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83464results about "Using optical means" patented technology

Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells

In a method of determining the focus of a lithographic apparatus used in a lithographic process on a substrate, the lithographic process is used to form a structure on the substrate, the structure having at least one feature which has an asymmetry in the printed profile which varies as a function of the focus of the lithographic apparatus on the substrate. A first image of the periodic structure is formed and detected while illuminating the structure with a first beam of radiation. The first image is formed using a first part of non-zero order diffracted radiation. A second image of the periodic structure is foamed and detected while illuminating the structure with a second beam of radiation. The second image is formed using a second part of the non-zero order diffracted radiation which is symmetrically opposite to the first part in a diffraction spectrum. The ratio of the intensities of the measured first and second portions of the spectra is determined and used to determine the asymmetry in the profile of the periodic structure and/or to provide an indication of the focus on the substrate. In the same instrument, an intensity variation across the detected portion is determined as a measure of process-induced variation across the structure. A region of the structure with unwanted process variation can be identified and excluded from a measurement of the structure.
Owner:ASML NETHERLANDS BV

Three-dimensional measurement method and apparatus

The apparatus and method measure the three-dimensional surface shape of a surface without contact with the surface, and without any physical constraint on the device during measurement. The device is a range-sensor or scanner, and in one embodiment is a laser-camera sensor, which has a portable camera and multi-line light projector encased in a compact sensor head, and a computer. The apparatus provides three-dimensional coordinates in a single reference frame of points on the surface. The sensor head does not have to be physically attached to any mechanical positioning device such as a mechanical arm, rail, or translation or rotation stage, and its position in three-dimensional space does not have to be measured by any position-tracking sensor. This allows unrestricted motion of the sensor head during scanning, and therefore provides much greater access to surfaces which are immovable, or which have large dimensions or complex shape, and which are in confined spaces such as interior surfaces. It also permits measurement of a surface to be made by a continuous sweeping motion rather than in stages, and thus greatly simplifies the process of measurement. The apparatus can be hand-held, mounted on any moving device whose motion is unknown or not accurately known, or airborne. The apparatus and method also permit unknown and unmeasured movement of the object whose surface is to be measured, which may be simultaneous with the movement of the range-sensor head.
Owner:ALIGN TECH
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