The invention discloses a microscopic structure test method for
metal filaments, thin strips or coatings, which is applied to the technical field of physical and chemical detection of materials. According to the method, an
ion beam which is focused by an electromagnetic lens and accelerated by an
electric field with specific intensity and has specific beam intensity is used for continuously scanning a test surface of a sample at specific scanning speed and scanning times, and the
ion beam excites a secondary electronic
signal while generating a stripping effect on atoms with nanoscale thickness on the
surface layer of the test surface of the sample; according to the principle that a contrast image containing
crystal orientation information is obtained by utilizing the characteristic that the stripping effect and the excitation intensity of a secondary electronic
signal are influenced by different
crystal face orientations of a polycrystalline
metal material, the
microstructure information of a sample test surface is further obtained. The microscopic structure information of
metal filaments, thin strips and plating
layers, which is not easy to obtain by a traditional metallographic
corrosion method, can be intuitively, quickly and accurately obtained, the detection problem of microscopic structures such as bonding wires, connecting sheets and plating
layers commonly used in the field of
microelectronics is solved, and the blank of a test method is filled.