21 results about "Digital holographic microscopy" patented technology

The application relates to a kind of quantitative imaging methods of living cells based on digital holographic microscopic sequential displacement aberration correction, and belongs to the field of optical measurement, comprising: collecting three holograms by sequentially displacing living cells; obtaining three original phase maps by phase demodulation; obtaining total mask map; sequentially displacing phase map in reverse direction; performing difference calculation to obtain global phase system aberration difference data; obtaining local system aberration difference data by using total mask map; performing difference processing on Chebyshev polynomial to obtain local polynomial difference data by using total mask map; fitting global system aberration by calculating corresponding coefficients from difference data; subtracting global system aberration from three original phase maps to obtain phase map of living cells after aberration correction. The application realizes high-precision quantitative phase imaging of living cells while retaining high-frequency information, has excellent displacement distance robustness, does not need to be equipped with high-precision displacement mechanism, and greatly reduces the hardware cost of measurement system.

The invention belongs to the technical field of optical measurement, and relates to an MEMS fatigue evolution law observation device based on off-axis digital holographic microscopy, which comprises a red light super-radiation light-emitting diode light source, a wire grid type beam splitter, an objective lens and a CCD, and is characterized in that a linear polarizer, a half-wave plate and the wire grid type beam splitter are fixedly arranged on a light path emitted by a red light super-radiation light-emitting diode; a half-wave plate, a beam expanding lens group, a plano-convex lens, a beam splitter prism, an objective lens and a sample table are fixedly arranged on an object light path in sequence, a reflector is arranged on a vertical light path, and an optical delay line, the beam expanding lens group and the plano-convex lens are fixedly arranged on a reference light path; after the reference light passes through the reflector and the beam splitter prism, the reference light interferes with the object light reflected by the beam splitter prism on the CCD and is observed. According to the invention, the hologram of the MEMS device under high-frequency vibration can be acquired, and the surface topography of the MEMS device is obtained through computer rapid phase unwrapping, so that the purpose of observing fatigue evolution of the MEMS structure in real time is achieved.

A system includes an illumination system, an optical system, a detector system, and a processor. The illumination system directs a first illumination beam and a second illumination beam toward the target structure, and directs a first reference beam toward the detector system. The optical system directs the first scattered beam and the second scattered beam from the target structure to the detector system. A detector system captures the interference pattern and outputs a measurement signal. The first scattered beam, the second scattered beam, and the first reference beam generate an interference pattern. The processor analyzes the measurement signal to determine a characteristic of the target structure.

The invention discloses an OAPM-based secondary phase distortion compensation digital holographic microscopy system, which comprises a laser, the right side of the laser is provided with a collimation and beam expanding system, the right side of the collimation and beam expanding system is provided with a half slide, the right side of the half slide is provided with a polarization splitting prism body, and the right side of the polarization splitting prism body is provided with an optical fiber. An off-axis planed mirror is arranged on the right side of the polarization splitting prism body, a reflecting mirror is arranged below the polarization splitting prism body, a non-polarization splitting prism is arranged on the right side of the reflecting mirror, and a quarter-wave slide is arranged on the right side of the non-polarization splitting prism; belongs to the technical field of holographic microscopes, and provides a digital holographic microscopy system based on OAPM-secondary phase distortion compensation, which utilizes an off-axis planed mirror to realize secondary phase distortion compensation, integrates compensation and reflection effects in the same optical element, and greatly reduces the size of the digital holographic microscopy system.

This invention discloses a heterodyne digital holographic microscopic phase imaging scheme based on a moving grating. The scheme includes an optical imaging device and a measurement method. The optical imaging device includes a light source system, an amplification system, a heterodyne interferometry system, and an image acquisition system. A light beam emitted from the light source penetrates the object under test, carrying the object's optical phase information. This information is amplified by the amplification system and then passed through a moving grating in the heterodyne microscopy system, splitting the incident light into multiple beams of different frequencies. An aperture is used to select the 0th and +1st order beams, which interfere on the camera's detection surface to generate continuous moving interference fringes. The measurement method mainly includes: optical path adjustment, image data acquisition, image processing, and phase-height calibration. This invention achieves higher reconstruction accuracy compared to traditional single-image reconstruction schemes, and features low cost and good stability, providing a new measurement scheme and approach for digital holographic microscopy.

The present invention relates to a cell analysis system based on virtual fluorescence generation technology, and a method therefor. According to the present invention, the system comprises: an input unit that receives a quantitative phase image of a sample including at least one cell through digital holography microscopy; and a cell identification unit that identifies at least one living cell by applying, to the received quantitative phase image, a cell segmentation mask generation model and a nuclei segmentation mask generation model constructed previously, and that masks a position of the nucleus of the living cell to derive an identification result. The system may further comprise a post-processing unit that derives a final result by applying a preset post-processing method to the derived identification result.

