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Physical parameter common-channel phase-shift digital holographic microscopic device based on diffraction grating

A digital holographic microscope and diffraction grating technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of poor stability, poor measurement accuracy, environmental vibration sensitivity, etc., to achieve good stability, environmental vibration insensitivity, Effects with low monochromatic requirements

Active Publication Date: 2011-08-10
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The object of the present invention is to provide a digital holographic microscope device based on grating diffraction, which is sensitive to environmental vibration (poor stability), poor repeatability, small field of view, and phase caused by the objective lens. Technical problems of distortion and poor measurement accuracy

Method used

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  • Physical parameter common-channel phase-shift digital holographic microscopic device based on diffraction grating
  • Physical parameter common-channel phase-shift digital holographic microscopic device based on diffraction grating
  • Physical parameter common-channel phase-shift digital holographic microscopic device based on diffraction grating

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Embodiment

[0057] Embodiment: a microlens array is used as the tested sample; the laser 1 is a He-Ne laser (λ=633nm); the magnification of the first telescope unit is 15X. The magnification of the microscope objective lens 7 is 10X, and the numerical aperture NA=0.3. Third lens 8 focal length f 2 =200mm; the focal lengths of the fourth lens 10 and the fifth lens 14 are respectively f 3 =f 4 =80mm, the focal length of the sixth lens 16 is f 5 =100mm, the focal length of the seventh lens 18 is f 6 = 300mm. The hole diameter of the second pinhole filter is 20 μm; the period Λ of the first grating 9 and the second grating 15 1 =Λ 2 = 15 μm. The maximum spectrum v of the object light on the plane where the first grating 9 is located max =NA / (M 2 λ)3.2×10 4 m -1 ,M 2 is the magnification of the second telescope unit. Because 1 / Λ 1 >2v max , so the device can separate the spectrum of different diffracted light under the premise of retaining the maximum resolution of the objective...

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Abstract

The invention relates to a physical parameter common-channel phase-shift digital holographic microscopic device based on a diffraction grating, which comprises a lighting unit, a microscopic unit, an interference generating unit and an imaging unit, wherein the lighting unit and the microscopic unit are respectively arranged at two sides of a sample; the lighting unit comprises a laser and a light intensity controller arranged in front of the laser; the microscopic unit comprises a second telescope unit which consists of a microobjective and a third lens; the sample is placed on the front focal plane of the second telescope unit; the interference generating unit comprises a beam splitting unit, a filtering unit, a beam combining unit and a contrast control unit sequentially arranged in the light path direction; and the imaging unit comprises a CCD (charge coupled device) camera which is arranged on the rear focal plane of a seventh lens. The digital holographic microscopic device has the advantages of good stability and no sensitivity to ambient vibration.

Description

technical field [0001] The invention relates to a phase-shift digital holographic microscopic device for measuring the three-dimensional shape of tiny objects. Background technique [0002] Ordinary microscopes can only observe the intensity distribution of tiny objects, but they can't do anything about the phase distribution of transparent objects. However, the phase distribution of the measured object is directly related to the three-dimensional shape of the measured object, and it is of great significance to accurately measure the phase distribution of tiny objects. [0003] The DHM-1000 digital holographic microscope developed by Lunceetec in Switzerland can be used to measure the phase distribution of tiny objects. But its disadvantages are: 1. The field of view and resolution of the CCD camera cannot be fully utilized due to the off-axis holographic optical path; 2. The phase distortion caused by the objective lens cannot be eliminated in the optical path, which bring...

Claims

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Application Information

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IPC IPC(8): G01B9/04
Inventor 郜鹏姚保利
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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