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Calibration method of spot scanning galvanometer of three-dimensional measuring system

A technology of three-dimensional measurement and calibration method, which is applied in the direction of measuring devices, instruments, laser welding equipment, etc., can solve the problems of time-consuming and complicated calibration process, and achieve the effect of reducing the possibility of error and fast calibration process

Active Publication Date: 2013-02-27
BEIHANG UNIV
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Problems solved by technology

The traditional calibration method needs to make a special calibration plate, measure with auxiliary measuring equipment, manually calculate the deviation between theoretical and actual values, and then generate a calibration file through compensation calculation, which consumes a lot of time and requires specialized operators and expensive auxiliary measuring equipment. The calibration process is complicated

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  • Calibration method of spot scanning galvanometer of three-dimensional measuring system
  • Calibration method of spot scanning galvanometer of three-dimensional measuring system
  • Calibration method of spot scanning galvanometer of three-dimensional measuring system

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Embodiment Construction

[0043] The invention aims at the problem of the deviation between the actual deflection angle of the scanning galvanometer and the theoretical value in point-scanning three-dimensional measurement, uses a method based on standard plane measurement to realize the calibration of the galvanometer, and obtains the accurate relationship between the actual deflection angle of the galvanometer and the driving voltage.

[0044] See figure 1 , a method for calibrating a vibrating mirror of a point-scanning three-dimensional measurement system, comprising the following steps:

[0045] Step 1: System modeling to obtain the expression of the deflection angle of the galvanometer.

[0046] Step 2: Adjust the standard plane to a known position and perpendicular to the main direction of the system, and measure the plane. The actual measured standard deviation δ allowed by the given plane measurement 0 .

[0047] Step 3: Calculate the standard deviation δ of the measured data relative to th...

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Abstract

The invention discloses a calibration method of spot scanning a galvanometer of a three-dimensional measuring system. The calibration method comprises seven major steps as follows: firstly performing system modeling, so as to obtain a galvanometer deflection angle expression, then adjusting a standard plane to be positioned in a known position and perpendicular to a system main direction, measuring the plane, projecting measured data to the standard plane, so as to obtain ideal data, utilizing the data to calculate a galvanometer deflection angle, matching a relational expression between the galvanometer deflection angle and driving voltage, and measuring the standard plane again through the relational expression, and repeating the process till the standard deviation from the measured data to the standard plane is smaller than a set value, so as to obtain an accurate relational expression between the galvanometer deflection angle and the corresponding driving voltage, establishing the interactional relation between two galvanometers, describing the non-perpendicularity error of axes of the two galvanometers, and correcting the relational expression, so as to improve the calibration accuracy. The calibration method has higher practical value in the technical field of optical three-dimensional measurement and laser processing.

Description

technical field [0001] The invention relates to a vibrating mirror calibration method for a point-scanning three-dimensional measurement system, which can be used for a three-dimensional measuring system that uses a vibrating mirror to realize point scanning, and is suitable for high-speed vibrating mirror theoretical research and the application of three-dimensional measurement-related engineering technologies. The invention belongs to the technical field of optical three-dimensional measurement and laser processing. Background technique [0002] Due to the limitations of low efficiency of contact measurement methods and easy damage to the measured object, non-contact 3D measurement methods have been rapidly developed and widely used in many fields in recent years. Among them, the three-dimensional laser scanning measurement technology based on the triangulation method overcomes the limitations of traditional measurement technology, and has the advantages of fast scanning s...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/04G01B11/00B23K26/042
Inventor 李旭东赵慧洁边赟李成杰姜宏志
Owner BEIHANG UNIV
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