Measuring overlay using enhanced overlay targets is described. Multiple dimensional (e.g., x and y components) of an overlay measurement may be acquired in parallel in a digital holographic microscope (for example) system using non-cartesian overlay targets (e.g., overlay targets with structures oriented at angles other than typical ninety degree x and y orientations, but within forty five degrees of a radiation axis). This scheme enables single-shot acquisition of the multiple dimensional components of the overlay measurement (e.g., a full overlay vector). A processor is configured to deconstruct data from the single-shot acquisition (based on the orientation of the overlay targets) into the x and y components of an overlay value. Or the non-cartesian targets may be oriented to correspond to patterned features of interest in a substrate such that the single shot acquisition directly provides an overlay value relative to those features of interest.

The present invention relates to a method of characterizing a microorganism, comprising: A. for each wavelength of a predetermined set of wavelengths comprising at least one wavelength, acquiring a holographic digital image, generating a focused image by a computer device, each pixel of the image comprising an amplitude value and a phase value, and segmenting the focused image to extract a portion corresponding to the microorganism, and B. characterizing the microorganism by a computer device according to the aggregated image portion. According to the invention, before characterization or before segmentation or before generation of aggregated images, the method comprises correcting the optical aberration of the acquisition device by means of a computer device, and characterizing the microorganism comprises applying a digital model to these parts, the amplitude value and / or phase value of each wavelength of the predetermined set of wavelengths as a descriptor.

The present invention relates to a system and method for digital holographic microscopy. According to an aspect of the invention there is provided an off-axis digital holographic microscope comprising: a light emitter configured to provide a divergent light beam; a sensor position to receive light from the light emitter in a first path and a second path, and thereby to detect a holographic image; a reflector positioned partially in the divergent light beam so that light that encounters the reflector extends towards the sensor in the first path, and light that does not encounter the reflector extends towards the sensor in the second path; and a support structure configured to support a sample in the first path or the second path.

The application discloses a fast tilt compensation method based on Zernike polynomials, which comprises the following steps: obtaining a two-dimensional image matrix output by a digital holographic microscope; pre-processing the two-dimensional image matrix; projecting the pre-processed image intensity matrix onto a Zernike polynomial base, realizing Zernike fitting, and obtaining a Zernike model about a sample to be measured; calculating tilt term coefficients alpha x , alpha y of a first-order polynomial in the Zernike model; calculating defocus aberration by using the tilt term coefficients alpha x , alpha y ; performing tilt compensation on the pre-processed image intensity matrix, and outputting a compensated image intensity matrix. Further, corresponding electronic equipment is disclosed. The application can quickly and effectively compensate and correct a photographed image, and is quite considerable in robustness and calculation speed.

This disclosure describes a computing module and method for identifying cellular aggregates in real-time based on digital holographic images that are captured using digital holographic microscopy (DHM) techniques. In particular, the computing module is configured to use artificial intelligence models and data analysis techniques to analyze the captured DHM images. The analyzed DHM images are then classified and quantified to identify cellular patterns which are then statistically analyzed to reveal patterns linking the cellular patterns to associated diseases.

The present application relates to a kind of dot auxiliary focusing digital holographic microscope system and holographic reconstruction method, the system includes digital holographic microscopic optical path part and dot auxiliary focusing optical path part, digital holographic microscopic optical path part is irradiated after the object sample of polarization modulation narrowband laser to be measured with reference mirror reflected polarization orthogonal reference light in polarization camera interference imaging, different phase shift acquisition of single image is realized;Dot auxiliary focusing optical path part utilizes the definition of image to calculate the focus position of the object sample to be measured, can directly obtain the best inverse diffraction distance required in digital holographic reconstruction process.Compared with prior art, the present application has improved the autofocusing efficiency of digital holographic microscope, greatly speed up the speed of digital holographic three-dimensional surface reconstruction, on the premise of guaranteeing the reconstruction measurement precision, improves the efficiency and real-time of reconstruction and the like advantages.

The invention relates to the technical field of optical detection, in particular to a glass defect detection method and system based on a reflective off-axis digital holographic microscopy technology, and the system comprises a light source unit, an object light adjusting unit, a reference light adjusting unit, an image processing unit, a defect positioning unit, a three-dimensional reconstruction unit and a main control unit. Depth information of defects can be obtained through hologram reconstruction, surface and internal defects can be distinguished, the positioning precision can reach the micron order, the interference measurement principle is utilized, high sensitivity is achieved for nanoscale deformation and micron-order defects, invisible cracks which are difficult to find through a traditional method can be detected, and the method is suitable for large-scale popularization and application. According to the invention, defects can be detected, three-dimensional morphology characteristics of the defects can be obtained, more comprehensive data support is provided for quality evaluation, contact with a sample is not needed, potential damage to the glass surface is avoided, the device is suitable for on-line detection application, a reflective off-axis light path design is adopted, a complex interferometer structure is avoided, and industrial field installation and maintenance are facilitated.

