The invention belongs to the field of scanning
electron microscopes, and discloses a multi-view backscattering
electron imaging device and method for a low-
voltage scanning electron microscope, which adopts the design that an annular micro-channel plate is arranged between an objective lens and a sample and optical axes are aligned, a central through hole allows a primary
electron beam to pass through, an input surface faces the sample, and an output surface is tightly attached to a reading
anode unit. The read-out
anode unit is divided into a plurality of concentric girdles to distinguish polar angle interval signals, and each girdle is uniformly divided into a plurality of independent sectors to capture
azimuth angle information. By adopting the device, the
signal-to-
noise ratio and the
image quality of low-
voltage imaging are remarkably improved, a large flat sample can be compatible without inclining the sample, and geometric defects of a traditional side
detector are avoided; the multi-view
signal separation can provide abundant angle information, enhance the stereoscopic impression and
shadow effect of the image, support simple three-dimensional reconstruction to deduce the surface
topography characteristics, reduce information waste and meet the high-precision analysis requirements of surface sensitive materials and non-conductive samples.