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13 results about "Digital holographic microscopy" patented technology
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Digital holographic microscopy (DHM) is digital holography applied to microscopy. Digital holographic microscopy distinguishes itself from other microscopy methods by not recording the projected image of the object. Instead, the light wave front information originating from the object is digitally recorded as a hologram, from which a computer calculates the object image by using a numerical reconstruction algorithm. The image forming lens in traditional microscopy is thus replaced by a computer algorithm. Other closely related microscopy methods to digital holographic microscopy are interferometric microscopy, optical coherence tomography and diffraction phase microscopy. Common to all methods is the use of a reference wave front to obtain amplitude (intensity) and phase information. The information is recorded on a digital image sensor or by a photodetector from which an image of the object is created (reconstructed) by a computer. In traditional microscopy, which do not use a reference wave front, only intensity information is recorded and essential information about the object is lost.
Quantitative imaging method for living cells based on sequential displacement aberration correction of digital holographic microscopy
The application relates to a kind of quantitative imaging methods of living cells based on digital holographic microscopic sequential displacement aberration correction, and belongs to the field of optical measurement, comprising: collecting three holograms by sequentially displacing living cells; obtaining three original phase maps by phase demodulation; obtaining total mask map; sequentially displacing phase map in reverse direction; performing difference calculation to obtain global phase system aberration difference data; obtaining local system aberration difference data by using total mask map; performing difference processing on Chebyshev polynomial to obtain local polynomial difference data by using total mask map; fitting global system aberration by calculating corresponding coefficients from difference data; subtracting global system aberration from three original phase maps to obtain phase map of living cells after aberration correction. The application realizes high-precision quantitative phase imaging of living cells while retaining high-frequency information, has excellent displacement distance robustness, does not need to be equipped with high-precision displacement mechanism, and greatly reduces the hardware cost of measurement system.
Owner:SHANDONG UNIV
MEMS fatigue evolution law observation device based on off-axis digital holographic microscopy
PendingCN121740798APolarisation-affecting propertiesPhase-affecting property measurementsSuperluminescent diodeGrism
The invention belongs to the technical field of optical measurement, and relates to an MEMS fatigue evolution law observation device based on off-axis digital holographic microscopy, which comprises a red light super-radiation light-emitting diode light source, a wire grid type beam splitter, an objective lens and a CCD, and is characterized in that a linear polarizer, a half-wave plate and the wire grid type beam splitter are fixedly arranged on a light path emitted by a red light super-radiation light-emitting diode; a half-wave plate, a beam expanding lens group, a plano-convex lens, a beam splitter prism, an objective lens and a sample table are fixedly arranged on an object light path in sequence, a reflector is arranged on a vertical light path, and an optical delay line, the beam expanding lens group and the plano-convex lens are fixedly arranged on a reference light path; after the reference light passes through the reflector and the beam splitter prism, the reference light interferes with the object light reflected by the beam splitter prism on the CCD and is observed. According to the invention, the hologram of the MEMS device under high-frequency vibration can be acquired, and the surface topography of the MEMS device is obtained through computer rapid phase unwrapping, so that the purpose of observing fatigue evolution of the MEMS structure in real time is achieved.
Owner:TIANJIN UNIV
Lithography apparatus, metrology system, digital holographic microscopy alignment sensor and method thereof
A system includes an illumination system, an optical system, a detector system, and a processor. The illumination system directs a first illumination beam and a second illumination beam toward the target structure, and directs a first reference beam toward the detector system. The optical system directs the first scattered beam and the second scattered beam from the target structure to the detector system. A detector system captures the interference pattern and outputs a measurement signal. The first scattered beam, the second scattered beam, and the first reference beam generate an interference pattern. The processor analyzes the measurement signal to determine a characteristic of the target structure.
Owner:ASML NETHERLANDS BV
Cell analysis system based on virtual fluorescence generation technology and method therefor
PCT designated stageWO2026100856A1Image enhancementImage analysisDigital holographic microscopyCell segmentation
The present invention relates to a cell analysis system based on virtual fluorescence generation technology, and a method therefor. According to the present invention, the system comprises: an input unit that receives a quantitative phase image of a sample including at least one cell through digital holography microscopy; and a cell identification unit that identifies at least one living cell by applying, to the received quantitative phase image, a cell segmentation mask generation model and a nuclei segmentation mask generation model constructed previously, and that masks a position of the nucleus of the living cell to derive an identification result. The system may further comprise a post-processing unit that derives a final result by applying a preset post-processing method to the derived identification result.
