional model to obtain two-dimensional contour data of each layer section; point array processing, dividing a single layer section area into a contour point array and a filling point array, adaptively discretizing and sampling the contour point array based on curvature change, and generating a basic point array mode with regular arrangement for the filling point array; scanning sequence generation and optimization, converting the discretized point array into an ordered scanning instruction sequence, predicting thermal field evolution under different scanning sequences by establishing a thermal influence model, and iteratively optimizing the scanning sequence based on a multi-objective optimization algorithm; and layer-by-layer point melting forming, controlling electron beam point-by-point melting of metal powder according to the optimized point scanning sequence. The application replaces continuous line scanning with a discrete point melting mode, significantly reduces thermal accumulation and thermal stress, and improves the size accuracy and surface quality of the formed part.

The invention discloses a dual-polarized antenna with an adjustable radiation zero point applied to a satellite communication phased array system. The dual-polarized antenna comprises a radio frequency connector, a radiation metal patch, a metal floor and a dielectric substrate located between the radiation metal patch and the metal floor. The radiation metal patch comprises four groups of metal sheets, and any two adjacent groups of metal sheets are arranged at intervals; the number of the radio frequency connectors is four, and each radio frequency connector is connected with a group of metal sheets; the dual-polarized antenna with the adjustable radiation zero point further comprises two groups of radiation zero point scanning control networks, one group of radiation zero point scanning control networks is connected with two groups of opposite metal sheets through radio frequency connectors, and the other group of radiation zero point scanning control networks is connected with the other two groups of opposite metal sheets through radio frequency connectors. The dual-polarized antenna with the adjustable radiation zero point is simple in structure, and scanning control and dual polarization of the radiation zero point can be achieved.

The application discloses a kind of multi-beam confocal mask defect detection system and method based on fiber laser array, the present application obtains multi-point scanning light field as illumination light source based on fiber laser array, and can be based on the arrangement of laser array Realize the regulation and control of scanning light field, through the joint action of motion platform and multi-surface rotating mirror, realize fast and accurate mask two-dimensional scanning imaging, and based on confocal microscopic imaging method, with high-power microscope objective and photomultiplier tube Realize high-resolution detection of mask defect.Compared with the traditional point scanning type mask defect detection system, the present application has the advantages of high detection resolution, fast scanning speed, multi-point scanning light field can be freely regulated and controlled, and does not need to introduce additional diffractive optical element.