The invention relates to a living cell quantitative imaging method based on digital holographic microscopy sequential displacement aberration elimination, which belongs to the field of optical measurement, and comprises the following steps: collecting three holograms for living cell sequential displacement; performing phase demodulation to obtain three original phase diagrams; obtaining a total mask pattern; performing reverse direction sequential displacement on the phase diagram; carrying out differential calculation to obtain system aberration differential data of a global phase; utilizing the total mask pattern to obtain local system aberration differential data; carrying out differential processing on the Chebyshev polynomial, and obtaining local polynomial differential data by utilizing the total mask pattern; calculating a corresponding coefficient through differential data so as to fit a global system aberration; and subtracting global system aberration from the three original phase diagrams to obtain a living cell aberration-eliminated phase diagram. According to the method, high-precision quantitative phase imaging of living cells is realized while high-frequency information is reserved, the method has excellent displacement distance robustness, a high-precision displacement mechanism does not need to be equipped, and the hardware cost of a measurement system is greatly reduced.

The invention discloses a digital holographic microscopic imaging coherent noise suppression network model and method based on deep learning. The network model adopts a double-branch encoder-single decoder structure, and a double-branch encoder extracts local details and global noise features of an image in parallel; the innovative double-branch intensive attention fusion module fuses multi-scale features through an adaptive weighting and enhancement mechanism; and the decoder integrates information through jump connection and reconstructs a clear image. The training method generates a high-fidelity data set based on a physical simulation system. According to the method, speckle noise and parasitic fringes can be efficiently suppressed, the phase details of the object are effectively reserved while the peak signal-to-noise ratio and the structural similarity index are remarkably improved, and the method has excellent generalization ability and calculation efficiency and is suitable for real-time high-quality imaging of a digital holographic microscopy system.

The application discloses a kind of based on topological structure's image reconstruction method and system, belong to image reconstruction field.It includes: the establishment digital holographic microscopy model;Three-dimensional space topological data is converted into multi-layer graph structure by adaptive focusing algorithm with different focal length imaging, and hierarchical graph model is formed;According to the topological data of hierarchical graph model, the deflection angle of object is calculated;According to the deflection angle, angle correction is carried out to hierarchical graph model, and the corrected hierarchical graph model is obtained;The best imaging focal point position in the corrected hierarchical graph model of different angles is calculated, and surface topological reconstruction is carried out according to the best imaging focal point position, to obtain the reconstructed image after angle adjustment.In traditional digital holographic microscopy, due to the limitation of light scattering angle, the side edge of object and large-angle inclined part often cannot be recorded completely, resulting in edge distortion or information loss of reconstructed image.The application solves the imaging limitation when processing complex curved surface object.

A transflective digital holographic microscope system belongs to the technical field of microscopes, includes a reflection-type digital holographic microscope light path and a transmission-type digital holographic microscope light path, wherein the reflection-type digital holographic microscope light path is as follows: a first light beam is changed in polarization direction through a first polarizer, and is divided into two light waves with vertical polarization states; wherein the transmission-type digital holographic microscope light path is as follows: a second light beam is changed in polarization direction through a second polarizer, and is divided into two light waves with vertical polarization states, so that the thickness information and surface contour information of the sample can be tested at the same time.

This invention discloses a deep learning-based digital holographic phase image stitching method. The method includes: acquiring multi-field holographic interferograms, obtaining a single-field phase image through numerical reconstruction, and then linearly mapping it to a grayscale image to create a synthetic dataset; using semi-supervised training of a noise-resistant registration network, calling the obtained registered grayscale image pairs and their binary masks, and then inputting them into a baseline compensation fusion network, using unsupervised training of the fusion model; inputting the registered grayscale image pairs into the trained image stitching model to obtain a stitched grayscale image, which, after grayscale-phase conversion, yields a large field-of-view phase image. This invention uses only a synthetic dataset to train the network, avoiding the difficulty of manually annotating the registration matrix. Through a semi-supervised training strategy and noise-resistant registration network design, it greatly improves registration accuracy, and baseline compensation further optimizes the fusion effect, showing great application potential in digital holographic microscopy quantitative measurement field-of-view stitching.

Method for lensless digital holographic microscopy with sub-pixel resolution using a single hologram, comprising digital interpolation of a complex-valued hologram of an object in an object plane, recorded using an approximately spherical reference wave with an origin by means of an area detector, in particular a camera sensor, in its detector plane, onto a fine scanning grid with sub-pixel resolution, as well as numerical compensation of the reference wave, and exact reconstruction of the interpolated hologram, and apparatus for carrying out the same.

A dark field digital holographic microscope and associated metrology method is disclosed which is configured to determine a characteristic of interest of a structure. The dark field digital holographic microscope includes an illumination branch for providing illumination radiation to illuminate the structure; a detection arrangement for capturing object radiation resulting from diffraction of the illumination radiation by the structure; and a reference branch for providing reference radiation for interfering with the object radiation to obtain an image of an interference pattern formed by the illumination radiation and reference radiation. The reference branch has an optical element operable to vary a characteristic of the reference radiation so as to reduce and / or minimize variation in a contrast metric of the image within a field of view of the dark field digital holographic microscope at a detector plane.