The invention relates to an automatic micro-area substance identification method and
system based on combination of a multi-
modal atlas
database and
artificial intelligence. The method comprises the following steps: constructing a multi-
modal microscopic atlas
database, obtaining and preprocessing an image to be detected, carrying out intelligent segmentation and pre-recognition on the image, comparing the image with the atlas
database to generate a candidate
list, intelligently planning EDS point locations based on the candidate
list and collecting EDS data, fusing morphology pre-judgment and component data to carry out decision judgment, and generating an analysis report. The
system comprises a multi-
modal microatlas database, a to-be-tested
sample image acquisition and preprocessing module, an intelligent segmentation and pre-identification module, an intelligent analysis planning and EDS data automatic acquisition module, a data fusion judgment module and a
user control and interaction module. According to the method,
artificial intelligence, a pre-constructed multi-modal
knowledge base and a traditional SEM-EDS analysis process are deeply fused, the analysis and
cognition process of human experts is simulated and surpassed, the speed is high, and the recognition accuracy is high.