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Reactive sensor modules using pade' approximant based compensation and providing module-sourced excitation

Reactive sensors typically exhibit nonlinear response to the combination of an excitational signal (e.g., sinusoidally oscillating signal) and a physical parameter under measure (e.g., position of magnetic core member). Such sensors are typically sensitive to temperature variation. Systems and methods are disclosed for compensating for the nonlinear and / or temperature dependant behavior of reactive sensors and for calibrating the post-compensation output signals relative to known samples of the physical parameter under measure (e.g., position). One class of embodiments comprises a housing containing at least part of a reactive sensor, a monolithic integrated circuit and a timing reference (e.g., an oscillator crystal). The integrated circuit includes a waveform generator for generating a sensor exciting signal, a detector for detecting the response of the sensor to the combination of the exciting signal and the under-measure physical parameter, a temperature compensating unit and a Pade' Approximant based, nonlinearity compensating unit. The temperature compensating unit and the Pade' Approximant nonlinearity compensating unit are tuned by use of digitally programmed coefficients. The coefficients calibrate the final output as well as compensating for nonlinearity and temperature sensitivity. A highly accurate measurement of the under-measure physical parameter is made possible even though each of the sensor and compensating circuitry may be relatively simple, compact, and low in cost.
Owner:SEMICON COMPONENTS IND LLC +1

Substrate dicing method

A programmable dicing saw is operable with movement of its spindle and work surface for aligning a dicing blade juxtaposed between flanges on the spindle and dicing a substrate along a predetermined blade path. By locating the center of the substrate, an efficient movement of the blade relative to the substrate center rather than the work surface center saves time. Locating the center of the blade includes aligning opposing substrate edges and edge location data entry into a processor for calculation of the substrate center and control based on the substrate center. In addition, prior to cutting along the edges of the substrate, the dicing blade is first aligned for travel parallel to and proximate the edge of the substrate, and an alignment offset is provided to the programmable dicing saw for laterally moving the blade toward the center of the substrate prior to making a cut and avoiding damage to the blade and substrate that typically results when the blade slides along the substrate edge rather than cutting into the substrate. In addition, by knowing the substrate center location, an arcuate cut can be accurately made into the substrate by making multiple straight cuts with a rotation of the substrate about its center between each cut. A flange clearance is monitored by measuring the blade exposure after a preselected number of cuts during the substrate dicing, and a minimum flange clearance permitted before blade movement toward the substrate is automatically stopped.
Owner:THERMOCARBON
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