Owner:DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY
Overlay metrology with enhanced overlay targets
Measuring overlay using enhanced overlay targets is described. Multiple dimensional (e.g., x and y components) of an overlay measurement may be acquired in parallel in a digital holographic microscope (for example) system using non-cartesian overlay targets (e.g., overlay targets with structures oriented at angles other than typical ninety degree x and y orientations, but within forty five degrees of a radiation axis). This scheme enables single-shot acquisition of the multiple dimensional components of the overlay measurement (e.g., a full overlay vector). A processor is configured to deconstruct data from the single-shot acquisition (based on the orientation of the overlay targets) into the x and y components of an overlay value. Or the non-cartesian targets may be oriented to correspond to patterned features of interest in a substrate such that the single shot acquisition directly provides an overlay value relative to those features of interest.
Owner:ASML NETHERLANDS BV
Method and system for characterizing microorganisms by digital holographic microscopy
PendingCN122074127AImage analysisMicrobiological testing/measurementMicroorganismDigital holographic microscopy
The present invention relates to a method of characterizing a microorganism, comprising: A. for each wavelength of a predetermined set of wavelengths comprising at least one wavelength, acquiring a holographic digital image, generating a focused image by a computer device, each pixel of the image comprising an amplitude value and a phase value, and segmenting the focused image to extract a portion corresponding to the microorganism, and B. characterizing the microorganism by a computer device according to the aggregated image portion. According to the invention, before characterization or before segmentation or before generation of aggregated images, the method comprises correcting the optical aberration of the acquisition device by means of a computer device, and characterizing the microorganism comprises applying a digital model to these parts, the amplitude value and / or phase value of each wavelength of the predetermined set of wavelengths as a descriptor.
Owner:BIOMERIEUX SA +3
Fast tilt compensation method based on zernike polynomials and electronic device
The application discloses a fast tilt compensation method based on Zernike polynomials, which comprises the following steps: obtaining a two-dimensional image matrix output by a digital holographic microscope; pre-processing the two-dimensional image matrix; projecting the pre-processed image intensity matrix onto a Zernike polynomial base, realizing Zernike fitting, and obtaining a Zernike model about a sample to be measured; calculating tilt term coefficients alpha x , alpha y of a first-order polynomial in the Zernike model; calculating defocus aberration by using the tilt term coefficients alpha x , alpha y ; performing tilt compensation on the pre-processed image intensity matrix, and outputting a compensated image intensity matrix. Further, corresponding electronic equipment is disclosed. The application can quickly and effectively compensate and correct a photographed image, and is quite considerable in robustness and calculation speed.
Owner:HEFEI TUXUN ELECTRONICS TECH
Dot-assisted focusing digital holographic microscope system and holographic reconstruction method
The present application relates to a kind of dot auxiliary focusing digital holographic microscope system and holographic reconstruction method, the system includes digital holographic microscopic optical path part and dot auxiliary focusing optical path part, digital holographic microscopic optical path part is irradiated after the object sample of polarization modulation narrowband laser to be measured with reference mirror reflected polarization orthogonal reference light in polarization camera interference imaging, different phase shift acquisition of single image is realized;Dot auxiliary focusing optical path part utilizes the definition of image to calculate the focus position of the object sample to be measured, can directly obtain the best inverse diffraction distance required in digital holographic reconstruction process.Compared with prior art, the present application has improved the autofocusing efficiency of digital holographic microscope, greatly speed up the speed of digital holographic three-dimensional surface reconstruction, on the premise of guaranteeing the reconstruction measurement precision, improves the efficiency and real-time of reconstruction and the like advantages.
Owner:SHANGHAI UNIV
Digital holographic microimaging coherent noise suppression network model and method
PendingCN122090080Aresolve inhibitionSolve the contradiction of image detail preservationCharacter and pattern recognitionBiological modelsMicroscopic imageData set
The invention discloses a digital holographic microscopic imaging coherent noise suppression network model and method based on deep learning. The network model adopts a double-branch encoder-single decoder structure, and a double-branch encoder extracts local details and global noise features of an image in parallel; the innovative double-branch intensive attention fusion module fuses multi-scale features through an adaptive weighting and enhancement mechanism; and the decoder integrates information through jump connection and reconstructs a clear image. The training method generates a high-fidelity data set based on a physical simulation system. According to the method, speckle noise and parasitic fringes can be efficiently suppressed, the phase details of the object are effectively reserved while the peak signal-to-noise ratio and the structural similarity index are remarkably improved, and the method has excellent generalization ability and calculation efficiency and is suitable for real-time high-quality imaging of a digital holographic microscopy system.
Owner:CHINA JILIANG UNIV
A topology-based image reconstruction method and system
The application discloses a kind of based on topological structure's image reconstruction method and system, belong to image reconstruction field.It includes: the establishment digital holographic microscopy model;Three-dimensional space topological data is converted into multi-layer graph structure by adaptive focusing algorithm with different focal length imaging, and hierarchical graph model is formed;According to the topological data of hierarchical graph model, the deflection angle of object is calculated;According to the deflection angle, angle correction is carried out to hierarchical graph model, and the corrected hierarchical graph model is obtained;The best imaging focal point position in the corrected hierarchical graph model of different angles is calculated, and surface topological reconstruction is carried out according to the best imaging focal point position, to obtain the reconstructed image after angle adjustment.In traditional digital holographic microscopy, due to the limitation of light scattering angle, the side edge of object and large-angle inclined part often cannot be recorded completely, resulting in edge distortion or information loss of reconstructed image.The application solves the imaging limitation when processing complex curved surface object.
Owner:HEFEI TUXUN ELECTRONICS TECH
Transflective digital holographic microscope system
A transflective digital holographic microscope system belongs to the technical field of microscopes, includes a reflection-type digital holographic microscope light path and a transmission-type digital holographic microscope light path, wherein the reflection-type digital holographic microscope light path is as follows: a first light beam is changed in polarization direction through a first polarizer, and is divided into two light waves with vertical polarization states; wherein the transmission-type digital holographic microscope light path is as follows: a second light beam is changed in polarization direction through a second polarizer, and is divided into two light waves with vertical polarization states, so that the thickness information and surface contour information of the sample can be tested at the same time.
Owner:SHENZHEN TECH UNIV
A digital holographic phase image stitching method based on deep learning
This invention discloses a deep learning-based digital holographic phase image stitching method. The method includes: acquiring multi-field holographic interferograms, obtaining a single-field phase image through numerical reconstruction, and then linearly mapping it to a grayscale image to create a synthetic dataset; using semi-supervised training of a noise-resistant registration network, calling the obtained registered grayscale image pairs and their binary masks, and then inputting them into a baseline compensation fusion network, using unsupervised training of the fusion model; inputting the registered grayscale image pairs into the trained image stitching model to obtain a stitched grayscale image, which, after grayscale-phase conversion, yields a large field-of-view phase image. This invention uses only a synthetic dataset to train the network, avoiding the difficulty of manually annotating the registration matrix. Through a semi-supervised training strategy and noise-resistant registration network design, it greatly improves registration accuracy, and baseline compensation further optimizes the fusion effect, showing great application potential in digital holographic microscopy quantitative measurement field-of-view stitching.
Owner:ZHEJIANG SCI-TECH UNIV
Dark field digital holographic microscope and associated metrology method
A dark field digital holographic microscope and associated metrology method is disclosed which is configured to determine a characteristic of interest of a structure. The dark field digital holographic microscope includes an illumination branch for providing illumination radiation to illuminate the structure; a detection arrangement for capturing object radiation resulting from diffraction of the illumination radiation by the structure; and a reference branch for providing reference radiation for interfering with the object radiation to obtain an image of an interference pattern formed by the illumination radiation and reference radiation. The reference branch has an optical element operable to vary a characteristic of the reference radiation so as to reduce and / or minimize variation in a contrast metric of the image within a field of view of the dark field digital holographic microscope at a detector plane.
Owner:ASML NETHERLANDS BV